JPH0243329A - Production of stock for producing titanium alloy powder - Google Patents
Production of stock for producing titanium alloy powderInfo
- Publication number
- JPH0243329A JPH0243329A JP19391788A JP19391788A JPH0243329A JP H0243329 A JPH0243329 A JP H0243329A JP 19391788 A JP19391788 A JP 19391788A JP 19391788 A JP19391788 A JP 19391788A JP H0243329 A JPH0243329 A JP H0243329A
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- alloy powder
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- alloy
- titanium
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Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、チタン合金粉末製造用素材の製造方法に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for producing a material for producing titanium alloy powder.
チタン合金は比強度が高く、また靭性、耐食性、耐熱性
などが優れた材料であるが、溶解、鍛造、切削性などに
難点がある。そのためいわゆるニヤーネットシェープ（
Ｎｅａｒ Ｎｅｔ ５ｈａｐｅ）加工技術が種々試みら
れており、その一つの有力な技術として粉末冶金法があ
る。Titanium alloy has high specific strength and is a material with excellent toughness, corrosion resistance, and heat resistance, but it has difficulties in melting, forging, machinability, etc. Therefore, the so-called near net shape (
Various processing techniques have been attempted, one of which is the powder metallurgy method.
チタン合金の粉末冶金法としては、原料粉末として所定
の合金成分の粉末を使用し、これを高温静水下で圧下し
て成形する合金粉末法が代表的なものである。かかる合
金粉末法で製造したチタン合金は、熔解法で製造したも
のとほぼ同等の引張特性、破壊靭性、疲労特性を示すこ
とが明らかになっている。また、粉末を出発材料とすれ
ば、熱間加工、冷間加工等の極めて困難な合金でも容易
に最終成品形状（Ｎｅｔ ５ｈａｐｅ）ないしは最終成
品に近い形状（Ｎｅａｒ Ｎｅｔ ５ｈａｐｅ）に成形
できる利点があり、今後市場もますまず拡大することが
期待できる。A typical powder metallurgy method for titanium alloys is an alloy powder method in which a powder of a predetermined alloy component is used as a raw material powder, and the powder is compressed under high-temperature still water to form the powder. It has been revealed that titanium alloys produced by such an alloy powder method exhibit tensile properties, fracture toughness, and fatigue properties that are almost equivalent to those produced by the melting method. In addition, using powder as a starting material has the advantage that even alloys that are extremely difficult to hot-work or cold-work can be easily molded into the final product shape (Net 5hape) or a shape close to the final product (Near Net 5hape). We can expect the market to continue to expand in the future.
現在、かかる合金粉末の製造には、プラズマ回転電極法
（Ｐ−ＲＥＰ法と略す）、電子ビームによる溶解噴霧法
など種々考えられている。第１図には、現在製造法とし
て最も期待されているプラズマ回転電極法の構成図を模
式的に示した。At present, various methods are being considered for producing such alloy powders, such as a plasma rotating electrode method (abbreviated as P-REP method) and a melting atomization method using an electron beam. FIG. 1 schematically shows the configuration of the plasma rotating electrode method, which is currently the most promising manufacturing method.
高速回転している回転電極１を水冷タングステン２より
、移行型アーク電源３を電源として生ずるヘリウムプラ
ズマアーク４により溶解し、溶湯を飛散、凝固させて合
金粉末を製造する。このときヘリウムガスを水冷タング
ステンと水冷銅ノズル５の間から供給する。活性金属粉
の製造のため系全体が高真空容器内に納められている極
めて簡単な装置である。A rotating electrode 1 rotating at high speed is melted by a water-cooled tungsten 2 and a helium plasma arc 4 generated using a transferable arc power source 3 as a power source, and the molten metal is scattered and solidified to produce an alloy powder. At this time, helium gas is supplied from between the water-cooled tungsten and water-cooled copper nozzles 5. This is an extremely simple device for producing active metal powder, with the entire system housed in a high-vacuum container.
ここで、所望する合金粉を製造するためには、回転電極
の製造が重要である。従来、この回転電極に用いる素材
の製造法としては、次のような方法が用いられていた。Here, in order to produce the desired alloy powder, production of the rotating electrode is important. Conventionally, the following methods have been used to manufacture materials used for this rotating electrode.
