JPH0266842A - Power source device for charged particle detector - Google Patents

Abstract

PURPOSE:To make a DC power source in a common use by feeding a voltage to set the secondary ion collecting voltage, or feeding by adding either voltage and a set voltage to the voltage to set the secondary ion collecting voltage, to an error amplifier to stabilize the ion multiplying voltage. CONSTITUTION:To an error amplifier 17, a high voltage Vh to multiply the the electrons is fed from a detecting resistance 20, and, the Vh setting voltage from a Vh setting resistance 21, and the set voltage of a secondary electron collecting voltage Ve or the set voltage of a secondary ion collecting voltage Vi through a switch 41, are fed. The amplifier 17 adds the three types of fed voltages, and controls an oscillation drive circuit 16 to make the adding value into zero. As a result, when the secondary electrons are detected, switches 35 and 41 are converted to the solid lines, the Ve voltage is used as an incident surface voltage, and the Ve setting voltage is fed to the amplifier 17. The Vh voltage is made into 1100 V by adding the 1000V set in the resistance 21 and the 100V set in a Ve setting resistance 28, and the voltage between the incident surface and the output surface is kept at 1000V. The same manner is used in the secondary ions, and a DC power source can be used commonly, consequently.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention provides a power supply device for a detector that selectively detects secondary electrons and secondary ions generated when an ion beam or the like is irradiated onto a target laser 1. Regarding.

(Prior art) Figure 4 shows the main parts of an ion beam device that selectively detects secondary electrons and secondary ions generated when an ion beam is irradiated onto the target laser 1-1. rB
is accelerated and focused on the target 1F by a lens (not shown).

Secondary electrons or secondary ions generated when the target 1 is irradiated with the ion beam rB are detected by a detector 2, which is composed of microchannel plates 1 to 3 and an anode 4. There is. The entrance surface of the microchannel plate 3 is supplied with a voltage from a Ve power source 5 that generates a voltage Ve for collecting secondary electrons or a voltage from a Vi power source 6 that generates a voltage Vi for collecting secondary ions by a switch 7. It is applied by switching. A high voltage Vh (for example,
kV) is supplied from the vh power supply 8.

Electrons multiplied and emitted by the microchannel plays 1 to 3 are detected by the anode 4. The signal detected by the anode 4 is amplified by the amplifier 9 and supplied to the light emitting diode 10, which causes the light emitting diode 10 to emit light according to the detected signal strength. In addition, 11 is I
/ This is a resistance for V conversion. The light emission of the light emitting diode 10 is detected by the light receiving diode 12, and the detection signal is amplified by the amplifier 13 and then used as a video signal.The operation of the connected structure is as follows. Ion beam I
When detecting secondary electrons generated from the target laser 1-1 by irradiation with B, a voltage from the Ve voltage power supply 5, for example, +100■, is applied to the incident surface of the microchannel plate 3 by the switch circuit 7, and the result is , the secondary electrons generated from Targetera 1-1 are accelerated and incident on the microchannel plate 3, and the electrons are multiplied within the microchannel plate 3 according to the amount of the incident secondary electrons, and the electrons are multiplied according to the intensity. The detected signal is detected by the anode 4. In addition, 2 generated by ion beam IB irradiation
When detecting the next ion, the switch circuit 7
The voltage from the voltage power supply 5, for example -100V, is a micro channel play! As a result, the secondary ions generated from the target 1 are accelerated and incident on the microchannel pre[・3, and this incident 2
Next, electrons are multiplied in the microchannel plays 1 to 3 according to the amount of ions, and a signal corresponding to the intensity is detected by the at 4.

(Problem to be Solved by the Invention) Although the circuit that generates the vh lightning voltage ve lightning voltage V1 voltage in FIG. As an example, the fifth
The configuration shown in the figure can be considered.

=3 - In Fig. 5, circuits CI, C2, and C3 are each vh
The first DC power supply 15 in the circuit C1, which generates lightning voltage, Ve voltage, and Vi voltage, drives an oscillation drive circuit 16 and an error amplifier 17.

The output voltage of the oscillation drive circuit 16 is output from the step-up transformer 18.
After being boosted by , it is supplied to a circuit 19 that rectifies and removes ripples, and the output voltage of this circuit 19 becomes vh lightning voltage. vh lightning voltage, error amplifier 1 via detection resistor 20
7 and is compared with the vh setting voltage supplied via the vh voltage setting resistor 21 in this amplifier 17 . The error amplifier 17 generates a difference signal between the detection voltage and the set voltage, supplies it to the oscillation drive circuit 16, controls the circuit 16, and stabilizes the voltage at the vh lightning voltage set voltage.

