JPH0260247U - - Google Patents
Info
- Publication number
- JPH0260247U JPH0260247U JP14042388U JP14042388U JPH0260247U JP H0260247 U JPH0260247 U JP H0260247U JP 14042388 U JP14042388 U JP 14042388U JP 14042388 U JP14042388 U JP 14042388U JP H0260247 U JPH0260247 U JP H0260247U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- suction surface
- vacuum tweezers
- zirconia
- opens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図ａは本考案実施例に係る真空ピンセツト
を示す平面図、第１図ｂは同図ａ中の―線断
面図である。第２図は第１図ａ中のＹ―Ｙ線断面
に相当する他の実施例を示す断面図である。第３
図ａは従来の真空ピンセツトとラツクに収納した
ウエハの位置関係を示す側面図、第３図ｂは従来
の真空ピンセツトを示す斜視図である。
Ｐ……真空ピンセツト、１，２……板状体、１
ａ……吸着面、３……吸引孔。
FIG. 1a is a plan view showing a vacuum tweezers according to an embodiment of the present invention, and FIG. 1b is a sectional view taken along the line -- in FIG. 1a. FIG. 2 is a sectional view showing another embodiment corresponding to the section taken along the line Y--Y in FIG. 1a. Third
FIG. 3A is a side view showing the positional relationship between a conventional vacuum tweezers and wafers stored in a rack, and FIG. 3B is a perspective view showing the conventional vacuum tweezers. P... Vacuum tweezers, 1, 2... Plate-shaped body, 1
a... Suction surface, 3... Suction hole.
Claims (1)
し、該吸着面に開口し、かつ後端にて吸入口とな
る吸引孔を内設するとともに、少なくとも前記吸
着面を含む平面をジルコニアを主成分とするセラ
ミツクスにより形成したことを特徴とする真空ピ
ンセツト。 A suction surface with a smooth surface is formed on the tip side of the plate-like body, and a suction hole that opens on the suction surface and serves as a suction port is provided at the rear end, and at least the plane including the suction surface is made of zirconia. Vacuum tweezers characterized by being made of ceramics whose main component is
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140423U JPH0731545Y2 (en) | 1988-10-27 | 1988-10-27 | Vacuum tweezers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140423U JPH0731545Y2 (en) | 1988-10-27 | 1988-10-27 | Vacuum tweezers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260247U true JPH0260247U (en) | 1990-05-02 |
| JPH0731545Y2 JPH0731545Y2 (en) | 1995-07-19 |
Family
ID=31404578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988140423U Expired - Lifetime JPH0731545Y2 (en) | 1988-10-27 | 1988-10-27 | Vacuum tweezers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731545Y2 (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107896A (en) * | 1980-01-23 | 1981-08-27 | Hitachi Ltd | Suction type vacuum tweezer |
| JPS60109859U (en) * | 1983-12-28 | 1985-07-25 | 株式会社 デイスコ | Semiconductor wafer surface grinding equipment |
| JPS62287638A (en) * | 1986-06-06 | 1987-12-14 | Hitachi Ltd | wafer holder |
| JPS6385046A (en) * | 1986-09-29 | 1988-04-15 | 日産自動車株式会社 | Manufacture of zirconia base sintered body |
-
1988
- 1988-10-27 JP JP1988140423U patent/JPH0731545Y2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107896A (en) * | 1980-01-23 | 1981-08-27 | Hitachi Ltd | Suction type vacuum tweezer |
| JPS60109859U (en) * | 1983-12-28 | 1985-07-25 | 株式会社 デイスコ | Semiconductor wafer surface grinding equipment |
| JPS62287638A (en) * | 1986-06-06 | 1987-12-14 | Hitachi Ltd | wafer holder |
| JPS6385046A (en) * | 1986-09-29 | 1988-04-15 | 日産自動車株式会社 | Manufacture of zirconia base sintered body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0731545Y2 (en) | 1995-07-19 |