JPH0270181A - Driving system for solid-state image pickup device - Google Patents

Driving system for solid-state image pickup device

Info

Publication number
JPH0270181A
JPH0270181A JP1160801A JP16080189A JPH0270181A JP H0270181 A JPH0270181 A JP H0270181A JP 1160801 A JP1160801 A JP 1160801A JP 16080189 A JP16080189 A JP 16080189A JP H0270181 A JPH0270181 A JP H0270181A
Authority
JP
Japan
Prior art keywords
solid
state imaging
period
imaging device
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1160801A
Other languages
Japanese (ja)
Other versions
JPH0415670B2 (en
Inventor
Nozomi Harada
望 原田
Okio Yoshida
吉田 興夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1160801A priority Critical patent/JPH0270181A/en
Publication of JPH0270181A publication Critical patent/JPH0270181A/en
Publication of JPH0415670B2 publication Critical patent/JPH0415670B2/ja
Granted legal-status Critical Current

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

PURPOSE:To improve resolution in a horizontal direction, and to obtain the device of the high resolution by moving a solid-state image pickup chip substrate which is made so that a sampling point gets out of position in a vertical direction between fields relatively in a horizontal direction against an incident optical image. CONSTITUTION:The solid-state image pickup chip substrate is made to vibrate relatively against the incident image in the direction corresponding to horizontality in a reproduced picture in one cycle of one frame period. At that time, a signal charge accumulated in a photodiode in each of A, B fields is moved to a vertical electric charge accumulating device (CCD) during a vertical blanking period, and a moving period and the center of vibration of the solid- state image pickup chip substrate are synchronized. As the result, an effective area for light incidence moves from an opening part shown by a full line to the opening part of a dotted line, and the signal charge due to the light incidence is generated and accumulated at these points. Thus, the number of picture elements in the horizontal direction becomes twice effectively, and the high resolution is obtained.

Description

【発明の詳細な説明】 〔発明の属する技術分野) 本発明は高速シャッタ動作を伴う固体撮像装置の5動力
式に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a five-power type solid-state imaging device with high-speed shutter operation.

〔従来技術とその問題点〕[Prior art and its problems]

固体撮像装置は従来の撮像管に比べ、小型、軽−畦、高
信頼性、特性面では図形歪がなく、残像が小さく、・尭
げきかない等の多くの利点を有していルタメ、ITV 
、家庭ビデオカメラ用として広く使用され始めており、
特に最近では銀塩フィルムを弔いない、いわゆる電子カ
メラへの応用も考えられている。
Solid-state imaging devices have many advantages over conventional image pickup tubes, such as being smaller, lighter, more reliable, with no shape distortion, less afterimage, and no shading.
, has begun to be widely used for home video cameras,
Particularly recently, applications are being considered for so-called electronic cameras that do not use silver halide film.

しかるに従来の固体撮像装置は例えばNTSC標準方式
に適合させるように駆動されており、従って固体撮像装
置の画素数を全て再生するために1は、上記成子カメラ
のシャッタi 1/30秒以上開口させなけれ・ばなら
ないことになる。しかし通常シャッタ速度が1/30秒
の場合は例えば三脚で固定するなどして撮像しない限り
、手振れがおこる。そのため1/30秒以下での高速シ
ャッタ撮像を可能にするためには、読出し周波数を高く
して1フレ一ム時間の短縮で図る必要があるが、現在の
500(垂直) X 400 (水平)画素のセンサに
おける読出し周波数:i、7.161’vfHzであり
、これを2陪の1432MHzにできたとしても、シャ
ッタ速度は高々1/60秒にしかならなAo一方、カメ
ラとしてのシャッタ速度は1/1000秒程Vまで必要
であり、このような高速シャッタ動作を満足させるには
上記読出し周波数は240MHzとなってしまい、固体
撮像装置の駆動、信号処理が極めて困難となる。
However, conventional solid-state imaging devices are driven to comply with, for example, the NTSC standard system, and therefore, in order to reproduce all the pixels of the solid-state imaging device, the shutter of the Nariko camera must be opened for at least 1/30 seconds. It becomes indispensable. However, if the shutter speed is normally 1/30 second, camera shake will occur unless the image is taken by fixing it on a tripod, for example. Therefore, in order to enable high-speed shutter imaging at 1/30 seconds or less, it is necessary to increase the readout frequency and shorten the time per frame. The readout frequency of the pixel sensor is i, 7.161'vfHz, and even if this could be made to 1432MHz for two, the shutter speed would only be 1/60 seconds at most.On the other hand, the shutter speed of the camera is V up to about 1/1000 second is required, and to satisfy such a high-speed shutter operation, the readout frequency must be 240 MHz, making driving and signal processing of the solid-state imaging device extremely difficult.

このため従来の方式で高速シャッタ1像を行なおうとす
る揚台はインターレス撮像を行わずに撮像せざるを得す
、その結果画素数は垂直方向において半分になってしま
い、解像度が大幅に低下する。
For this reason, a platform that attempts to perform a single high-speed shutter image using the conventional method has no choice but to take images without performing interlaced imaging.As a result, the number of pixels is halved in the vertical direction, and the resolution is significantly reduced. descend.

以上の事項を図面を参照してもう少し詳しく説明する。The above matters will be explained in more detail with reference to the drawings.

第1図はよく知られているインターライン転送方式のC
CD (以下IT−CCDと称す)の、溝戎テ示す。
Figure 1 shows C of the well-known interline transfer method.
This figure shows the grooves of a CD (hereinafter referred to as IT-CCD).

