JPH0264907A - Thin film magnetic head and its manufacturing method - Google Patents

Abstract

PURPOSE:To obtain a narrow track and a multi-track by causing an angle, which the step different part of an edge part in a magnetic contact hole to be faced in a magnetic path direction forms with a substrate, to be smaller than an angle, which the step difference part of the edge part in a magnetic contact hole to be faced orthogonally to the magnetic path direction forms with the substrate. CONSTITUTION:For a magnetic contact hole 5, a step angle K1 goes to be smaller than a step angle K2 in a direction to be orthogonal to the magnetic path direction concerning the magnetic path direction which is constituted by an upper magnetic layer 6. Preferably, the step angle K1 is <=60 deg. and the step angle K2 is 80-90 deg.. Thus, since the step angle K1 is smaller, the rising angle of the upper magnetic layer 6 goes to be smooth and the continuity of the upper magnetic layer 6 can be made satisfactory. Thus, recording and reproduc ing efficiency can be prevented from being lowered by the increase of magnetic resistance.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to a thin film magnetic head and a method for manufacturing the same, particularly a thin film magnetic head having an upper magnetic layer and a lower magnetic layer coupled to each other via magnetic contact holes on a substrate. The present invention relates to a manufacturing method thereof.

[Prior Art] A thin film magnetic head is formed by forming a magnetic layer, a conductive layer serving as a coil, a gap member, etc. on a substrate using various thin film forming methods.

Therefore, it has the advantage of being suitable for mass production and being easy to reduce in size and weight. In recent years, multi-track thin film magnetic heads have also been manufactured in which a plurality of magnetic gaps for a plurality of recording and reproducing tracks are formed on the same substrate.

FIG. 6 shows the structure of a magnetic head constructed by a conventional layering method. Here, a method of manufacturing a conventional thin film magnetic head will be explained with reference to FIG.

Conventionally, first a substrate made of ferrite, glass, etc.
A soft magnetic film made of permalloy, sendust, etc. is formed thereon to a predetermined thickness as the lower magnetic layer 2. An insulating layer (not shown) made of 0-order 5i02 or the like is formed on the lower magnetic layer 2. Furthermore, on top of that is the AI that makes up the coil part.
A conductive layer 3 made of copper or Cu is formed into a predetermined coil pattern by a photolithography process. This coil pattern is composed of a spiral pattern 3a and a substantially linear pattern 3b for leading out the other electrode from the center of the spiral pattern. pattern 3a,
An insulating layer (not shown) is arranged between 3b.

After forming the coil pattern, an insulating layer such as 5to2 (
7B and 7C is formed on the coil pattern, and a magnetic contact hole 5 is formed in the center of the coil pattern. The magnetic contact hole magnetically couples the lower magnetic layer 2 and the upper magnetic layer 6 to be formed later. Finally, a soft magnetic layer such as Sendust, which will become the upper magnetic layer 6, is formed by sputtering or the like, and formed by photolithography so as to extend between the magnetic contact hole 5 and the gap portion 4 as shown.

In order to show the shape of the magnetic contact hole 5, a top view of the head portion is shown in FIG. 7(A), and FIG.
The conventional method for forming the magnetic contact hole 5, whose XX cross section is shown in FIG. 7(B) and the Y-Y cross section is shown in FIG. 7(C), is to A photoresist is applied and the areas other than the resist pattern are ion-etched. First, after applying photoresist to a predetermined thickness, post-baking is performed to solidify the pattern after pre-baking, exposure and development.The angle between the resulting resist pattern and each underlying layer is constant. The angle between the contact hole 5 formed by ion etching and the underlying layer is also constant.

This angle K is called the step angle of the magnetic contact hole.

[Problems to be Solved by the Invention] Incidentally, when the step angle K of the magnetic contact hole is large, the rising angle of the upper magnetic layer 6 formed in the next step becomes large. In particular, when sendust is used as the upper magnetic layer 6, there is a problem that if the step angle K is large, the continuity of the film at the step portion deteriorates, and the magnetic resistance increases, resulting in a decrease in recording and reproducing efficiency. On the other hand, when the step angle K of the magnetic contact hole 5 becomes smaller, as shown in FIG. 7(C).
The effective width of the contact hole shown in FIG. 1 becomes narrower, and the area of the magnetic contact hole 5 becomes smaller. As a result, the magnetic resistance increases and magnetic saturation occurs, as described above, and the recording and reproducing efficiency decreases. .

On the other hand, in the field of magnetic recording and reproducing, the density of recording and reproducing is increasing by narrowing the tracks, and therefore the dimensions of magnetic heads are becoming smaller. However, the coil portion made of metal film has limitations regarding heat generation. As a result, the area of the magnetic contact hole 5 tends to become smaller and smaller. This tendency allows multiple devices to be placed on the same board.

This is particularly noticeable in the multi-track head that constitutes the board section.

