JPH0254004B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a sealing structure formed by penetrating a ceramic member with a large number of metal rods, and a method for manufacturing the same.

[Technical background of the invention and its problems]

2. Description of the Related Art In a high-temperature pressure vessel, a sealing structure, for example, a conductive through-path structure, which communicates the inside and outside of the vessel, is used as shown in FIGS. 6 and 7. That is, two disc-shaped ceramic members 1 are fitted with a gap between them into a cylindrical metal cylinder body 3 made of metal such as stainless steel, and a metal rod 4 is fitted into these ceramic members 1. A large number of through holes 2 are formed side by side for passing through. Each through hole 2 of the ceramic member 1 is covered with a metal cap 5 made of a sealing alloy such as Kovar alloy, which has a through hole 5a through which the metal rod 4 is inserted. are joined. In order to bond the metal cap 5 to the ceramic member 1, a metallized film 8 consisting of a metal film 6 such as molybdenum and a plating film 7 such as nickel is formed around the through hole 2 on the surface of the ceramic member 1. The contact portion between the metal cap 5 and the metallized film 8 is bonded and fixed by brazing.
The metal rod 4 is inserted through the through hole 2 of each ceramic member 1 and the through hole 5a of the metal cap 5.
The contact portion between the metal cap 5 and the metal cap 5 is bonded and fixed by brazing. Metal rod 4 and metal cap 5
is made of Kovar alloy or the like. Note that a metal ring 9 made of Kovar alloy or the like is provided at the joint between the ceramic member 1 and the metal cylinder 3, and this metal ring 9 is bonded and fixed to the ceramic member 1 and the metal cylinder 3 by brazing. .

Then, this sealed structure is attached to, for example, a high temperature pressure vessel, and the metal rod 4 is used as a conductive path.

Next, when manufacturing the sealed structure, the ceramic member 1 is manufactured by the following method. A large number of through holes 2 are formed in the ceramic sintered body obtained by sintering by machining, and then a circular metal film 6 is formed around each through hole 2 on the surface of the ceramic sintered body by screen printing. After that, each metal film 6 is connected with a lead wire, and a plating film 7 is formed on each metal film 6 by electroplating to manufacture the ceramic member 1.

Note that the sealing structure is assembled using an assembly jig shown in FIG. Each ceramic member 1 is combined with a metal ring 9 and placed on a base 21A, and the upper ceramic member 1 is lifted and both ceramic members 1 are positioned using a split cylindrical spacer 22. A metal rod 4 is inserted into the through hole 2 of each ceramic member 1.
Insert. Place the brazing filler metal for the metal gap 5 and the metal ring 9 on the upper ceramic member 1,
A metal cap 5 and a positioning pipe 23 are attached to the metal rod 4 protruding from the ceramic member 1.
mate. The base 11B is placed on the ceramic member 1, and the positioning hole 21 formed in the base 21B is
The positioning pipe 23 fitted to the metal rod 4 is inserted into a to position the metal rod 4. Cover each ceramic member 1 with the outer cylinder 24 and place the jig stand 2 on the base 21B.
Put 5. Remove the base 21A, turn the entire assembly upside down, and repeat the same operation. After assembly is complete, brazing is performed in a brazing furnace.

However, such conventional sealing structures have the following problems. When using the sealed structure as a wire through-hole and passing current through the metal rods 4, it is necessary to ensure a sufficient insulation distance between each metallized film 8 in order to electrically insulate each metal rod 4. . However, since a large number of metal rods 4 are lined up and penetrated through the ceramic member 1, the intervals between the through holes 2 are small, and the intervals l between the metallized films 8 formed around the through holes 2 on the surface of the ceramic member 1 are small.
will also become very small. For this reason, each metallized film 8
The insulation distance between the two metallized films 8 can only be kept to a minimum level, and manufacturing errors may cause variations in the dimensions of the through holes 2 and the metallized films 8, resulting in a reduction in the distance between the metalized films 8. In this case, the minimum insulation distance between each metallized film 8 cannot be ensured, and each metal rod 4 cannot be electrically insulated. Note that as a countermeasure to this problem, reducing the diameter of the metallized film 8 may be considered, but in this case, the brazing between the metal cap 5 and the metallized film 8 will be insufficient, and the bonding strength between the two will be reduced.

