JPH0246907B2 - - Google Patents
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- Publication number
- JPH0246907B2 JPH0246907B2 JP60294863A JP29486385A JPH0246907B2 JP H0246907 B2 JPH0246907 B2 JP H0246907B2 JP 60294863 A JP60294863 A JP 60294863A JP 29486385 A JP29486385 A JP 29486385A JP H0246907 B2 JPH0246907 B2 JP H0246907B2
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- piezoelectric ceramic
- layers
- polarization
- laminated
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Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、せん断型加速度センサー等に用いて
好適の積層型圧電セラミツク素子に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laminated piezoelectric ceramic element suitable for use in shear type acceleration sensors and the like.
従来のせん断型加速度センサーの一例を第７図
に示す。同図Ａは一部切開上面図、同図Ｂは一部
断面正面図である。これらの図において、１は圧
電セラミツク素子、２は錘（おもり）、３は支持
体で、１〜３は同心円状に取付けられている。電
極は圧電セラミツク素子１の内外の側面にあり、
分極処理は素子高さ（Ｚ）方向に電界を加えて行
なわれる。Ｚ方向の加速度が加わると、せん断応
力が錘２によつて素子１に作用し、素子１が面内
ずれ歪みを生じるため電極のある面に電荷を発生
し、電荷は電極からリード線５を通してコネクタ
４に運ばれ、外部へ電気信号として取出される。
錘２と素子１、素子１と支持体３は、通常接着に
より固定される。
An example of a conventional shear type acceleration sensor is shown in FIG. Figure A is a partially cutaway top view, and Figure B is a partially sectional front view. In these figures, 1 is a piezoelectric ceramic element, 2 is a weight, 3 is a support body, and 1 to 3 are attached concentrically. The electrodes are located on the inner and outer sides of the piezoelectric ceramic element 1,
The polarization process is performed by applying an electric field in the element height (Z) direction. When acceleration in the Z direction is applied, shear stress is applied to the element 1 by the weight 2, causing an in-plane shear strain in the element 1, which generates a charge on the surface where the electrode is located, and the charge is transferred from the electrode through the lead wire 5. It is carried to the connector 4 and taken out as an electrical signal to the outside.
The weight 2 and the element 1, and the element 1 and the support 3 are usually fixed by adhesive.
第８図は、第７図のせん断型加速度センサーに
用いられる圧電セラミツク素子の一例を示すもの
である。同図Ａに示すように、出力電極９は上述
の如く中空円筒状素子１内外の側面に形成され、
同図Ｂに示すように、分極用電極１０を素子１の
上面と底面に配しＰ方向の電界を加えて分極を行
なう。上述の圧電セラミツク素子は、単層である
ため感度が低く静電容量が小さいことから、電気
的ノイズ等に影響され易い。加えて、素子１と錘
２の固定には基本的に接着剤を用いるため、構造
上接着部分が特に弱くなつており、感度を向上さ
せる目的で錘２の重量を増加させることは、共振
周波数の低下だけでなく接着部分の一層の強度低
下を引き起こし、耐加速度衝撃性を小さくしたり
加速度センサーのサイズや重量の増大等の欠点を
生じさせる。 FIG. 8 shows an example of a piezoelectric ceramic element used in the shear type acceleration sensor shown in FIG. As shown in Figure A, the output electrodes 9 are formed on the inner and outer sides of the hollow cylindrical element 1 as described above,
As shown in Figure B, polarization electrodes 10 are arranged on the top and bottom surfaces of the element 1, and an electric field in the P direction is applied to perform polarization. Since the piezoelectric ceramic element described above is a single layer, its sensitivity is low and its capacitance is small, so it is easily affected by electrical noise and the like. In addition, since adhesive is basically used to fix element 1 and weight 2, the adhesive part is particularly weak due to the structure, and increasing the weight of weight 2 for the purpose of improving sensitivity will reduce the resonance frequency. This causes not only a decrease in the strength of the adhesive but also a further decrease in the strength of the bonded portion, resulting in disadvantages such as a decrease in acceleration impact resistance and an increase in the size and weight of the acceleration sensor.