As mentioned above, with conventional contact hole shapes, it is difficult to solve the conflicting problems of continuity in the step portion of the upper magnetic layer and reduction in the area of the magnetic contact hole due to narrower tracks or multi-tracks. there were.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and provide a thin film magnetic head and a method for manufacturing the same, which allow narrower tracks or multi-tracks without reducing recording and reproducing efficiency.

[Means for Solving the Problems 1] In order to solve the above problems, in the present invention, an upper magnetic layer and a lower magnetic layer are provided on a substrate and are coupled through a magnetic contact hole provided in an insulating layer. In a thin film magnetic head and a method for manufacturing the same, the angle between the stepped portions of the edges of the magnetic contact holes facing each other in the magnetic path direction and the substrate is such that the edge of the magnetic contact holes facing each other in a direction substantially perpendicular to the magnetic path direction It was decided that the magnetic contact hole would be configured so that the stepped portion of the magnetic contact hole was smaller than the angle formed with the substrate.

[Function] According to the above configuration, since the angle between the step portions of the edges of the magnetic contact hole facing each other in the magnetic path direction and the substrate is small, the continuity of the upper magnetic layer can be ensured, and the Since the stepped portions of the edges of the magnetic contact holes that face each other in a direction substantially perpendicular to the magnetic path direction form a large angle with the substrate, the coupling area between the upper and lower magnetic layers is sufficient even when the magnetic contact holes are downsized in this direction. can be secured.

[Example] Hereinafter, the present invention will be described in detail based on the example shown in the drawings.

FIG. 1A shows a top view of the essential parts of a thin film magnetic head employing the present invention. Moreover, FIGS. 1(B) and (C) show the XX cross section and YY cross section of FIG. 1(A) (7). That is, FIGS. 1(A) to (C) correspond to FIGS. 7(A) to (C).

The difference between the thin film magnetic head of this embodiment and the conventional structure is in the magnetic contact hole portion, and the other overall structure and overall manufacturing process are almost the same as those described in connection with FIG.

The magnetic contact hole 5 in this embodiment is shown in FIG.
As shown in B), the step angle Kl with respect to the magnetic path direction formed by the upper magnetic layer 6 is larger than 2 in the step angle in the direction approximately perpendicular to the magnetic path direction, as shown in FIGS. It is designed to be small. Preferably: 1 is 60° or less for the step angle, 2 is for the step angle
is approximately 80 to 90 degrees.

According to the above configuration, since the step angle Kl is small, the rising angle of the upper magnetic layer 6 becomes gentle as shown in FIG. 1(B), and the continuity of the upper magnetic layer 6 can be improved. It is possible to prevent a decrease in recording and reproducing efficiency due to an increase in magnetic resistance.

On the other hand, since the step angle is large, the width of the magnetic contact hole 5 in this direction can be increased as shown in FIG. Also, a magnetic contact hole 5 with a sufficient area can be formed, and a decrease in recording and reproducing efficiency due to an increase in magnetic resistance or magnetic saturation can be prevented. On the other hand, if the area occupied by the entire magnetic contact hole is the same as the conventional one, as is clear from Figure 1(C), the conductive I constituting the coil
I! 3 can be expanded in the direction of the magnetic contact hole 5, an increase in current density in the conductive layer 3 can be suppressed, and even when configuring a multi-track head as shown in FIG. This narrows the spacing and allows for narrower track pitches.

Next, the steps for manufacturing the above magnetic head will be explained with reference to FIGS. 2 to 4.

First, a lower magnetic layer 2 made of a soft magnetic film such as Sendust is sputtered on a substrate l (FIG. 4) made of ferrite, glass, etc., about 5 to 1101L, and then 5io2
The insulating layer of FIG.
Depositing an insulating layer (coded in FIGS. 1(B) and (C)),
After forming a magnetic gap portion (numeral 4 in FIG. 6) from a predetermined gap material, a magnetic contact hole is formed by photolithography and ion etching steps.

As the first step,
As shown in the -X section), a photoresist 10 is formed, and ion beam etching is performed by arranging the substrate so that the angle α with respect to the ion beam 20 is preferably 60' or less so that the step angle is small.

Next, in the second step, a photoresist is formed to cover the step portion in the magnetic path direction of the magnetic contact hole formed as described above (not shown).
), the ion beam etching is performed by arranging the substrate so that the ion beam angle α to the substrate is 80 to 90', as shown in FIG.
, (C) and FIG. 4, it is possible to form magnetic contact holes 5 having different step angles in the magnetic path direction and in the orthogonal direction.

Thereafter, an upper magnetic layer 6 made of sendust or the like is formed in the conventional manner, and the wafer process of the thin film magnetic head is completed.

When forming the upper magnetic layer 6, the continuity of the upper magnetic layer 6 is ensured as described above by setting the step angle Kl, and a decrease in recording and reproducing efficiency due to an increase in magnetic resistance can be prevented. Further, by setting the step angle to 2, a sufficient coupling area between the upper and lower magnetic layers can be ensured, and a decrease in recording and reproducing efficiency can also be prevented.

