JPH0274675A - Needle felt for abrasion - Google Patents
Needle felt for abrasionInfo
- Publication number
- JPH0274675A JPH0274675A JP63225690A JP22569088A JPH0274675A JP H0274675 A JPH0274675 A JP H0274675A JP 63225690 A JP63225690 A JP 63225690A JP 22569088 A JP22569088 A JP 22569088A JP H0274675 A JPH0274675 A JP H0274675A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- abrasive
- felt
- polishing
- cushion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005299 abrasion Methods 0.000 title 1
- 229920005989 resin Polymers 0.000 claims abstract description 44
- 239000011347 resin Substances 0.000 claims abstract description 44
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims abstract description 17
- 239000006061 abrasive grain Substances 0.000 claims abstract description 11
- 229920005992 thermoplastic resin Polymers 0.000 claims abstract description 8
- 239000002981 blocking agent Substances 0.000 claims abstract description 7
- 238000005498 polishing Methods 0.000 claims description 36
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 claims description 6
- 239000004816 latex Substances 0.000 claims description 2
- 229920000126 latex Polymers 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229920002635 polyurethane Polymers 0.000 claims description 2
- 239000004814 polyurethane Substances 0.000 claims description 2
- 239000004744 fabric Substances 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000006757 chemical reactions by type Methods 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000010494 dissociation reaction Methods 0.000 abstract 1
- 230000005593 dissociations Effects 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- WHOPEPSOPUIRQQ-UHFFFAOYSA-N oxoaluminum Chemical compound O1[Al]O[Al]1 WHOPEPSOPUIRQQ-UHFFFAOYSA-N 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 230000008023 solidification Effects 0.000 abstract 1
- 238000007711 solidification Methods 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000005470 impregnation Methods 0.000 description 10
- 238000013508 migration Methods 0.000 description 8
- 230000005012 migration Effects 0.000 description 8
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012948 isocyanate Substances 0.000 description 2
- 150000002513 isocyanates Chemical class 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 239000012209 synthetic fiber Substances 0.000 description 2
- 229920002994 synthetic fiber Polymers 0.000 description 2
- 229920006230 thermoplastic polyester resin Polymers 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002174 Styrene-butadiene Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Classifications
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
- D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
- D06M15/37—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- D06M15/564—Polyureas, polyurethanes or other polymers having ureide or urethane links; Precondensation products forming them
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
- Nonwoven Fabrics (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は研磨用フェルト、特に、テレビブラウン管の
パネルフェイス、平板ガラス、レンズ、シリコンウェハ
、ガリウム・ヒ素ウェハなどの研磨に用いて好適な研磨
用フェルトに関するものである。[Detailed Description of the Invention] [Field of Industrial Application] This invention is a polishing felt suitable for use in polishing felts, particularly panel faces of television cathode ray tubes, flat glass, lenses, silicon wafers, gallium arsenide wafers, etc. This relates to felt.
一般に従来の研磨用フェルトは、合成繊維をフェルト状
に構成したものをそのまま研磨フェルトとして用いる方
式と、多孔性湿式ウレタンなどで樹脂加工したフェルト
を使用する方式とに大別される。このうち前者(樹脂加
工しないもの)は、研磨速度が低く、研磨面の表面品位
も良くないため、樹脂加工フェルトを使う方式が主流に
なりつつある。Conventional polishing felts are generally divided into two types: those that use synthetic fibers in the form of felt as is, and those that use felt processed with a resin such as porous wet urethane. Of these, the former (one that is not resin-treated) has a low polishing speed and poor surface quality of the polished surface, so methods that use resin-treated felt are becoming mainstream.
C発明が解決しようとする課題〕
しかしながら従来の湿式ウレタン樹脂加工フェルトは、
■有機溶剤を使用するため、作業環境の劣化を招く上、
溶剤の回収作業や洗浄水の水処理などの問題がつきまと
う。Problems to be solved by the invention C] However, conventional wet urethane resin-processed felt uses organic solvents, which leads to deterioration of the working environment.
Problems such as solvent recovery work and cleaning water treatment are common.
