JPH0252434U - - Google Patents
Info
- Publication number
- JPH0252434U JPH0252434U JP13114588U JP13114588U JPH0252434U JP H0252434 U JPH0252434 U JP H0252434U JP 13114588 U JP13114588 U JP 13114588U JP 13114588 U JP13114588 U JP 13114588U JP H0252434 U JPH0252434 U JP H0252434U
- Authority
- JP
- Japan
- Prior art keywords
- rod
- bodies
- grooves
- longitudinal direction
- diffusion furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の一実施例の石英ボートの斜視
図、第２図は第１図の溝部の拡大断面図、第３図
は第２図の溝にウエハーが装填された拡大断面図
、第４図は本考案の他の実施例の石英ボートの溝
の拡大断面図、第５図は第４図の溝にウエハーが
装填された拡大断面図、第６図は従来の石英ボー
トの溝の拡大断面図、第７図は第６図の溝にウエ
ハーが装填された拡大断面図である。
１……石英ボート、２，２ａ，１２……石英ボ
ートの溝、３……ウエハー。
FIG. 1 is a perspective view of a quartz boat according to an embodiment of the present invention, FIG. 2 is an enlarged sectional view of the groove shown in FIG. 1, and FIG. 3 is an enlarged sectional view of a wafer loaded into the groove shown in FIG. FIG. 4 is an enlarged cross-sectional view of a groove of a quartz boat according to another embodiment of the present invention, FIG. 5 is an enlarged cross-sectional view of a wafer loaded into the groove of FIG. 4, and FIG. 6 is a groove of a conventional quartz boat. FIG. 7 is an enlarged sectional view of the groove shown in FIG. 6 loaded with a wafer. 1... Quartz boat, 2, 2a, 12... Groove of quartz boat, 3... Wafer.
Claims (1)
、該棒状体のそれぞれにウエハー部が嵌合する第
１、第２の溝を設け、前記相対向する棒状体の対
となる溝にまたがるようにウエハーを挿入して保
持する拡散炉用ボートにおいて、棒状体の長手方
向に沿つた前記溝の断面形状が、溝の中心線に対
して棒状体の表面側に開いた非対称なテーパ部を
有することを特徴とする拡散炉用ボート。 First and second grooves into which the wafer portions are fitted are provided in each of the rod-like bodies so as to be orthogonal to the longitudinal direction of the opposing rod-like bodies, so as to straddle the pair of grooves of the opposing rod-like bodies. In a boat for a diffusion furnace in which wafers are inserted and held, the cross-sectional shape of the groove along the longitudinal direction of the rod-like body has an asymmetric tapered portion that opens toward the surface side of the rod-like body with respect to the center line of the groove. A diffusion furnace boat characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13114588U JPH0252434U (en) | 1988-10-05 | 1988-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13114588U JPH0252434U (en) | 1988-10-05 | 1988-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252434U true JPH0252434U (en) | 1990-04-16 |
Family
ID=31386939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13114588U Pending JPH0252434U (en) | 1988-10-05 | 1988-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252434U (en) |
-
1988
- 1988-10-05 JP JP13114588U patent/JPH0252434U/ja active Pending