JPH0279023U - - Google Patents
Info
- Publication number
- JPH0279023U JPH0279023U JP15869088U JP15869088U JPH0279023U JP H0279023 U JPH0279023 U JP H0279023U JP 15869088 U JP15869088 U JP 15869088U JP 15869088 U JP15869088 U JP 15869088U JP H0279023 U JPH0279023 U JP H0279023U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- parallel direction
- end plates
- side frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 8
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000002787 reinforcement Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Description
第１図および第２図は本考案の実施例を示すウ
エハ支持具の傾斜図、第３図は従来例を示す斜視
図である。
図中、１０……端板、２０……側枠、２１ａ，
２１ｂ……支持部、２２……補強部、２１ｃ……
ウエハ装着溝、３０……ウエハ。
FIGS. 1 and 2 are oblique views of a wafer support according to an embodiment of the present invention, and FIG. 3 is a perspective view of a conventional example. In the figure, 10... end plate, 20... side frame, 21a,
21b...support part, 22...reinforcement part, 21c...
Wafer mounting groove, 30... wafer.
Claims (1)
列に支持するウエハ支持具であつて、ウエハ並列
方向両端に位置する２枚の端板と、該端板間にウ
エハ並列方向にＹ状のウエハ収容部を形成する如
く架設された２枚の側枠とを有し、該側枠はウエ
ハ並列方向に延在する２条の支持部と、該支持部
間に架設される補強部とが一体形成されたはしご
状部材であり、かつ前記支持部内面側にウエハ装
着溝を有していることを特徴とするウエハ支持具
。 A wafer support that supports semiconductor wafers in parallel with a gap in the thickness direction, and includes two end plates located at both ends in the wafer parallel direction, and a Y-shaped wafer storage in the wafer parallel direction between the end plates. The side frame has two side frames installed so as to form a section, and the side frame is integrally formed with two supporting sections extending in the wafer parallel direction and a reinforcing section installed between the supporting sections. 1. A wafer support, characterized in that the support is a ladder-like member, and has a wafer mounting groove on the inner surface of the support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988158690U JPH079374Y2 (en) | 1988-12-06 | 1988-12-06 | Wafer support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988158690U JPH079374Y2 (en) | 1988-12-06 | 1988-12-06 | Wafer support |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0279023U true JPH0279023U (en) | 1990-06-18 |
| JPH079374Y2 JPH079374Y2 (en) | 1995-03-06 |
Family
ID=31439242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988158690U Expired - Lifetime JPH079374Y2 (en) | 1988-12-06 | 1988-12-06 | Wafer support |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079374Y2 (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346670A (en) * | 1976-10-08 | 1978-04-26 | Matsushita Electric Industrial Co Ltd | Electrostatic capaciyt coupling type touch switch |
| JPS5920629U (en) * | 1982-07-30 | 1984-02-08 | 株式会社テクニスコ | Diffusion jig |
| JPS5940444U (en) * | 1982-09-10 | 1984-03-15 | 住友軽金属工業株式会社 | suspended scaffolding |
| JPS5940443U (en) * | 1982-09-08 | 1984-03-15 | 三井造船株式会社 | Suspended scaffolding for building the equatorial ring |
| JPS6346670A (en) * | 1986-08-14 | 1988-02-27 | Matsushita Commun Ind Co Ltd | Disk cartridge |
| JPS63278225A (en) * | 1987-05-08 | 1988-11-15 | Teru Sagami Kk | Boat for heat treatment |
| JPH02123736A (en) * | 1988-11-02 | 1990-05-11 | Tel Sagami Ltd | Wafer boat for longitudinal heat treatment furnace |
-
1988
- 1988-12-06 JP JP1988158690U patent/JPH079374Y2/en not_active Expired - Lifetime
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346670A (en) * | 1976-10-08 | 1978-04-26 | Matsushita Electric Industrial Co Ltd | Electrostatic capaciyt coupling type touch switch |
| JPS5920629U (en) * | 1982-07-30 | 1984-02-08 | 株式会社テクニスコ | Diffusion jig |
| JPS5940443U (en) * | 1982-09-08 | 1984-03-15 | 三井造船株式会社 | Suspended scaffolding for building the equatorial ring |
| JPS5940444U (en) * | 1982-09-10 | 1984-03-15 | 住友軽金属工業株式会社 | suspended scaffolding |
| JPS6346670A (en) * | 1986-08-14 | 1988-02-27 | Matsushita Commun Ind Co Ltd | Disk cartridge |
| JPS63278225A (en) * | 1987-05-08 | 1988-11-15 | Teru Sagami Kk | Boat for heat treatment |
| JPH02123736A (en) * | 1988-11-02 | 1990-05-11 | Tel Sagami Ltd | Wafer boat for longitudinal heat treatment furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079374Y2 (en) | 1995-03-06 |