JPH0243866Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a material heating device that evaporates two or more materials at the same time.

Electron beams are often used as a heating source for vapor deposition of high-melting point metals, etc., but recently such electron beam evaporation equipment has been used to deposit two or more materials simultaneously and as much as possible, for example for the vapor deposition of magnetic-related parts. There is an increasing desire to evaporate from a close position. There are almost no electron beam evaporation devices currently available on the market that have multiple electron guns, so if you forcefully use multiple electron guns to construct a device that can heat multiple materials simultaneously, The results will be as shown in Figures 1a and b. Fig. 1a is a plan view of the main part, b is a cross-sectional view taken along line X-X, and numeral 1 indicates a crucible. The crucible is filled with two materials 2a and 2b, and the two materials are heated and evaporated using different electron beams. 3a, 3b
are the magnetic poles of the first deflector, which are arranged above the crucible 1 to face each other. Both magnetic poles are made of a ferromagnetic material, the other ends of which are joined to each other by a yoke, and are subjected to a predetermined excitation by an excitation coil. 4a,
4b is a magnetic pole of the second deflector, which, like the first deflector, is disposed facing above the crucible 1, and its other end is joined to form a single magnetic circuit. A magnetic flux is generated between the magnetic poles of both deflectors in the vertical direction and parallel to the plane of the paper, and contributes to the deflection of the electron beam. 5a and 5b are filaments of an electron gun for generating electron beams, and the electron beams generated from the filaments are accelerated by acceleration/focusing electrodes (not shown) and taken out as beams EB1 and EB2, which are introduced into the respective magnetic fields of the deflector. be done. The electron beam is curved and deflected by the deflection magnetic field as shown in the figure, and travels, and is projected onto the materials 2a and 2b in the crucible 1, respectively.

By irradiating the electron beam, the materials 2a,
2b is heated, further raised in temperature and evaporated, and the crucible 1
The material to be evaporated (not shown) is placed above the evaporator.

As mentioned above, when depositing multiple types of materials at the same time, each material needs to be placed close to each other, but in the apparatus shown in Figure 1, each deflector can originally be placed close to each other. Since this is not taken into consideration, if both deflectors are placed relatively close together as shown in the figure, mutual magnetic field interference will occur between the two deflectors, making it impossible to obtain a magnetic field of a predetermined strength between each magnetic pole. Therefore, the degree of deflection of the electron beam by each deflector is smaller than the predetermined value,
The trajectory of the electron beam has a large radius of curvature, as shown by the dotted line in FIG. For this reason, both deflectors cannot be arranged so close together, and materials 2a and 2b
It is not possible to fully satisfy the demand of arranging the two in close proximity to each other. Furthermore, due to the shape of the magnetic pole, the number of electron beams is limited to two as shown in FIG. 1, and it cannot be applied at all to cases where it is desired to evaporate more materials at the same time.

SUMMARY OF THE INVENTION In view of the above-mentioned drawbacks of the conventional apparatus, it is an object of the present invention to provide a heating apparatus in which a plurality of deflectors can be arranged very close to each other, thereby allowing simultaneous vapor deposition of two or more metals.

The structural feature of the present invention is that a plurality of magnetic circuits made of ferromagnetic material are prepared and arranged close to each other so that the distance between the magnetic poles of adjacent magnetic circuits is smaller than the distance between the magnetic poles at both ends of each magnetic circuit. , a plurality of electron guns for exciting the adjacent magnetic poles to have different polarities to generate an external magnetic field between the two magnetic poles and introducing an electron beam into the external magnetic field, the electron gun The present invention provides an apparatus for heating a material with a plurality of electron beams configured to deflect the electron beams from the magnetic field and project the electron beams onto the material.