すなわち、予め成分調整してＶＡＲ（真空アーク溶解）
、ＥＢＲ（電子ビーム溶解）等で溶解、鋳造した鋳塊か
ら切削加工するか、またはかかる鋳塊を鍛造ないしは熱
間圧延等により展伸した材料から切削加工することによ
り電極仕上げを施していた。従って、Ｎｅｔ ５ｈａｐ
ｅ技術、Ｎｅａｒ Ｎｅｔ ５ｈａｐｅ技術と称しても
電極製造段階で多大の費用を要し、かつ工程も必然的に
長くなり小ロツト対応も困難であった。In other words, the components are adjusted in advance and VAR (vacuum arc melting) is performed.
Electrode finishing was performed by cutting from an ingot melted and cast using EBR (electron beam melting), or by cutting from a material expanded by forging or hot rolling such an ingot. Therefore, Net 5hap
Even if they are called e-technology or Near Net 5-shape technology, they require a large amount of cost at the electrode manufacturing stage, and the process is inevitably long, making it difficult to accommodate small lots.
本発明は上述した合金粉末製造用電極素材の溶解法によ
らない新たな高能率の製造法を提供するものである。The present invention provides a new high-efficiency manufacturing method that does not rely on the above-mentioned method of melting electrode materials for manufacturing alloy powder.
本発明の着眼点は、本発明者等が長年にわたり研究して
きた素粉末法による合金製造の技術にある。すなわち、
従来の溶解に代わって所定の合金成分となるよう予め機
械的に混合して成る混合粉末を、金型プレス、冷間静水
圧プレス等で所定の形状に圧粉成形し、さらに高温下で
熱処理することにより、合金化と焼結とを同一工程で行
う（これがいわゆる素粉末法である）。さらに強度、延
性、靭性を向上させるために、高温静水下における圧下
（熱間静水圧プレス、ＩＩＩＰ）を行うことにより、密
度９５％以上にする。The focus of the present invention is on the technology for manufacturing alloys by the raw powder method, which the present inventors have been researching for many years. That is,
Instead of conventional melting, a mixed powder is prepared by mechanically mixing the desired alloy components in advance, which is then compacted into a desired shape using a die press, cold isostatic press, etc., and then heat treated at high temperatures. By doing so, alloying and sintering are performed in the same process (this is the so-called raw powder method). In order to further improve strength, ductility, and toughness, the material is reduced to a density of 95% or more by performing rolling under high-temperature static water (hot isostatic pressing, IIIP).
即ち、本発明の要旨は下記のとおりである。That is, the gist of the present invention is as follows.
（１） −一種または二種以上の元素または母合金の
粉末の、少なくとも何れかを所定の合金成分になるよう
に混合し、圧縮成形して焼結することを特徴とするチタ
ン合金粉末製造用素材の製造方法。(1) - For manufacturing titanium alloy powder, which is characterized by mixing at least one of powders of one or more elements or master alloys to a predetermined alloy composition, compression molding, and sintering. How the material is manufactured.
（２）前項１記載の方法に従って得られた焼結材に、更
に高温静水下で圧下を加え密度を９５％以上とすること
を特徴とする高強度高靭性チタン合金粉末製造用素材の
製造方法。(2) A method for producing a material for producing a high-strength, high-toughness titanium alloy powder, characterized in that the sintered material obtained according to the method described in 1 above is further reduced under high-temperature still water to have a density of 95% or more. .
以上の方法によれば、溶解や鍛造ないし熱間圧延といっ
た高価な工程を経ることなく合金粉末製造用素材の製造
が可能となる。さらに溶解が困難なものや、熱間加工性
が悪い材料でも、合金粉末製造用素材の製造が可能とな
る。According to the above method, it is possible to produce a material for producing alloy powder without going through expensive processes such as melting, forging, or hot rolling. Furthermore, even materials that are difficult to melt or have poor hot workability can be used to produce alloy powder materials.
