JPH0245423U - - Google Patents

Info

Publication number
JPH0245423U
JPH0245423U JP12334688U JP12334688U JPH0245423U JP H0245423 U JPH0245423 U JP H0245423U JP 12334688 U JP12334688 U JP 12334688U JP 12334688 U JP12334688 U JP 12334688U JP H0245423 U JPH0245423 U JP H0245423U
Authority
JP
Japan
Prior art keywords
pump
flow rate
detecting
rate detection
freed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12334688U
Other languages
Japanese (ja)
Other versions
JPH0725632Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12334688U priority Critical patent/JPH0725632Y2/en
Publication of JPH0245423U publication Critical patent/JPH0245423U/ja
Application granted granted Critical
Publication of JPH0725632Y2 publication Critical patent/JPH0725632Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案を実施するのに好適な真空排
気系の一例の縦断面図、第２図及び第３図は流量
検出回路例を示すブロツク図である。 １…第１ポンプ（ターボ分子ポンプ）、５…回
転翼、２１…第２分子ポンプ（ねじ溝真空ポンプ
）。 FIG. 1 is a longitudinal sectional view of an example of a vacuum evacuation system suitable for implementing this invention, and FIGS. 2 and 3 are block diagrams showing examples of a flow rate detection circuit. 1... First pump (turbo molecular pump), 5... Rotary blade, 21... Second molecular pump (thread groove vacuum pump).

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転翼を備えた第１ポンプと、この第１ポンプ
の排気側に接続される第２ポンプとを有する真空
排気系において、上記第２ポンプの作動中に、上
記第１ポンプの回転翼を自由回転可能とすると共
に、その回転数を検出し、これに基づいて流量検
出を行う流量検出手段を設けたことを特徴とする
真空排気系の流量検出装置。 In a vacuum pumping system having a first pump equipped with a rotary blade and a second pump connected to the exhaust side of the first pump, the rotor blade of the first pump is freed while the second pump is in operation. A flow rate detection device for an evacuation system, characterized in that it is rotatable and is provided with a flow rate detection means for detecting the number of rotations thereof and detecting the flow rate based on this.
JP12334688U 1988-09-20 1988-09-20 Vacuum exhaust system flow rate detector Expired - Lifetime JPH0725632Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12334688U JPH0725632Y2 (en) 1988-09-20 1988-09-20 Vacuum exhaust system flow rate detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12334688U JPH0725632Y2 (en) 1988-09-20 1988-09-20 Vacuum exhaust system flow rate detector

Publications (2)

Publication Number Publication Date
JPH0245423U true JPH0245423U (en) 1990-03-28
JPH0725632Y2 JPH0725632Y2 (en) 1995-06-07

Family

ID=31372112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12334688U Expired - Lifetime JPH0725632Y2 (en) 1988-09-20 1988-09-20 Vacuum exhaust system flow rate detector

Country Status (1)

Country Link
JP (1) JPH0725632Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013209928A (en) * 2012-03-30 2013-10-10 Ebara Corp Vacuum evacuation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013209928A (en) * 2012-03-30 2013-10-10 Ebara Corp Vacuum evacuation device
JP2016205405A (en) * 2012-03-30 2016-12-08 株式会社荏原製作所 Vacuum exhaust device

Also Published As

Publication number Publication date
JPH0725632Y2 (en) 1995-06-07

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