JPH0251261U - - Google Patents

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Publication number
JPH0251261U
JPH0251261U JP12896988U JP12896988U JPH0251261U JP H0251261 U JPH0251261 U JP H0251261U JP 12896988 U JP12896988 U JP 12896988U JP 12896988 U JP12896988 U JP 12896988U JP H0251261 U JPH0251261 U JP H0251261U
Authority
JP
Japan
Prior art keywords
gas
ejection hole
cvd
reaction
gas ejection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12896988U
Other languages
English (en)
Other versions
JPH0437901Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12896988U priority Critical patent/JPH0437901Y2/ja
Publication of JPH0251261U publication Critical patent/JPH0251261U/ja
Application granted granted Critical
Publication of JPH0437901Y2 publication Critical patent/JPH0437901Y2/ja
Expired legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案に係るＣＶＤ装置の一例を示す
縦断面図、第２図は本考案ガスノズルの一実施例
の構成を示す縦断面図、第３図は従来ガスノズル
の一例を示す縦断面図である。 ３……ガスノズル、５……反応室（ベルジヤ）
、６……内管、７……細管、８……外管、９……
第２のガス噴出孔、１０……ガス噴出孔。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) ＣＶＤ装置の反応室５内に反応ガスを供給
    するガスノズル３において、このガスノズル３を
    、上端密封型の内、外管６，８よりなる２重構造
    とし、内管６の周りに反応ガスを噴出するガス噴
    出孔１０を設け、このガス噴出孔１０の周りを取
    り囲む、外管８の部分に反応による固体生成物を
    生じないガスを噴出する第２のガス噴出孔９を設
    けてなるＣＶＤ用ガスノズル。 (2) 内管６の周りには先端開口をガス噴出孔１
    ０とする細管７を設けた実用新案登録請求の範囲
    第１項記載のＣＶＤ用ガスノズル。 (3) 第２のガス噴出孔９より噴出するガスはＨ
    ２    ，Ｎ２，Ｈｅ，Ａｒ，ＨＣ等のガスまたはこ
    れらの混合ガスである実用新案登録請求の範囲第
    １項、第２項のいずれかに記載のＣＶＤ用ガスノ
    ズル。
JP12896988U 1988-09-30 1988-09-30 Expired JPH0437901Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12896988U JPH0437901Y2 (ja) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12896988U JPH0437901Y2 (ja) 1988-09-30 1988-09-30

Publications (2)

Publication Number Publication Date
JPH0251261U true JPH0251261U (ja) 1990-04-10
JPH0437901Y2 JPH0437901Y2 (ja) 1992-09-04

Family

ID=31382803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12896988U Expired JPH0437901Y2 (ja) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0437901Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012253134A (ja) * 2011-06-01 2012-12-20 Hitachi Kokusai Electric Inc 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012253134A (ja) * 2011-06-01 2012-12-20 Hitachi Kokusai Electric Inc 基板処理装置

Also Published As

Publication number Publication date
JPH0437901Y2 (ja) 1992-09-04

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