JPH0259412U - - Google Patents
Info
- Publication number
- JPH0259412U JPH0259412U JP13821088U JP13821088U JPH0259412U JP H0259412 U JPH0259412 U JP H0259412U JP 13821088 U JP13821088 U JP 13821088U JP 13821088 U JP13821088 U JP 13821088U JP H0259412 U JPH0259412 U JP H0259412U
- Authority
- JP
- Japan
- Prior art keywords
- laser plane
- adjustment mechanism
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案に係るレーザ平面干渉計の一実
施例を示す斜視図、第２図はＸ軸調整部の機構を
示す正面図、第３図は干渉計本体の内部構造の一
実施例を示す説明図、第４図乃至第６図は従来に
おけるレーザ平面干渉計の別異の例を示す図であ
る。
６……二軸調整機構、８……Ｘ軸調整部、１０
……Ｙ軸調整部。
Fig. 1 is a perspective view showing an embodiment of the laser plane interferometer according to the present invention, Fig. 2 is a front view showing the mechanism of the X-axis adjustment section, and Fig. 3 is an embodiment of the internal structure of the interferometer body. 4 to 6 are diagrams showing different examples of conventional laser plane interferometers. 6...Two-axis adjustment mechanism, 8...X-axis adjustment section, 10
...Y-axis adjustment section.
Claims (1)
構を備えてなるレーザ平面干渉計。 A laser plane interferometer equipped with an angle adjustment mechanism in two different axial directions relative to the sample surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13821088U JPH0259412U (en) | 1988-10-25 | 1988-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13821088U JPH0259412U (en) | 1988-10-25 | 1988-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0259412U true JPH0259412U (en) | 1990-05-01 |
Family
ID=31400337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13821088U Pending JPH0259412U (en) | 1988-10-25 | 1988-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0259412U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59225305A (en) * | 1983-06-06 | 1984-12-18 | Ricoh Co Ltd | Alignment device in interference measuring machine |
-
1988
- 1988-10-25 JP JP13821088U patent/JPH0259412U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59225305A (en) * | 1983-06-06 | 1984-12-18 | Ricoh Co Ltd | Alignment device in interference measuring machine |