JPH0249130U - - Google Patents
Info
- Publication number
- JPH0249130U JPH0249130U JP12905088U JP12905088U JPH0249130U JP H0249130 U JPH0249130 U JP H0249130U JP 12905088 U JP12905088 U JP 12905088U JP 12905088 U JP12905088 U JP 12905088U JP H0249130 U JPH0249130 U JP H0249130U
- Authority
- JP
- Japan
- Prior art keywords
- wetting device
- wafers
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Description
第１図はこの考案の一実施例を示す自動ウエツ
ト装置の正面図、第２図は従来のウエツト装置の
正面図である。
図において、１は外箱、２は水洗槽、３はテフ
ロンバスケツトＡ、４はプツシヤー、５はロボツ
ト、６はカセツトチヤツクＡ、７はカセツトチヤ
ツクＢ、８はテフロンバスケツトＢ、９はアーム
を示す。なお、図中、同一符号は同一、または相
当部分を示す。
FIG. 1 is a front view of an automatic wetting device showing an embodiment of this invention, and FIG. 2 is a front view of a conventional wetting device. In the figure, 1 is an outer box, 2 is a washing tank, 3 is a Teflon basket A, 4 is a pusher, 5 is a robot, 6 is a cassette chuck A, 7 is a cassette chuck B, 8 is a Teflon basket B, and 9 is an arm. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
ト装置よりウエハの入つたバスケツトを２個同時
に投入する事を特徴とする自動ウエツト装置。 An automatic wetting device is characterized in that two baskets containing wafers are simultaneously fed from a wetting device into a spin dryer for drying wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12905088U JPH0249130U (en) | 1988-09-29 | 1988-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12905088U JPH0249130U (en) | 1988-09-29 | 1988-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0249130U true JPH0249130U (en) | 1990-04-05 |
Family
ID=31382965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12905088U Pending JPH0249130U (en) | 1988-09-29 | 1988-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249130U (en) |
-
1988
- 1988-09-29 JP JP12905088U patent/JPH0249130U/ja active Pending
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