JPH024239U - - Google Patents
Info
- Publication number
- JPH024239U JPH024239U JP8268988U JP8268988U JPH024239U JP H024239 U JPH024239 U JP H024239U JP 8268988 U JP8268988 U JP 8268988U JP 8268988 U JP8268988 U JP 8268988U JP H024239 U JPH024239 U JP H024239U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- end point
- data
- dry etching
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 238000001312 dry etching Methods 0.000 claims description 4
- 238000004088 simulation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の実施例１を示すブロツク図、
第２図は実施例２のブロツク図、第３図は従来の
終点検出装置を示すブロツク図である。
１……エツチング室、２……終点検出部、３…
…ドライエツチング装置、４ｂ……終点信号演算
部、５……ペンレコーダ、６……検出信号Ａ／Ｄ
コンバータ、７……データバンク、８……データ
入力装置。
FIG. 1 is a block diagram showing Embodiment 1 of the present invention;
FIG. 2 is a block diagram of a second embodiment, and FIG. 3 is a block diagram showing a conventional end point detection device. 1... Etching chamber, 2... End point detection section, 3...
...Dry etching device, 4b...End point signal calculation section, 5...Pen recorder, 6...Detection signal A/D
converter, 7...data bank, 8...data input device.
Claims (1)
おいて、サンプルエツチングデータを記憶する手
段と、該記憶手段から必要なサンプルエツチング
データを読み出し、そのデータに基づいてドライ
エツチングのシユミレーシヨンを行い、実際のエ
ツチング時での最適エツチング終了点を演算する
手段とを有することを特徴とするドライエツチン
グ装置の終点検出装置。 An end point detection device in a dry etching apparatus includes means for storing sample etching data, reading necessary sample etching data from the storage means, performing dry etching simulation based on the data, and performing optimum etching during actual etching. An end point detection device for a dry etching apparatus, comprising means for calculating an end point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8268988U JPH024239U (en) | 1988-06-22 | 1988-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8268988U JPH024239U (en) | 1988-06-22 | 1988-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024239U true JPH024239U (en) | 1990-01-11 |
Family
ID=31307432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8268988U Pending JPH024239U (en) | 1988-06-22 | 1988-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024239U (en) |
-
1988
- 1988-06-22 JP JP8268988U patent/JPH024239U/ja active Pending
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