JPH0263443A - Manufacturing method of ultrasonic probe - Google Patents
Manufacturing method of ultrasonic probeInfo
- Publication number
- JPH0263443A JPH0263443A JP1151495A JP15149589A JPH0263443A JP H0263443 A JPH0263443 A JP H0263443A JP 1151495 A JP1151495 A JP 1151495A JP 15149589 A JP15149589 A JP 15149589A JP H0263443 A JPH0263443 A JP H0263443A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- vibrator plate
- electrode
- ultrasonic probe
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は３次元的な情報を実時間で得るだめの圧電振動
子を２次元に配列した超音波探触子の製造方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing an ultrasonic probe in which piezoelectric vibrators are two-dimensionally arranged to obtain three-dimensional information in real time.
一般に、直線電子走査型超音波装置に用いられる超音波
探触子は、直線状に複数個に圧電振動子を配列したもの
で、直線電子走査することにより実時間で２次元の平面
画像が得られるものである。Generally, an ultrasound probe used in a linear electronic scanning ultrasound device has a plurality of piezoelectric transducers arranged in a straight line, and a two-dimensional planar image can be obtained in real time by linear electronic scanning. It is something that can be done.
更に、実時間で立体像すなわち三次元画像を得るために
は、超音波振動子を２次元に配列した超音波探触子を利
用することは既に知られている。Furthermore, it is already known to use an ultrasound probe in which ultrasound transducers are arranged two-dimensionally in order to obtain a three-dimensional image, that is, a three-dimensional image in real time.
従来の２次元配列型の超音波探触子としては、第１図、
第２図ａ、ｂに示すものが知られている。Conventional two-dimensional array type ultrasound probes are as shown in Figure 1.
The devices shown in FIGS. 2a and 2b are known.
第１図においては、圧電振動子板１の両面に相互に交叉
するように複数列の電極２ａ、２ｂ、・・・・・２ｎ、
３ａ、３ｂ、・・・・・・３ｎを対向して設けである。In FIG. 1, a plurality of rows of electrodes 2a, 2b, .
3a, 3b, . . . 3n are provided facing each other.
このような構造を有する超音波探触子は、圧電振動子板
１の両面に交叉する複数列の電極２ａ。The ultrasonic probe having such a structure has multiple rows of electrodes 2a that intersect on both sides of the piezoelectric transducer plate 1.
２ｂ、・・・・・・２ｎ、３ａ、３ｂ、・・・・・・３
ｎから、例えば電極２ａと電＋ｌｊ！、３ａを選択して
電圧印加することにより、電極２ａと電極３ａが交叉す
る圧電振動子板１の一部が付勢され、超音波ビームを放
射し、同様に反射波の受信ができるものであり、構造が
比較的簡単で製造が容易である。しかしながら、このよ
うな構造では、圧電振動子板１を切断分割しないで、電
極２ａ 、 ２ｂ 、・・・・・・２ｎ。2b,...2n, 3a, 3b,...3
From n, for example, electrode 2a and electric +lj! , 3a and apply a voltage, the part of the piezoelectric vibrator plate 1 where the electrodes 2a and 3a intersect is energized, which emits an ultrasonic beam and can similarly receive reflected waves. It has a relatively simple structure and is easy to manufacture. However, in such a structure, the piezoelectric vibrator plate 1 is not cut and divided into electrodes 2a, 2b, . . . 2n.
３ａ、３ｂ、・・・・・・３ｎのみの分割駆動であるた
めに、音響的なりロストークが著しく大きくなり、圧電
振動子板の所望域からの超音波ビームの送受信がむずか
しく、分解能が極度に低下した画像しか得られないとい
う欠点を有している。Since only 3a, 3b, ... 3n are driven separately, the acoustic loss talk becomes extremely large, it is difficult to transmit and receive the ultrasonic beam from the desired area of the piezoelectric vibrator plate, and the resolution becomes extremely low. This method has the disadvantage that only degraded images can be obtained.
