JPH024240U - - Google Patents
Info
- Publication number
- JPH024240U JPH024240U JP8271388U JP8271388U JPH024240U JP H024240 U JPH024240 U JP H024240U JP 8271388 U JP8271388 U JP 8271388U JP 8271388 U JP8271388 U JP 8271388U JP H024240 U JPH024240 U JP H024240U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- semiconductor substrate
- pure water
- water
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000011010 flushing procedure Methods 0.000 claims 2
- 239000008213 purified water Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図および第２図はそれぞれ本考案の実施例
を示す断面図である。
尚図において、１……貯液槽、２……供給管、
３……バルブ、４……フイルター、５……水洗槽
、６……配水管、７……純水導入管、８……半導
体基板、である。
FIGS. 1 and 2 are sectional views showing embodiments of the present invention, respectively. In the figure, 1...liquid storage tank, 2...supply pipe,
3...Valve, 4...Filter, 5...Washing tank, 6...Water pipe, 7...Pure water introduction pipe, 8...Semiconductor substrate.
Claims (1)
供給して該半導体基板に付着した薬液やゴミを洗
い流す水洗装置において、該水洗槽より高い位置
に純水を貯液するための槽をもち、大口径の配管
を介して接続され配管途中のバルブを開放するこ
とにより貯液タンク内の純水を短時間に水洗槽内
へ供給する機構を有することを特徴とする水洗装
置。 In a water washing device in which a semiconductor substrate is immersed in a tank and purified water is supplied from a supply pipe to wash away chemicals and dirt adhering to the semiconductor substrate, a tank for storing pure water is provided at a higher position than the washing tank. 1. A flushing device characterized by having a mechanism for supplying pure water in a liquid storage tank to a flushing tank in a short time by opening a valve connected through a large-diameter piping and in the middle of the piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8271388U JPH024240U (en) | 1988-06-21 | 1988-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8271388U JPH024240U (en) | 1988-06-21 | 1988-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024240U true JPH024240U (en) | 1990-01-11 |
Family
ID=31307456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8271388U Pending JPH024240U (en) | 1988-06-21 | 1988-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024240U (en) |
-
1988
- 1988-06-21 JP JP8271388U patent/JPH024240U/ja active Pending
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