このIT−CODは例えばホトダイオード(以下PDと
称す)で形成されたMX2N個の感光部(”l 1 +
 ”11 rP12 r P;2+ ”+3 + ”’
 + PIN +PIN + P21 +P21 t 
”u、”221 ”231”’ IP2N、P、二、・
+ PMl + p、、 l ”M2 + ”Mt r
 2M3 +・・r ”MN 1 ”MN )(以下P
i、Pi’で代表する)と、この感光部(Pi。
This IT-COD has MX2N photosensitive parts ("l 1 +
"11 rP12 r P;2+ "+3 + "'
+ PIN + PIN + P21 + P21 t
``u,'' 221 ``231''' IP2N, P, 2,・
+ PMl + p,, l ”M2 + ”Mtr
2M3 +...r ”MN 1 ”MN) (hereinafter referred to as P
i, Pi') and this photosensitive area (Pi.

Pi’)で光電変換されて蓄積された信号電荷を読出す
ための垂直CCD (C,、C2,・・・CM)が図示
の如く水平方向に交互に配列されている。そして垂直C
CD(C4,C2,・、CM)の信号電荷は1段ごとに
水平CCDシフトレジスタ(1)に転送され、水平有効
期間において水平CCDシフトレジスタ(1)内を転送
さまた後、順次出力部12)より読出される0ここで垂
直CCD(C8,C2,・・・l ”M )  におけ
る垂直方向転送段数は感光部(Pi、Pi’)の垂直方
向画素数の半数である。
Vertical CCDs (C, C2, . . . CM) for reading out signal charges photoelectrically converted and accumulated by Pi') are arranged alternately in the horizontal direction as shown. and vertical C
The signal charges of the CDs (C4, C2,..., CM) are transferred to the horizontal CCD shift register (1) one stage at a time, and after being transferred within the horizontal CCD shift register (1) during the horizontal effective period, they are sequentially transferred to the output section. 12) Here, the number of vertical transfer stages in the vertical CCD (C8, C2, . . . l''M) is half the number of vertical pixels of the photosensitive section (Pi, Pi').

通常のテレビジョン標準方式においては1フレームば2
フイールドより構成され、インターレス走査を行ってい
る。従ってIT−CCDでもこれに適合した撮像動作を
行っている。すなわち先の2フイールドiA 、Bフィ
ールドとすると、Aフィールドでは垂直方向に連伏して
設けられた2個のPD(P12.P+:) 、 (P1
21 ”+2) l−、(P+s、 PIN) + (
P2、+P21)+(P2tr P22 ) + 、”
 r (”zN + PtN ) + ”’ r (”
lJ+ + ”M+) + (PM21PM2′) +
 ”’ + (PMN l ”MN )で蓄積された信
号電荷が合せて読出され、Bフィールドでは、Aフィー
ルドで読出された2個のPD(Pi、Pi )  に対
して空間的に垂直方向に180度位相の異なる連続した
2個のPD (P、LP、□)、(P+t、P+s)、
−、(P21.P 2□)、ω22 + ”23 ) 
+”’(”)j l’+ PM□) + (P)421
2M3 )置・で蓄積された信号電荷が合せて読出され
る。このような信号電荷転送モードはフィールド蓄積モ
ードと呼ばれる。この場合、垂直方向においてA、Bフ
ィールドで読出される信号の空間的位相が180度異な
るため、感光領域全域からは2NXM個のサンプル点が
得られる。
In the normal television standard system, 1 frame is 2
It consists of fields and performs interlace scanning. Therefore, even IT-CCDs perform imaging operations that are compatible with this. That is, assuming the previous two fields iA and B field, in the A field, two PDs (P12.P+:) and (P1
21 ”+2) l-, (P+s, PIN) + (
P2, +P21)+(P2tr P22) +,”
r ("zN + PtN) + "' r ("
lJ+ + "M+) + (PM21PM2') +
The signal charges accumulated in ``' + (PMN l ``MN) are read out together, and in the B field, the signal charges are spatially 180% perpendicular to the two PDs (Pi, Pi) read out in the A field. Two consecutive PDs with different degree phases (P, LP, □), (P+t, P+s),
−, (P21.P2□), ω22 + “23)
+”'(”)j l'+ PM□) + (P)421
The signal charges accumulated in 2M3) are also read out. Such a signal charge transfer mode is called a field accumulation mode. In this case, since the spatial phases of the signals read out in the A and B fields differ by 180 degrees in the vertical direction, 2NXM sample points are obtained from the entire photosensitive area.

なおPD(Pi 、 Pi )から垂直CCD(C,・
C2パ°・CM)への信号電荷転送はPDと垂直CCD
との間に設けられたフィールドシフトゲート(以下FS
Gと呼ぶ)(4)にパルス磁圧を印加して行う。
Note that from PD (Pi, Pi) to vertical CCD (C, ·
Signal charge transfer to C2 (CM) is performed by PD and vertical CCD.
Field shift gate (hereinafter referred to as FS) installed between
(referred to as G) (4) is performed by applying pulsed magnetic pressure.

第2図(a)は第1図+7) IT−CCDニオはルF
SG(4)ニ印加するシ圧波形を、第2図(b)は信号
出力波形を、第2d(c)は高速シャッタ時のシャッタ
開閉を各々示す。すなわち第21図(alに示すように
FSG (41に高レベル底圧VHが印加されている同
にPDに蓄積すれている信号電荷が垂直CODへ移動さ
れ、第2図(blに示すように例えばAフィールド期間
で蓄積された信号電荷が出力部(2)よりBフィールド
期間に読出される。この信号出力を8人とすると、Bフ
ィールドでPDに蓄積された信号電荷による信号出力S
Bは1フイ一ル°ド期間遅れて続いて読出される。
Figure 2 (a) is Figure 1 + 7) IT-CCD is LeF
2(b) shows the signal output waveform, and FIG. 2(c) shows the shutter opening/closing during high-speed shutter. That is, as shown in Fig. 21 (al), the high level bottom pressure VH is applied to the FSG (41). At the same time, the signal charge accumulated in the PD is moved to the vertical COD, and as shown in Fig. 2 (bl) For example, the signal charge accumulated in the A field period is read out from the output section (2) during the B field period.If this signal output is 8 people, the signal charge S generated by the signal charge accumulated in the PD in the B field is output.
B is subsequently read out with a delay of one field period.