The Ve voltage generation circuit C2 has the same configuration as the Ve voltage generation circuit C1, and includes an oscillation drive circuit 23 driven by the second DC power supply 22, a step-up transformer 24. Rectification/ripple removal circuit 25° detection resistor 26. Error amplifier 27. It is composed of a Ve setting resistor 28 and is designed to stably generate a Ve lightning voltage. V11 voltage raw circuit C
3 also has the same configuration as the Ve voltage generation circuit C1, but the DC power supply is used in combination with the DC power supply 22 of the Ve voltage generation circuit C2. This circuit C3 is an oscillation drive circuit 29
．． Boosting 1-Lance 30. Rectification/ripple removal circuit 316
Detection resistor 32. The error amplifier 33 is composed of a resistance 34 for setting Ve, and is designed to stably generate a Vi lightning voltage. Output voltage ve of circuit C2 and output voltage V of circuit C3
t indicates whether the secondary charged particles to be detected are electrons or ions, which are switched by the switch 35 to become the vh lightning voltage reference voltage, which is applied to the incident surfaces of the microchannel plates 1 and 3.

In the circuit shown in FIG. 5, if the reference voltage of the error amplifier 17 is made equal to the reference voltage of the error amplifier 27.33, then 2
When detecting secondary electrons, microchannel plate 3
Since →-100V is applied to the incident surface of
To set it to oov, adjust the vh voltage setting resistor and set v
What should be done about h lightning voltage 11OO? In addition, when detecting secondary ions, since -100V is applied to the incident surface of the microchannel plate 3, v
The h voltage 39 and constant resistor 21 must be adjusted so that the vh lightning voltage is 900 V, and troublesome adjustments are required when changing the type of detected particles.

In order to eliminate the above-mentioned troublesome adjustment, if the reference voltage of the error amplifier 17 is set to the ye lightning voltage V1 voltage, the error amplifiers 27 and 3
The reference voltage of error amplifier 1 is the ground potential, whereas the reference voltage of error amplifier 1
Since the reference voltage of No. 7 is the Ve lightning voltage V voltage, the first DC power supply 15 and the second DC power supply 22 cannot be shared.

The present invention has been made in view of these points, and its object is to provide a charged particle detection system that can stably generate the VH lightning voltage Ve lightning voltage V1 voltage with a simple configuration and without troublesome adjustments. The aim is to realize a handy power supply device.

(Means for Solving the Problem) A power supply device for a charged particle detector based on wood redundancy includes a microchannel plate into which secondary charged particles generated from a target are incident based on the illumination side of a primary beam, and a microchannel plate into which secondary charged particles generated from a target are incident. In a power supply device for a charged particle detector that includes an anode that detects electrons multiplied by a channel plate, an electron multiplier that generates an electron multiplier voltage that is applied between an entrance surface and an exit surface of a microchannel plate. The secondary charged particle collection voltage is 2.
It is configured to generate by switching between positive and negative voltages in order to switch and collect secondary ions, secondary electrons, etc. Furthermore, this voltage is sent to the error amplifier in the electron multiplication voltage generation circuit along with the electron multiplication voltage setting...voltage. It is characterized by being applied.

(Function) The electron multiplication voltage of micro channel play 1~ (Vh is applied to the input of the error amplifier for stabilizing the lightning voltage along with the vh output voltage and the vh setting voltage, as well as the secondary electron collection setting voltage or the secondary ion collection setting voltage. supply either.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a power supply device for a detector in the ion beam apparatus etc. shown in FIG. 4, and the same components as in FIG. 5 are given the same numbers. The difference between this embodiment and the proposed device shown in FIG. 5 is that the vh voltage generation circuit CI, ve
A single DC power supply 40 is used as the DC power supply for the voltage generation circuits C2 and Vi voltage generation circuits C3, and a switch 41 that switches in synchronization with the switch 35 is provided, so that the ve set voltage and the i set voltage can be set by the switch 41. This is the point where the signal is switched and supplied to the error amplifier 17.

In the error amplifier 17, the vh lightning voltage from the detection resistor 20 is supplied to the (-) terminal, for example, and the vh lightning voltage setting resistor 2
The vh setting voltage from 1 and the Ve setting voltage or V) setting voltage via the switch 41 are supplied to the (+) terminal. The error amplifier 17 adds the three types of voltages supplied and controls the oscillation drive circuit 16 so that the addition result becomes zero.

