JPH0243134U - - Google Patents

Info

Publication number
JPH0243134U
JPH0243134U JP11994288U JP11994288U JPH0243134U JP H0243134 U JPH0243134 U JP H0243134U JP 11994288 U JP11994288 U JP 11994288U JP 11994288 U JP11994288 U JP 11994288U JP H0243134 U JPH0243134 U JP H0243134U
Authority
JP
Japan
Prior art keywords
electrode
electric heater
electrically insulating
ceramic substrate
insulating ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11994288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11994288U priority Critical patent/JPH0243134U/ja
Publication of JPH0243134U publication Critical patent/JPH0243134U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の採用された静電チ
ヤツクを示す断面図、第２図は従来の静電チヤツ
クおよび被チヤツク物の加熱する電気ヒータを示
す断面図である。 図中、１……静電チヤツク、２……グリーンシ
ート（セラミツク基板）、３……一方の電極、４
，６……セラミツク製絶縁保護膜（セラミツク保
護膜）、５……金属製電気ヒータ、７……基板（
被チヤツク物）。

Claims (1)

  1. 【実用新案登録請求の範囲】 電気絶縁性のセラミツク基板の片面に一方の電
    極を配置するとともに、 前記セラミツク基板の他面に他方の電極として
    の被チヤツク物を加熱する電気ヒータを配置し、 前記一方の電極および前記電気ヒータを電気絶
    縁性のセラミツク保護膜で被覆し一体化した静電
    チヤツク。
JP11994288U 1988-09-13 1988-09-13 Pending JPH0243134U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11994288U JPH0243134U (ja) 1988-09-13 1988-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11994288U JPH0243134U (ja) 1988-09-13 1988-09-13

Publications (1)

Publication Number Publication Date
JPH0243134U true JPH0243134U (ja) 1990-03-26

Family

ID=31365609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11994288U Pending JPH0243134U (ja) 1988-09-13 1988-09-13

Country Status (1)

Country Link
JP (1) JPH0243134U (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04304941A (ja) * 1991-03-29 1992-10-28 Ngk Insulators Ltd ウエハー保持具の製造方法
JPH058140A (ja) * 1990-12-28 1993-01-19 Ngk Insulators Ltd 静電チヤツク
JP2001189378A (ja) * 1990-12-25 2001-07-10 Ngk Insulators Ltd ウエハー吸着加熱装置
JP2003347396A (ja) * 1990-12-25 2003-12-05 Ngk Insulators Ltd ウエハー吸着加熱装置及びウエハー吸着装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001189378A (ja) * 1990-12-25 2001-07-10 Ngk Insulators Ltd ウエハー吸着加熱装置
JP2003347396A (ja) * 1990-12-25 2003-12-05 Ngk Insulators Ltd ウエハー吸着加熱装置及びウエハー吸着装置
JPH058140A (ja) * 1990-12-28 1993-01-19 Ngk Insulators Ltd 静電チヤツク
JPH04304941A (ja) * 1991-03-29 1992-10-28 Ngk Insulators Ltd ウエハー保持具の製造方法

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