この扇合第1図で説明しiように全てのPDでAフィー
ルド期間で蓄積された信号な荷が全て垂直CCDに移動
された後新たにBフィールドでの信号蓄積が行われる。
As explained in FIG. 1, after all the signal loads accumulated in the A field period in all PDs are moved to the vertical CCD, signal accumulation in the B field is newly performed.

従って第2図(b)に示すようにBフィールドでの信号
出力SBが辱られるためには、Bフィールド期間に何ら
かの光入力が必要である。
Therefore, in order for the signal output SB in the B field to be degraded as shown in FIG. 2(b), some kind of optical input is required during the B field period.

しかるに第2図(c)に示すように例えば1/1000
秒だけ光学シャッタが開きその間だけ光入力があるよう
な高速シャッタ動作においては、Aフィールド信号出力
SAは得られるがBフィールド信号出力SBは傅らルな
いこと、/こなる。これは第1図で説明したところの感
光領域全域から2NXM個のサンプル点が得られず、高
速シャッタ動作でi N X M個のサンプル点しか得
られないこと全意味する。
However, as shown in Figure 2(c), for example, 1/1000
In a high-speed shutter operation in which the optical shutter is opened for only a second and light is input during that time, the A-field signal output SA is obtained, but the B-field signal output SB remains unchanged. This means that 2NXM sample points cannot be obtained from the entire photosensitive area as explained in FIG. 1, but only iNXM sample points can be obtained by high-speed shutter operation.

従って高速シャッタ動作では前述したように垂直方向の
画素数が半分になり、解像度が大幅に低下してしまう。
Therefore, in high-speed shutter operation, the number of pixels in the vertical direction is halved as described above, resulting in a significant drop in resolution.

以上述べたように、従来の方式で解像度を低下させずに
高速シャッタ動作を行うとしても高々1/60秒までし
かできず、これ以上の高速シャッタ動作を行おうとする
と、解像度が大幅に低下してしまい、実用に供すること
ができない。
As mentioned above, even if high-speed shutter operation can be performed using conventional methods without reducing resolution, it can only be done up to 1/60 seconds at most, and if you try to perform shutter operation faster than this, the resolution will drop significantly. Therefore, it cannot be put to practical use.

〔発明の目的〕[Purpose of the invention]

本発明は上記の点に鑑みなされたもので、解像度を低下
させることなく高速シャッタ動作を可能とした固体撮像
装置の駆動方式を提供することを目的とする。
The present invention has been made in view of the above points, and it is an object of the present invention to provide a driving method for a solid-state imaging device that enables high-speed shutter operation without reducing resolution.

〔発明の概要〕[Summary of the invention]

本発明は固体撮像装置への入射光像の通過金制到するた
めの光学シャッタの開口期間を、感光部に蓄積された信
号電荷を読み出し部に同時に転送せしめる動作の前後に
2いて、同じ期間だけ設けるようにしたことを特徴とす
る0 〔発明の効果〕 このようにした本発明によれば、信号電荷の読み出し部
への転送動作の前及び後で感光部で信号電荷が発生・蓄
積されるため出力部からはその両方の信号電荷が読み出
されることとなり、かつ1/1000秒程度の高速シャ
ッタ動作が容易に達成されるため、特に成子カメラにと
って極めて有効となる。
In the present invention, the opening period of the optical shutter for controlling the passage of the incident light image to the solid-state imaging device is set to two times before and after the operation to simultaneously transfer the signal charges accumulated in the photosensitive part to the readout part, and the opening period is the same. [Effects of the Invention] According to the present invention, signal charges are generated and accumulated in the photosensitive section before and after the signal charge transfer operation to the readout section. Therefore, both signal charges are read out from the output section, and a high-speed shutter operation of about 1/1000 seconds can be easily achieved, which is extremely effective especially for the Naruko camera.

〔発明の実施例〕[Embodiments of the invention]

以下図面を用いて本発明の詳細な説明する。 The present invention will be described in detail below using the drawings.

第1図は本発明の固体撮像装置における駆動方式の一実
施例を示す図で、第1図(a):r’f、フィールドシ
フトゲ−) (F’SG)に印加する・成田波形を示す
FIG. 1 is a diagram showing an embodiment of the driving method in the solid-state imaging device of the present invention. FIG. 1(a): Narita waveform applied to r'f, field shift gate show.

すなわち第1図に示したIT−CCDのFSG (41
に高レベル電圧vHを印加することによりPD (PI
 、P+ )に蓄積された信号電荷全垂直CCD (C
,、C,、、、、、CM)に移動せしめる。
In other words, the FSG (41
PD (PI
, P+ ) accumulated in the total vertical CCD (C
, , C, , , , , CM).