Furthermore, in manufacturing the ceramic member 1, in order to form the metallized film 8, the metal film 6 and the plating film 7 are individually formed for each through hole 2, so the work of forming the metallized film is very troublesome.

[Purpose of the invention]

The present invention was made based on the above circumstances, and
It is an object of the present invention to provide a sealed structure that has excellent electrical insulation properties, is highly reliable, and can be easily manufactured, and a method for manufacturing the same.

[Summary of the invention]

The sealing structure of the present invention is characterized in that, on the surface of a ceramic member provided with a plurality of through holes, recesses are formed between each through hole except for the periphery of each through hole where a metallized film is formed. Due to the presence of this recess, a sufficient insulation distance can be secured between each metallized film.

In addition, the method for manufacturing a sealed structure according to the present invention involves forming a metallized film on the entire surface of a ceramic sintered body, and then forming through holes and recesses between the through holes in the ceramic sintered body, thereby eliminating unnecessary metallization. This method is characterized in that the ceramic member is manufactured by removing the film portion, and the metallized film can be easily formed.

[Embodiments of the invention]

An embodiment of the present invention illustrated in the drawings will be described below.

1 to 3 show an embodiment incorporating the sealing structure of the present invention, and the same parts as in FIG. 6 are given the same reference numerals. That is, 1 is a ceramic member, 2 is a through hole, 3 is a metal cylinder, 4 is a metal rod, 8 is a metallized film consisting of a metal film 6 and a plating film 7, and 9 is a metal ring.

A recess 10 is formed between the through holes 2 on the surface of the ceramic member 1 except for the peripheral edge 2 a of each through hole 2 forming the metallized film 8 . A metallized film 8 is formed on the surface of the peripheral edge 2 a of each through hole 2 so as to surround the opening of the through hole 2 . Note that the diameter of the peripheral edge 2a of the through hole 2 is equal to the diameter of the metallized film 8.
The size is such that the metal seat 11 and the metal seat 11 can be sufficiently brazed together. Therefore, the peripheral edges 2a of the through holes 2 on which the metallized film 8 is formed are adjacent to each other with the recess 10 interposed therebetween. Further, on the metallized film 8 at the peripheral edge 2a of each through hole 2, a disk-shaped metal seat 11 having a through hole 11a formed of an alloy such as Kovar alloy is arranged. The joint with the membrane 8 is fixed by brazing. The metal rod 4 is inserted through the through hole 11a of the metal seat 11 and the through hole 2 of the ceramic member 1, and the joint between the metal rod 4 and the metal seat 11 is fixed by brazing.

In such a structure, the ceramic member 1
The insulation distance between each metallized film 8 formed around each through hole 2 on the surface of
The size is the sum of the height of a (the depth of the recess 10) l'×2. Here, l is the same as the spacing l between each metallized film 8 in the prior art. Therefore, in the present invention, the insulation distance between each metallized film 8 is increased by 2×l' compared to the conventional method, and a sufficient insulation distance can be ensured between each metallized film 8. Even if the distance l is reduced due to variations in the dimensions of each metallized film 8 due to manufacturing errors, the necessary insulation distance can be secured due to the existence of l'×2.

Next, the case where the ceramic member 1 is manufactured by the manufacturing method of the present invention will be explained.

First, as shown in FIG. 4, a disk-shaped ceramic sintered body 1' is obtained by sintering. Next, a metal film 6 is formed on the entire surface of the ceramic sintered body 1' by screen printing, and a plating film 7 is formed on the entire surface of the metal film 6 to form a metallized film 8. After that, the ceramic sintered body 1' is made by ultrasonic processing.
The through holes 2 are formed in the holes 2, and the recesses 10 are formed between the through holes 2, leaving the peripheral edge 2a of each through hole 2. As a result, the portion of the metallized film 8 formed on the entire surface of the ceramic sintered body 1' facing the recess 10 is removed, leaving only the portion facing the peripheral edge 2a of each through hole 2.

By manufacturing the ceramic member 1 in this manner, the metallized film 8 can be formed more easily than in the case where the metallized film 8 is formed for each through hole 2. Further, the through hole 2 can be formed with high accuracy by ultrasonic processing.