■熱可塑性の樹脂で加工したフェルトは、研磨時の摩擦
熱によって表面の樹脂及びステープルが溶融・膜化し、
砥粒を保持できなくなったり、硬質の異物が混入した際
に該異物を噛み込んで被研磨面を傷つけてしまうおそれ
がある。■For felt processed with thermoplastic resin, the resin and staples on the surface melt and form a film due to the frictional heat during polishing.
There is a risk that the abrasive grains will not be retained or that if hard foreign matter gets mixed in, the foreign matter will get caught and damage the surface to be polished.
といった問題点を有していた。It had such problems.
この発明は上記の点に鑑み、研磨速度が速い上に研磨面
の品位が高く、しかも研磨時の摩擦によるステープルの
溶融・膜化が発生しにくい研磨用ニードルフェルトを提
供することを目的としている。In view of the above points, it is an object of the present invention to provide a polishing needle felt that has a high polishing speed and a high quality polished surface, and is less likely to melt or form a film on staples due to friction during polishing. .
上記の目的を達成するため、この発明の研磨用ニードル
フェルトは、フェルト本体のバットに、100℃以下で
ブロック剤が解離する熱反応型ウレタン樹脂を30%以
上含むクッション体形成樹脂を含浸させ、ステープルの
周囲の空nをクッション性樹脂で満たすとともに、熱反
応型ウレタン樹脂のブロック化を利用して、研磨時の熱
でステープルや熱可塑性樹脂が溶融しても、全体として
膜化に至ることを防止できるように構成したちのである
。In order to achieve the above object, the abrasive needle felt of the present invention impregnates the butt of the felt body with a cushion body-forming resin containing 30% or more of a heat-reactive urethane resin whose blocking agent dissociates at 100° C. or lower. In addition to filling the void around the staple with a cushioning resin, by using a block of heat-reactive urethane resin, even if the staple and thermoplastic resin melt due to the heat during polishing, the entire film will form. It is designed to prevent this.
以下、この発明を添付の図面に示す一実施例に基づいて
説明する。Hereinafter, the present invention will be described based on an embodiment shown in the accompanying drawings.
第1図はステープルの周囲空間がクッション体で満たさ
れたこの発明の研磨用ニードルフェルトの原理構成図、
第2図はクッション体を含まない従来フェルトの原理構
成図、第3図(a)はステープルと樹脂ブロックの関係
を示す原理図、(b)はステープルの溶融・膜化を示す
原理図、第4図(a)は水系の熱反応型ウレタン樹脂の
含浸・乾燥加工プロセスを示す説明図、同図(b)は一
般の水系樹脂の含浸・乾燥加工プロセスを示す説明図、
第5図は空気圧入式回転ドラム方式によるブラウン管研
磨の実験例、第6図はディスク方式による同研磨例、第
7図はウェハの研磨例、をそれぞれ示している。FIG. 1 is a diagram showing the basic structure of the polishing needle felt of the present invention in which the space around the staple is filled with a cushion body;
Figure 2 is a diagram showing the basic structure of conventional felt that does not include a cushion body, Figure 3 (a) is a diagram showing the relationship between staples and resin blocks, Figure 3 (b) is a diagram showing the principle of melting and film formation of staples, and Figure 3 (a) is a diagram showing the principle of the relationship between staples and resin blocks. Figure 4 (a) is an explanatory diagram showing the impregnation and drying process of a water-based heat-reactive urethane resin, and Figure 4 (b) is an explanatory diagram showing the impregnation and drying process of a general water-based resin.
FIG. 5 shows an experimental example of cathode ray tube polishing using a pneumatic rotating drum system, FIG. 6 shows an example of polishing using a disk system, and FIG. 7 shows an example of wafer polishing.
図において1はフェルト本体で、該本体1は基布2と、
該基布2の上面にニードリング接結で形成した研磨用バ
ット3とからなっている。該本体■は、空気圧入回転ド
ラム方式を使って研磨を行う場合はチューブラ状、ディ
スク方式で研磨する場合は平板状に構成されている。基
布2は高強度で耐久性の織布からなり、研磨時の負荷に
耐えながらバット3を保持できるようになっている。In the figure, 1 is a felt main body, and the main body 1 includes a base fabric 2,
It consists of a polishing bat 3 formed on the upper surface of the base cloth 2 by needling. The main body (2) has a tubular shape when polishing is performed using a pneumatic rotating drum system, and a flat plate shape when polishing is performed using a disk system. The base fabric 2 is made of a high-strength and durable woven fabric, and is capable of holding the bat 3 while withstanding the load during polishing.
