JPH0267646U - - Google Patents

Info

Publication number
JPH0267646U
JPH0267646U JP1988145436U JP14543688U JPH0267646U JP H0267646 U JPH0267646 U JP H0267646U JP 1988145436 U JP1988145436 U JP 1988145436U JP 14543688 U JP14543688 U JP 14543688U JP H0267646 U JPH0267646 U JP H0267646U
Authority
JP
Japan
Prior art keywords
holding part
end holding
substrate
clamp
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988145436U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988145436U priority Critical patent/JPH0267646U/ja
Publication of JPH0267646U publication Critical patent/JPH0267646U/ja
Pending legal-status Critical Current

Links

JP1988145436U 1988-11-09 1988-11-09 Pending JPH0267646U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988145436U JPH0267646U (fr) 1988-11-09 1988-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988145436U JPH0267646U (fr) 1988-11-09 1988-11-09

Publications (1)

Publication Number Publication Date
JPH0267646U true JPH0267646U (fr) 1990-05-22

Family

ID=31414025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988145436U Pending JPH0267646U (fr) 1988-11-09 1988-11-09

Country Status (1)

Country Link
JP (1) JPH0267646U (fr)

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