JPH0241841A - Holding device for objects with non-planar shapes - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a holding device for an object having a non-planar shape,
In particular, objects with a non-31Z surface shape suitable for holding an object with a non-planar outer surface shape, such as an optical lens, in a non-contact state by applying suction force and ejection force of fluid to the surface thereof. This invention relates to a holding device.

[Conventional technology]

Conventionally, as a device for transferring an optical lens (hereinafter referred to as a lens) to a polishing device or incorporating a lens into an optical device such as a camera or a telescope, for example, Japanese Patent Application Laid-Open No. 61-284
As described in Japanese Patent No. 336, there is known an apparatus that vacuum-chucks a lens using a suction chuck to which negative pressure is supplied.

The above conventional technology has the advantage that it is easy to insert the lens into the recessed lens frame because it does not grip the end face of the lens.However, when the lens is suctioned, the blood on the lens at the suctioned part may cause dirt or scratches. There was a problem with sticking.

Therefore, in recent years, various techniques for holding objects in a non-contact manner have been developed in order to bundle objects without staining or damaging them.

Among these, as a device for holding an object in a non-contact manner by fluid force, for example, as described in Japanese Patent Application Laid-Open No. 62-211236, there is a A device has been developed that is provided with an air supply hole having an air supply hole and a groove to which negative pressure is supplied, and holds an object in a non-contact manner through the mutual action of gas suction force and ejection force.

[Problem to be solved by the invention]

The above-mentioned conventional technology is effective for holding a plate-shaped object such as a semiconductor wafer because the holding surface is formed in a planar shape, but on the other hand, it is effective for holding a plate-shaped object such as a semiconductor wafer. When holding an object with a shape, it is impossible to partially reduce the gap between the object surface and the holding surface facing it, so the supporting force and holding rigidity (restoring force) for the held object are Because of the small size, there was a problem in that holding stability was lacking.

The present invention has been made in order to solve the above-mentioned problems of the prior art. 1. It is possible to hold an object having a non-31Z external shape, such as an optical lens, with a strong holding force without contacting the object to be held. It is an object of the present invention to provide a holding device for an object having a non-planar shape that does not become dirty or tinned.
That is the purpose.

[Means to solve the problem]

In order to achieve the above object, the structure of the device for holding an object having a non-planar shape according to the present invention is a device that holds an object having a non-planar outward shape without contact with the object by fluid force. A holder equipped with a holding surface that forms a parallel gap between them, and a diaphragm that is provided on the holding surface of this holder and generates a pressure higher than atmospheric pressure against the surface of the object facing the holding surface. and a fluid suction section that is provided on the holding surface of the holding body and generates a pressure equal to or lower than atmospheric pressure against the object surface facing the holding surface, and the holding surface includes: It is formed into a non-flat shape so as to follow the surface of an object having a non-flat external shape.

[Effect]

The function of the above technical means is as follows.

A fluid suction section located around the fluid ejecting section lowers the average pressure within the gap between the holding surface of the holding body and the object (held object) having a non-planar shape to below atmospheric pressure by suctioning the fluid. This negative pressure supports the weight of the object to be held.

On the other hand, the fluid ejecting section has a throttle and supplies pressurized fluid to the gap between the holding surface and the object to be held. As a result, the pressure within the gap in this area decreases as the gap distance increases, and increases as the gap 1;11 distance decreases. Therefore, due to the negative pressure obtained by the fluid suction section, the object to be held is supported in a non-contact manner with respect to the holding surface while maintaining a constant minute gap.

In addition, at this time, since the pressure of the fluid suction part is below atmospheric pressure, the fluid is ejected into the surrounding area and removes the surrounding debris.
It does not cause whiskers or displace surrounding objects.

〔Example〕

The above is the 11th embodiment of the present invention! This will be explained with reference to FIGS.

1 is a front sectional view of an optical lens holding device according to an embodiment of the present invention, FIG. 2 is a bottom view of the device shown in FIG. 1, and FIG.
4 is a front sectional view for explaining the holding operation of the optical lens of the apparatus shown in FIG. 1; FIG. 4 is a front sectional view for explaining the holding operation of the plate-like object in the plate-like object holding device Fifth
This figure is an explanatory view showing the dimensional relationship of the device shown in FIG. 4, and FIG. 6 is an explanatory view showing the holding operation by the device shown in FIG. 4.

In FIGS. 1 and 2, reference numeral 1 denotes an optical lens related to an object to be held in a non-contact manner, and is an object having an unusual outer surface shape. Reference numeral 2 denotes a holder for the optical lens 1, and a gap 3 is formed between the holding surface 2A of the holder 2 and the upper surface IA of the optical lens 1 with a gap in between.

That is, the holding surface 2A of the holding body 2 is formed into a non-flat curve so as to follow the non-planar top surface IA of the held object, which is an optical lens.