Note that the sealing structure is assembled using a jig shown in FIG. In the figure, reference numeral 31 denotes a cylindrical support jig made of carbon, which is constructed by combining divided bodies 31A and 31B obtained by dividing a cylinder into two along the axial direction, and support grooves 31a and 31a are formed at both ends of the inner circumference. There is.
The ceramic member 1 is combined with the metal ring 9 and fitted into the support grooves 31a, 31a of the support jig 31 to position the ceramic member 1. An outer cylinder 32 made of carbon is fitted to the outside of the support jig 31. Place what has been assembled so far on the support stand 33 vertically. A metal rod 4 is inserted into each through hole 2 of each ceramic member 1. A brazing material for the metal seat 11 and the metal ring 9 is placed on the upper ceramic member 1, and the metal seat 11 and the holding pipe 34 are fitted into the portion of the metal rod 4 protruding from the ceramic member 1.
The jig stand 33 is removed from the bottom of the assembly and placed over the top of the assembly. Perform the same assembly process as above with the assembly upside down. After assembly is completed, the assembly is placed in a brazing furnace and brazed. Note that the outer cylinder 32 forms a slot 32a to escape shrinkage due to heat during brazing. After brazing, the outer cylinder 32 and the support jig 31 are removed.

This assembly work consists of the through hole 2 of the ceramic member 1.
The bases 11A and 1 used in conventional assembly work are formed with high precision by ultrasonic processing.
The metal rod 4 can be accurately positioned simply by inserting the metal rod 4 into the through hole 2 of the ceramic member 1 without using the metal rod 1B.

〔Effect of the invention〕

As explained above, according to the sealing structure of the present invention, a metallized film is formed on the surface of a ceramic member provided with a plurality of through holes, surrounding the opening of each through hole, and a metallized film of each through hole is formed. The insulation distance between the metallized films of each through hole can be reduced by bonding the metal seat and forming a recess between each through hole, leaving the periphery of each through hole with a metallized film formed on the surface of the ceramic member. By increasing the length of the metal rods, sufficient insulation can be ensured between the metal rods inserted into the through holes of the ceramic member. Further, by employing the metal seat, the metal seat can be firmly bonded to the metallized film of the ceramic member, and the metal bar can be firmly bonded to the metal seat, and as a result, the metal bar can be firmly bonded to the ceramic member. Further, by employing ultrasonic processing, ceramic members can be easily manufactured.

[Brief explanation of the drawing]

1 to 5 show an embodiment of the present invention. FIGS. 1 and 2 are longitudinal cross-sectional views and plan views showing a sealing structure, and FIG. 3 is a diagram showing a ceramic member and a metal rod. FIGS. 4a and 4b are explanatory diagrams showing the method of manufacturing the ceramic member, and FIGS. 5a and 5b are longitudinal sectional views and plan views showing the sealing structure when assembled. , FIGS. 6 to 8 show conventional examples, in which FIG. 6 is a longitudinal sectional view showing a sealing structure, and FIG. 7 is an enlarged sectional view showing a joint between a ceramic member and a metal rod. , FIG. 8 is a longitudinal cross-sectional view showing the sealing structure when assembled. 1...Ceramics member, 2...Through hole, 3...
Metal cylindrical body, 4...metal rod, 5...metal gap,
6...metal film, 7...plated film, 8...metalized film, 9...metal ring, 10...recess, 11...metal seat.

Claims (1)

[Scope of Claims] 1. A ceramic member having a plurality of through holes, and a metallized film formed surrounding the openings of each of the through holes of this ceramic member, and having through holes corresponding to the through holes of the ceramic member. The ceramic member and the metal seats are inserted into the through holes of each of the metal seats bonded to each through hole of the ceramic member and the metallized film formed surrounding the opening of each of these through holes. a plurality of metal rods joined to the ceramic member, and a recess is formed on the surface of the ceramic member between each of the through holes, leaving a peripheral edge of each of the through holes in which the metallized film is formed. A sealed structure characterized by: 2. Forming a metallized film on the entire surface of the ceramic sintered body, and then forming a plurality of through holes in the ceramic sintered body by ultrasonic processing,
By forming recesses on the surface of the ceramic sintered body by ultrasonic machining between the plurality of through-holes except for the peripheral edges of the plurality of through-holes, and removing the metallized film facing the recesses. 1. A method for manufacturing a sealed structure, comprising a step of manufacturing a ceramic member.