JPH0247044U

JPH0247044U -

Info

Publication number: JPH0247044U
Application number: JP12564288U
Authority: JP
Priority date: 1988-09-28
Filing date: 1988-09-28
Publication date: 1990-03-30

Description

[Brief explanation of the drawing]

第１図はこの考案に係る半導体ウエハ移換装置
を示す概略図、第２図は第１図のＡ―Ａ断面図、
第３図は第２図の一部拡大図、第４図〜第９図は
第１図〜第３図に示した半導体ウエハ移換装置の
動作説明図である。３ａ，３ｂ……キヤリア、５……半導体ウエハ
、８ａ，８ｂ……昇降部材、１０ａ，１０ｂ……
ラツク、１１ａ，１１ｂ……モータ、１２ａ，１
２ｂ……回転軸、１４ａ，１４ｂ……ピニオン、
１５ａ，１５ｂ……モータ、１６ａ，１６ｂ……
回転軸、１８ａ，１８ｂ……雄ネジ、１９ａ，１
９ｂ……雌ネジ部材、２０ａ，２０ｂ……挾持部
材、２２……ガイド部材、２３……移動部材、２
４……保持部材。 FIG. 1 is a schematic diagram showing a semiconductor wafer transfer device according to this invention, FIG. 2 is a sectional view taken along line AA in FIG.
FIG. 3 is a partially enlarged view of FIG. 2, and FIGS. 4 to 9 are explanatory views of the operation of the semiconductor wafer transfer apparatus shown in FIGS. 1 to 3. 3a, 3b...Carrier, 5...Semiconductor wafer, 8a, 8b...Elevating member, 10a, 10b...
Rack, 11a, 11b...Motor, 12a, 1
2b... Rotating shaft, 14a, 14b... Pinion,
15a, 15b...Motor, 16a, 16b...
Rotating shaft, 18a, 18b...male thread, 19a, 1
9b... Female screw member, 20a, 20b... Clamping member, 22... Guide member, 23... Moving member, 2
4...Holding member.

Claims

[Scope of utility model registration request]

In a wafer transfer device that transfers a plurality of wafers stored in a carrier one by one to another carrier, a wafer lifting means for lifting and lowering the wafer;
A wafer transfer device comprising wafer transfer means for holding and moving the wafer.