また、プラズマ回転電極法による合金粉末製造では局所
溶解が行われる。この時揮発性である塩化物は蒸発除去
される可能性に着目して、通常のスポンジチタンを原料
として素粉末法により電極製造を行ない、それを用いて
粉末を製造した場合には、塩化物濃度の極めて低いチタ
ン合金粉末が得られるという大きな利点も見いだされた
。また、局所溶解により電極棒中に存在する成分の不均
一はかかる工程で合金粉末を製造することにより解消さ
れる。一般の焼結材と異なり焼結材自体を構造材として
使用しないため、完全に均一な成分分布を有する焼結材
をも必要としない。Furthermore, local melting is performed in the production of alloy powder using the plasma rotating electrode method. Focusing on the possibility that chloride, which is volatile at this time, can be removed by evaporation, electrodes are manufactured using the raw powder method using ordinary sponge titanium as a raw material, and when powder is manufactured using this, chloride A major advantage was also found in that titanium alloy powder with extremely low concentration could be obtained. In addition, the non-uniformity of the components present in the electrode rod due to local dissolution can be eliminated by producing the alloy powder in this process. Unlike general sintered materials, the sintered material itself is not used as a structural material, so there is no need for a sintered material with a completely uniform distribution of components.
特許請求の範囲で元素とはチタン、アルミニウムなどの
元素（必ずしも金属に限らない）であり、また母合金と
はｖ４゜Ａｔ６゜などの予め容易に得られている合金の
ことである。ここで原料としてはチタン粉末等の金属元
素と、ν４０ Ａ１６０合金等の母合金が使用される。In the claims, the elements are elements such as titanium and aluminum (not necessarily limited to metals), and the master alloy is an alloy that is easily obtained in advance, such as v4°At6°. Here, as raw materials, a metal element such as titanium powder and a master alloy such as v40 A160 alloy are used.
また、２種以上の金属元素同士の混合、金属元素と母合
金との混合も当然行なわれる。Naturally, two or more metal elements may be mixed together, and a metal element may be mixed with a mother alloy.
なお、本発明の合金粉末製造用累月はプラズマ回転電極
法の他、電子ビームを熱源とするアルゴン噴霧冷却法に
も用いられる。In addition to the plasma rotating electrode method, the alloy powder manufacturing method of the present invention can also be used in an argon spray cooling method using an electron beam as a heat source.
実施例１（チタン合金、Ｔ ｉ −６Ａｌ−４Ｖ （Ｄ
製造）（１）２種類の粉末、すなわち、その組成がチタ
ン９９．６％、酸素０．０９％、塩素０．１５％よりな
るスポンジチタン粉末と、その組成がアルミニウム６０
％、バナジウム４０％の添加用母合金粉末とを用意した
。Example 1 (Titanium alloy, Ti-6Al-4V (D
Manufacturing) (1) Two types of powder: sponge titanium powder whose composition is 99.6% titanium, 0.09% oxygen, and 0.15% chlorine, and sponge titanium powder whose composition is 60% aluminum.
% and a master alloy powder for addition of 40% vanadium were prepared.
（２）第一工程二次に、チタン粉末と添加用母合金粉末
を重量化９：１の混合比で機械的に混合した。(2) First step Second, titanium powder and additive master alloy powder were mechanically mixed at a mixing ratio of 9:1 by weight.
（３）第二工程：第一工程で得られた混合粉末を所定の
形状の弾力性のある型に装入、充填した。(3) Second step: The mixed powder obtained in the first step was charged and filled into an elastic mold having a predetermined shape.
（４）第三工程：充填された粉末を冷間静水圧プレスに
より圧粉成形した。(4) Third step: The filled powder was compacted by cold isostatic pressing.
（５）第四工程：圧粉体を、真空度１０−４〜１Ｏ−６
ｔｏｒｒ、約１２５０’ｃ７−焼結処理した。得られた
焼結体の相対密度は９６％、引張強度は８４ｋｇｆ／ｄ
、伸びは５％であった。(5) Fourth step: The green compact is heated to a vacuum degree of 10-4 to 1O-6.
torr, about 1250'C7 - Sintered. The relative density of the obtained sintered body was 96%, and the tensile strength was 84 kgf/d.
, the elongation was 5%.