一方、第２図ａ、ｂにその製造方法を示すものは、第２
図ａに示すＩ！！８線パターン４を形成した基板５（基
板５側が超音波放射面であるため、通常は基板５の厚み
を４分の１波長にする。）上に、第２図すに示すような
圧′ｂ振振子子板の両面に電極２，３ａ、３ｂ、・・・
・・・３ｎを設け、片面の電極３ａ ３ｂ、・・・・
・・３ｎ及び一部の圧電振動子板１を分割してなるもの
を、第２図ａに示すように、分割した側の圧電振動子板
１の電極３ａ、３ｂ。On the other hand, the manufacturing method shown in FIGS. 2a and 2b is
I! shown in figure a! ! On the substrate 5 on which the 8-line pattern 4 is formed (the substrate 5 side is the ultrasonic radiation surface, the thickness of the substrate 5 is usually made to be one quarter wavelength), a pressure as shown in Fig. 2 is applied. b Electrodes 2, 3a, 3b,... on both sides of the pendulum plate
...3n are provided, and electrodes 3a, 3b, ... on one side are provided.
. . 3n and a part of the piezoelectric vibrator plate 1 are divided into electrodes 3a and 3b of the piezoelectric vibrator plate 1 on the divided side, as shown in FIG. 2a.
・・・・・・３ｎが配線パターン４に合せて電気的接続
されるように固着し、次にバッキング材６を電極２上に
接着して２次元配列超音波探触子を完成させるものであ
る。しかしながら、このような構造を有する超音波探触
子においても、第１図に示したものと同様に、圧電振動
子板１が完全に切断分割されていないために、著しい音
響的クロストークが発生し、分解能の向上が望めない。3n is fixed in accordance with the wiring pattern 4 so as to be electrically connected, and then the backing material 6 is adhered onto the electrode 2 to complete a two-dimensional array ultrasonic probe. be. However, even in an ultrasonic probe having such a structure, significant acoustic crosstalk occurs because the piezoelectric vibrator plate 1 is not completely cut and divided, similar to the one shown in FIG. However, no improvement in resolution can be expected.
また、接地電極２が超音波放射面になっていないため、
外来誘導ノイズの影響を受けやすく、画像に悪影響を及
ぼすというような欠点を有している。In addition, since the ground electrode 2 is not an ultrasonic radiation surface,
It has the disadvantage that it is susceptible to externally induced noise, which adversely affects images.
本発明は以上のような欠点に濫みなされたものであり、
圧電振動子板の片面にあらかじめマトリックス状の溝を
設け、溝の部分に導′覗材料あるいは電気絶縁材料等の
充填物を充填し、この圧電振動子板上及び充填物上に共
通電極を形成し、更にその上に一層以上の音響整合層材
料を付着し、共通電極側の充填物を一部残した状！用で
マトリックス状の溝に沿って圧電振動子板を完全に分割
することにより、マトリックス状に分割した内側に位置
する各圧電振動子からの共通電極の電気端子の取り出し
が容易で、音響的クロストークが少なく外来誘導ノイズ
の影響を受けない超音波探触子の製造方法を提供するこ
とを目的とするものである。The present invention suffers from the above drawbacks,
A matrix-like groove is prepared in advance on one side of the piezoelectric vibrator plate, the groove is filled with a filler such as a conductive material or an electrically insulating material, and a common electrode is formed on the piezoelectric vibrator plate and the filler. Then, on top of that, one or more layers of acoustic matching layer material are attached, leaving some of the filling on the common electrode side! By completely dividing the piezoelectric vibrator plate along the matrix-shaped grooves, it is easy to take out the electrical terminal of the common electrode from each piezoelectric vibrator located inside the matrix-shaped division, and the acoustic cross The object of the present invention is to provide a method for manufacturing an ultrasonic probe that generates little talk and is not affected by externally induced noise.
以下図面をもとに本発明の実施例について説明する。Embodiments of the present invention will be described below based on the drawings.
第３図ａｙｄは、本発明の一実施例を示す製造工程図で
ある。まず第３図ａに示すごとく圧電振動子板１の片面
に真空蒸着あるいは銀の焼付は等の方法により′１ｆ極
２を形成し、電極２と対向する面に圧電振動子板１の厚
さの例えば３分の１〜４分の１程の深さにマトリックス
状の溝７ａ、７ｂ。FIG. 3 ayd is a manufacturing process diagram showing one embodiment of the present invention. First, as shown in FIG. 3a, a '1f pole 2 is formed on one side of the piezoelectric vibrator plate 1 by vacuum deposition or silver baking, and the thickness of the piezoelectric vibrator plate 1 is formed on the surface facing the electrode 2. The grooves 7a, 7b are arranged in a matrix at a depth of, for example, one-third to one-fourth of the depth.