ここで、例えばビデオカメラのように連続して各フィー
ルドの画像信号を得る場合は上記VH印加パルスは1フ
イールド毎に繰返し印加されるが、ル子カメラに2いて
は瞬時の画像を撮像するため、第1図(33に示すよう
に少なくとも2個でよい。また印加パルス幅Ts14 
P Dから垂直C’CDへの信号電荷移動期間で、1μ
〜10μ秒である。
For example, when obtaining image signals for each field continuously as in a video camera, the above VH application pulse is repeatedly applied for each field, but in the case of a video camera, an instantaneous image is captured. , at least two as shown in FIG. 1 (33). Also, the applied pulse width Ts14
During the signal charge movement period from PD to vertical C'CD, 1μ
~10 μsec.

第1図(blはシャッタ開口期間を示す。この実施例に
よ仇ば本図に示すように、高レベル成圧VH保持期間に
またがる期間Toだけ開口させる。この期間Toは例え
ば1/1000秒(1m秒)である。ここで、シャッタ
が開口してTo/2期間後、即ち開口期間の中心時期を
第1図(alO高レベし電圧保持期間Tsの終端に一致
させることが望ましい。これは、第1図(alで示した
高レベル電圧印加期間にもPDに光照射があり、この光
照射によって発生した信号4荷が高レベル電圧印加期間
に垂直CCDに流入するからである。
FIG. 1 (bl indicates the shutter opening period. In this embodiment, as shown in this figure, the shutter is opened only for a period To that spans the high level pressure VH holding period. This period To is, for example, 1/1000 seconds. (1 ms).Here, it is desirable that after the To/2 period after the shutter opens, that is, the center time of the opening period, coincides with the end of the voltage holding period Ts when the alO is at a high level (see FIG. 1). This is because the PD is irradiated with light even during the high-level voltage application period shown in FIG. 1 (al), and the signal 4 generated by this light irradiation flows into the vertical CCD during the high-level voltage application period.

このように高レベル電圧vHの終端を中心fc Lで、
その前後にTo/2ずつ開口せしめることにより、前半
の開口期間To /2でPDに発生し蓄積された信号電
荷は高レベル威圧Vo[Iolの印加により垂直CCD
に移送され、後半の開口期間To / 2でFDに発生
し蓄積された信号電荷は、次の高しペルシ圧VH(11
3の印加によシ垂直CC’Dに移送される。その結果信
号出力は第1図(C)l/c示すようにAフィールドの
信号SAとBフィールドの信号SBの両方が得られるこ
とになる。
In this way, the terminal of high level voltage vH is centered at fcL,
By opening To/2 before and after that, the signal charge generated and accumulated in the PD during the opening period To/2 in the first half is transferred to the vertical CCD by applying a high level pressure Vo[Iol.
The signal charges generated and accumulated in the FD in the second half opening period To/2 are transferred to the next high pelsi pressure VH (11
By application of 3, it is transferred vertically to CC'D. As a result, both the A field signal SA and the B field signal SB are obtained as signal outputs as shown in FIG. 1(C) l/c.

ここで上述のようにシャッタ開口期間の中心が高しペル
シ圧■Hの終端に一致しているため、Aフィールド、B
フィールドにおける光照射期間は一致しており、従って
信号出力SAとSBのレベルば1ぼ同じである。
Here, as mentioned above, since the center of the shutter opening period coincides with the end of the high persi pressure ■H, the A field and the B field
The light irradiation periods in the field are the same, so the levels of the signal outputs SA and SB are almost the same.

このようにFSGへ印加する高レベル電圧■H保持期間
にまたがるようにシャッタを開口させて光入射を行うと
いう全く新規な方式を採用することにより、例えば1/
1000秒という高速シャッタ動作を必要とする場合に
おいてもA 、 B’両タフイールド信号を出力するこ
とができる。従って解像度を低下させることなくシ子カ
メラに適用することができる。
By adopting this completely new method of opening the shutter and allowing light to enter over the high-level voltage ■H holding period applied to the FSG, for example,
Even when a high-speed shutter operation of 1000 seconds is required, both A and B' tough-field signals can be output. Therefore, it can be applied to a Shiko camera without reducing the resolution.

尚、上述したとうシVH印加パルスの終端時点とTo 
/2時点を完全に一致させることが望ましいが、■H印
加パルスの幅Tsは1μ秒程度であるため、シャッタ開
口期間Toを例えば1/1000秒(1m秒)とすると
、Tsはシャッタ開口時間Toの0.1%程度と極めて
短い。よってVH印加パルスの終端とシャッタ開口期間
の中心は多少のズレがあってもさしつかえない。
It should be noted that the above-mentioned terminal point of the VH application pulse and To
It is desirable to completely match the /2 time points, but since the width Ts of the H application pulse is about 1 μsec, if the shutter opening period To is, for example, 1/1000 seconds (1 msec), Ts is the shutter opening time. It is extremely short, about 0.1% of To. Therefore, there may be some deviation between the end of the VH application pulse and the center of the shutter opening period.

第4図は本発明の他の実施列を示すもので、第4図(a
)はFSGに印加する電圧波形、第4図fb)はシャッ
タ開口期間、第4図(C)は信号出力を夫々示す。
FIG. 4 shows another embodiment of the present invention, and FIG.
) shows the voltage waveform applied to the FSG, FIG. 4(fb) shows the shutter opening period, and FIG. 4(C) shows the signal output.

本実施例の場合は第4図(blに示されているように、
ンヤツタ開口はToの期間のうちのTIの期間に行われ
る。そしてこの期間TIはvH印・)0パルス00の前
後に位置する。言い換えればToの期間中のシャッタ閉
期間TM内にVH印加パルス00が位置する。
In the case of this embodiment, as shown in FIG. 4 (bl),
The arrow opening is performed during the period TI of the period To. This period TI is located before and after the vH mark.)0 pulse 00. In other words, the VH application pulse 00 is located within the shutter closing period TM during the period To.