上述の方法に対し、積層型圧電セラミツク素子
を用いて感度を向上させる方法は、上記欠点を伴
わずに済む。第４及び第５図に、せん断型加速度
センサーに用いる積層型圧電セラミツク素子の一
例を示す。この積層型圧電セラミツク素子は、適
当形状の圧電セラミツクス１１を複数枚積み重ね
たもので、各層に施してある出力用電極１２を並
列接続することにより、感度は単層のものに比べ
積層枚数に比例して高くなる。第４図の素子は中
空円筒状の圧電セラミツクスを同心円状に積層し
たもので、同図Ａは上面図、同図Ｂは一部切断斜
視図である。分極処理は、同図Ｂに矢印で示すよ
うに、素子の上面及び底面に垂直な方向に行なわ
れており隣接層では分極方向は反対である。各圧
電セラミツクス１１の電気出力を得るための内部
電極１２は、各圧電セラミツクス１１の間の接合
面に設けられる。内部電極１２が露出した積層端
面において、絶縁保護膜１４で内部電極１２を１
つおきに被覆した後、例えば銀ペースト等の導電
性材料をその上に塗布して内部電極１２を１つお
きに接続し、１対の外部電極１３とする。１対の
外部電極１３は互いに異なる極性の内部電極に接
続し、積層数に比例した電気出力を得るようにす
る。 In contrast to the above-mentioned method, the method of improving sensitivity using a laminated piezoelectric ceramic element does not have the above-mentioned drawbacks. 4 and 5 show an example of a laminated piezoelectric ceramic element used in a shear type acceleration sensor. This laminated piezoelectric ceramic element is made by stacking a plurality of piezoelectric ceramics 11 of an appropriate shape, and by connecting the output electrodes 12 on each layer in parallel, the sensitivity is proportional to the number of layers laminated compared to a single layer. and become expensive. The element shown in FIG. 4 is made by laminating hollow cylindrical piezoelectric ceramics concentrically, and FIG. 4A is a top view, and FIG. 4B is a partially cutaway perspective view. The polarization process is performed in a direction perpendicular to the top and bottom surfaces of the element, as indicated by the arrows in FIG. B, and the polarization direction is opposite in adjacent layers. Internal electrodes 12 for obtaining electrical output from each piezoelectric ceramic 11 are provided on the joint surfaces between each piezoelectric ceramic 11. At the stacked end face where the internal electrode 12 is exposed, the internal electrode 12 is covered with an insulating protective film 14.
After coating every other part, a conductive material such as silver paste is applied thereon to connect every other internal electrode 12 to form a pair of external electrodes 13 . A pair of external electrodes 13 are connected to internal electrodes of mutually different polarities so as to obtain an electrical output proportional to the number of laminated layers.
第５図の素子は同一リング形状の圧電セラミツ
クスを高さ方向に複数枚積み重ねたもので、同図
Ａは上面図、同図Ｂは一部切断斜視図である。内
部電極１２は各圧電セラミツクス１１の間の接合
面にあり、内部電極の接続方法等は第４図の場合
と同様である。このように、せん断型加速度セン
サーに用いる積層型圧電セラミツク素子は、分極
軸方向と電気軸方向が同じでなく90°直交してお
り、パイロ電気出力の影響が少ないため周囲温度
変化による電気的ノイズの少ない高感度の加速度
センサーが得られる反面、分極処理に出力用の内
部電極のほかに分極用の電極を設ける必要があ
る。 The element shown in FIG. 5 is made by stacking a plurality of piezoelectric ceramics having the same ring shape in the height direction, and FIG. 5A is a top view, and FIG. 5B is a partially cutaway perspective view. The internal electrodes 12 are located on the joint surfaces between the piezoelectric ceramics 11, and the method of connecting the internal electrodes is the same as that shown in FIG. In this way, in the laminated piezoelectric ceramic element used in shear type acceleration sensors, the direction of polarization axis and the direction of electrical axis are not the same but are perpendicular to each other by 90 degrees, so the influence of pyroelectric output is small, so electrical noise due to changes in ambient temperature is avoided. Although it is possible to obtain a highly sensitive acceleration sensor with less noise, it is necessary to provide a polarization electrode in addition to the internal output electrode for polarization processing.