Figure 2 shows an embodiment of the present invention.
7, 8, and 9 are magnetic circuits (yokes) made of ferromagnetic material, and magnetic poles 6a and 6 are provided at both ends of the magnetic circuits (yoke).
b, 7a and 7b, 8a and 8b, and 9a and 9b are formed. Magnetic pole of each magnetic circuit (e.g. 6a)
are magnetic poles of mutually adjacent magnetic circuits (e.g. 7b)
The magnetic poles are arranged in close proximity to each other, and the spacing between adjacent magnetic poles is smaller than the spacing between the two magnetic poles (6a and 6b) in each magnetic circuit. 10,1
1, 12, and 13 are excitation coils wound around each magnetic circuit, and a predetermined current is supplied from a DC power source (not shown) so that adjacent magnetic poles (6a and 7b, 7a and 8b, etc.) have opposite polarities. is excited. As a result, the magnetic flux generated from the coil is as shown by the dotted arrow: yoke 6 → magnetic pole 6a → 7b → yoke 7 → magnetic pole 7a → 8b → yoke 8 → magnetic pole 8a → 9
It circulates through the path b→yoke 9→magnetic pole 9a→6b→yoke 6. In this magnetic flux circulation path,
An external magnetic field is generated in the gaps between the magnetic poles 6a and 7b, 7a and 8b, 8a and 9b, and 9a and 6b, and this magnetic field contributes to the deflection of the electron beam. 5a, 5b, 5
c and 5d are filaments of an electron gun, and the electron beams from the filaments are largely deflected by the external magnetic field formed between the magnetic poles of the adjacent magnetic circuits, and have a trajectory similar to that shown in FIG. 1
are projected onto each of the materials 2a, 2b, 2c and 2d.

In such a configuration, the magnetic poles at both ends of each magnetic circuit are close to the magnetic poles of other adjacent magnetic circuits to form a deflection magnetic field there, and a deflection magnetic field is generated between the magnetic poles at both ends of each magnetic circuit. Therefore, there is almost no leakage of magnetic flux, and the electron beam can be efficiently deflected. Also, since each deflection magnetic field can be placed extremely close to each other, multiple It becomes possible to heat and evaporate materials in close proximity. Furthermore, as each magnetic field can approach each other as described above, conventionally only two electron guns (electron beams) could be used, but with this invention, as many as four can be used as shown in Figure 2, further increasing the number. It is also possible to do so. Of course, it can be used in the same way as in the case of two or three as in the conventional case. Furthermore, in connection with the ability to increase the number of electron guns in the present invention, even if the filament of one of the electron guns breaks, the other electron guns are fully operational, so there is no need to stop work, improving work efficiency. It is possible to improve Further, since the number of electron guns can be increased, unlike in FIGS. 1 and 2, when heating a single material, the heating surface of the material can be widened, and efficient heating and evaporation can be achieved.

[Brief explanation of the drawing]

FIG. 1 is a diagram schematically showing a conventional heating device using multiple electron beams, and FIG. 2 is a plan view showing an embodiment of the present invention. 1: Crucible, 2a-2d: Heating material, 5a-5
d: Electron gun filament, 6, 7, 8, 9: Magnetic circuit, 6a, 6b: Magnetic pole, 7a, 7b: Magnetic pole, 8
a, 8b: magnetic pole, 9a, 9b: magnetic pole, 10,1
1, 12, 13: Excitation coil.

Claims (1)

[Scope of utility model registration request] A plurality of magnetic circuits made of ferromagnetic material are prepared, and they are arranged close to each other so that the distance between the magnetic poles of the adjacent magnetic circuit is smaller than the distance between the magnetic poles at both ends of each magnetic circuit, and the adjacent magnetic poles are arranged so that the magnetic poles of the adjacent magnetic circuits are different from each other. It has a plurality of electron guns that are excited to have the same polarity to generate an external magnetic field between both magnetic poles and introduce electron beams into the external magnetic field, and the electron beams from the electron guns are guided by the magnetic field. A device for heating a material with a plurality of electron beams configured to be deflected and projected onto the material.