そして、$1のシャツタ開期間12においてPDに発生
し、蓄積された信号電荷がvHパルスaOの印加によっ
て垂直CODに移送され、その後第2のシャツタ開期間
t131においてPL)に発生・蓄積された信号4荷が
VHハルスαDの印刀口によって垂直CCDに移送され
る。従って出力信号は第4図(clのように、兆、SB
の両方が得られる。
Then, the signal charges generated and accumulated in the PD during the shutter open period 12 of $1 are transferred to the vertical COD by the application of the vH pulse aO, and then generated and accumulated in the PL during the second shirt starter open period t131. The signal 4 load is transferred to the vertical CCD by the stamping port of VH Hals αD. Therefore, the output signal is as shown in Fig. 4 (cl, trillion, SB
You can get both.

この実施例によればシャッタ閉期間TM金設け、この期
間内にVHパルス印加(すなわちPDから垂直CCDへ
の信号電荷の移送)を行っているので、先の実施列のよ
りなりHパルス印加期間内の光入射による問題もなく、
またVHパルス印加は期間TM内(C位置しておれば・
よいため、シャツタ開口と■Hパルスの時間位相のズレ
の許容範囲も大きくとれるという利点がある。
According to this embodiment, the shutter closing period TM is provided, and the VH pulse is applied (that is, the signal charge is transferred from the PD to the vertical CCD) within this period. There is no problem with light entering inside.
In addition, the VH pulse application is within the period TM (if it is at the C position,
Therefore, there is an advantage that the allowable range for the time phase shift between the shutter opening and the ■H pulse can be widened.

ここでシャッタ速度は、第1のシャッタ開口期間qzの
始点から第2のシャッタ期間113の終点までの期間(
To)に相当する。
Here, the shutter speed is defined as the period from the start point of the first shutter opening period qz to the end point of the second shutter period 113 (
Corresponds to To).

このように本実施夕1jにおいても先の実施例と同様、
解像度を低下させることなく、高速シャッタ動作が可能
となる。
In this way, in this embodiment 1j, as in the previous embodiment,
High-speed shutter operation is possible without reducing resolution.

以上説明したように本発明によれば高速シャッタ動作金
高解像度で達成させることができるが、本発明は水平解
像度を向上させる方式においても極めて都合良く適用す
ることができ、以下これについて説明する。
As described above, according to the present invention, high resolution can be achieved with a high speed shutter operation, but the present invention can also be very conveniently applied to a method of improving horizontal resolution, which will be described below.

第5図(a)は、第1図に示したIT−CCDにおける
一部の画素部分を示すもので、図において(15−1)
FIG. 5(a) shows some pixel parts in the IT-CCD shown in FIG.
.

(15−2) 、(15−3)・・は画素を示す。これ
らの画素は、本図で示すようにその全てが光入射(C対
する有効領域ではなく、図中実線で示された開口部(1
6−1) 。
(15-2), (15-3), . . . indicate pixels. As shown in this figure, all of these pixels are not in the effective area for light incidence (C) but in the aperture (1) indicated by the solid line in the figure.
6-1).

(16−2) 、(16−3)・・のみが有効領域であ
る。上記の水平方向解像度を向上させる方式とは、この
点に着目して、固体撮像素子チップ基板を再生画像上で
水平方向に対応する方向に、入射像llc対して相対的
に1フレ一ム期間を1周期として振動させる方式である
。すなわち第5図(b)は固体撮像素子チップの撮動モ
ードの一例を示し、この例によればチップはX軸方向(
水平方向)に三角波状に撮動される。ここでAフィール
ド、Bフィールドの各フィールドでPDに蓄積された信
号電荷は、垂直ブランキング期間中の任意の期間に垂直
CCDに移動されるが、この移動期間と上述の固体撮像
チップ基板の撮動中心(第5図(b)中のA、B、C・
)とが同期される。
Only (16-2), (16-3), etc. are valid areas. The method for improving the horizontal resolution described above focuses on this point and moves the solid-state image sensor chip substrate in a direction corresponding to the horizontal direction on the reproduced image for one frame period relative to the incident image llc. This is a method that vibrates as one period. That is, FIG. 5(b) shows an example of the imaging mode of the solid-state image sensor chip, and according to this example, the chip is moved in the X-axis direction (
(horizontal direction) in a triangular wave pattern. Here, the signal charges accumulated in the PD in each field, A field and B field, are moved to the vertical CCD during an arbitrary period during the vertical blanking period, and during this movement period and the above-mentioned solid-state imaging chip substrate Center of motion (A, B, C in Figure 5(b)
) are synchronized.

その結果ダ]えばAフィールドにおいて光入射に対する
有効領域が例えば第5図(a)の実線で示された開口部
(16−1) 、(15−2) 、(16−3)  の
位置にあったとすると、Bフィールドではこれらの開口
部は第5図(a)中の点線で示す位置(17−1) 、
(17−2)、(17−3)・に移動し、これらの位置
で光入射による信号電荷の発生・蓄遺が行われることに
なる。これはとりもなおさず水平方向において1画素内
に2つのサンプル点が存在するため実効的に画素数が2
@になったことを意味し、これによって水平方向の解像
度が2倍に同上されることになる。
As a result, for example, in the A field, the effective area for light incidence is located at the apertures (16-1), (15-2), and (16-3) shown by solid lines in FIG. 5(a). Then, in the B field, these openings are at the positions (17-1) shown by the dotted lines in FIG. 5(a),
(17-2) and (17-3), and signal charges are generated and stored at these positions by light incidence. This is because there are two sample points within one pixel in the horizontal direction, so the effective number of pixels is 2.
This means that it has become @, which means that the horizontal resolution will be doubled.

このような方式に本発明を適用するには、第6図に示す
ようにすればよい。すなわち第6図(a)。
To apply the present invention to such a system, the method shown in FIG. 6 may be used. That is, FIG. 6(a).

(b)は第1図(aj 、 (blと全く同様のFSG
への印加信号とシャッタ開口期間を示し、第6図(C)
が上記振動の様子を示す。第6図(C)からも明らかな
ようにシャッタ開口期間Toの中心(多少のズレは許容
できる)が振動の中心になるように固体撮像チップ基体
が水平方向に振動される。なお第6図(dlは第1図f
c)と全く周環の出力信号図である。
(b) is an FSG that is exactly the same as in Figure 1 (aj, (bl)
Fig. 6(C) shows the applied signal to and the shutter opening period.
shows the above vibration. As is clear from FIG. 6(C), the solid-state imaging chip substrate is vibrated in the horizontal direction so that the center of the shutter opening period To (some deviation is allowable) becomes the center of vibration. In addition, Fig. 6 (dl is Fig. 1 f)
c) is a completely circumferential output signal diagram.

このようにすることにより垂直方向の解像度はもとよシ
、固体撮像チップ基板を水平方向に振動させることによ
って水平方向の解像度をも向上させることができ、高速
シャッタ動作時でも垂直水平両方向の高解像度化が達成
される。
By doing this, it is possible to improve not only the vertical resolution, but also the horizontal resolution by vibrating the solid-state imaging chip board in the horizontal direction, and even during high-speed shutter operation, it is possible to improve the resolution in both the vertical and horizontal directions. resolution is achieved.

なお本実施例における固体、撮像チップ基板の移動は三
角波状の場合であるが、正弦波状2台形状。
In this embodiment, the movement of the solid state and the imaging chip substrate is in the form of a triangular wave, but the movement is in the form of two trapezoidal sine waves.

階段状の変化でもよい。It may be a stepwise change.

第7図は第6図の変形例を示す。第7図(a)、 (b
lは第6図(al 、 (blと同、猥に、FSGへの
印加電圧とシャツタ開口を各々示し、第7図(C)は振
動モードを示す。すなわち第6図の場合は固体撮像チッ
プ基板はシャッタが開口している期間のみ振動するよう
にしたが、第7図の場合は、第7図(C)かられかるよ
うに、シャッタ開口以前に振動を開始させ、シャッタが
閉じられた以後もこの振動が持続するようにしている。
FIG. 7 shows a modification of FIG. 6. Figure 7 (a), (b)
l indicates the applied voltage to the FSG and the shutter opening, respectively, and Fig. 7 (C) indicates the vibration mode. In other words, in the case of Fig. 6, the solid-state imaging chip The board was made to vibrate only while the shutter was open, but in the case of Figure 7, as can be seen from Figure 7(C), the vibration was started before the shutter was opened, and the shutter was closed. This vibration will continue from now on.

このようにすれば振動が安定した状態でシャツタ開口を
行うことができ、シャッタ開口期間の中心と撮動中心と
を一致させるのが容易となる。また仮にシャッタ開口期
間の中心と振1中心との間(C第7図(d)(シャッタ
開口期間内を実線で、それ以外を点線で示す)に示すよ
うに多少のズレが生じたとしても、出力信号S入とSB
とで再生される各画素内で各々2個存在する見かけ上の
空間的画素内感度分布の重なりが犬きくなることによる
若干の解像度劣化が生ずるだけに止まり、横スジ発生に
は至らない。
In this way, shutter opening can be performed in a state where vibrations are stable, and it becomes easy to match the center of the shutter opening period with the imaging center. Furthermore, even if there is a slight deviation between the center of the shutter opening period and the center of oscillation 1, as shown in Figure 7(d) (the area within the shutter opening period is shown by a solid line, and the rest is shown by a dotted line), , output signal S input and SB
The overlapping of the two apparent spatial intra-pixel sensitivity distributions in each pixel reproduced by this method becomes sharp, resulting in only a slight deterioration in resolution, and does not result in the occurrence of horizontal stripes.

第8図は第6図の他の変・杉例を示す。すなわちこの方
式は上述のシャッタ開口期間中、固体撮像チップ基板を
入射光学像に対して相対的に一方向に移動させるように
したものである。
FIG. 8 shows another variation of the cedar shown in FIG. That is, in this method, the solid-state imaging chip substrate is moved in one direction relative to the incident optical image during the above-mentioned shutter opening period.

例えばシャッタ開口期間Toにおいて画素(15−1)
 。
For example, in the shutter opening period To, pixel (15-1)
.

(15−2) 、 I’15−3)・・・の水平ピッチ
をPM1開口水平方向長をLA、固体撮像基板の移動速
度をVBとしたとき、 の関係で撮像基板を移動させる。その、造果、画素(1
5−1) 、 (15−2) 、 (15−3)・・の
開口部(16−1) 、 (16−2) 。
(15-2), I'15-3)... When the horizontal pitch of the PM1 aperture is LA, and the moving speed of the solid-state imaging board is VB, the imaging board is moved according to the following relationship. The artifact, pixel (1
5-1), (15-2), (15-3)... openings (16-1), (16-2).

(16−3)・は、シャッタ開口期間の終端で、図示点
線で示す如く、元の開口部と接する位置まで移動される
。このよう;Cすれば撮像チップ基板の移動に関してシ
ャッタ開口期間との時間位相のズレを考麗する必要がな
くなるため、第7図において述べた位相ズレによる解像
度劣化の心配はなくなる。
At the end of the shutter opening period, (16-3) is moved to a position where it contacts the original opening, as shown by the dotted line in the figure. In this way, there is no need to consider the time phase shift with respect to the shutter opening period in relation to the movement of the imaging chip substrate, so there is no need to worry about the resolution deterioration due to the phase shift described in FIG.

なおシャッタ速度が変化した場合は上記VBをそれに応
じて変化させればよい。
Note that when the shutter speed changes, the above-mentioned VB may be changed accordingly.

第9図は前述した撮像チップ基板振動方式に本発明を適
用する場合の他の列を示す図である。
FIG. 9 is a diagram showing another row when the present invention is applied to the above-described imaging chip substrate vibration method.

纂9図(at 、 (b)は第4図fa) 、 (b)
と同一の図で、第9図fc)が振動モードを示す図であ
る。すなわち第9図iclのように、第1のシャッタ開
口期間(12でIdチップ基板は第1の所定の位置に静
止せしめ、シャツタ閉期間TMでチップ基板を振動(移
動)して、第2のシャッタ開口期間(131で第2の所
定の位置に静止tしめる。ここで移動用@dは、第5図
で説明した各画素内に2つのサンプル点を形成する方法
により定められる。また上述のように撮像基板チップの
移動はシャッタ閉期間TM内で行われるが、To<TM
が満足される限りシャツタ開口とチップ基板の時間位相
のズレ1d問題とならなIA。
Figure 9 (at, (b) is Figure 4 fa), (b)
FIG. 9 fc) is a diagram showing the vibration mode. That is, as shown in FIG. 9, the Id chip board is made to stand still at the first predetermined position during the first shutter opening period (12), and the chip board is vibrated (moved) during the shutter closing period TM, and the second The shutter opening period (131) is stopped at a second predetermined position. Here, the moving @d is determined by the method of forming two sample points in each pixel as described in FIG. As shown, the movement of the imaging board chip is performed within the shutter closing period TM, but To<TM
As long as is satisfied, the time phase difference 1d between the shutter opening and the chip substrate becomes a problem.

以上詳しく説明したように本発明は近時注目をあびてき
たいわゆるシ子カメラに極めて有用であるが、本発明に
お叶る固体撮像チップ基板は第1図に示したIT−CC
Dに限定されるもので−°はなく、各画素の感光部に発
生した信号載荷が任意の期間蓄積された後、同時に炉出
部に移動されるものであれば何でもよく、例えば光導濾
膜で光電変換を行ない信号電荷読出しを従来の固体、゛
最像素子で行ういわゆる2階建センサ等にも適用できる
。また第1図ではPDが垂直方向に一列に配列されtも
せしめた場合について説明したが、この前後に複数個の
■Hパルスが印クロされても何ら本発明の効果は損なわ
れない。
As explained in detail above, the present invention is extremely useful for so-called Shiko cameras, which have recently attracted attention.
D is not limited to −°, and any device may be used as long as the signal load generated in the photosensitive area of each pixel is accumulated for an arbitrary period of time and then transferred to the furnace exit at the same time, such as a light guide filter. The present invention can also be applied to a so-called two-story sensor in which photoelectric conversion is performed and signal charge readout is performed using a conventional solid-state image element. Further, in FIG. 1, a case has been described in which the PDs are arranged in a line in the vertical direction and t is also increased, but the effects of the present invention are not impaired in any way even if a plurality of ■H pulses are printed before and after this.

また本発明は固体囁像チップ基板金1個、2個あるいは
3個用いてカラー撮像を行うシ子カメラにも適用でき、
2枚、3枚式シ子カメラにおいては本発明と絵素ずらし
法を共用することにより更に高解像度の画像を得ること
もできる。
The present invention can also be applied to a Shiko camera that captures color images using one, two, or three solid-state image chip substrates.
In two- or three-element cameras, images with even higher resolution can be obtained by using the present invention and the pixel shifting method.

さらに本発明の説明では2次元のセンサについて述べた
が、1次元センサに対しても高解像度化ができる。
Further, in the description of the present invention, a two-dimensional sensor has been described, but high resolution can also be achieved with a one-dimensional sensor.

また第1図のI’I’−CCDは垂直方向のPD数が垂
直C(?Dの段数の2倍のものについて示したが、本発
明は垂直方向のPD数と垂直CCDの段数が同じものに
ついても適用できる。
In addition, the I'I'-CCD in FIG. 1 is shown for the case where the number of PDs in the vertical direction is twice the number of stages of vertical C (?D), but in the present invention, the number of PDs in the vertical direction and the number of stages of vertical CCD are the same. It can also be applied to things.

又、実施例では固体撮像チップ基板を再生画像上で水平
方向に対応する方向に相対的に移動せしめた場合につい
て説明したが、斜め方向に移動せしめる場合(Cついて
も適用できることは言うまでもない。
Further, in the embodiment, a case has been described in which the solid-state imaging chip substrate is relatively moved in a direction corresponding to the horizontal direction on the reproduced image, but it goes without saying that the present invention can also be applied to a case in which the solid-state imaging chip substrate is moved in a diagonal direction (C).

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はインターライン転送方式CCDの概略構成図、
第2図は第1図に示したCODを用いて高速シャッタ動
作を行なう場合の問題点を説明するための図、第1図は
不発明の固体撮像装置の駆動方式の一実施例を示す図、
第4図は本発明の固体撮像装置の駆動方式の他の実施例
を示す図、第5図乃至第9図は本発明の詳細な説明する
ための図である。 PII + Pll * PI3 + Pll + ”
’ * PMN + P≦:感光部CI + ”2 *
・・・、CM:垂直CC’D(1):水平CCDシフト
レジスタ (2):出力部 (4):フィールドシ7トゲート
Figure 1 is a schematic configuration diagram of an interline transfer type CCD.
FIG. 2 is a diagram for explaining the problems when performing a high-speed shutter operation using the COD shown in FIG. 1, and FIG. 1 is a diagram showing an example of the driving method of the uninvented solid-state imaging device. ,
FIG. 4 is a diagram showing another embodiment of the driving method of the solid-state imaging device of the present invention, and FIGS. 5 to 9 are diagrams for explaining the present invention in detail. PII + Pll * PI3 + Pll + ”
' * PMN + P≦: Photosensitive area CI + "2 *
..., CM: Vertical CC'D (1): Horizontal CCD shift register (2): Output section (4): Field shift gate

Claims (5)

【特許請求の範囲】[Claims] (1)半導体基板上に1次元もしくは2次元的に配列さ
れた感光部を有し、この感光部において光電変換された
後蓄積された信号電荷を読み出し部に同時に転送せしめ
て読み出す間、前記感光部が次につながる期間の光照射
による信号電荷の蓄積動作を行う固体撮像装置と、この
固体撮像装置に任意の期間入射光学像を照射するための
光学シャッタとを備え、前記蓄積された信号電荷を前記
読み出し部に同時に転送させる動作の前後において、前
記光学シャッタを同じ期間開口させるようにしたことを
特徴とする固体撮像装置の駆動方式。
(1) It has a photosensitive part arranged one-dimensionally or two-dimensionally on a semiconductor substrate, and the signal charges accumulated after photoelectric conversion in the photosensitive part are simultaneously transferred to a readout part and read out. A solid-state imaging device that performs an operation of accumulating signal charges by light irradiation during a period in which a section is connected to the next, and an optical shutter for irradiating an incident optical image to this solid-state imaging device for an arbitrary period, 1. A driving method for a solid-state imaging device, characterized in that the optical shutter is opened for the same period before and after an operation of simultaneously transferring images to the reading section.
(2)前記光学シャッタの開口期間は、前記感光部に蓄
積された信号電荷を前記読み出し部に転送させるための
制御パルス信号の終端を中心としてその前後に連続して
同じ期間だけ設けられることを特徴とする特許請求の範
囲第1項記載の固体撮像装置の駆動方式。
(2) The opening period of the optical shutter is provided for the same continuous period before and after the end of the control pulse signal for transferring the signal charge accumulated in the photosensitive section to the readout section. A driving method for a solid-state imaging device according to claim 1.
(3)前記光学シャッタの開口期間は、少なくとも前記
感光部に蓄積された信号電荷を前記読み出し部に転送さ
せるための制御パルス印加期間を除いて、この制御パル
ス印加期間の前後に同じ期間だけ設けられることを特徴
とする特許請求の範囲第1項記載の固体撮像装置の駆動
方式。
(3) The opening period of the optical shutter is set to the same period before and after the control pulse application period, excluding at least the control pulse application period for transferring the signal charge accumulated in the photosensitive section to the readout section. 2. A driving method for a solid-state imaging device according to claim 1, wherein:
(4)前記固体撮像装置は、その固体撮像基板チップが
、前記感光部に蓄積された信号電荷を前記読み出し部に
同時に転送させる動作期間を移動中心として、再生画像
上で水平方向に対応する方向に入射光像に対して相対的
に移動されるものであることを特徴とする特許請求の範
囲第1項記載の固体撮像装置の駆動方式。
(4) The solid-state imaging device moves in a direction corresponding to the horizontal direction on the reproduced image, with the solid-state imaging substrate chip moving around an operation period in which signal charges accumulated in the photosensitive section are simultaneously transferred to the readout section. 2. A driving method for a solid-state imaging device according to claim 1, wherein the solid-state imaging device is moved relative to an incident light image.
(5)前記固体撮像装置は、その固体撮像基板チップが
、前記感光部に蓄積された信号電荷を前記読み出し部に
同時に転送させる動作期間を移動中心として、再生画像
上で斜め方向に対応する方向に入射光像に対して相対的
に移動されるものであることを特徴とする特許請求の範
囲第1項記載の固体撮像装置の駆動方式。
(5) The solid-state imaging device moves in a direction corresponding to an oblique direction on a reproduced image, with the solid-state imaging substrate chip moving around an operation period in which signal charges accumulated in the photosensitive section are simultaneously transferred to the readout section. 2. A driving method for a solid-state imaging device according to claim 1, wherein the solid-state imaging device is moved relative to an incident light image.
JP1160801A 1989-06-26 1989-06-26 Driving system for solid-state image pickup device Granted JPH0270181A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1160801A JPH0270181A (en) 1989-06-26 1989-06-26 Driving system for solid-state image pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1160801A JPH0270181A (en) 1989-06-26 1989-06-26 Driving system for solid-state image pickup device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57051418A Division JPS58169966A (en) 1982-03-31 1982-03-31 Drive system for solid-state image pickup device

Publications (2)

Publication Number Publication Date
JPH0270181A true JPH0270181A (en) 1990-03-09
JPH0415670B2 JPH0415670B2 (en) 1992-03-18

Family

ID=15722740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1160801A Granted JPH0270181A (en) 1989-06-26 1989-06-26 Driving system for solid-state image pickup device

Country Status (1)

Country Link
JP (1) JPH0270181A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155010A (en) * 1976-06-18 1977-12-23 Hitachi Ltd Solid image pickup unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155010A (en) * 1976-06-18 1977-12-23 Hitachi Ltd Solid image pickup unit

Also Published As

Publication number Publication date
JPH0415670B2 (en) 1992-03-18

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