単層の圧電セラミツク素子では、例えば第８図
Ａのように出力電極９を設けると共にこれと直交
する面に第８図Ｂのように分極用電極１０を設け
て分極処理すればよい。しかし、積層型圧電セラ
ミツク素子の場合は、例えば第５図Ｂのように分
極する方向を１層おきに逆にする必要があるの
で、第６図に示すように、各層ごとに分極用電極
１０を取付け各層について分極を行なわなければ
ならない。同図中、P1及びP2は逆の分極方向を
示す。また、隣接する層に加える電圧が逆になる
ので、或る圧電セラミツクス層に加える分極電圧
が隣接する圧電セラミツクス層に影響を及ぼす。
特に、グリーンシート法等によつて製造された積
層型圧電セラミツク素子の圧電セラミツクス１層
の厚さは0.5mm以下と薄いため、その１層ごとに
分極用電極を均一に施すことは困難である。
In the case of a single-layer piezoelectric ceramic element, for example, an output electrode 9 may be provided as shown in FIG. 8A, and a polarization electrode 10 may be provided on a surface perpendicular to the output electrode 9 as shown in FIG. 8B for polarization. However, in the case of a laminated piezoelectric ceramic element, it is necessary to reverse the direction of polarization for every other layer, as shown in FIG. 5B, for example. Therefore, as shown in FIG. must be installed and polarization performed for each layer. In the figure, P 1 and P 2 indicate opposite polarization directions. Furthermore, since the voltages applied to adjacent layers are reversed, a polarization voltage applied to one piezoelectric ceramic layer affects the adjacent piezoelectric ceramic layer.
In particular, since the thickness of each layer of piezoelectric ceramic in a laminated piezoelectric ceramic element manufactured by the green sheet method is as thin as 0.5 mm or less, it is difficult to uniformly apply polarizing electrodes to each layer. .
また、圧電セラミツクスを積み重ねる前に分極
処理することは、接着による積層の場合、圧電セ
ラミツクスのキユリー点以下の温度で硬化して分
極を消失させないこと、１層の厚さを余り薄くで
きないこと等の制約を受ける。特に、グリーンシ
ート法等による積層の場合、積層化方法として熱
プレスを用いるため高温にさらされて分極が消失
してしまうので、せん断効果を利用することがで
きなかつた。 In addition, polarization treatment before stacking piezoelectric ceramics is important because, in the case of lamination by adhesive, the polarization does not disappear due to curing at a temperature below the Curie point of the piezoelectric ceramics, and the thickness of one layer cannot be made too thin. subject to restrictions. In particular, in the case of lamination by the green sheet method or the like, since a hot press is used as the lamination method, polarization disappears due to exposure to high temperatures, making it impossible to utilize the shear effect.
本発明は、圧電セラミツクスの層と圧電性のな
い又は弱い絶縁材料の層（以下「絶縁層」とい
う。）を交互に積み重ねて積層型圧電セラミツク
素子とすることにより、上述の問題点を解決し
た。
The present invention solves the above-mentioned problems by alternately stacking layers of piezoelectric ceramic and layers of non-piezoelectric or weak insulating material (hereinafter referred to as "insulating layers") to form a laminated piezoelectric ceramic element. .
上記の構成とすれば、１対の分極性電極で簡単
に圧電セラミツク素子を分極処理することが可能
となる。
With the above configuration, it becomes possible to easily polarize a piezoelectric ceramic element using a pair of polarizable electrodes.
