JPH0275910A - 光学式エンコーダ - Google Patents

光学式エンコーダ

Info

Publication number
JPH0275910A
JPH0275910A JP22898588A JP22898588A JPH0275910A JP H0275910 A JPH0275910 A JP H0275910A JP 22898588 A JP22898588 A JP 22898588A JP 22898588 A JP22898588 A JP 22898588A JP H0275910 A JPH0275910 A JP H0275910A
Authority
JP
Japan
Prior art keywords
light
slit
light receiving
light source
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22898588A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577966B2 (de
Inventor
Toshitsugu Ueda
敏嗣 植田
Fusao Kosaka
幸坂　扶佐夫
Kunio Kazami
邦夫 風見
Hiroshi Nakayama
博史 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP22898588A priority Critical patent/JPH0275910A/ja
Publication of JPH0275910A publication Critical patent/JPH0275910A/ja
Publication of JPH0577966B2 publication Critical patent/JPH0577966B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP22898588A 1988-09-13 1988-09-13 光学式エンコーダ Granted JPH0275910A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22898588A JPH0275910A (ja) 1988-09-13 1988-09-13 光学式エンコーダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22898588A JPH0275910A (ja) 1988-09-13 1988-09-13 光学式エンコーダ

Publications (2)

Publication Number Publication Date
JPH0275910A true JPH0275910A (ja) 1990-03-15
JPH0577966B2 JPH0577966B2 (de) 1993-10-27

Family

ID=16884963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22898588A Granted JPH0275910A (ja) 1988-09-13 1988-09-13 光学式エンコーダ

Country Status (1)

Country Link
JP (1) JPH0275910A (de)

Also Published As

Publication number Publication date
JPH0577966B2 (de) 1993-10-27

Similar Documents

Publication Publication Date Title
US5889280A (en) Apparatus for measuring displacement
US8890057B2 (en) Optical position-measuring device
US5604345A (en) Optical encoder having a combination of a uniform grating and a non-uniform grating
US6392224B1 (en) Scanning unit for an optical position measuring device
JP3045452B2 (ja) 光電測長または測角装置
US5977539A (en) Optical position-measuring device having reference mark graduation structures with chirp fields
US4677293A (en) Photoelectric measuring system
JP5147367B2 (ja) エンコーダ
JPH0131127B2 (de)
JPH05248895A (ja) 光−電子式目盛読取装置
US10209102B2 (en) Position detection apparatus, machine tool apparatus, and exposure apparatus
JPH07286861A (ja) 光学変換器および方法
JPH06258102A (ja) 測定装置
EP2295940A2 (de) Optischer Kodierer zum Erhalt von Verschiebungsinformation von Objekten
US6674066B1 (en) Encoder
JP4936980B2 (ja) 光学エンコーダ
US7112782B2 (en) Optical position measuring system
JP2002543375A (ja) 光学位置測定装置
EP2284498B1 (de) Optische Codiervorrichtung
US4883955A (en) Optical encoder with converging means
JP2562479B2 (ja) 反射式ｘｙエンコーダ
US7123354B2 (en) Optical position measuring device
JPH0275910A (ja) 光学式エンコーダ
JP4445498B2 (ja) 透過型光学エンコーダ
US20040183701A1 (en) Projection-type rotary encoder