JPH024246U - - Google Patents
Info
- Publication number
- JPH024246U JPH024246U JP8209488U JP8209488U JPH024246U JP H024246 U JPH024246 U JP H024246U JP 8209488 U JP8209488 U JP 8209488U JP 8209488 U JP8209488 U JP 8209488U JP H024246 U JPH024246 U JP H024246U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped object
- holder
- peripheral edge
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図はこの考案の一実施例の平面図、第２図
はその断面図、第３図は同じくそのホルダのホル
ダ設置台への設置状態の断面図、第４図は同じく
そのホルダ本体の載置面における温度測定位置を
示す説明図、第５図は他の実施例の部分断面図、
第６図は従来の平面図、第７図はその断面図であ
る。
１……ホルダ本体、１ａ……載置面、２……通
気孔、２ａ……開口、４……ホルダ載置台。
Fig. 1 is a plan view of an embodiment of this invention, Fig. 2 is a sectional view thereof, Fig. 3 is a sectional view of the holder installed on a holder installation stand, and Fig. 4 is a sectional view of the holder body. An explanatory diagram showing the temperature measurement position on the mounting surface, FIG. 5 is a partial sectional view of another embodiment,
FIG. 6 is a plan view of the conventional device, and FIG. 7 is a sectional view thereof. DESCRIPTION OF SYMBOLS 1... Holder main body, 1a... Placement surface, 2... Ventilation hole, 2a... Opening, 4... Holder placement stand.
Claims (1)
載置面から裏面に貫通した多数の通気孔を設け、
前記通気孔の開口を前記載置面では周縁部を含む
全面に配置し、前記裏面では周縁部を除く範囲に
設けた板状処理物のホルダ。 A large number of ventilation holes are provided in the holder body on which the plate-shaped object is placed, penetrating from the surface on which the plate-shaped object is placed to the back surface.
A holder for a plate-shaped object, wherein the opening of the ventilation hole is arranged on the entire surface including the peripheral edge of the mounting surface, and is provided in a range excluding the peripheral edge of the rear surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8209488U JPH024246U (en) | 1988-06-20 | 1988-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8209488U JPH024246U (en) | 1988-06-20 | 1988-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024246U true JPH024246U (en) | 1990-01-11 |
Family
ID=31306857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8209488U Pending JPH024246U (en) | 1988-06-20 | 1988-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024246U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013254884A (en) * | 2012-06-08 | 2013-12-19 | Ns:Kk | Method for holding and peeling substrate and device thereof |
-
1988
- 1988-06-20 JP JP8209488U patent/JPH024246U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013254884A (en) * | 2012-06-08 | 2013-12-19 | Ns:Kk | Method for holding and peeling substrate and device thereof |
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