前記バット3は、合成繊維ステーブルSを主材としてお
り、立体的に錯綜するステープルSによって砥粒下を被
研磨面に向けて押圧支持できるようになっている。該ス
テープルSは、従来の研磨用ニードルフェルトのバット
で使用するものと同じポリエステルなどの熱可塑性繊維
からなり、樹脂含浸加工前のステープルSの空間充填密
度は0゜1〜0.5程度となっている。The bat 3 is mainly made of synthetic fiber stable S, and can be supported by pressing the bottom of the abrasive grain toward the surface to be polished by the staples S intertwined in three dimensions. The staple S is made of thermoplastic fibers such as polyester, which is the same as that used in conventional abrasive needle felt batts, and the space filling density of the staple S before resin impregnation is about 0°1 to 0.5. ing.
4はクッション体形成樹脂で、該クッション体形成樹脂
4はステープルSを包囲するクッション領域を形成して
砥粒保持能力を高めるためのもので、100℃以下でブ
ロック剤が解離する水系の熱反応型ウレタン樹脂U(ブ
ロック化イソシアネート)を30%以上含んだ樹脂から
なっている。Reference numeral 4 denotes a cushion body forming resin, and the cushion body forming resin 4 is used to form a cushion region surrounding the staple S to increase the abrasive grain retention ability, and is a water-based thermal reaction in which the blocking agent dissociates at 100°C or less. It is made of a resin containing 30% or more of type urethane resin U (blocked isocyanate).
ここで、ブロック剤としては開裂温度=約50”Cの重
亜硫酸塩を使用している。該クッション体形成樹脂4は
、バット3に対する重量比で10〜60%をバット3に
含浸させ、発泡・固化させることで適度な柔軟性を有し
、しかも−群のステープルSを保持するブロック群で構
成されるクッション体Kを形成するようになっている。Here, bisulfite having a cleavage temperature of approximately 50"C is used as the blocking agent. The cushion body forming resin 4 is impregnated into the batt 3 at a weight ratio of 10 to 60%, and foamed. - By solidifying, a cushion body K is formed which has appropriate flexibility and is composed of a group of blocks that hold the - group of staples S.
また、従来の研磨用ニードルフェルトで使用されていた
一般の水系樹脂では、含浸後の反応硬化時に、水分蒸発
とともに樹脂がバット3の表面に移動(マイグレーショ
ン)してしまうが、ここでは水系の熱反応型ウレタン樹
脂Uをクッション体形成樹脂4に混入しであるため、乾
燥時の熱によってブロック剤が解離して3次元網目構造
体になり、マイグレーションを起きにりくシている(表
3参照)。In addition, with general water-based resins used in conventional polishing needle felts, the resin migrates to the surface of the bat 3 as water evaporates during reaction hardening after impregnation, but here, the water-based resin migrates to the surface of the bat 3. Since the reactive urethane resin U is mixed into the cushion body forming resin 4, the blocking agent dissociates due to the heat during drying and becomes a three-dimensional network structure, making it difficult to cause migration (see Table 3). .
該クッション体形成樹脂4の構成成分のうち、熱反応型
ウレタン樹脂U以外の成分は、レゾルシノール樹脂、ポ
リウレタンやSBRなどに代表される水系の熱硬化性樹
脂や熱可塑性樹脂やラテックスであってもよい。さらに
、該熱硬化性樹脂内にO〜20%程度(対樹脂比)の砥
粒子(アルミナ、AJ2. O,系、SiO□系、Si
C系等)を混入し、研磨時のクッション材4の摩耗に応
じて該砥粒子を随時補給できるように構成してもよい。Among the constituent components of the cushion body forming resin 4, components other than the heat-reactive urethane resin U may be water-based thermosetting resins, thermoplastic resins, or latex such as resorcinol resin, polyurethane, and SBR. good. Furthermore, abrasive particles (alumina, AJ2.O, system, SiO□ system, Si
C-based abrasive particles, etc.) may be mixed in, and the abrasive particles may be replenished at any time according to the wear of the cushion material 4 during polishing.
