JPH027603U - - Google Patents
Info
- Publication number
- JPH027603U JPH027603U JP8708288U JP8708288U JPH027603U JP H027603 U JPH027603 U JP H027603U JP 8708288 U JP8708288 U JP 8708288U JP 8708288 U JP8708288 U JP 8708288U JP H027603 U JPH027603 U JP H027603U
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- surface protection
- highly elastic
- elastic surface
- crystal substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Description
第１図は本考案による光導波路素子の一実施例
を示す断面図、第２図は封止材料を厚さ１０μｍ
以下に薄膜化した高弾性表面保護材料で兼用した
構造の断面図、第３図は光導波路、電極近傍のみ
を厚さ１０μｍ以下に薄膜化した高弾性表面保護
材料で覆つた構造の断面図、第４図は本考案の作
用を説明するための図である。
１１…結晶基板、１２…光導波路、１３…電極
、１４，２４，３４…厚さ１０μｍ以下に薄膜化
した高弾性表面保護材料、１５…容器、１６…封
止材料、１７…ヘリウムガス。
Figure 1 is a sectional view showing an embodiment of the optical waveguide device according to the present invention, and Figure 2 is a sectional view showing an embodiment of the optical waveguide device according to the present invention.
The following is a cross-sectional view of a structure in which a thin film of highly elastic surface protection material is used, and FIG. FIG. 4 is a diagram for explaining the operation of the present invention. DESCRIPTION OF SYMBOLS 11... Crystal substrate, 12... Optical waveguide, 13... Electrode, 14, 24, 34... Highly elastic surface protection material thinned to a thickness of 10 μm or less, 15... Container, 16... Sealing material, 17... Helium gas.
Claims (1)
近傍に形成された電極とからなる光導波路素子に
おいて、前記電極を覆つて形成され、前記結晶基
板に歪を発生させない厚さの高弾性表面保護材料
と、さらに少なくとも前記電極上の前記高弾性表
面保護材料が気密封止により保護されていること
を特徴とする光導波路素子。 In an optical waveguide element consisting of an optical waveguide formed on a crystal substrate and an electrode formed in the vicinity of the optical waveguide, a highly elastic surface protection is formed to cover the electrode and has a thickness that does not cause strain on the crystal substrate. An optical waveguide element, characterized in that the material and at least the highly elastic surface protection material on the electrodes are protected by hermetic sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8708288U JPH027603U (en) | 1988-06-29 | 1988-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8708288U JPH027603U (en) | 1988-06-29 | 1988-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH027603U true JPH027603U (en) | 1990-01-18 |
Family
ID=31311714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8708288U Pending JPH027603U (en) | 1988-06-29 | 1988-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027603U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5873494A (en) * | 1981-10-26 | 1983-05-02 | Nippon Kokan Kk <Nkk> | Method for preventing freezing of piping systems installed on ships |
-
1988
- 1988-06-29 JP JP8708288U patent/JPH027603U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5873494A (en) * | 1981-10-26 | 1983-05-02 | Nippon Kokan Kk <Nkk> | Method for preventing freezing of piping systems installed on ships |