・・・・７ｎ、８ａ、８ｂ・・・・・・８ｎをカッター
等で設ける。次にｆｇ ７ ａ 、 ７ｂ 、−・・・
・７ｎ 、 ８ ａ 、 ｓｂ 。...7n, 8a, 8b...8n are provided with a cutter or the like. Next, fg 7 a , 7 b , --...
・7n, 8a, sb.
・・・・８ｎの部分に充填物９として導電材料例えば導
電性接着剤、または電気絶縁材料例えばエポキシ樹脂等
を充填する。しかるのち、第３図すに示すように、圧電
振動子板１の溝７ａ 、 ７ｂ 、・・・・・７ｎ、８
ａ 、ｓｂ、・・・・・・８ｎに充填物９を設けた面上
及び圧電振動子板１の面上に真空蒸着などによって電極
３（電極３が接地電極となシ超音波放射面になる。）を
形成し、更に、電極３上に一層以上の音響整合層材料１
０ａ、１０ｂを接着する。. . . The portion 8n is filled with a conductive material such as a conductive adhesive or an electrically insulating material such as an epoxy resin as a filler 9. Thereafter, as shown in FIG. 3, grooves 7a, 7b, 7n, 8 of piezoelectric vibrator plate 1 are
A, sb,...8n are provided with the filling material 9 on the surface thereof, and on the surface of the piezoelectric vibrator plate 1, an electrode 3 (electrode 3 is used as a ground electrode) is applied to the ultrasonic emission surface by vacuum deposition or the like. ), and furthermore, one or more acoustic matching layer material 1 is formed on the electrode 3.
Glue 0a and 10b.
即ち、充填物９は、分離された圧電振動子板１に設ける
接地電極を電気的に共通するために橋渡し的な役目を果
たすものであり、この充填物９がなければ、分シされた
圧電振動子板１から共ｊに電極を取り出すことが困難と
なる。音響整合層としては、例えば、医用超音波診断装
置用の超音波探触子の場合においては、このように２ｍ
の音響′整合層を設ける構造が好ましく、第１の整合層
１０ａとして、溶融石英ガラス等の材料、第２の整合層
１０ｂとしてエポキシ・財脂等の材料が使用できる。That is, the filler 9 plays a bridging role in order to electrically share the ground electrodes provided on the separated piezoelectric vibrator plates 1, and without this filler 9, the separated piezoelectric vibrator plates 1 This makes it difficult to take out the electrodes from the vibrator plate 1 at the same time. For example, in the case of an ultrasound probe for a medical ultrasound diagnostic device, the acoustic matching layer has a thickness of 2 m.
A structure in which an acoustic matching layer is provided is preferable, and a material such as fused silica glass can be used as the first matching layer 10a, and a material such as epoxy or resin can be used as the second matching layer 10b.
次に第３図Ｃに示すように、マトリックス状の溝７ａ
、 ７ｂ 、＝−−−−７ｒｘ 、 ８ａ 、 ｓｂ
、−−−−−−８ｒｘに沿って、音響整合層材料１０ａ
、１０ｂの付着していない而から圧′成振動子板１をカ
ッター等で切断し欠除部１１ａ、１１ｂ、・＝−１１ｎ
、１２ａ。Next, as shown in FIG. 3C, a matrix-shaped groove 7a is formed.
, 7b, =---7rx, 8a, sb
, ------8rx, acoustic matching layer material 10a
, 10b are not attached, so cut the pressure-forming transducer plate 1 with a cutter or the like to make the missing parts 11a, 11b, . . . = -11n.
, 12a.
１２ｂ、・・・・・・１２ｎを形成する。切ｉ！ｆｒす
る深さは、充填物９の厚さＡまでとする。（Ａの寸法と
しては例えば約０．１聰が適している。）その結果、圧
電振動子板１の接地電標３が形成された状態で、圧電振
動子板１を完全にマトリックス状に切断分割することが
できる。その後、第３図ｄに示すように、各々の圧電振
動子の電極２の部分と、基板１４例えばバッキング材に
使われているフェライトゴムに予め形成しである配線パ
ターン４とを、半田付けなどの接合材１３により接続し
て電気端子を外部に取り出す。その後、このようにして
得られた２次元に配列する超音波振動子部を適当なケー
スに入れ（図示せず）、本体装置と接続するケーブルを
取り付けて、超音波探触子を完成させるものである。な
お、電極２の形成は第３図すに示す電極３を形成する工
程で同時に形成しても良い。12b, . . . 12n are formed. Cut it! The depth of fringing is up to the thickness A of the filling 9. (For example, approximately 0.1 thick is suitable as the dimension of A.) As a result, the piezoelectric vibrator plate 1 is completely cut into a matrix shape with the grounding electrode 3 of the piezoelectric vibrator plate 1 formed. Can be divided. Thereafter, as shown in FIG. 3d, the electrode 2 portion of each piezoelectric vibrator and the wiring pattern 4, which is preformed on the substrate 14, for example, ferrite rubber used as a backing material, are connected by soldering, etc. The electrical terminals are connected by the bonding material 13 and taken out to the outside. After that, the two-dimensionally arranged ultrasonic transducer section obtained in this way is placed in a suitable case (not shown), and a cable connecting to the main device is attached to complete the ultrasonic probe. It is. Note that the electrode 2 may be formed at the same time as the step of forming the electrode 3 shown in FIG.