Figure 5 shows the structure of different magnetic heads.
Similarly to FIG. 1(B), it shows the XX cross section of FIG. 1(A). In FIG. 5, the step portion in the direction of the magnetic path is not formed in a straight line but in a continuous curved shape as indicated by the symbol a. Such a curved surface can be formed by sequentially changing the angle of the ion beam 20 with respect to the substrate in the process shown in FIG. With such a configuration, the continuity of the upper magnetic layer 6 can be further improved, and the efficiency of magnetic recording and reproduction can be improved.

Furthermore, in the above embodiment, it was considered that the magnetic contact hole 5 was formed into a substantially rectangular shape, but the reference numeral 5 in FIG.
As shown in b, at least the step portion of the upper magnetic layer 6 in the direction toward the gap may be formed in an arc shape. Such a shape can also improve the continuity of the upper magnetic layer 6.

Magnetic recording and reproducing efficiency can be improved.

[Effects of the Invention] As is clear from the above, the present invention provides a thin film magnetic head in which an upper magnetic layer and a lower magnetic layer are provided on a substrate and are coupled via a magnetic contact hole provided in an insulating layer. In the manufacturing method, the angle formed by the stepped portions of the edges of the magnetic contact holes facing each other in the magnetic path direction with the substrate is such that the stepped portions of the edges of the magnetic contact holes facing each other in the direction substantially perpendicular to the magnetic path direction form an angle with the substrate. The magnetic contact hole is configured to make an angle smaller than the angle formed with the substrate. Therefore, since the angle between the stepped portions of the edges of the magnetic contact holes facing each other in the magnetic path direction is small, the continuity of the upper magnetic layer can be ensured, and the edges facing each other in the magnetic path direction are Since the angle between the stepped portion of the edge of the magnetic contact hole and the substrate is large, even if the magnetic contact hole is made smaller in this direction, a sufficient coupling area between the upper and lower magnetic layers can be secured, and the electromagnetic /It has the excellent effect of not only improving magnetoelectric conversion characteristics but also being able to easily respond to miniaturization of thin film magnetic heads and narrowing of tracks in multi-track heads without impairing characteristics.

[Brief explanation of the drawing]

FIG. 1(A) is a top view of the main parts of a thin-film magnetic head employing the present invention, and FIGS. 1(B) and (C) are respectively FIG. 1(A).
) along the x-X line and the Y-Y line, FIG. 2,
3 is a cross-sectional view of a substrate block showing the manufacturing process of the magnetic head shown in FIG. 1, FIG. 4 is a perspective view showing formed magnetic contact holes, and FIG. 5 is a diagram showing different structures of magnetic contact holes. 6 is a perspective view showing the structure and manufacturing process of a conventional thin film magnetic head, and FIG.
Figure (A) is a top view of the main parts of a conventional thin-film magnetic head.
Figures (B) and (C) are cross-sectional views taken along the x-X line and the Y-Y line in Figure 7 (A), respectively. l... Substrate 2... Lower magnetic layer 3... Conductive layer 5... Magnetic contact hole 6... Upper magnetic layer 10... Photoresist 20
...Ion beam 1 beam 1 ion glZP 3t blowing 2nd figure

Claims (1)

[Claims] 1) An upper magnetic layer and a lower magnetic layer constituting a magnetic path that mainly performs electromagnetic/magnetoelectric conversion are arranged on a substrate with an insulating layer containing a conductive layer serving as a coil member interposed therebetween. In the thin film magnetic head, an angle between stepped portions of edges facing in the magnetic path direction of a magnetic contact hole provided in the insulating layer for magnetically coupling the upper magnetic layer and the lower magnetic layer with the substrate is . A thin film magnetic head, characterized in that a stepped portion of an edge of the magnetic contact hole facing in a direction substantially perpendicular to the magnetic path direction is configured to be smaller than an angle formed with the substrate. 2) Forming a lower magnetic layer constituting a magnetic path that is the main body of electromagnetic/magnetoelectric conversion on the substrate, and forming a conductive layer constituting a coil member on the lower magnetic layer via a first insulating layer. forming a second insulating layer covering the conductive layer; and adding the lower magnetic layer and the lower magnetic layer together with the lower magnetic layer in a predetermined region of the second insulating layer surrounded by the conductive layer. a step of forming a magnetic contact hole for coupling upper magnetic layers forming a magnetic path; and a step of forming an upper magnetic layer coupled to the lower magnetic layer via the magnetic contact hole and extending in the magnetic gap direction. In the method of manufacturing a thin film magnetic head, in the magnetic contact hole forming step, an angle formed by a stepped portion of the edge of the magnetic contact holes facing each other in the magnetic path direction with the substrate is substantially perpendicular to the magnetic path direction. 1. A method of manufacturing a thin film magnetic head, comprising shaping magnetic contact holes so that the stepped portions of the edges of the magnetic contact holes facing each other in the direction are smaller than the angle made with the substrate.