（６）上述（７）工程で製造したＴｉ−６Ａ！−４Ｖ
（７） ５０ｍｍφの丸棒を用い、プラズマ回転電極法
を用いて合金粉末を製造した結果、Ａｉ ＝ ６．２％
、Ｖ＝４．１％、０＝０．１５％、ＣＩ＜０．００１％
、残りＴｉよりなる、はぼ組成的にＴｉ−６八１−４Ｖ
の塩素の低い合金粉末（２００ｐｍ直径以下）が得られ
た。(6) Ti-6A produced in step (7) above! -4V
(7) As a result of producing alloy powder using a plasma rotating electrode method using a round bar with a diameter of 50 mm, Ai = 6.2%.
, V=4.1%, 0=0.15%, CI<0.001%
, the remainder consists of Ti, the composition is Ti-681-4V
A low chlorine alloy powder (less than 200 pm diameter) was obtained.
実施例２（チタン合金、Ｔｉ−６ＡＩ−４Ｖ （７）製
造）（１）実施例１に加えて、得られた焼結体を、約９
００°Ｃの温度で熱間静水圧プレス処理をした。Example 2 (Titanium alloy, Ti-6AI-4V (7) Production) (1) In addition to Example 1, the obtained sintered body was
Hot isostatic pressing was carried out at a temperature of 00°C.
処理後の相対密度は１００％、引張強度は９６ｋｇ ｆ
／ ｎｌ、伸びは１１％であった。Relative density after treatment is 100%, tensile strength is 96kg f
/nl, the elongation was 11%.
（２）上述ノ工程で製造したＴｉ−６ＡＩ−４Ｖ （７
） ５０ｍｍφの丸棒を用い、プラズマ回転電極法を用
いて合金粉末を製造した結果、Δｌ＝６．２％、Ｖ ＝
４．０％、Ｏ＝０．１６％、ＣＺ＜０．００１％、残
りＴｉよりなる、はぼ組成的ムこＴｉ−６ＡＩ−４νの
合金粉末（２００μｍ直径以下）かえられた。(2) Ti-6AI-4V (7
) As a result of manufacturing alloy powder using a plasma rotating electrode method using a 50 mmφ round bar, Δl = 6.2%, V =
4.0%, O = 0.16%, CZ < 0.001%, and the remainder Ti, the compositionally bulky Ti-6AI-4v alloy powder (less than 200 μm diameter) was changed.
実施例３（チタン合金、Ｔｊ−６Ａ！−６Ｖ−２Ｓｎの
製造）（１）３種類の粉末、すなわち、その組成がチタ
ン９９．６％、酸素０．０９％、塩素０．１５％ノスポ
ンジチタン粉末と、その組成がアルミニウム６０％、ノ
リージウム４０％の添加用母合金粉末、その組成がアル
ミニウム４０％、バナジウム４０％、スズ２０％の添加
用母合金粉末を用意した。Example 3 (Manufacture of titanium alloy, Tj-6A!-6V-2Sn) (1) Three types of powder, namely, Nosponge whose composition is 99.6% titanium, 0.09% oxygen, and 0.15% chlorine. Titanium powder, a master alloy powder for addition having a composition of 60% aluminum and 40% noridium, and a master alloy powder for addition having a composition of 40% aluminum, 40% vanadium, and 20% tin were prepared.
（２）第一工程二次に、チタン粉末８５％、アルミニウ
ムーバナジウム４％、アルミニウムーバナジウム−スズ
１１％を機械的に混合した。(2) First step Second, 85% titanium powder, 4% aluminum-vanadium, and 11% aluminum-vanadium-tin were mechanically mixed.
（３）第二工程：第一工程で得られた混合粉末を所定の
形状の弾力性のある型に装入、充填した。(3) Second step: The mixed powder obtained in the first step was charged and filled into an elastic mold having a predetermined shape.
（４）第三工程：充填された粉末を冷間静水圧プレスに
より圧粉成形した。(4) Third step: The filled powder was compacted by cold isostatic pressing.