しかして、フェルト本体1を構成する基布2の上面にニ
ードリング接結されたバット3にクッション体形成樹脂
4を含浸させると、樹脂4は水系の熱反応型ウレタンU
を含んでいるので、水分蒸発時にマイグレーションを発
生することがなく、バット3に対して均一な樹脂分布の
まま(砥粒子を混入した場合は、砥粒子を適度に分散支
持したまま)固化する。さらに、熱反応型ウレタン樹脂
Uのブロック化作用により、約50℃で反応を開始して
、バット3のステープルSを適寸のブロック群で保持し
てなるクッション体Kを形成することとなる。When the batt 3 bonded by needling to the upper surface of the base fabric 2 constituting the felt body 1 is impregnated with the cushion body forming resin 4, the resin 4 is made of water-based heat-reactive urethane U.
Since it contains, migration does not occur during water evaporation, and the resin is solidified with a uniform resin distribution in the vat 3 (if abrasive particles are mixed, the abrasive particles are appropriately dispersed and supported). Further, due to the blocking effect of the heat-reactive urethane resin U, the reaction starts at about 50° C., and the cushion body K is formed by holding the staples S of the bat 3 in blocks of appropriate size.
次に、このようにして形成した研磨用ニードルフェルト
を使い、砥粒スラリーを補給しながらガラス研磨等に適
用すると、従来のステープルのみの研磨用ニードルフェ
ルトに比べて、クッション体4による砥粒の保持能力が
大幅に増大し、研磨性が向上する。また、研磨時の摩擦
熱でステープルSや熱可塑性樹脂が溶融しても、その周
囲が熱硬化型の熱反応型ウレタン樹脂で包囲されている
ため、溶融ステープルや樹脂の膜化が起きにくく、研磨
布としての耐久性が増大する。Next, when using the polishing needle felt formed in this way and applying it to glass polishing etc. while replenishing the abrasive grain slurry, the cushion body 4 can reduce the abrasive grains compared to the conventional polishing needle felt with only staples. The holding capacity is greatly increased and the polishability is improved. In addition, even if the staple S or thermoplastic resin melts due to the frictional heat during polishing, the molten staple and resin are less likely to form a film because they are surrounded by thermosetting, heat-reactive urethane resin. Increased durability as a polishing cloth.
(実験例)
この発明の研磨用ニードルフェルトについて、ガラス研
磨性、表面品位、ウレタン含浸量とマイグレーション度
の関係、などを確認する実験を行ったところ、表1.2
.3のような結果を得ることができた。(Experimental example) An experiment was conducted to confirm the glass polishing property, surface quality, relationship between urethane impregnation amount and migration degree, etc. for the polishing needle felt of the present invention, and the results were shown in Table 1.2.
.. I was able to get results like 3.
この実験結果から、
■熱反応型ウレタン樹脂を含浸させると研磨性と耐久性
が格段に向上する。From the results of this experiment, it was found that: (1) Impregnation with heat-reactive urethane resin significantly improves polishability and durability.
■熱反応型樹脂の比率を30%以上にすればマイグレー
ションは著しく発生しに(くなる。■If the ratio of heat-reactive resin is 30% or more, migration will be significantly less likely to occur.
■バットのステープルは0.5〜6.Odの範囲内のも
のが表面品位に優れる。■Bat staples are 0.5-6. Those within the range of Od have excellent surface quality.
などが分かった。etc. I found out.
