JPH0260199A - Magnetic shielding device - Google Patents

Magnetic shielding device

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Publication number
JPH0260199A
JPH0260199A JP21205088A JP21205088A JPH0260199A JP H0260199 A JPH0260199 A JP H0260199A JP 21205088 A JP21205088 A JP 21205088A JP 21205088 A JP21205088 A JP 21205088A JP H0260199 A JPH0260199 A JP H0260199A
Authority
JP
Japan
Prior art keywords
magnetic shielding
superconducting
magnetic
superconductive
oxide superconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21205088A
Other languages
Japanese (ja)
Inventor
Shunichiro Tanaka
俊一郎 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21205088A priority Critical patent/JPH0260199A/en
Publication of JPH0260199A publication Critical patent/JPH0260199A/en
Pending legal-status Critical Current

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  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Abstract

PURPOSE:To realize a magnetic shielding effect of high efficiency by a method wherein a magnetic shielding wall is formed of the material which contains oxide superconductor whose critical temperature is higher than that of the material of a superconductive equipment and cooled at the same temperature as the superconductive equipment. CONSTITUTION:An oxide superconductor constituting a magnetic shielding wall 6, which is installed facing toward required directions to magnetically shield the upper, the peripheral, and the lower part of an ultra cooling agent reservoir, is formed of the material whose critical temperature is higher than that of the superconductive material used for the formation of a superconductive magnet 5 and cooled at the same temperature as the superconductive magnet 5 by means of liquid herium or liquid hydrogen. By this structure, the Meissner effect of the oxide super-conductor is made to increase, a magnetic shielding of high efficiency can be realized, and a magnetic shielding device of this design can be made comparatively small.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) この発明は、磁気シールド効果に優れた、例えば超電導
磁石のような超電導機器用の磁気シールド装置に関する
。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a magnetic shielding device for a superconducting device such as a superconducting magnet, which has an excellent magnetic shielding effect.

(従来の技術) 近年、MHI  (Magnetic Re5onan
ce Imaging:医療用核磁気共鳴診断装置)に
使用される磁場発生装置のように、高磁場を発生する装
置が様々な分野において使用され始めている。たとえば
、MRlにおいては1〜20kG程度の強力な磁場の形
成が必要とされる。また、シリコン単結晶などの引上法
による形成工程においても、単結晶の均一性をさらに高
めることなどを目的として原料の溶融るつぼの外周部に
磁場発生装置を設置し、磁場中で単結晶の引上げを行う
、いわゆるMCZ法などが行われており、このMCZ装
置においても強力な磁場の形成が必要とされている。
(Prior art) In recent years, MHI (Magnetic Re5onan)
BACKGROUND ART Devices that generate high magnetic fields, such as magnetic field generating devices used in medical nuclear magnetic resonance diagnostic imaging (CE Imaging), are beginning to be used in various fields. For example, MRl requires the formation of a strong magnetic field of about 1 to 20 kG. In addition, in the process of forming silicon single crystals using the pulling method, a magnetic field generator is installed around the outer periphery of the raw material melting crucible in order to further improve the uniformity of the single crystal. A so-called MCZ method is being used to perform pulling, and this MCZ device also requires the formation of a strong magnetic field.

このような要求に伴い、強力な磁場形成のために、磁場
発生装置として超電導磁石の利用が盛んになってきてい
る。このような超電導磁石に用いる超電導部材としては
、近年酸化物超¥A導体などの高臨界温度のものも発見
されているが、実際の装置として安定して用いることが
できるという点で、従来から知られている金属系や化合
物系の超電導部材がほとんどである。
In response to such demands, superconducting magnets are increasingly being used as magnetic field generators to generate strong magnetic fields. As superconducting materials used in such superconducting magnets, materials with high critical temperatures such as oxide super conductors have been discovered in recent years, but since they can be stably used in actual devices, Most of them are known metal-based or compound-based superconducting members.

この超電導磁石は高磁場の発生が可能である半面、外部
への漏洩磁場の遮蔽をより効率良く行うことが重要な課
題であった。
Although this superconducting magnet is capable of generating a high magnetic field, an important issue was how to more efficiently shield magnetic fields leaking to the outside.

しかし、従来の磁気シールド材としては、純鉄、ケイ素
鋼、パーマロイなどの高透磁率を有する素材によって形
成されているものが一般的であり、これら磁気シールド
材を超電導磁石の外周を囲うように配置した磁気シール
ド装置では、磁気遮蔽効果が充分に満足のいくものとは
言えず、漏洩磁場の許容限界を満足させるためには、か
なりの厚さを有する磁気シールド部材を用いなければな
らず、その設置場所や装置コストが高くなるという難点
を有していた。
However, conventional magnetic shielding materials are generally made of materials with high magnetic permeability such as pure iron, silicon steel, and permalloy. The installed magnetic shielding device cannot be said to have a fully satisfactory magnetic shielding effect, and in order to satisfy the permissible limit of leakage magnetic field, a magnetic shielding member with a considerable thickness must be used. This has the disadvantage that the installation location and equipment cost are high.

(発明が解決しようとする課題) 上述したように、従来の超電導磁石のような超電導機器
の漏洩磁場の遮蔽に用いられてきた磁気シールド装置は
、高透磁率を有する素材によってその外周を囲うだけの
ものであったため、充分な磁気シールド効果を得るため
には、かなりの厚さを白゛する磁気シールド部材を用い
なければならず、その設置場所や装置コストが高いとい
う難点をHしていた。
(Problems to be Solved by the Invention) As mentioned above, magnetic shielding devices that have been used to shield leakage magnetic fields from superconducting devices such as conventional superconducting magnets are simply made of a material with high magnetic permeability that surrounds the outer periphery. Therefore, in order to obtain a sufficient magnetic shielding effect, it was necessary to use a considerably thick magnetic shielding member, which had the disadvantage of requiring high installation space and equipment costs. .

この発明は、このような従来技術の課題に対処するため
になされたもので、高効率な磁気遮蔽効果を確実に、か
つ比較的小形な装置で得ることを可能にした磁気シール
ド装置を提供することを目的としている。
The present invention was made to address the problems of the prior art, and provides a magnetic shielding device that can reliably obtain a highly efficient magnetic shielding effect with a relatively small device. The purpose is to

[発明の構成] (課題を解決するための手段) すなわちこの発明は、沸点の異なる 2種類以上の冷媒
用液体によって冷却される超電導機器の外周側に磁気遮
蔽壁を配置し、この磁気遮蔽壁により漏洩磁場を遮蔽す
る磁気シールド装置において、前記磁気遮蔽壁を前記超
電導機器に用いられた超電導部材より高臨界温度を有す
る酸化物超電導体を少なくとも4.6−する部材により
形成するとともに、前記超電導機器と同一温度に冷却す
るよう構成したことを特徴としている。
[Structure of the Invention] (Means for Solving the Problems) In other words, the present invention provides a method for disposing a magnetic shielding wall on the outer circumferential side of a superconducting device cooled by two or more types of refrigerant liquids having different boiling points. In a magnetic shielding device for shielding a leakage magnetic field by a magnetic shielding device, the magnetic shielding wall is formed of a member made of an oxide superconductor having a critical temperature higher than that of the superconducting member used in the superconducting equipment by at least 4.6- It is characterized by being configured to cool to the same temperature as the equipment.

(作 用) 高臨界温度を有する酸化物超電導体としては、希土類元
素含有のペロブスカイト型、たとえばY−Ba−Cu−
0系の酸化物超電導体や、B1−8r−Ca−Cu−0
系、TI−Ca−Ba−Cu−0系の酸化物超電導体な
どが知られている。これら酸化物超電導体の臨界温度と
臨界磁場は以下に示す通りである。
(Function) As an oxide superconductor having a high critical temperature, perovskite type containing rare earth elements, such as Y-Ba-Cu-
0 series oxide superconductor, B1-8r-Ca-Cu-0
TI-Ca-Ba-Cu-0 based oxide superconductors are known. The critical temperature and critical magnetic field of these oxide superconductors are shown below.

YBa2Cua O7−δ: Tc−90KSHc+ 
 −150eBi  Sr  Da  Cu  O:T
c−80〜105K。
YBa2Cua O7-δ: Tc-90KSHc+
-150eBi Sr Da Cu O:T
c-80~105K.

223x llc+  = 1000e TI  Ha  Ca  Cu  O:Tc−1111
〜125K。
223x llc+ = 1000e TI Ha Ca Cu O: Tc-1111
~125K.

223X 11c1−1500e これら酸化物超電導体の臨界温度からすれば、液体窒素
による冷却でも充分に超電導特性を発揮することが可能
であるが、これら酸化物超電導体はたとえば液体ヘリウ
ムなどの超冷却媒体温度での冷却によって、さらにマイ
スナー効果による磁気遮蔽効果が大きくなる。そして、
たとえば従来から使用されているNb3 SnやNb−
Tlなどの超電導部祠を用いた超電導磁石のような超電
導機器では、これら超電導部材の冷却のために液体ヘリ
ウムや液体水素などの超冷却媒体を使用しており、かつ
これら超冷却媒体の蒸発や液化促進のために液体窒素な
どの冷媒用液体によってその外周が覆われている。そこ
で、液体ヘリウムや液体水素などの超冷却媒体によって
酸化物超電導体からなる磁気遮蔽壁が冷却されるように
構成することで、高効率の磁気遮蔽が実現できる。
223X 11c1-1500e Considering the critical temperature of these oxide superconductors, it is possible to sufficiently exhibit superconducting properties even when cooled with liquid nitrogen; Cooling at , further increases the magnetic shielding effect due to the Meissner effect. and,
For example, Nb3 Sn and Nb-
Superconducting devices such as superconducting magnets using superconducting parts such as Tl use supercooling media such as liquid helium and liquid hydrogen to cool these superconducting members, and the evaporation and Its outer periphery is covered with a refrigerant liquid such as liquid nitrogen to promote liquefaction. Therefore, highly efficient magnetic shielding can be achieved by configuring the magnetic shielding wall made of an oxide superconductor to be cooled by a supercooling medium such as liquid helium or liquid hydrogen.

(実施例) 次に、この発明の実施例について図面を参照して説明す
る。
(Example) Next, an example of the present invention will be described with reference to the drawings.

第1図は、この発明の磁気シールド装置を磁場中で単結
晶の引上げを行う、いわゆるMCZ法を利用した単結晶
製造装置に適用した一実施例の構成を模式的に示す図で
ある。
FIG. 1 is a diagram schematically showing the configuration of an embodiment in which the magnetic shielding device of the present invention is applied to a single crystal manufacturing apparatus using the so-called MCZ method, which pulls a single crystal in a magnetic field.

同図において、1は原料溶融用のるつぼであり、このる
つぼ1の外周にはこのるっぽ1を取囲むようにヒータ2
が設置されており、このヒータ2はカーボンなどからな
る断熱壁3によって覆われている。
In the figure, 1 is a crucible for melting raw materials, and a heater 2 is installed around the outer periphery of this crucible 1 so as to surround this crucible 1.
is installed, and this heater 2 is covered with a heat insulating wall 3 made of carbon or the like.

断熱壁3の外周側には、真空断熱等を利用した液体ヘリ
ウムや液体水素などの超冷却媒体用貯留槽4が配置され
ている。この超冷却媒体用貯留槽4内にはNJ Snや
Nb−Tiなどの超電導部材によって構成された超電導
磁石5が設置されており、また超冷却媒体用貯留te4
の上部、外周側および下部方向の内壁には酸化物超電導
体からなる磁気遮蔽壁6が、この超冷却媒体用貯留槽4
内に収容されている液体ヘリウムや液体水素などの超冷
却媒体に浸漬されるように設置されている。
On the outer peripheral side of the heat insulating wall 3, a storage tank 4 for a supercooling medium such as liquid helium or liquid hydrogen is arranged using vacuum insulation or the like. A superconducting magnet 5 made of a superconducting member such as NJ Sn or Nb-Ti is installed in this supercooling medium storage tank 4, and a supercooling medium storage tank te4 is installed.
Magnetic shielding walls 6 made of an oxide superconductor are provided on the inner walls of the upper, outer circumferential side, and lower part of the storage tank 4 for supercooling medium.
It is installed so that it is immersed in a supercooling medium such as liquid helium or liquid hydrogen contained within.

この磁気遮蔽壁6を構成する酸化物超電導体は、超7は
導磁石5に用いられた超電導部材より臨界温度の高いも
のが用いられる。このような酸化物超電導体としては、
たとえば 一般式:  YBa2Cua O7−δで表されるY系
を代表とする希土類元素含有のペロブスカイト架構゛造
を有するl、n−1)a−Cu−0系(Lni、tYS
La、 5cSNdSSII% P、u、 GtL D
Y% 110% Er、Tm5YbS1.u等の希土類
元素から選ばれた少なくとも 1種の元素を、δは酸素
欠陥を表し通常1以下の数、Baの一部は5rSeaな
どでなどで置換可能。)の酸化物超電導体や、 一般式:Bi25r2Ca2Cu30 。
The oxide superconductor constituting the magnetic shielding wall 6 is one having a higher critical temperature than the superconducting member used for the conductive magnet 5. As such an oxide superconductor,
For example, a-Cu-0 system (Lni, tYS
La, 5cSNdSSII% P, u, GtL D
Y% 110% Er, Tm5YbS1. At least one element selected from rare earth elements such as u, δ represents an oxygen defect and is usually a number of 1 or less, and a part of Ba can be replaced with 5rSea or the like. ) and oxide superconductors with the general formula: Bi25r2Ca2Cu30.

