JPH0248838U - - Google Patents
Info
- Publication number
- JPH0248838U JPH0248838U JP12718588U JP12718588U JPH0248838U JP H0248838 U JPH0248838 U JP H0248838U JP 12718588 U JP12718588 U JP 12718588U JP 12718588 U JP12718588 U JP 12718588U JP H0248838 U JPH0248838 U JP H0248838U
- Authority
- JP
- Japan
- Prior art keywords
- metal
- detection part
- pressure detection
- stopper
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000005394 sealing glass Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本発明の一実施例の半導体圧力変換器
の圧力検出部縦断面図、第２図は第１図の圧力検
出部詳細縦断面図である。
１…金属栓体、２…シリコンダイヤフラム、３
…ガラス台、４…ガラスホルダー、５…封着ガラ
ス、６…圧力検出部固定金属、７…混成集積回路
、８…金線、９…カバー。
FIG. 1 is a longitudinal cross-sectional view of a pressure detecting section of a semiconductor pressure transducer according to an embodiment of the present invention, and FIG. 2 is a detailed longitudinal cross-sectional view of the pressure detecting section of FIG. 1. 1...Metal stopper, 2...Silicon diaphragm, 3
...Glass stand, 4...Glass holder, 5...Sealing glass, 6...Pressure detection part fixing metal, 7...Mixed integrated circuit, 8...Gold wire, 9...Cover.
Claims (1)
イヤフラムを固定し、更に、ガラスホルダーへ固
定した圧力検出部と、それを収納するための金属
栓体、及び圧力検出部固定金属を有する圧力変換
器において、前記金属栓体又は、圧力検出部固定
金属のどちらかを低溶点材料でめつきして、圧力
検出部固定金属を金属栓体へ圧入後、熱処理して
、めつきを溶かし、金属かん合部のすき間を埋め
て、気密を取る構造としたことを特徴とする半導
体圧力変換器。 A pressure transducer having a silicon diaphragm having a diffusion resistance fixed on a glass stand, a pressure detection part fixed to a glass holder, a metal stopper for housing the pressure detection part, and a metal fixing the pressure detection part. , either the metal stopper or the metal fixing the pressure detection part is plated with a low melting point material, the pressure detection part fixation metal is press-fitted into the metal stopper, heat treatment is performed to melt the plating, and the metal plate is heated. A semiconductor pressure transducer characterized by having an airtight structure by filling the gap between joints.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12718588U JPH0248838U (en) | 1988-09-30 | 1988-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12718588U JPH0248838U (en) | 1988-09-30 | 1988-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0248838U true JPH0248838U (en) | 1990-04-04 |
Family
ID=31379386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12718588U Pending JPH0248838U (en) | 1988-09-30 | 1988-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248838U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07294353A (en) * | 1994-04-28 | 1995-11-10 | Matsushita Electric Works Ltd | Pressure sensor |
-
1988
- 1988-09-30 JP JP12718588U patent/JPH0248838U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07294353A (en) * | 1994-04-28 | 1995-11-10 | Matsushita Electric Works Ltd | Pressure sensor |
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