■、 軌 ウレタン 4′ による
の 上但し、
A:樹脂含浸加工なし
B:熱反応型ウレタン樹脂加工
C:同士アルミナ砥粒(樹脂比20χ)D:同士熱可塑
性ポリエステル樹脂
E:同十熱硬化性レゾルシノール樹脂
含浸率・35χ
ブロック化イソシアネート=エラストロンE−37(第
−工業製薬型)
熱可塑製ポリエステル樹脂=ボンデイック1040(大
日本インキ化学製)
但し、
被研摩物=板ガラス
a:o、8d
b:2.od
c:6.od
但し、
W=0.8 d、X=2d、Y=6d、 Z=10
d(いずれもポリエステルステープル)
但し、
t=フェルトの厚さ(mm)
◎=マイグレーショーンはとんど無し、優△=マイグレ
ーショーンあまり無し、良×=マイグレーショーン有り
、不良
〔発明の効果〕
上記のようにこの発明の研磨用ニードルフェルトは、フ
ェルト本体のバットに、100℃以下でブロック剤が解
離する熱反応型ウレタン樹脂を30%以上含むクッショ
ン体形成樹脂を含浸させたことを特徴としているので、
マイグレーションを起こすことなくバットに均一なりッ
ション体を形成することができる。また、クッション体
は砥粒の保持能力に優れ、被研磨面に対する密着性も向
上させるため、研磨効率を増大させると同時に、研磨面
の品位を向上させることができる。さらに、研磨時の熱
でステープルや熱可塑性樹脂が溶融することがあっても
、−群のステープルは熱硬化性の樹脂ブロックで包囲さ
れているため、ステープルや熱可塑性樹脂の膜化は生ぜ
ず、耐久性は格段に向上する。■, By urethane 4'
However, A: No resin impregnation B: Heat-reactive urethane resin processing C: Double alumina abrasive grains (resin ratio 20χ) D: Double thermoplastic polyester resin E: Same 10 thermosetting resorcinol resin impregnation rate 35χ block Chemical isocyanate = Elastron E-37 (Kogyo Seiyaku type) Thermoplastic polyester resin = Bondic 1040 (Dainippon Ink Chemical Co., Ltd.) However, object to be polished = plate glass a: o, 8d b: 2. od c:6. od However, W=0.8 d, X=2d, Y=6d, Z=10
d (Both are polyester staples) However, t = Thickness of felt (mm) ◎ = Almost no migration, Good △ = Not much migration, Good × = There is migration, poor [Invention [Effects] As described above, the polishing needle felt of the present invention has the butt of the felt body impregnated with a cushion body-forming resin containing 30% or more of a heat-reactive urethane resin whose blocking agent dissociates at 100°C or lower. Because it is a feature,
A uniform cushion body can be formed on the bat without causing migration. Further, the cushion body has excellent ability to retain abrasive grains and improves adhesion to the surface to be polished, so that it is possible to increase polishing efficiency and improve the quality of the polished surface. Furthermore, even if the staples and thermoplastic resin may melt due to the heat during polishing, the staples in group - are surrounded by a thermosetting resin block, so the staples and thermoplastic resin will not form a film. , durability is greatly improved.
従って、研磨効率、表面品位、耐久性、のいずれにおい
ても飛躍的な改善が実現され、生産性と品質向上に多大
な効果を奏するものである。Therefore, dramatic improvements are realized in polishing efficiency, surface quality, and durability, which has a great effect on improving productivity and quality.
第1図はステープルの周囲空間がクッション体で満たさ
れたこの発明の研磨用ニードルフェルトの原理構成図、
第2図はクッション体を含まない従来フェルトの原理構
成図、第3図(a)はステープルと樹脂ブロックの関係
を示す原理図、(b)はステープルの溶融・膜化を示す
原理図、第4図(a)は水系の熱反応型ウレタン樹脂の
含浸加工プロセスを示す説明図、同図(b)は一般の水
系樹脂の含浸加工プロセスを示す説明図、第5図は空気
圧入式回転ドラム方式によるブラウン管研磨の実験例、
第6図はディスク方式による同研磨例、第7図はウェハ
の研磨例、をそれぞれ示している。
1−・−フェルト本体
2・−基布
3−・・パ゛ント
4−クッション体形成樹脂
U−・・熱反応型ウレタン樹脂
K・−・クッション体
S−m−ステーブル
T・−砥粒
F−被研磨面
D・・・ディスク
B・−・基布
第1Kg!
