JPH0249672Y2 - - Google Patents

Description

[Detailed explanation of the idea]

This invention relates to an electric field device used as an ion source such as an ozonizer or a powder charging device. More specifically, the present invention relates to an electric field device for an ion source in which electric field forming electrodes are provided on the surface and inside of a substrate made of a dielectric material, and a high frequency high power source is connected therebetween. Conventionally, when the surface of the substrate of this type of electric field device for an ion source is made of fine ceramic dielectric material for its strength against discharge, it lacks smoothness due to its properties, is hygroscopic, and has a large surface roughness, making it susceptible to dirt. Once moisture is absorbed or dirt is attached, it is difficult to remove, and this moisture and dirt creates dielectric properties on the substrate surface. Creeping discharge no longer occurs, and the performance as an electric field device for an ion source deteriorates. The purpose of this invention is to create an electric field device for an ion source that does not allow moisture to easily permeate the surface of a planar substrate made of fine ceramic dielectric material in order to obtain strength against creeping discharge. It's about getting. This invention will be explained based on an embodiment shown in the drawings.A linear grounding electrode 3 is provided on the upper surface of a substrate 1 made of fine ceramic dielectric material to be connected to a terminal 3a, and a linear grounding electrode 3 is provided on the upper surface of the substrate 1. A coating layer 2 made of glaze or resin, which is smoother than the surface roughness of the electrode 3, is formed on the parts other than the electrode 3, and a planar induction electrode 5 is buried inside the substrate 1, and the linear ground electrode 3
A high-frequency, high-voltage power source 4 for forming an electric field is connected between the linear ground electrode 3 and the planar induction electrode 5, and the electric field forming power source 4 and the linear ground electrode 3 are A ground 6 is provided in between. In addition, in order to manufacture the electric field device for the ion source of the present invention, a binder such as a vinyl chloride/vinyl copolymer is added to a fine ceramic raw material such as alumina powder, and the mixture is kneaded and then heated and rolled into a sheet. A paste containing a conductive material is screen printed on the green sheet to form a planar induction electrode 5, and a ceramic green sheet made of the same material as the green sheet is placed on the applied surface and bonded under heat, and a line is formed on the upper surface. The shaped ground electrode 3 is screen printed and fired. When forming a smooth coating layer 2 made of glaze or synthetic resin Teflon, etc., apply glaze paste to the ceramic surface of the green sheet except for the electrode parts, dry it, and then apply it under a non-oxidizing atmosphere. Baking is performed at a temperature of 1000° to 1300°C, and then nickel plating is applied to the linear electrode portion 3 on the upper surface to complete the product. The glaze used in this case is, for example, borosilicate-based or calcia-alumina-silica-based. Examples of the composition of these glazes (numbers are weight ratios), expansion coefficients, and softening points are as follows. be.

[Table] When forming the synthetic resin coating layer, Teflon resin (registered trademark of DuPont, USA) is applied to the substrate 1 made of ceramic dielectric obtained by the above-mentioned green sheet manufacturing method, except for the ground electrode 3. ) and baked at a temperature of about 300 to 350°C, and then the ground electrode 3 on the upper surface is finished with nickel plating. In the present invention, a coating layer made of glaze or resin that is smoother than the roughness of the surface is formed on the surface of the substrate made of fine ceramic dielectric as described above, so that the surface is smooth and the surface roughness is low. becomes smaller, making it difficult for moisture to seep through. Furthermore, when Teflon is used as the synthetic resin coating layer, it becomes non-adhesive to almost no adhesion, is water repellent to liquids, has high heat resistance, mechanical abrasion resistance, chemical resistance, and is electrically resistant. It has many properties, including high insulation properties. In the present invention, the strength against creeping discharge of the substrate 1 is greater than that of the conventional one, and since moisture does not permeate into the surface layer, the linear ground electrode 3 formed inside and on the surface of the ceramic dielectric substrate, respectively. When a high frequency high voltage is applied between the planar induction electrodes 5, a high frequency corona discharge, that is, a creeping discharge is generated over the entire surface of the substrate on the linear ground electrode side, and is used as a powerful ion source. Can be done. Further, moisture and dirt on the surface do not cause conductivity between the two electrodes, which does not prevent the creeping discharge from occurring.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of the electric field device of the present invention, and FIG. 2 is a cross-sectional view along the line taken from FIG. 1 and a circuit diagram showing the state of use of the device of the present invention. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Covering layer, 3... Linear ground electrode, 3a... Terminal, 4... Power source for electric field formation, 5...
... Planar induction electrode, 6... Earth.

Claims (1)

[Claims for Utility Model Registration] 1. A plurality of linear electrodes are provided parallel to each other at intervals on the surface of a planar substrate formed of a dielectric material, and a planar induction electrode is provided inside the planar substrate. In the electric field device for an ion source buried parallel to the linear electrode, the planar substrate is formed of fine ceramic, and the linear electrode on the surface of the planar substrate formed of the fine ceramic is excluded. An electric field device for an ion source, characterized in that a coating layer made of glaze, synthetic resin, etc., which is smoother than the roughness of the surface, is formed in the creeping discharge generation area of the ion source. 2 Utility model registration claim 1, characterized in that the smooth coating layer is a glaze.
An electric field device for an ion source as described in . 3. The electric field device for an ion source according to claim 1, wherein the smooth coating layer is made of synthetic resin.