JPH0242359U - - Google Patents

Info

Publication number
JPH0242359U
JPH0242359U JP12139488U JP12139488U JPH0242359U JP H0242359 U JPH0242359 U JP H0242359U JP 12139488 U JP12139488 U JP 12139488U JP 12139488 U JP12139488 U JP 12139488U JP H0242359 U JPH0242359 U JP H0242359U
Authority
JP
Japan
Prior art keywords
sample
ion source
target
source chamber
introduction probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12139488U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12139488U priority Critical patent/JPH0242359U/ja
Publication of JPH0242359U publication Critical patent/JPH0242359U/ja
Pending legal-status Critical Current

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Landscapes

  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】
添付図面は本考案の一実施例を示す縦断面図で
ある。 １：筐体、２：イオン源室、４：一次ビーム発
生器、５：予備排気室、８：試料導入プローブ、
９：試料台、１１：電子冷却素子、１２：ターゲ
ツト、１３：第１のブラシ、１４：電極板、１５
：第２のブラシ、１７：第３のブラシ、１８：第
４のブラシ、１９：電源、２０：切換回路、２１
：ガイド棒、２３：ストツパー、２５：マイクロ
スイツチ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 試料導入プローブをイオン源室側壁にエアーロ
    ツク弁を介して設けられた予備排気室を通してイ
    オン源室内にセツトし、該試料導入プローブ先端
    に保持されるターゲツト上の試料に一次ビームを
    照射してイオン化するようにした装置において、
    前記ターゲツトに電子冷却素子を取り付けたこと
    を特徴とする質量分析装置における試料冷却装置
    。
JP12139488U 1988-09-16 1988-09-16 Pending JPH0242359U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12139488U JPH0242359U (ja) 1988-09-16 1988-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12139488U JPH0242359U (ja) 1988-09-16 1988-09-16

Publications (1)

Publication Number Publication Date
JPH0242359U true JPH0242359U (ja) 1990-03-23

Family

ID=31368357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12139488U Pending JPH0242359U (ja) 1988-09-16 1988-09-16

Country Status (1)

Country Link
JP (1) JPH0242359U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111248A (ja) * 1981-12-23 1983-07-02 Hitachi Ltd 質量分析計の直接試料導入装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111248A (ja) * 1981-12-23 1983-07-02 Hitachi Ltd 質量分析計の直接試料導入装置

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