第2図
第3図
第
図
(b)
マイグレーショフ発土
第
図
第
図
フFIG. 1 is a diagram showing the basic structure of the polishing needle felt of the present invention in which the space around the staple is filled with a cushion body;
Figure 2 is a diagram showing the basic structure of conventional felt that does not include a cushion body, Figure 3 (a) is a diagram showing the relationship between staples and resin blocks, Figure 3 (b) is a diagram showing the principle of melting and film formation of staples, and Figure 3 (a) is a diagram showing the principle of the relationship between staples and resin blocks. Figure 4 (a) is an explanatory diagram showing the impregnation process for water-based heat-reactive urethane resin, Figure 4 (b) is an explanatory diagram showing the impregnation process for general water-based resin, and Figure 5 is a pneumatic rotating drum. Experimental example of cathode ray tube polishing by method,
FIG. 6 shows an example of polishing using the disk method, and FIG. 7 shows an example of polishing a wafer. 1--Felt body 2--Base fabric 3--Pint 4-Cushion body forming resin U--Heat-reactive urethane resin K--Cushion body S-m-Stable T--Abrasive grain F-Surface to be polished D...Disk B--Base fabric 1st kg! Fig. 2 Fig. 3 Fig. (b) Fig. 2
Claims (3)
ク剤が解離する熱反応型ウレタン樹脂を30%以上含む
クッション体形成樹脂を含浸させたことを特徴とする研
磨用ニードルフェルト。(1) An abrasive needle felt characterized in that the butt of the felt body is impregnated with a cushion body-forming resin containing 30% or more of a heat-reactive urethane resin whose blocking agent dissociates at 100° C. or lower.
ウレタン樹脂以外の材質がポリウレタン、レゾルシノー
ル樹脂、熱可塑性樹脂、またはラテックスのいずれかで
ある特許請求の範囲第1項記載の研磨用フェルト。(2) The polishing felt according to claim 1, wherein the material of the cushion body forming resin other than the heat-reactive urethane resin is polyurethane, resorcinol resin, thermoplastic resin, or latex.
樹脂に対して重量比20%以下の砥粒を含んだものであ
る研磨用ニードルフェルト。(3) A polishing needle felt, wherein the cushion body forming resin contains abrasive grains in a weight ratio of 20% or less to the cushion body forming resin.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63225690A JP2673558B2 (en) | 1988-09-09 | 1988-09-09 | Needle felt for polishing |
| KR1019890005526A KR0136282B1 (en) | 1988-09-09 | 1989-04-26 | Needle felt for grinding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63225690A JP2673558B2 (en) | 1988-09-09 | 1988-09-09 | Needle felt for polishing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0274675A true JPH0274675A (en) | 1990-03-14 |
| JP2673558B2 JP2673558B2 (en) | 1997-11-05 |
Family
ID=16833264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63225690A Expired - Lifetime JP2673558B2 (en) | 1988-09-09 | 1988-09-09 | Needle felt for polishing |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2673558B2 (en) |
| KR (1) | KR0136282B1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005059179A (en) * | 2003-08-19 | 2005-03-10 | Japan Vilene Co Ltd | Precision abrasive |
| JP2008190546A (en) * | 2007-01-31 | 2008-08-21 | Iwai Kikai Kogyo Co Ltd | Diaphragm fixing structure of diaphragm valve |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5410565A (en) * | 1977-06-27 | 1979-01-26 | Koyosha Kk | Polishing cloth |
| JPS5459495A (en) * | 1977-10-12 | 1979-05-14 | Toray Industries | Processing of fiber structure |
-
1988
- 1988-09-09 JP JP63225690A patent/JP2673558B2/en not_active Expired - Lifetime
-
1989
- 1989-04-26 KR KR1019890005526A patent/KR0136282B1/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5410565A (en) * | 1977-06-27 | 1979-01-26 | Koyosha Kk | Polishing cloth |
| JPS5459495A (en) * | 1977-10-12 | 1979-05-14 | Toray Industries | Processing of fiber structure |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005059179A (en) * | 2003-08-19 | 2005-03-10 | Japan Vilene Co Ltd | Precision abrasive |
| JP2008190546A (en) * | 2007-01-31 | 2008-08-21 | Iwai Kikai Kogyo Co Ltd | Diaphragm fixing structure of diaphragm valve |
Also Published As
| Publication number | Publication date |
|---|---|
| KR0136282B1 (en) | 1998-04-28 |
| JP2673558B2 (en) | 1997-11-05 |
| KR900004459A (en) | 1990-04-12 |
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