また、充填物９として導電接着剤を用いると、充填物９
と共通電極を兼ねさせることができる。即ち、充填物９
と電極３を導電接着剤で同時に構成することができるこ
とになるので電極３を真空蒸着などによる被着工程を省
くことができる。Furthermore, when a conductive adhesive is used as the filler 9, the filler 9
It can also serve as a common electrode. That is, the filling 9
Since the electrode 3 and the conductive adhesive can be formed at the same time, a step of applying the electrode 3 by vacuum deposition or the like can be omitted.
なおここでは３次元画像を得るために２次元配列型の探
触子について説明したが、これに限らず、直線電子走査
型超音波装置において、２次元の可変口径と電子フォー
カスを実施するだめの超音波探触子の製造方法に用いて
も良い。Although we have described here a two-dimensional array type probe for obtaining three-dimensional images, this is not the only example. It may also be used in a method of manufacturing an ultrasonic probe.
以上のごとく本発明は、圧電振動子板の一方の面に、マ
ｔｌックス状の溝を形成し、この溝に充填物を充填し、
この圧電振動子板上に充填物を介して共通電極を形成し
、更にその上釦音響整合層を形成し、共通電極側に形成
した充填物を一部残した状１腹に音響整合層を形成した
圧電振動子板の反対側の面から圧電振動子板のみをマト
リックス状の溝に沿って完全に切断分割させた超音探触
子の製造方法に関したものであシ、本発明によれば、圧
電振動子板を一部の充填物を残して完全に切断分割でき
るため、音響的なりロストークを著しく低下させること
ができ、また切断分割した各々圧電振動子の一方の面側
の近傍の溝の一部に音響的クロストークに影響しない程
度に充填物を設けているため、マトリックス状に切断分
割した内側に位置する各圧電振動子からの共通電極の電
気端子の取出しが容易となシ、二次元配列の超音波振動
子群の所望域を任意に駆動し、超音波ビームの送受信を
行うことができ、分解能の高い三次元の画像を得ること
ができる。As described above, the present invention forms a matrix-like groove on one surface of a piezoelectric vibrator plate, fills this groove with a filler,
A common electrode is formed on this piezoelectric vibrator plate via a filling material, and a button acoustic matching layer is further formed on top of the common electrode, and an acoustic matching layer is formed on one side with a part of the filling material formed on the common electrode side remaining. The present invention relates to a method for manufacturing an ultrasonic probe in which only a piezoelectric vibrator plate is completely cut and divided along matrix grooves from the opposite side of a formed piezoelectric vibrator plate. For example, a piezoelectric vibrator plate can be completely cut and divided with some filler left behind, which can significantly reduce acoustic losstalk. Filling is provided in a part of the groove to the extent that it does not affect acoustic crosstalk, so it is easy to take out the electrical terminal of the common electrode from each piezoelectric vibrator located inside the cut and divided matrix. , it is possible to arbitrarily drive a desired area of a two-dimensional array of ultrasound transducers to transmit and receive ultrasound beams, and to obtain a three-dimensional image with high resolution.