This holding surface 2A is provided with a fluid suction part that sucks gas in the gap 3 to keep the average pressure in the gap 3 below the external pressure, and a fluid jet part that introduces pressurized fluid into the gap 3. ing.

The fluid suction section includes an annular groove 9 provided on the outer periphery of the holding surface 2A, and this annular groove 9 communicates with a fluid suction source 12 through a fluid suction passage 10 and a conduit 11 in the holding body 2. are doing.

Further, the fluid ejecting section includes an opening 4 and a throttle 5 provided in the center of the holding surface 2A, and the throttle 5 supplies pressurized fluid through a fluid supply port 6 and a pipe line 7 in the holding body 2. It communicates with source 8.

Note that in FIG. 1, an arrow 13 indicates the direction of the knob in which gravity acts.

Next, the operation of the optical lens holding device of this embodiment will be explained.

For simplicity of explanation, the holder 2 is shown in FIG.
It is assumed that both the holding surface 2A' and the upper surface IA' of the held object 1' are flat.

In the case of this embodiment, as shown in FIG.
Both A are non-planar, but with regard to the principle of non-contact holding operation, it is irrelevant whether they are flat or not, and the principle is the same.

In FIGS. 3 and 4, the same reference numerals as in FIG. 1 indicate the same or equivalent parts.

In FIGS. 73 and 4, when the fluid suction source 12 is driven,
As a result, fluid is sucked from the annular groove 9 through the pipe line 11 and the fluid suction passage 10, and the pressure inside the annular groove 9 is reduced to below the outside air.

The pressurized fluid supply 8, which is maintained at a pressure higher than the pressure in the annular groove 9, supplies pressurized fluid to the line 7, the fluid supply [-1
6 through the aperture 5 and the opening 4 to the gap;
Apply a pressure higher than atmospheric pressure to this part. At this time, the pressure within the gap 3 and the held object 1 calculated from this pressure
The force acting on ' is theoretically as described above for the case of Fig. 4.

Now, when the interval ha of the gap 3 is made sufficiently small, it can be assumed that the flow in the gap is an isothermal two-layer flow in which viscous force is dominant compared to lossy force. At this time, the following lJ equation and boundary conditions hold for the flow within the gap 3 using the coordinate system and symbols shown in FIG.

For the clearance rl≦r≦ro, P:Pc at r=rz, p=pvat r=ro
...(2) For the clearance of ra≦r≦rb.

1'=I'v at r=ra, p=1 no 3 at
r = rb -43) Here, the coordinates measured from the center O of the second holding surface 2' in the width direction of the gap: Gap 3 interval: Pressure inside gap 3 Radius of the open part 4: To the annular groove 9 Exogenous mass of the enclosed retaining surface 2A. Alternatively, the inner radius of the annular groove 9: the outer radius of the annular groove 9: the radius of holding 1fU2 A', the pressure in the opening part 4, the pressure in the annular groove 9, the external pressure, and the flow (pressure) in this gap 3. For the equation, the gas flow rate passing through the throttle 5 installed in the fluid supply port 6 is: CD Niorifice throttle flow coefficient (Co"0.85 for air) : Absolute temperature of the gas Ps : Pressure of the gas supplied to the fluid supply port 6 K : Specific heat ratio of the gas Also, the flow rate mh of the gaseous substance flowing within the gap 3 where rl≦r≦ro is, where, μ : Gas The following continuity conditions are imposed on these gaseous properties If, mR and mh.

m R”m h...
(6) Equations (1) to (6) above are the basic equations for the flow within gap 3, and by solving r), the pressure within gap 3 can be found. Then, from the determined pressure within the gap 3, the suction force F (upward positive) on the held object 1' is expressed as follows.

...(7) Here, the solution of equations (1) to (3) for pressure P is Pc
o≦r<r+However, Pc is unknown here, and this Pc is expressed by equations (4) to (6).
) is determined.

FIG. 6 shows the results of calculating the suction angle acting on the plate-like body 1 by changing the interval of the gap 3 from the above equations (1) to (7). The operation of the apparatus of the present invention is explained as follows from FIG. 6.

Now, the spacing of gap 3 is ha, Zunawachi 41''
! 1, it is assumed that the apparatus is designed so that when the held object 1' is in the position shown by the solid line, the suction force and the weight of the held object 1' are balanced. At this time, when the held object 1' moves to the position shown by the broken line in FIG. 4 and the interval of the C gap 3 increases to
is larger than the amount of Tlj of the object to be held 1'. Therefore, a restoring force acts on the held body 1' in the direction of returning it to the design point, which is the distance ha. Similarly, gap 3
Even when the gap becomes smaller than the design point gap ha, a restoring force acts on the held body 1' in the direction of returning to the position of the gap ha. As a result, the object to be held 1' is stably supported in a floating manner in a non-contact manner across the gap between the holding surface 2A of the holding body 2 and the gap 3. When supplying pressurized fluid to the fluid supply port 6, the held object 1' is placed below the holding surface 2A'.
In addition to suspending the object 1', it is also possible to suspend the object 1' above the holding surface 2A'. 6 to the gap 3 is provided in an annular shape so as to surround the opening 1 part 4, so that the gas flowing into the gap 3 from the fluid passage 6 is sucked and collected into the annular groove 9 and released to the outside. It does not blow out. Outside air flows into the annular groove 9 from the outer periphery of the holding surface 2Δ' at 11B, but the magnitude of the negative pressure in the annular groove 9 is 200.
”: Approximately 300 mm of water column, and the flow of inflowing gas is small. Also, unlike when it blows out, when it flows in, the impact on the surroundings is small.