第１図は、本発明の第１の実施例を示す一部断
面斜視図である。本例は、径の異なる中空円筒状
の圧電セラミツクス層と絶縁層を同心円状に積み
重ねた積層型圧電セラミツク素子である。電気出
力用の内部電極１２は絶縁層１５と接する圧電セ
ラミツクス層１１の表面にあり、各内部電極の接
続は、１対の外部電極１３を用いて各層の圧電セ
ラミツクス１１が並列になるように接続する。す
なわち、一方の外部電極には内部電極の一方の極
同士を、他方の外部電極には内部電極の他方の極
同士を接続する。外部電極１３には、従来と同様
に絶縁保護膜１４により内部電極１２を１つおき
に接続する。また、外部電極１３には電気出力を
外部に導くためリード線５が接続される。このよ
うな構造の圧電セラミツク素子では、せん断効果
による電気出力を得るための分極処理は、１層お
きに分極方向を逆にする必要がないので、素子の
上面と底面に着脱可能な分極用電極を取付け直流
電圧を印加するだけでよい。
FIG. 1 is a partially sectional perspective view showing a first embodiment of the present invention. This example is a laminated piezoelectric ceramic element in which hollow cylindrical piezoelectric ceramic layers and insulating layers having different diameters are stacked concentrically. Internal electrodes 12 for electrical output are located on the surface of the piezoelectric ceramic layer 11 in contact with the insulating layer 15, and each internal electrode is connected using a pair of external electrodes 13 so that the piezoelectric ceramics 11 of each layer are connected in parallel. do. That is, one pole of the internal electrodes is connected to one external electrode, and the other pole of the internal electrodes is connected to the other external electrode. Every other internal electrode 12 is connected to the external electrode 13 by an insulating protective film 14 as in the conventional case. Furthermore, a lead wire 5 is connected to the external electrode 13 in order to guide the electrical output to the outside. In a piezoelectric ceramic element with such a structure, the polarization process to obtain electrical output through the shear effect does not require reversing the polarization direction for every other layer, so removable polarization electrodes are attached to the top and bottom surfaces of the element. All you have to do is attach the mount and apply DC voltage.
第１図中の矢印が分極方向を示し、圧電セラミ
ツクス１１は同方向に分極され、絶縁層１５には
分極は生じないか又は生じたとしても弱い分極が
生じるだけである。分極時の分極用電極は、内部
電極１２と直接接触しないように素子の上面及び
底面を絶縁被覆（コーテイング）するか絶縁板を
挾むなどして絶縁保護しておき、内部電極１２を
通して分極用電極同士が短絡しないようにする。 The arrows in FIG. 1 indicate polarization directions, and the piezoelectric ceramic 11 is polarized in the same direction, and no polarization occurs in the insulating layer 15, or even if it occurs, only weak polarization occurs. During polarization, the polarization electrodes should be insulated and protected by coating the top and bottom surfaces of the element or sandwiching insulating plates so that they do not come into direct contact with the internal electrodes 12. Avoid shorting the electrodes.
第２図は、本発明の第２の実施例を示す一部断
面斜視図である。本例は、同一の薄いリング状の
圧電セラミツクス層と絶縁層を高さ方向に交互に
積み重ねた積層型圧電セラミツク素子である。第
１図と対応する部分には同一の符号を付して説明
を省略する。このような構造の素子の分極は、素
子の内壁と外壁に着脱可能な分極用電極を取付け
て、図中矢印で示すように放射状の方向に電界を
加えるだけでよい。ただし、分極用電極を取付け
る素子の内外壁には、第１図の場合と同様な理由
により絶縁保護をしておく。 FIG. 2 is a partially sectional perspective view showing a second embodiment of the invention. This example is a laminated piezoelectric ceramic element in which thin ring-shaped piezoelectric ceramic layers and insulating layers are alternately stacked in the height direction. Components corresponding to those in FIG. 1 are designated by the same reference numerals, and their explanation will be omitted. To polarize an element having such a structure, it is sufficient to attach removable polarization electrodes to the inner and outer walls of the element and apply an electric field in a radial direction as shown by the arrows in the figure. However, the inner and outer walls of the element to which the polarization electrodes are attached are provided with insulation protection for the same reason as in the case of FIG.