第１図および第２図ａ、ｂは従来の２次元配列型超音波
探触子を示す斜視図および製造工程図、第３図ａ−ｄは
本発明の超音波診断装置の製造方法の一実施例を説明す
る工程図である。
１・・・・・・圧電振動子板、２．２ａ、２ｂ〜２ｎ。
３ａ、３ｂ〜３ｎ・・・・・・電極、４・・・・・・配
線ノ（ターン、５・・・・・基板、６・・・・・・バッ
キング材、７ａ、アｂ〜７ｎ、８ａ 、ｓｂ〜８ｎ・・
・・・・溝、９・・・・・・充填物、１０ａ、１０ｂ・
・・・・・音響整合層、１１ａ、１１ｂ〜１１ ｎ 、
１２ ａ 、 １２ｂ〜１２ｍ・−−−−−切断溝、
１３・・・・・接合材、１４・・・・・・基板。
第 １ 図
寓 ２ 区
（α）
３−ｍ＝ 芸通 電 懺
第
図
＜Ｃ）
／
？1 and 2 a and b are perspective views and manufacturing process diagrams showing a conventional two-dimensional array type ultrasound probe, and FIGS. It is a process diagram explaining an example. 1...Piezoelectric vibrator plate, 2.2a, 2b to 2n. 3a, 3b to 3n...electrode, 4...wiring (turn), 5...substrate, 6...backing material, 7a, ab to 7n, 8a, sb~8n...
... Groove, 9... Filler, 10a, 10b.
...acoustic matching layer, 11a, 11b to 11n,
12a, 12b~12m---cutting groove,
13... Bonding material, 14... Substrate. Fig. 1 Fig. 2 Ward (α) 3-m= Geitsu Denki Diagram <C) / ?
Claims (3)
工程と、前記溝に充填物を充填する工程と、前記圧電振
動子板の他方の面に電極を形成する工程と、前記圧電振
動子板の一方の面に前記充填物を介して共通電極を形成
する工程と、前記共通電極上に少なくとも一層の音響整
合層を形成する工程と、前記圧電振動子板の他方の面に
形成された電極上から前記溝に沿って前記充填物に至る
まで前記圧電振動子板を切断する工程とを備えてなるこ
とを特徴とする超音波探触子の製造方法。(1) forming grooves in a grid pattern on one surface of the piezoelectric vibrator plate, filling the grooves with a filler, and forming electrodes on the other surface of the piezoelectric vibrator plate; forming a common electrode on one surface of the piezoelectric vibrator plate via the filling; forming at least one acoustic matching layer on the common electrode; and the other surface of the piezoelectric vibrator plate. A method for manufacturing an ultrasonic probe, comprising the step of cutting the piezoelectric vibrator plate from above the electrode formed on the electrode along the groove to the filler.
請求の範囲第１項記載の超音波探触子の製造方法。(2) The method for manufacturing an ultrasonic probe according to claim 1, wherein the filling is made of a conductive material.
請求の範囲第１項記載の超音波探触子の製造方法。(3) The method for manufacturing an ultrasonic probe according to claim 1, wherein the filling is made of an insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1151495A JPH0263443A (en) | 1989-06-13 | 1989-06-13 | Manufacturing method of ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1151495A JPH0263443A (en) | 1989-06-13 | 1989-06-13 | Manufacturing method of ultrasonic probe |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57066702A Division JPS58183152A (en) | 1982-04-20 | 1982-04-20 | Ultrasonic probe and production thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0263443A true JPH0263443A (en) | 1990-03-02 |
| JPH0532059B2 JPH0532059B2 (en) | 1993-05-14 |
Family
ID=15519750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1151495A Granted JPH0263443A (en) | 1989-06-13 | 1989-06-13 | Manufacturing method of ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0263443A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6396198B1 (en) | 1999-06-16 | 2002-05-28 | Ngk Spark Plug Co. Ltd. | Wave transmission-reception element for use in ultrasound probe, method for manufacturing the wave transmission-reception element and ultrasound probe incorporating the transmission-reception element |
| US10654071B2 (en) | 2016-03-07 | 2020-05-19 | Seiko Epson Corporation | Ultrasonic element array, ultrasonic probe, ultrasonic apparatus, and manufacturing method for ultrasonic element array |
-
1989
- 1989-06-13 JP JP1151495A patent/JPH0263443A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6396198B1 (en) | 1999-06-16 | 2002-05-28 | Ngk Spark Plug Co. Ltd. | Wave transmission-reception element for use in ultrasound probe, method for manufacturing the wave transmission-reception element and ultrasound probe incorporating the transmission-reception element |
| US10654071B2 (en) | 2016-03-07 | 2020-05-19 | Seiko Epson Corporation | Ultrasonic element array, ultrasonic probe, ultrasonic apparatus, and manufacturing method for ultrasonic element array |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0532059B2 (en) | 1993-05-14 |
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