JPH0257965U - - Google Patents

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Publication number
JPH0257965U
JPH0257965U JP1988136871U JP13687188U JPH0257965U JP H0257965 U JPH0257965 U JP H0257965U JP 1988136871 U JP1988136871 U JP 1988136871U JP 13687188 U JP13687188 U JP 13687188U JP H0257965 U JPH0257965 U JP H0257965U
Authority
JP
Japan
Prior art keywords
tube
reaction tube
cooling
cooling pipe
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988136871U
Other languages
English (en)
Other versions
JPH0613263Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988136871U priority Critical patent/JPH0613263Y2/ja
Publication of JPH0257965U publication Critical patent/JPH0257965U/ja
Application granted granted Critical
Publication of JPH0613263Y2 publication Critical patent/JPH0613263Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第１図は本考案装置の一実施例を示す断面図、
第２図は本考案装置と従来装置において成長回数
に対する結晶欠陥密度の変化を示す特性図、第３
図は従来装置を示す断面図である。 １…反応管、２…ガス導入管、３…フランジ、
４…排気管、５…サセプタ、６…基板、７…ＲＦ
コイル、８…冷却管、９…マルチバイブレータ、
１０…圧電振動子、１１…反応物。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応管と、該反応管に連通するガス導入管及び
    ガス排気管と、前記反応管の内壁に沿つて配され
    た冷却管と、を備え、前記冷却管は前記反応管の
    長手方向に沿つてスライド可能であり、及び／又
    は前記冷却管にはこれを振動させる振動手段が接
    続されていることを特徴とするＭＯＣＶＤ装置。
JP1988136871U 1988-10-20 1988-10-20 Ｍｏｃｖｄ装置 Expired - Lifetime JPH0613263Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988136871U JPH0613263Y2 (ja) 1988-10-20 1988-10-20 Ｍｏｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988136871U JPH0613263Y2 (ja) 1988-10-20 1988-10-20 Ｍｏｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH0257965U true JPH0257965U (ja) 1990-04-26
JPH0613263Y2 JPH0613263Y2 (ja) 1994-04-06

Family

ID=31397785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988136871U Expired - Lifetime JPH0613263Y2 (ja) 1988-10-20 1988-10-20 Ｍｏｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0613263Y2 (ja)

Also Published As

Publication number Publication date
JPH0613263Y2 (ja) 1994-04-06

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