第３図は、本発明による積層型圧電セラミツク
素子を用いたせん断型加速度センサーの一例を示
し、同図Ａは上面図、同図Ｂは一部断面正面図で
ある。絶縁層１５と圧電セラミツクス層１１が交
互に積層され、電気出力を取出すための内部電極
１２は積層面にあり、内部電極１２に挟まれた圧
電セラミツクス層１１を並列に接続するため、内
部電極１２の端面を絶縁保護膜１４で１層おきに
覆い、その上に外部電極１３を設けてある。最外
部と最内部の絶縁層１５は他層より厚めとし、外
部電極１３と錘２、外部電極１３と支持体３が接
触しないように余裕をもたせる。上述の代わり
に、外部電極１３を形成後、錘２及び支持体３に
接触する外部電極１３の部分を絶縁保護してもよ
い。リード線５の一方はベース８に接続して接地
し、他方はコネクタ４に接続する。図のＺ方向に
加速度が加わると、電気出力を発生しこれを信号
として外部に伝える。 FIG. 3 shows an example of a shear type acceleration sensor using a laminated piezoelectric ceramic element according to the present invention, in which FIG. 3A is a top view and FIG. 3B is a partially sectional front view. Insulating layers 15 and piezoelectric ceramic layers 11 are alternately laminated, and internal electrodes 12 for extracting electrical output are located on the laminated surface. The end faces of the insulating protective film 14 are covered every other layer, and the external electrodes 13 are provided thereon. The outermost and innermost insulating layers 15 are made thicker than other layers to provide a margin so that the outer electrode 13 and the weight 2 and the outer electrode 13 and the support 3 do not come into contact with each other. Instead of the above, after forming the external electrode 13, the portion of the external electrode 13 that contacts the weight 2 and the support 3 may be insulated and protected. One end of the lead wire 5 is connected to the base 8 and grounded, and the other end is connected to the connector 4. When acceleration is applied in the Z direction in the figure, an electrical output is generated and transmitted as a signal to the outside.
なお、本発明による積層型圧電セラミツク素子
は、圧電セラミツクス層と絶縁層とを交互に積層
するものであれば、その形状を上述の実施例に限
る必要はない。 Note that the shape of the laminated piezoelectric ceramic element according to the present invention does not need to be limited to the above-described embodiments, as long as piezoelectric ceramic layers and insulating layers are alternately laminated.
以上説明したとおり、本発明によれば、１対の
分極用電極で素子全体を一度に分極できるので、
分極用電極の取付けや分極処理に要する時間を短
縮できるばかりでなく、層の厚さが薄い場合でも
分極精度を落とすことなく分極処理ができる利点
がある。
As explained above, according to the present invention, the entire device can be polarized at once with a pair of polarization electrodes, so
Not only can the time required for attaching polarization electrodes and polarization processing be shortened, but also there is an advantage that polarization processing can be performed without reducing polarization accuracy even when the layer thickness is thin.
第１図は本発明の第１実施例を示す図、第２図
は本発明の第２実施例を示す図、第３図は本発明
を用いたせん断型加速度センサーの例を示す図、
第４及び第５図は従来の積層型圧電セラミツク素
子の２つの例を示す図、第６図は第５図の素子の
分極状況を示す説明図、第７図は従来のせん断型
加速度センサーの例を示す図、第８図は第７図の
ものに用いられる圧電セラミツク素子の例を示す
図である。
１１……圧電セラミツクス層、１５……絶縁材
料の層（絶縁層）、１２……内部電極、１３……
外部電極。
FIG. 1 is a diagram showing a first embodiment of the present invention, FIG. 2 is a diagram showing a second embodiment of the present invention, and FIG. 3 is a diagram showing an example of a shear type acceleration sensor using the present invention.