（５）第四工程：圧粉体を、真空度１０−４〜１ｏ−６
ｔｏｒｒ、約１２５０°Ｃの温度で焼結処理した。得ら
れた焼結体の相対密度は９５％、引張強度は９５ｋｇ
ｆ ／ ａｄ、伸びは４％であった。(5) Fourth step: The green compact is heated to a vacuum degree of 10-4 to 1o-6.
torr, and a temperature of about 1250°C. The relative density of the obtained sintered body was 95%, and the tensile strength was 95 kg.
f/ad, elongation was 4%.
（６）上述の工程で製造したＴｉ−６ＡＩ−６Ｖ−２Ｓ
ｎの５０ｍｍφの丸棒を用い、プラズマ回転電極法を用
いて合金粉末を製造した結果、ＩＶ ＝ ５．９％、Ｖ
−５，７％、５ｎ＝１．９％、０＝０．１５％、ＩＪ
＜ ０．００１％、残りＴｉよりなる、はぼ組成的にＴ
ｉ−６八／−５ν２Ｓｎの合金粉末（２００μｍ直径以
下）かえられた。(6) Ti-6AI-6V-2S manufactured by the above process
As a result of producing alloy powder using a plasma rotating electrode method using a 50 mmφ round bar of n, IV = 5.9%, V
-5.7%, 5n=1.9%, 0=0.15%, IJ
< 0.001%, remaining Ti, compositionally T
The i-68/-5v2Sn alloy powder (less than 200 μm diameter) was changed.
実施例４（チタン合金、Ｔｉ−６ＡＩ−６Ｖ−２Ｓｎ
（７）製造）（１）実施例３に加えて、得られた焼結体
を、約９００°Ｃで熱間静水圧プレス処理をした。処理
後の相対密度は９９％、引張強度は１ ］ １ ｋｇｆ
／ｍｊ、伸びは６％であった。Example 4 (Titanium alloy, Ti-6AI-6V-2Sn
(7) Manufacture) (1) In addition to Example 3, the obtained sintered body was subjected to hot isostatic pressing at about 900°C. Relative density after treatment is 99%, tensile strength is 1] 1 kgf
/mj, and the elongation was 6%.
（２）上述ノ工程で製造したＴｉ−６八１−６Ｖ−２Ｓ
ｎの５０鵬φの丸棒を用い、プラズマ回転電極法を用い
て合金粉末を製造した結果、ＡＩ ＝ ５．９％、Ｖ−
５，６％、５ｎ＝１．９％、０＝０．１５％、ＣＩ ＜
０．００１％、残りＴｉよりなる、はぼ組成的にＴ
ｉ −６ｋｌ −６シ２Ｓｎの合金粉末（２００μｍ直
径以下）かえられた。(2) Ti-681-6V-2S manufactured in the above process
As a result of producing alloy powder using a plasma rotating electrode method using a round bar with a diameter of 50 φ, AI = 5.9%, V-
5,6%, 5n=1.9%, 0=0.15%, CI<
Compositionally T, consisting of 0.001% and the remainder Ti.
i-6kl-6Sn alloy powder (200 μm diameter or less) was changed.
実施例５ （Ｔｉ−Ｎｉの製造）
（１）２種類の粉末、すなわち、その組成がチタン９９
．６％、酸素０．０９％のチタン粉末と、その組成がニ
ッケル９９．９％以上の純ニツケル粉末とを用意した。Example 5 (Manufacture of Ti-Ni) (1) Two types of powder, that is, the composition is titanium 99
．． Titanium powder containing 6% oxygen and 0.09% oxygen, and pure nickel powder containing 99.9% or more of nickel were prepared.
（２）第一工程二次に、チタン粉末と純ニツケル粉末を
原子比５０：５０の混合比で、機械的に混合した。(2) First step Second, titanium powder and pure nickel powder were mechanically mixed at an atomic ratio of 50:50.
（３）第二工程；第一工程で得られた混合粉末を所定の
形状の弾力性のある型に装入、充填した。(3) Second step: The mixed powder obtained in the first step was charged and filled into an elastic mold having a predetermined shape.
（４）第三工程：充填された粉末を冷間静水圧プレスに
より圧粉成形した。(4) Third step: The filled powder was compacted by cold isostatic pressing.