で表されるl1a−8r−Ca−Cu−0系の酸化物超
電導体、一般式;T12Ba2Ca2Cu30xで表さ
れるT l−Ba−Ca−Cu−0系の酸化物超電導体
などが例示される。
Examples include an 11a-8r-Ca-Cu-0-based oxide superconductor represented by the general formula T12Ba2Ca2Cu30x, and a T1-Ba-Ca-Cu-0-based oxide superconductor represented by the general formula: T12Ba2Ca2Cu30x.

この酸化物超電導体からなる磁気遮蔽壁6の存在形態と
しては、所望の磁気シールド効果を発揮しうる体積を有
していれば、焼結体、厚膜、シート、粉体を適当な容器
内に充填したものなど、どのようなものでもよい。
The magnetic shielding wall 6 made of this oxide superconductor can be placed in a sintered body, thick film, sheet, or powder in a suitable container as long as it has a volume that can exhibit the desired magnetic shielding effect. It may be of any kind, such as one filled with water.

超冷却媒体用貯留槽4の外周側には、この超冷却媒体用
貯留槽4内に収容された液体ヘリウムや液体水素などを
冷却するように、液体窒素などの冷媒用液体が収容され
た冷却容器7か設置されている。
On the outer periphery side of the supercooling medium storage tank 4, there is a cooling tank containing a refrigerant liquid such as liquid nitrogen so as to cool liquid helium, liquid hydrogen, etc. contained in the supercooling medium storage tank 4. There are 7 containers installed.

そして、るりは1内にたとえばSlやGaAsなとの原
料を投入し、ヒータ2によって融点以上に加熱するとと
もに超電導磁石5によって磁場を印加しつつ原料融液8
を作製し、るつぼ1上方に昇降自在に配置された結晶引
上げ軸9の先端に取付けられた種結晶9を原料融液に接
触させ、結晶引上げ軸9を回転させながら引上げること
によって単結晶が得られるように構成されている。
Then, a raw material such as Sl or GaAs is put into Ruri 1, heated to above its melting point by a heater 2, and a magnetic field is applied by a superconducting magnet 5 to melt the raw material 8.
A single crystal is produced by making a seed crystal 9 attached to the tip of a crystal pulling shaft 9 disposed above the crucible 1 so as to be able to rise and fall freely, and bringing it into contact with the raw material melt, and pulling it while rotating the crystal pulling shaft 9. It is configured so that it can be obtained.

上記構成の磁気シールド装置を設置した単結晶製造装置
において、超電導磁石5として2丁の超電導磁石を用い
、単結晶製造装置の外壁から 1001の所で漏洩磁場
を測定したところ、上記した液体ヘリウムによって酸化
物超電導体からなる磁気遮蔽壁6の冷却を行ったこの実
施例の磁気シールド装置を用いたものでは12000 
cてあった。
In a single crystal manufacturing apparatus equipped with a magnetic shielding device having the above configuration, two superconducting magnets were used as the superconducting magnets 5, and the leakage magnetic field was measured at a point 1001 from the outer wall of the single crystal manufacturing apparatus. 12,000 using the magnetic shielding device of this embodiment in which the magnetic shielding wall 6 made of oxide superconductor was cooled.
There was c.

また、この発明との比較のため、超電導体による磁気シ
ールドを行わない構成のものと酸化物超電導体からなる
磁気遮蔽壁を液体窒素によって冷却を行う構成のMCZ
法による単結晶製造装置において、上記実施例と同一条
件で漏洩磁場の測定を行ったところ、超電導部材による
磁気遮蔽を行わないものでは14000 eて、゛液体
窒素によって冷却したものでは13900 eであった
。
In addition, for comparison with this invention, we have prepared two MCZs: one without magnetic shielding using a superconductor, and one with a magnetic shielding wall made of an oxide superconductor cooled with liquid nitrogen.
When the leakage magnetic field was measured under the same conditions as in the above example in a single crystal manufacturing apparatus using the method, it was 14,000 e for the one without magnetic shielding by a superconducting member, and 13,900 e for the one cooled by liquid nitrogen. Ta.

