JPH0241784A - Laser beam marking device - Google Patents

Abstract

PURPOSE:To obtain a marking device which does not take time to control printing and a mask by providing a pattern writing means to write a mask pattern in a transmission film with a reflection film, the other laser beam oscillator and a beam shaping part. CONSTITUTION:A laser beam oscillator 11 is a laser beam oscillator to produce the mask pattern and a laser beam emitted from the laser beam oscillator 11 is expanded by a beam expander 12. A focus is formed and scanned on the transmission film 18 with the reflection film by a galvanic type scanner 13 and a condensing lens 14 and the reflection film is removed to a desired mask pattern shape. This formed mask pattern is fed into film protective glass 19 by a film feed mechanism 20. A laser beam emitted from a laser beam oscillator 17 is shaped by the beam shaping part 16 and projected on the mask pattern fed into the film protective glass 19 via a reflection mirror 15 and the image of the transmitted pattern is formed on the machining surface 22 by an image formation lens 21.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a marking device for printing on semiconductor/O-tsuka cages, and more particularly to a laser marking device using a laser oscillator.

[Conventional technology]

Conventionally, this type of laser marking apparatus, as shown in FIG. 3, includes a laser oscillator 31, a beam shaping section 32 that shapes one oscillation beam, and a glass mask 33 that irradiates the beam shaped by this beam shaping. The pattern was imaged on the processing surface 36 by an imaging lens 35 via a reflecting mirror 34.

[Problem to be solved by the invention]

The above-mentioned conventional laser marking device has the disadvantage that it takes a lot of time to create a screen 1 in which the glass mask 33 is replaced in order to mark a desired pattern, and it also takes a considerable amount of time to manage the glass mask. had.

Therefore, it is an object of the present invention to provide a marking device that does not take much time to print and does not take much time to manage the mask.

[Means to solve the problem]

According to the present invention, a film feeding means for supporting a transparent film with a reflective film, the surface of which is covered with a reflective film and whose base is transparent to laser light, supported by a film protective glass and moved in the length direction;
It has a laser oscillator, a beam expander, a galvano type scanner, and a condensing lens, and has a pattern writing means for writing a mask pattern on the transmission film with a reflective film, and another laser oscillator and a beam shaper, and the film The writing i at a predetermined position on the protective glass;
(h) a laser beam forming means for projecting a beam sufficient to cover the mask pattern; and a laser beam forming means for projecting a beam sufficient to cover the mask pattern; A laser marking device is obtained, comprising an imaging means for imaging.

〔Example〕

FIG. 1 is a block diagram of an embodiment of the present invention.

The laser oscillator 11 is a laser oscillator for creating a mask pattern, and the beam emitted from this laser oscillator is expanded by a beam expander 12 and then coated with a reflective film by a galvano scanner 13 and a focusing lens 14. The light is focused on the transparent film 18 and scanned, and the reflective film is removed in the shape of a desired mask or turn. The mask pattern formed on the reflective film-attached transmission film 18 is fed between the film protection glasses 19 by the film feeding mechanism 20.

The laser beam emitted from the laser oscillator 17 is shaped by the beam shaping section 16 and irradiated onto the mask pattern fed into the film protection lath 19 via the reflecting mirror 15 . The transmitted pattern is imaged on the processing surface 22 by the imaging lens 21.

FIG. 2 is a block diagram of a second embodiment of the present invention.

Components in this figure that are the same as in FIG. 1 are given the same reference numerals. The laser oscillator 11 is a laser oscillator for creating a mask pattern.

The beam emitted from this laser oscillation is expanded by a beam expander 22 and sent to a galvano type scanner 13 and a focusing lens 14. The light is condensed and scanned onto the reflective film-coated film 18 via the guichroic mirror 25 to form a mask pattern. The formed mask pattern is fed between the film protective glasses 19 by the film feeding mechanism 20 as in the first embodiment.

The laser oscillator 17 has a different wavelength from the laser oscillator 11, and the beam is shaped by the beam shaping section 16 and irradiated onto the mask pattern via the gicroic mirror 25.
An image is formed on the processing surface 22 by the imaging lens 21. In this second embodiment, since lasers with different wavelengths are used, the optical paths of the mask pattern writing section and the imaging section can be made into one.

This has the advantage that the optical system can be simplified.

〔Effect of the invention〕

As explained above, the present invention uses a mask pattern writing unit consisting of a laser oscillator, a beam expander galvanometer type scanner, and a focusing lens to form a mask/mother turn on a transparent film with a reflective film, and then transport the film. The desired mask pattern is created by feeding the film between the protective glass using a mechanism and imaging 79 turns on the processing surface by the imaging section consisting of a laser oscillator, beam shaping section, reflecting mirror, and imaging lens. Mask patterns can be produced in a short time, and the film feeding mechanism allows mask patterns to be easily exchanged. Furthermore, since the mask pattern formed on the reflective film-attached transmission film can be rolled up, the mask pattern is not easily grouped together and can be easily managed.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a first embodiment of a laser marking device of the present invention, FIG. 2 is a block diagram of a second embodiment of the present invention, and FIG. 3 is a block diagram of a conventional device. Explanation of symbols: 11... Laser oscillator, 12... Beam expander, 13... Galvano type scanner.

Claims (1)

[Claims] (1) A film feeding means that moves a transmissive film with a reflective film whose surface is covered with a reflective film and whose base is transparent to the laser beam in the length direction while supporting it with a film protective glass, a laser oscillator, a beam expander, and a galvano type scanner. , and a pattern writing means having a condensing lens and writing a mask pattern on the transmission film with a reflective film, and another laser oscillator and a beam shaper, the pattern writing means having a condensing lens and writing a mask pattern on the transmission film with a reflective film, and having a pattern writing means for writing a mask pattern on the transmission film with a reflective film, and having another laser oscillator and a beam shaper, the pattern writing means has a condenser lens, and has a pattern writing means for writing a mask pattern on the transmission film with a reflective film, and has another laser oscillator and a beam shaper, and has a pattern writing means for writing a mask pattern on the transmission film with a reflective film, and has a pattern writing means for writing a mask pattern on the transparent film with a reflective film, and has another laser oscillator and a beam shaper, a laser beam forming means for projecting a beam sufficient to cover the written mask pattern; and a laser beam forming means for projecting a beam sufficient to cover the written mask pattern, and a laser beam forming means for forming an image of the pattern transmitted through the mask pattern portion of the beam on the processing surface when the written mask pattern is at the predetermined position. A laser marking device comprising an image means.