JPH0272996U - - Google Patents

Info

Publication number
JPH0272996U
JPH0272996U JP1988152362U JP15236288U JPH0272996U JP H0272996 U JPH0272996 U JP H0272996U JP 1988152362 U JP1988152362 U JP 1988152362U JP 15236288 U JP15236288 U JP 15236288U JP H0272996 U JPH0272996 U JP H0272996U
Authority
JP
Japan
Prior art keywords
directions
exposed
moving
exposure apparatus
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988152362U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0624799Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988152362U priority Critical patent/JPH0624799Y2/ja
Publication of JPH0272996U publication Critical patent/JPH0272996U/ja
Application granted granted Critical
Publication of JPH0624799Y2 publication Critical patent/JPH0624799Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP1988152362U 1988-11-22 1988-11-22 露光装置における被露光部材位置決め装置 Expired - Lifetime JPH0624799Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988152362U JPH0624799Y2 (ja) 1988-11-22 1988-11-22 露光装置における被露光部材位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988152362U JPH0624799Y2 (ja) 1988-11-22 1988-11-22 露光装置における被露光部材位置決め装置

Publications (2)

Publication Number Publication Date
JPH0272996U true JPH0272996U (it) 1990-06-04
JPH0624799Y2 JPH0624799Y2 (ja) 1994-06-29

Family

ID=31427221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988152362U Expired - Lifetime JPH0624799Y2 (ja) 1988-11-22 1988-11-22 露光装置における被露光部材位置決め装置

Country Status (1)

Country Link
JP (1) JPH0624799Y2 (it)

Also Published As

Publication number Publication date
JPH0624799Y2 (ja) 1994-06-29

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