（５）第四工程：圧粉体を、真空度１ｏ−４〜１ｏ−６
ｔｏｒｒ、約１２００°Ｃで焼結処理した。得られた焼
結体の相対密度は９０％であった。(5) Fourth step: The green compact is heated to a vacuum degree of 1o-4 to 1o-6.
sintering at about 1200°C. The relative density of the obtained sintered body was 90%.
（６）上述の工程で製造したＴｉ−Ｎｉの５０ｍｍφの
丸棒を用い、プラズマ回転電極法を用いて合金粉末を製
造した結果、原子比でＴｉ ：Ｎ１＝５０．１ ：４９
．９よりなる、はぼ組成的にＴｉ−Ｎｉの合金粉末（２
００μｍ直径以下）かえられた。(6) Using the Ti-Ni round bar of 50 mm diameter manufactured in the above process, an alloy powder was manufactured using the plasma rotating electrode method, and as a result, the atomic ratio was Ti:N1=50.1:49.
．． 9 is a Ti-Ni alloy powder (2
00 μm diameter or less) was changed.
以上の説明から明らかなように、本発明では冷間で成形
した混合粉末を高温下で真空焼結を行い、従来法に比べ
低廉な製造費でチタン合金粉末製造用素材を得ることが
でき、さらに熱間静水圧プレス処理を加えることにより
、高強度高靭性チタン合金粉末製造用素材を得ることが
できる。As is clear from the above description, in the present invention, a cold-molded mixed powder is vacuum sintered at high temperature, and a material for producing titanium alloy powder can be obtained at a lower manufacturing cost than conventional methods. By further applying hot isostatic pressing treatment, a material for producing high strength and high toughness titanium alloy powder can be obtained.
第１図はプラズマ回転電極法の構成図を示したものであ
る。
１・・・回転電極、２・・・水冷タングステン、３・・
・移行型アーク電源、４・・・ヘリウムプラズマアーク
、５・・・水冷銅ノズルFIG. 1 shows a block diagram of the plasma rotating electrode method. 1... Rotating electrode, 2... Water-cooled tungsten, 3...
・Transitional arc power supply, 4... Helium plasma arc, 5... Water-cooled copper nozzle
Claims (2)
、少なくとも何れかを所定の合金成分になるように混合
し、圧縮成形して焼結することを特徴とするチタン合金
粉末製造用素材の製造方法。(1) A material for producing titanium alloy powder, which is characterized by mixing at least one of powders of one or more elements or a master alloy to a predetermined alloy composition, compression molding, and sintering. manufacturing method.
更に高温静水下で圧下を加え密度を９５％以上とするこ
とを特徴とする高強度高靭性チタン合金粉末製造用素材
の製造方法。(2) The sintered material obtained according to the method according to claim 1,
A method for producing a material for producing a high-strength, high-toughness titanium alloy powder, which further comprises applying pressure reduction under high-temperature still water to achieve a density of 95% or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19391788A JPH0243329A (en) | 1988-08-03 | 1988-08-03 | Production of stock for producing titanium alloy powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19391788A JPH0243329A (en) | 1988-08-03 | 1988-08-03 | Production of stock for producing titanium alloy powder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0243329A true JPH0243329A (en) | 1990-02-13 |
Family
ID=16315890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19391788A Pending JPH0243329A (en) | 1988-08-03 | 1988-08-03 | Production of stock for producing titanium alloy powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0243329A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111702183A (en) * | 2020-07-09 | 2020-09-25 | 四川容克斯科技有限公司 | Spherical titanium-aluminum alloy powder and preparation method and application thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411764A (en) * | 1977-06-29 | 1979-01-29 | Fujitsu Ltd | Surface condition measuring method of disc substrates |
| JPS568902A (en) * | 1979-07-04 | 1981-01-29 | Seiko Epson Corp | Antenna unit |
-
1988
- 1988-08-03 JP JP19391788A patent/JPH0243329A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411764A (en) * | 1977-06-29 | 1979-01-29 | Fujitsu Ltd | Surface condition measuring method of disc substrates |
| JPS568902A (en) * | 1979-07-04 | 1981-01-29 | Seiko Epson Corp | Antenna unit |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111702183A (en) * | 2020-07-09 | 2020-09-25 | 四川容克斯科技有限公司 | Spherical titanium-aluminum alloy powder and preparation method and application thereof |
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