JPH0273052U - - Google Patents
Info
- Publication number
- JPH0273052U JPH0273052U JP15173488U JP15173488U JPH0273052U JP H0273052 U JPH0273052 U JP H0273052U JP 15173488 U JP15173488 U JP 15173488U JP 15173488 U JP15173488 U JP 15173488U JP H0273052 U JPH0273052 U JP H0273052U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron microscope
- heating
- heating lamp
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000007872 degassing Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Description
第１図は試料微動の平面断面図、第２図は本案
の一実施例の加熱ランプ装置の縦断面図である。
１……鏡体、２……試料室、３……対物レンズ
、４……励磁コイル、５……スペーサ、６……受
金具、７……球体軸受、８……保護筒、９……試
料、１０……試料ホルダー、１１……調整ネジ、
１２……スプリング、１３……移動棒、１４……
Ｏリング、１５……Ｏリング、１６……取付金具
、１７……Ｏリング、１８……気密端子、１９…
…加熱ランプ、２０……リード線、２１……メツ
シユ、２２……反射板。
FIG. 1 is a plan sectional view of a sample micromovement, and FIG. 2 is a vertical sectional view of a heating lamp device according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Mirror body, 2... Sample chamber, 3... Objective lens, 4... Excitation coil, 5... Spacer, 6... Bracket, 7... Spherical bearing, 8... Protective tube, 9... Sample, 10... Sample holder, 11... Adjustment screw,
12... Spring, 13... Moving rod, 14...
O-ring, 15...O-ring, 16...Mounting bracket, 17...O-ring, 18...Airtight terminal, 19...
...Heating lamp, 20...Lead wire, 21...Mesh, 22...Reflector.
Claims (1)
おいて、試料周辺部に輻射熱が集光するように加
熱ランプと反射板を配設して試料周辺部の加熱脱
ガスを行うようにしたことを特徴とする電子顕微
鏡。 ２ 上記反射板を試料自身に輻射熱が集光するよ
うに設け、試料を加熱するようにしたことを特徴
とする請求の範囲第１項に記載された電子顕微鏡
。 ３ 上記加熱ランプの表面を導電性の網で覆うよ
うにしたことを特徴とする請求の範囲第１項に記
載された電子顕微鏡。[Scope of Claim for Utility Model Registration] 1. In an electron microscope equipped with a heating lamp in the sample chamber, a heating lamp and a reflector are arranged so that the radiant heat is focused on the periphery of the sample, thereby degassing the periphery of the sample by heating. An electron microscope characterized by the following: 2. The electron microscope according to claim 1, wherein the reflector is provided so that radiant heat is focused on the sample itself, thereby heating the sample. 3. The electron microscope according to claim 1, wherein the surface of the heating lamp is covered with a conductive net.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15173488U JPH0273052U (en) | 1988-11-24 | 1988-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15173488U JPH0273052U (en) | 1988-11-24 | 1988-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273052U true JPH0273052U (en) | 1990-06-04 |
Family
ID=31426044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15173488U Pending JPH0273052U (en) | 1988-11-24 | 1988-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273052U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010103072A (en) * | 2008-10-21 | 2010-05-06 | Hironari Miyazaki | Baking mechanism for sample chamber of electron microscope |
-
1988
- 1988-11-24 JP JP15173488U patent/JPH0273052U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010103072A (en) * | 2008-10-21 | 2010-05-06 | Hironari Miyazaki | Baking mechanism for sample chamber of electron microscope |
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