Figures 4 and 5 are diagrams showing two examples of conventional laminated piezoelectric ceramic elements, Figure 6 is an explanatory diagram showing the polarization state of the element in Figure 5, and Figure 7 is a diagram of a conventional shear type acceleration sensor. FIG. 8 is a diagram showing an example of a piezoelectric ceramic element used in the one shown in FIG. 7. 11... Piezoelectric ceramic layer, 15... Insulating material layer (insulating layer), 12... Internal electrode, 13...
external electrode.
Claims (1)
料の層を交互に積み重ね、上記各セラミツクス層
と上記絶縁層の接する面に内部電極を形成し、上
記セラミツクス層と上記絶縁層の積層面に露出し
た内部電極のうち、互いに異なる内部電極を１つ
おきに接続した１対の外部電極を設けると共に、
上記複数の圧電セラミツクス層の分極方向を同一
にしたことを特徴とする積層型圧電セラミツク素
子。 ２ 上記複数の圧電セラミツクス層と上記複数の
絶縁層は互いに径の異なる中空円筒状であり、上
記セラミツクス層と上記絶縁層の積層端面に上記
内部電極が露出した特許請求の範囲１項記載の積
層型圧電セラミツク素子。 ３ 上記複数の圧電セラミツクス層と上記複数の
絶縁層は同一の薄いリング状であり、上記セラミ
ツクス層と上記絶縁層の積層側面に上記内部電極
が露出した特許請求の範囲１項記載の積層型圧電
セラミツク素子。[Scope of Claims] 1. A plurality of layers of piezoelectric ceramics and a plurality of layers of insulating material are stacked alternately, an internal electrode is formed on a surface where each of the ceramic layers and the insulating layer are in contact with each other, and the ceramic layer and the insulating layer are stacked alternately. Among the internal electrodes exposed on the laminated surface, a pair of external electrodes are provided in which alternate internal electrodes that are different from each other are connected, and
A laminated piezoelectric ceramic element characterized in that the plurality of piezoelectric ceramic layers have the same polarization direction. 2. The laminated layer according to claim 1, wherein the plurality of piezoelectric ceramic layers and the plurality of insulating layers have hollow cylindrical shapes with mutually different diameters, and the internal electrode is exposed at the end surface of the laminated layer of the ceramic layer and the insulating layer. type piezoelectric ceramic element. 3. The multilayer piezoelectric device according to claim 1, wherein the plurality of piezoelectric ceramic layers and the plurality of insulating layers have the same thin ring shape, and the internal electrode is exposed on the side surface of the laminated layer of the ceramic layer and the insulating layer. Ceramic element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60294863A JPS62153765A (en) | 1985-12-27 | 1985-12-27 | Laminated type piezoelectric ceramic element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60294863A JPS62153765A (en) | 1985-12-27 | 1985-12-27 | Laminated type piezoelectric ceramic element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153765A JPS62153765A (en) | 1987-07-08 |
| JPH0246907B2 true JPH0246907B2 (en) | 1990-10-17 |
Family
ID=17813228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60294863A Granted JPS62153765A (en) | 1985-12-27 | 1985-12-27 | Laminated type piezoelectric ceramic element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62153765A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2011001515A1 (en) * | 2009-06-30 | 2012-12-10 | 富士通株式会社 | Acceleration sensor, vibration power generation device, and method of manufacturing acceleration sensor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3189377B1 (en) | 2014-09-02 | 2018-05-16 | ASML Netherlands B.V. | Sensor, object positioning system, lithographic apparatus and device device manufacturing method |
| JP6476730B2 (en) * | 2014-10-21 | 2019-03-06 | セイコーエプソン株式会社 | Force detection device and robot |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53120478A (en) * | 1977-03-29 | 1978-10-20 | Kobayashi Rigaku Kenkiyuushiyo | Acceleration type oscillation pick up |
-
1985
- 1985-12-27 JP JP60294863A patent/JPS62153765A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2011001515A1 (en) * | 2009-06-30 | 2012-12-10 | 富士通株式会社 | Acceleration sensor, vibration power generation device, and method of manufacturing acceleration sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62153765A (en) | 1987-07-08 |
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