JPH0273735U - - Google Patents
Info
- Publication number
- JPH0273735U JPH0273735U JP15330988U JP15330988U JPH0273735U JP H0273735 U JPH0273735 U JP H0273735U JP 15330988 U JP15330988 U JP 15330988U JP 15330988 U JP15330988 U JP 15330988U JP H0273735 U JPH0273735 U JP H0273735U
- Authority
- JP
- Japan
- Prior art keywords
- cooling coil
- drying device
- dried
- steam
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 239000003960 organic solvent Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案に係る蒸気乾燥装置の冷却コイ
ル部を示す縦断面図、第２図は従来蒸気乾繰装置
を示す断面図、第３図は乾燥後のウエーハに生じ
た染みの外観図である。
１……蒸気乾燥装置、２……フロン溶剤、３…
…ヒーター、４……蒸気、５……キヤリア、６…
…半導体ウエーハ、７……冷却コイル。
Fig. 1 is a vertical cross-sectional view showing the cooling coil section of the steam drying device according to the present invention, Fig. 2 is a cross-sectional view showing the conventional steam drying device, and Fig. 3 is an external view of stains on the wafer after drying. It is. 1... Steam drying device, 2... Freon solvent, 3...
...Heater, 4...Steam, 5...Carrier, 6...
...Semiconductor wafer, 7...Cooling coil.
Claims (1)
燥物を乾燥させる蒸気乾燥装置において、前記被
乾燥物を囲んで蒸気雰囲気中に設置された蒸気を
冷却して凝集させる冷却コイルの巻径を上方に向
けて漸次拡径し、該冷却コイルの上段巻線位置と
下段巻線位置とを径方向にずらせたことを特徴と
する蒸気乾燥装置。 In a steam drying device that boils an organic solvent and dries the material to be dried in the vapor atmosphere, the winding diameter of the cooling coil that surrounds the material to be dried and is placed in the vapor atmosphere to cool and condense the steam is set upward. 1. A steam drying device characterized in that the diameter of the cooling coil is gradually expanded toward , and the upper winding position and the lower winding position of the cooling coil are shifted in the radial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15330988U JPH0273735U (en) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15330988U JPH0273735U (en) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273735U true JPH0273735U (en) | 1990-06-05 |
Family
ID=31429032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15330988U Pending JPH0273735U (en) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273735U (en) |
-
1988
- 1988-11-25 JP JP15330988U patent/JPH0273735U/ja active Pending
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