As a result, when detecting secondary electrons, switches 35 and 4
1 is switched as shown by the solid line in the figure, and Ve lightning voltage is 100V.
) is used as the entrance surface voltage of the microchannel plays 1 and 3, and the Ve setting voltage is supplied to the error amplifier 17. VH lightning voltage, 1 set by VH voltage setting resistor 21
000V and 100■ set by Ve setting resistor 28
h0 is calculated as 1100V, and therefore, the voltage between the entrance surface and the exit surface of the microchannel plate 3 is maintained at 1000V. On the other hand, when detecting secondary ions, switches 35 and 41 are switched as shown by the dotted lines in the figure, Vi lightning voltage - 100V) is used as the incident surface voltage of microchannel 11 channel plates 1 and 3, and v1 set voltage is The signal is supplied to an error amplifier 17. VH lightning voltage, 900V which is the sum of 1000V set by VH voltage setting resistor 21 and -100V set by V1 setting resistor 28.
Therefore, the voltage between the entrance surface and the exit surface of the microchannel plate 3 is maintained at 1000V.

In this embodiment, three types of voltages are added by an error amplifier (), but the vh constant voltage and the ve or Viffl constant voltage are added by the adder, and the error amplifier adds the vh output voltage. It may be configured to compare the summed output from the adder with the summed output from the adder.

FIG. 2 shows another embodiment of the invention, in which the same parts as in FIG. 1 are given the same numbers. This example
The voltage generation circuit and the vi electric sweat generation circuit are the same generation circuit C.
The circuit C4 is characterized by being configured with the oscillation drive circuit 45.4. Boost 1 to lance 4G, polarity switchable rectifier 47. Ripple removal circuit 48. Detection failure 49. Error amplifier 50, Ve voltage setting resistor 28. It is composed of a Vl voltage setting resistor 34 and switches 51, 52, and 53.

When detecting secondary electrons, each switch is switched to the state shown by the solid line in the figure, and the (→-) terminal of the error amplifier 50 is
The voltage from the setting resistor 28 is supplied, and the (=) terminal is
A signal from the detection resistor 49 is supplied to generate a Ve lightning voltage. When detecting secondary ions, each switch is set to the state shown by the dotted line in the figure, and the (-) terminal of the error amplifier 50 has v1
The voltage from the setting resistor 34 is supplied, and the (→) terminal is
4 is supplied from the detection resistor 49, and the V1 voltage is generated. FIG. , switches 56 and 57 are provided, and the switches 56 and 57 are switched synchronously depending on the polarity of input pressure.

In the above embodiment, an example was shown in which secondary electrons and secondary ions are switched for detection, but the present invention is not limited to this, and for example, reflected electrons and secondary ions may be switched for detection.

(Effects of the Invention) As explained below, in this defense, the secondary electron collection voltage (Ve
Either the voltage for setting the secondary ion collection voltage (vl) or the voltage for overturning the setting of the secondary ion collection voltage (vl) is added to the vh setting voltage. , there is no need to adjust the Vh setting voltage in the case of detecting secondary ions. In addition, the vh voltage generation circuit and Ve lightning voltage V
The oscillation drive circuit and error amplifier used in the i-voltage generation circuit can be used at a common potential, and the DC power supply for each circuit can be shared.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a power supply device that is an embodiment of the present invention, FIG. 2 is a diagram showing another embodiment of the present invention, FIG. 3 is a diagram showing an example of a rectifier with switchable polarity, and FIG. The figure shows secondary electrons and 2
FIG. 5 is a diagram showing a main part of an ion beam device capable of switching and detecting the next ion, and FIG. 5 is a diagram showing an example of a detector power supply circuit used in the device of FIG. 4. 1... Target 2... Detector 3... Microchip 17 Channel plate 4... Anode
5...Ve power supply G...Vi power supply 7...
・Switch 8...VH power supply 9...Amplifier 10...Light emitting diode 12...Light receiving diode 13...Amplifier 15.22.40...DC power supply 16.23.29.45... 1st drive circuit 18
．． 24. ．． 30.46...Step-up transformer 19.25.
31... Rectification/ripple removal circuit 20.26.32.
49...Detection resistor 17.27.33.50...Error amplifier 21...vh voltage setting resistor 28...■e voltage setting resistor 34...v1 voltage setting resistor Patent applicant Japan Electronics stock
Company agent Patent attorney
Fuji Ijima 1 person

Claims (1)

[Claims] 2 generated from the target based on the irradiation of the primary beam
a microchannel plate into which the next charged particle is incident;
In a power supply device for a charged particle detector equipped with an anode that detects electrons multiplied by a microchannel plate, the electrons generate an electron multiplication voltage that is applied between the entrance surface and the exit surface of the microchannel plate. It includes a multiplication voltage generation circuit and a collection voltage generation circuit that generates a voltage applied to the incident surface of the microchannel plate to collect secondary charged particles. It is configured to switch and generate positive and negative voltages in order to switch and collect secondary electrons, etc., and this voltage is further applied to the error amplifier in the electron multiplier voltage generation circuit together with the voltage for setting the electron multiplier voltage. A power supply device for a charged particle detector, characterized in that: