JPH02724U - - Google Patents
Info
- Publication number
- JPH02724U JPH02724U JP1988077243U JP7724388U JPH02724U JP H02724 U JPH02724 U JP H02724U JP 1988077243 U JP1988077243 U JP 1988077243U JP 7724388 U JP7724388 U JP 7724388U JP H02724 U JPH02724 U JP H02724U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- pipe
- substrate
- window
- discharging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988077243U JPH02724U (pt) | 1988-06-13 | 1988-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988077243U JPH02724U (pt) | 1988-06-13 | 1988-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02724U true JPH02724U (pt) | 1990-01-05 |
Family
ID=31302240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988077243U Pending JPH02724U (pt) | 1988-06-13 | 1988-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02724U (pt) |
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1988
- 1988-06-13 JP JP1988077243U patent/JPH02724U/ja active Pending