このように、この実施例の磁気シールド装置においては
、超電導磁石の冷却に従来から用いられてきだ液体ヘリ
ウムや液体水素などの超冷却媒体用貯留槽内に、磁気シ
ールドを必要とする方向のみに酸化物超電導体からなる
磁気遮蔽壁を設置するだけで、酸化物超電導体のマイス
ナー効果が液体窒素温度よりも液体ヘリウム温度のよう
な極低温の方が高いことを利用して、高効率な磁気シー
ルドが実現できる。
As described above, in the magnetic shielding device of this embodiment, the storage tank for supercooling medium such as liquid helium or liquid hydrogen, which has been conventionally used to cool superconducting magnets, is used only in the direction where magnetic shielding is required. By simply installing a magnetic shielding wall made of oxide superconductors, highly efficient magnetic Shielding can be achieved.

また、従来から超電導磁石の冷却に用いられてきた液体
ヘリウムや液体水素などの超冷却媒体用貯留槽を利用し
、これに酸化物超電導体からなる磁気遮蔽壁を付加する
だけで上述したように高効率の磁気シールドが実現でき
るため、磁気シールド装置自体は大幅に小形化されたも
のとなる。
In addition, by simply adding a magnetic shielding wall made of oxide superconductor to a storage tank for supercooling medium such as liquid helium or liquid hydrogen, which has traditionally been used to cool superconducting magnets, the above-mentioned method can be achieved. Since highly efficient magnetic shielding can be achieved, the magnetic shielding device itself can be significantly downsized.

なお、上記実施例では、MCZ法を利用した単結晶製造
装置にこの発明の磁気シールド装置を適用した例につい
て説明したが、この発明はこれに限定されるものではな
くMRIなど、各種超電導磁石を用いた装置に適用可能
である。
In the above embodiment, an example was explained in which the magnetic shielding device of the present invention was applied to a single crystal manufacturing apparatus using the MCZ method, but the present invention is not limited to this and can be applied to various types of superconducting magnets such as MRI. Applicable to the equipment used.

[発明の効果] 以上説明したようにこの発明の磁気シールド装置によれ
ば、各種超電導機器の冷却装置を利用して小形で高効率
の磁気シールドが実現できる。
[Effects of the Invention] As explained above, according to the magnetic shielding device of the present invention, a compact and highly efficient magnetic shielding can be realized using cooling devices for various superconducting equipment.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例の磁気シールド装置を適用
したMCZ法を利用した単結晶製造装置の構成を模式的
に示す断面図である。 4・・・・・・・・・超冷却媒体用貯留槽5・・・・・
・・・・超電導磁石 6・・・・・・・・・酸化物超電導体からなる磁気遮蔽
壁7・・・・・・・・・冷却容器 出願人      株式会社 東芝
FIG. 1 is a cross-sectional view schematically showing the configuration of a single crystal manufacturing apparatus using the MCZ method to which a magnetic shielding device according to an embodiment of the present invention is applied. 4...Super cooling medium storage tank 5...
......Superconducting magnet 6......Magnetic shielding wall made of oxide superconductor 7...Cooling container Applicant: Toshiba Corporation

Claims (1)

【特許請求の範囲】[Claims] (1)沸点の異なる2種類以上の冷媒用液体によって冷
却される超電導機器の外周側に磁気遮蔽壁を配置し、こ
の磁気遮蔽壁により漏洩磁場を遮蔽する磁気シールド装
置において、 前記磁気遮蔽壁を前記超電導機器に用いられた超電導部
材より高臨界温度を有する酸化物超電導体を少なくとも
含有する部材により形成するとともに、前記超電導機器
と同一温度に冷却するよう構成したことを特徴とする磁
気シールド装置。
(1) In a magnetic shielding device in which a magnetic shielding wall is arranged on the outer circumferential side of a superconducting device cooled by two or more types of refrigerant liquids having different boiling points, and the magnetic shielding wall shields leakage magnetic fields, the magnetic shielding wall is A magnetic shielding device characterized in that it is formed of a member containing at least an oxide superconductor having a higher critical temperature than the superconducting member used in the superconducting device, and is configured to be cooled to the same temperature as the superconducting device.
JP21205088A 1988-08-26 1988-08-26 Magnetic shielding device Pending JPH0260199A (en)

Priority Applications (1)

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JP21205088A JPH0260199A (en) 1988-08-26 1988-08-26 Magnetic shielding device

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Application Number Priority Date Filing Date Title
JP21205088A JPH0260199A (en) 1988-08-26 1988-08-26 Magnetic shielding device

Publications (1)

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JPH0260199A true JPH0260199A (en) 1990-02-28

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JP21205088A Pending JPH0260199A (en) 1988-08-26 1988-08-26 Magnetic shielding device

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021046342A (en) * 2019-09-19 2021-03-25 信越半導体株式会社 Apparatus and method for pulling single crystal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021046342A (en) * 2019-09-19 2021-03-25 信越半導体株式会社 Apparatus and method for pulling single crystal

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