In the above explanation of the operation, as shown in FIG.
It was assumed that both the holding surface 2A' of the holding surface 2A' and the upper surface IA' of the held object 1' are flat, but in the case of this embodiment, the third
As shown in the figure, both the holding surface 2A of the holding body 2 and the upper surface IA of the optical lens 1, which is the held object, are non-planar.

If the opposing surfaces of the holder and the object to be held that form the gap in the ilZ movement are non-IL surfaces, the force acting on l-+n+IA of the object to be held (optical lens 1) due to the pressure in the gap 3 will be , the resultant force of the force components in the direction in which the object to be held changes acts as a restoring force and a holding force acting on the object to be held 1.

As described above, according to the present embodiment, an object having a non-planar outer surface shape, such as an optical lens, can be held in a non-contact manner.
It can be mounted, incorporated into optical equipment, etc. In addition, since no fluid is ejected from the device toward the outside, there is no possibility that surrounding dust will blow up and contaminate the lens, etc., or displace other objects placed around the device. . That is, it is possible to improve the handling performance of optical lenses and the like that are sensitive to dirt and scratches.

Next, FIG. 7 is a front sectional view of an optical lens holding device according to another embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 1 are the same or corresponding parts, so the explanation thereof will be omitted.

In the embodiment shown in FIG. 7, a plurality of holders 2 (two in FIG. 7) in the embodiment shown in FIG. 1 are provided for the optical lens 1 which is the object to be held.

The two holding bodies 2-1 and 2-2 shown in FIG. 7 are each mounted on the frame at number 14.

The fluid supply port 6 of each holding body 2-1.2-2 is connected to the conduit 7-1.
7-2 communicates with a common pressurized fluid supply source 8, and the fluid suction passage 10 communicates with a common fluid suction source 12 through conduits 11-1, 11-2.

According to the embodiment shown in FIG. 7, the optical lens 1 is held in a non-contact manner by the plurality of holders 2-1, 2-2.
When the optical lens 1 is tilted and displaced with respect to the holding cloth 2A of the holding body, a large restoring force can be applied to the optical lens 1.

In each of the above embodiments, a holding device for an optical lens has been described, but the present invention is not limited to an optical lens, but can also be applied to a device that uses fluid force to hold an object having a non-planar outer surface shape in a non-contact manner. It can be applied universally.

〔Effect of the invention〕

As described above, according to the present invention, an object having a non-planar outer surface shape, such as an optical lens, can be held with strong holding force without contact, and the object to be held can be held as a non-contact object without getting dirty or damaged. It is possible to provide a holding device for an object having an eleven-sided shape.

[Brief explanation of the drawing]

1 is a front sectional view of an optical lens holding device according to an embodiment of the present invention, FIG. 2 is a bottom view of the device shown in FIG. 1, and FIG.
4 is a front sectional view for explaining the holding operation of the optical lens of the apparatus shown in FIG. 1; FIG. 4 is a front sectional view for explaining the holding operation of the plate-like object in the plate-like object holding device Fifth
4 is an explanatory diagram showing the dimensional relationship of the device shown in FIG. 4, FIG. 6 is a holding operation characteristic diagram of the device shown in FIG. 4, and FIG. 7 is an optical lens holding device according to another embodiment of the present invention. FIG. ]...Optical lens, IA...' two sides, 2.2-1.2
-2... Holding body, 2A... Holding cloth, 3... Gap, 4... Opening, 5... Restriction, 8... Pressurized fluid supply source, 9... Annular ■ Figure 2 Mouth 1z---shi^-Inecho Dashi 1 Nijihei (Figure■ Figure■ Otsuzu

Claims (1)

[Claims] 1. A device for holding an object having a non-planar outer surface shape in a non-contact manner using fluid force, which includes a holding body having a holding surface that forms a parallel gap between the object and the holding body, and this holding body. a fluid ejecting section provided on the holding surface of the body and equipped with a throttle that generates pressure equal to or higher than atmospheric pressure against the surface of the object facing the holding surface; a fluid suction section that generates a pressure equal to or lower than atmospheric pressure to the surface of the object facing the object, and the holding surface is formed into a non-planar shape so as to follow the surface of the object having a non-planar external shape. A holding device for an object having a non-planar shape, characterized in that: