JPH028058A - liquid jet recording head - Google Patents

liquid jet recording head

Info

Publication number
JPH028058A
JPH028058A JP15796088A JP15796088A JPH028058A JP H028058 A JPH028058 A JP H028058A JP 15796088 A JP15796088 A JP 15796088A JP 15796088 A JP15796088 A JP 15796088A JP H028058 A JPH028058 A JP H028058A
Authority
JP
Japan
Prior art keywords
substrate
electrodes
liquid
recording head
orifice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15796088A
Other languages
Japanese (ja)
Inventor
Shigeru Terajima
茂 寺島
Yoshikazu Sakano
坂野 嘉和
Toshimitsu Kawase
俊光 川瀬
Masahiko Enari
正彦 江成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15796088A priority Critical patent/JPH028058A/en
Publication of JPH028058A publication Critical patent/JPH028058A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To facilitate high-density wiring and make it possible to omit a step and to achieve full-multiple orifice formation by providing an electro-thermal converter as a part of each of partition walls for defining liquid passages, and disposing discrete electrodes and a common electrodes to be connected to the converters on the side of a substrate and on the side opposite to the substrate. CONSTITUTION:A pair of heat generating resistors 5 provided for causing each of partition walls for defining liquid passages 4 to be entirely or patly an electro-thermal converter are erected oppositely to each other, on both sides of the liquid passage 4 in the vicinity of an orifice 3. Discrete electrodes 6 are provided on the upper side of a substrate 1, and are electrically connected respectively to the heat generating resistors 5, whereas a common electrode 7 is provided along the lower side of an orifice plate 2 in an area covering the heat generating resistors 5 provided respectively along the liquid passages 4 adjacent to each other. By this method it is possible to omit the step of providing the electro-thermal converters by a thin film forming technique. Since wiring can be simplified and, particularly, the discrete and common electrodes 6, 7 can be provided with sufficient widths, it is possible to restrict wiring resistance to a low value, and to restrain an electrical loss.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は液体噴射記録ヘットに関し、詳しくは記録液を
噴射して飛翔的液滴を形成し、記録を行なう液体噴射記
録ヘッドに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a liquid jet recording head, and more particularly to a liquid jet recording head that performs recording by jetting recording liquid to form flying droplets.

[従来の技術] インクジェット記録装置(液体噴射記録装置)は、記録
時における騒音の発生が無視し得る程度に極めて小さく
、かつ高速記録が可能であり、而も所謂普通紙に定着と
いう特別な処理を必要とせずに記録の行なえる点におい
て最近関心を集めている。
[Prior Art] An inkjet recording device (liquid jet recording device) generates negligible noise during recording, is capable of high-speed recording, and uses a special process of fixing onto plain paper. Recently, there has been a lot of interest in the fact that recording can be done without the need for .

その中でも、例えば特開昭54−518:17号公報、
ドイツ公開(DOLS)第2843064号公報に記載
されである液体噴射記録方式は、熱エネルギーを液体に
作用させて、液滴吐出の為の原動力を得るという点にお
いて、他の液体噴射記録方式とは、異なる特徴を有して
いる。
Among them, for example, Japanese Patent Application Laid-Open No. 54-518:17,
The liquid jet recording method described in DOLS No. 2843064 is different from other liquid jet recording methods in that it applies thermal energy to the liquid to obtain the driving force for ejecting droplets. , have different characteristics.

即ち、上記の公報に開示されている記録方式では、熱エ
ネルギーの作用を受けた記録液が急峻な体積の増大を伴
う状態変化を起こし、その状態変化に基つく作用力によ
って、記録ヘット先端のオリフィスから液体が吐出され
、飛翔的液滴か形成されて、その液滴を被記録部材に付
着させることにより記録が行われる。
That is, in the recording method disclosed in the above-mentioned publication, the recording liquid subjected to the action of thermal energy undergoes a state change accompanied by a sharp increase in volume, and the acting force based on this state change causes the tip of the recording head to change. Recording is performed by ejecting liquid from the orifice, forming flying droplets, and making the droplets adhere to a recording member.

殊に、DOLS第284:1064号公報に開示されて
いる液体噴射記録方式は、所謂drop−an dem
and記録法に極めて有効に適用されるばかりではなく
、記録ヘット部をfull 1ineタイプで高密度マ
ルチオリフィス化された記録ヘッドとして容易に具現化
出来るので、高解像度、高品質の画像を高速で得られる
という特徴を有している。
In particular, the liquid jet recording method disclosed in DOLS No. 284:1064 is a so-called drop-and-dem
Not only can it be applied extremely effectively to the AND recording method, but it can also be easily realized as a full 1ine type recording head with high density multi-orifices, making it possible to obtain high resolution and high quality images at high speed. It has the characteristic of being

ところで、このような高密度マルチノズル記録ヘッドの
特徴を最大限に活用する道として例えばA4版紙を記録
ヘッドを走査することなく、記録することが可能な、い
わゆる固定式一体型フルマルチヘッドの具現化を挙げる
ことができる。
By the way, one way to make the most of the features of such a high-density multi-nozzle recording head is to use a so-called fixed integrated full multi-head, which can record, for example, A4 size paper without scanning the recording head. One example is materialization.

いま、上述の記録方式に用いられる従来の記録ヘッドに
おける発熱抵抗体および電極の構成の2例を第3A図お
よび第3B図にそれぞれ示す。
Now, two examples of configurations of the heating resistor and electrodes in a conventional recording head used in the above recording method are shown in FIGS. 3A and 3B, respectively.

これらの図において、101は発熱抵抗体、102は個
別電極、103は共通電極である。
In these figures, 101 is a heating resistor, 102 is an individual electrode, and 103 is a common electrode.

そこで、これらのような構成によってA4版の短手方向
208mm幅に1mm当り16ノズルの記録ヘッドを同
一基板上に作成しようとすると、ノズルの数は208 
x16=3.328木にものぼり、発熱抵抗体101お
よびその両側の電極の数も同数必要となる。また、従来
の構成ではその電極102や103が導体の薄膜を同一
プロセスで成膜する工程によって得られるため、イ列え
ばAl1の5000人の膜ではそのシート抵抗が0.0
7Ω/口となり、第3A図のような電極構成とした場合
、上述のような高密度配線を行うと配線抵抗が1000
以上となり、電気的な損失が非常に大きい。
Therefore, if we try to create a recording head with 16 nozzles per 1 mm on the same substrate with a width of 208 mm in the transverse direction of an A4 size sheet using such a configuration, the number of nozzles will be 208.
x16=3.328 trees, and the same number of heating resistors 101 and the same number of electrodes on both sides thereof are also required. In addition, in the conventional configuration, the electrodes 102 and 103 are obtained by forming conductor thin films in the same process, so for example, a 5,000-layer film of Al1 has a sheet resistance of 0.0.
If the electrode configuration is as shown in Figure 3A, the wiring resistance will be 1000 ohms when high-density wiring is performed as described above.
As a result, the electrical loss is extremely large.

しかも、208mm幅に渡って無欠陥に均一に製造する
ことは高度な製造技術を要する。
Moreover, it requires advanced manufacturing technology to manufacture uniformly without defects over a width of 208 mm.

また、第3B図のような電極構成にすると、実装密度お
よび配線抵抗は第3A図に比べ半分でよいが、共通電極
103が、薄膜状でしかも208mmにも及ぶため、そ
の両端間の抵抗を小さくしなければ電位勾配が生じてし
まう。薄膜プロセスで電極を形成する以上、電極の面積
を広げたいことになるがノズルの構成等から、それは困
難であり、また、このように−基板上に電極と発熱抵抗
体とを積層させる従来の製法では膜厚や面積が制限され
ることによって配線の抵抗が高くなり、電気的な損失が
多いことなどの課題があった。
Furthermore, if the electrode configuration is as shown in FIG. 3B, the packaging density and wiring resistance can be reduced to half compared to those in FIG. If it is not made small, a potential gradient will occur. Since electrodes are formed using a thin film process, it is necessary to increase the area of the electrodes, but this is difficult due to the structure of the nozzle. The manufacturing method had issues such as limitations on film thickness and area, which resulted in high wiring resistance and high electrical loss.

[発明が解決しようとする課題] すなわち、上述したように従来の構成では、高密度のマ
ルチオリフィス化を図るために、その電極の配線形態か
らくる配線抵抗や電位勾配等に解決されなければならぬ
種々な課題がありだ。
[Problems to be Solved by the Invention] In other words, as mentioned above, in the conventional configuration, in order to achieve high-density multi-orifice, problems such as wiring resistance and potential gradient caused by the wiring form of the electrode must be solved. There are various challenges.

本発明の目的は、上述従来の問題点の解決を図り、高密
度配線が容易で、かつ工程の省略を図ることができ、フ
ルマルチオリフィス化するに好適な液体噴射記録ヘッド
を提供することにある。
An object of the present invention is to solve the above-mentioned conventional problems, and to provide a liquid jet recording head that facilitates high-density wiring, can eliminate steps, and is suitable for full multi-orifice construction. be.

[課題を解決するための手段] かかる目的を達成するために、本発明は、選択的に記録
液を吐出させて飛翔的液滴を発生させる複数のオリフィ
スと、複数のオリフィスが形成され、基板上の対向位置
に設けられたオリフィスプレートと、飛翔的液滴を形成
するための熱エネルギーを発生ずる電気熱変換体を複数
のオリフィスのそれぞれに対応して個別に設け、複数の
オリフィスのそれぞれに連通し、基板上の仕切壁により
分目された波路と、個別の電気熱変換体に接続された一
対の電極とを有する液体噴射記録ヘッドにおいて、対向
する仕切壁の少なくとも一部を電気熱変換体で構成し、
電気熱変換体の個別電極および複数の電気熱変換体に共
通する電極を基板およびオリフィスプレートの基板と対
向する面にそれぞれ配設したことを特徴とする。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a method in which a plurality of orifices are formed to selectively eject a recording liquid to generate flying droplets, and a plurality of orifices are formed, and a plurality of orifices are formed. Orifice plates are provided at opposing positions on the top, and electrothermal transducers that generate thermal energy for forming flying droplets are individually provided for each of the plurality of orifices. In a liquid jet recording head having a wave path that communicates with each other and is separated by a partition wall on a substrate, and a pair of electrodes connected to separate electrothermal converters, at least a portion of the opposing partition walls are electrothermal converted. Composed of the body,
It is characterized in that individual electrodes of the electrothermal converters and electrodes common to the plurality of electrothermal converters are respectively disposed on the substrate and on the surface of the orifice plate facing the substrate.

[作 用] 本発明によれば、液路を形成している仕切壁の少なくと
も一部を電気熱変換体となして、電気熱変換体に接続す
る個別電極および共通電極をそれぞれ基板側および基板
と対向する面の側に設けるようにしたことによって、電
極の配線密度を液路で挟んで上下に分散させることがで
きるのみならず、従来の電気熱変換体構成のための工程
を省略することができて、製造コストの低減を図ること
ができる。
[Function] According to the present invention, at least a part of the partition wall forming the liquid path is used as an electrothermal converter, and the individual electrodes and the common electrode connected to the electrothermal converter are connected to the substrate side and the substrate side, respectively. By providing the electrode on the side facing the surface, not only can the wiring density of the electrode be distributed vertically across the liquid path, but also the process for configuring the conventional electrothermal converter can be omitted. This makes it possible to reduce manufacturing costs.

[実施例] 以下に、図面に基づいて本発明を詳細かつ具体的に説明
する。
[Example] The present invention will be described below in detail and specifically based on the drawings.

第1図は本発明の一実施例を示す。ここで、1は絶縁材
料で形成された基板、2は同じく絶縁材料で形成された
オリフィスプレート、3はオリフィスプレート2に穿設
されたオリフィスである。かくして、液路4に導かれた
記録液をオリフィス3から飛翔的液滴となして吐出させ
ることができる。5は液路4を形成している仕切壁自体
(ここでは説明を分かり易くするために仕切壁は破線に
よ)て示しである)若しくはその一部を電気熱変換体と
なすために形成された発熱抵抗体であり、本例の場合は
液路4の両側に対峠するごとくして一対の発熱抵抗体5
がオリフィス3の近傍に立設されている。
FIG. 1 shows an embodiment of the invention. Here, 1 is a substrate made of an insulating material, 2 is an orifice plate also made of an insulating material, and 3 is an orifice bored in the orifice plate 2. In this way, the recording liquid guided to the liquid path 4 can be ejected from the orifice 3 in the form of flying droplets. Reference numeral 5 denotes a partition wall forming the liquid path 4 (here, the partition wall is shown by a broken line to make the explanation easier to understand) or a part thereof formed to serve as an electrothermal converter. In this example, a pair of heating resistors 5 are provided on both sides of the liquid path 4 as if facing each other.
is installed near the orifice 3.

6は基板1の上面に設けられ、発熱抵抗体5と第2A図
に示すようにして電気的に接続された個別電極であり、
一方、互いに隣接する液路4に沿って設けられている発
熱抵抗体5同土間にはオリフィスプレート2の下面側に
沿って共通電極7が設けられている。
6 is an individual electrode provided on the upper surface of the substrate 1 and electrically connected to the heating resistor 5 as shown in FIG. 2A;
On the other hand, a common electrode 7 is provided along the lower surface side of the orifice plate 2 between the heating resistors 5 and the earthen floor provided along the liquid paths 4 adjacent to each other.

そこで、このように構成した液体噴射記録ヘッドでは、
個別電極6に選択的に電気信号を供給することにより、
個別電極6と共通電極7とに電気的に接続されている発
熱抵抗体5が発熱し、その熱エネルギーが液路4を充し
ている記録液に作用3δ することによって記録液に発砲を生じせしめ、オリフィ
ス3から5′1N7目的液滴を吐出させることができる
Therefore, in the liquid jet recording head configured in this way,
By selectively supplying electrical signals to the individual electrodes 6,
The heating resistor 5 electrically connected to the individual electrodes 6 and the common electrode 7 generates heat, and the thermal energy acts on the recording liquid filling the liquid path 4, causing firing in the recording liquid. As a result, a 5'1N7 target droplet can be ejected from the orifice 3.

第2B図は本発明の他の実施例を示し、本例は、仕切壁
構成部分の片側だけに個別電極6を接続するようにした
もので、この個別電極6が接続された側の仕切壁のみが
電気熱変換体として機能する。
FIG. 2B shows another embodiment of the present invention, in which the individual electrode 6 is connected only to one side of the partition wall component, and the partition wall on the side to which the individual electrode 6 is connected only acts as an electrothermal converter.

[発明の効果] 以上説明してきたように、本発明によれば、液路を形成
している仕切壁の少なくとも一部を電気熱変換体として
使用するようにしたことにより、従来のような薄膜形成
技術による電気熱変換体形成工程を少なくとも省略する
ことかできて、コスト低減に貢献する。また、従来のよ
うに電極を基板上に全て密集させて形成する必要がない
ので、配線の単純化を図ることができると共に、殊に共
通電極を十分な幅に形成することができて、配線抵抗を
低く押え、電気的損失を抑制することができる。
[Effects of the Invention] As explained above, according to the present invention, at least a part of the partition wall forming the liquid path is used as an electrothermal converter, so that it is possible to At least the step of forming an electrothermal converter using a forming technique can be omitted, contributing to cost reduction. In addition, since it is not necessary to form all the electrodes closely together on the substrate as in the past, wiring can be simplified, and in particular, the common electrode can be formed with a sufficient width. It is possible to keep resistance low and suppress electrical loss.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明液体噴射記録ヘットの構成の例を分解し
て示す斜視図、 第2A図は第1図のA−A線断面図、 第2B図は本発明の他の実施例の構成を示す断面図、 第3A図および第3B図は従来の液体噴射記録ヘットに
おける電気熱変換体とその電極との構成の2例をそれぞ
れ模式的に示す平面図である。 ・・・基板、 ・・・オリフィスプレート、 ・・・オリフィス、 ・・・液路、 ・・・発熱抵抗体、 ・・・個別電極、 ・・−共通電極。 3 オリフィス 2オグフイスブし一ト 募1閏のA−A線材面画 第2A図 杏炙5 明 dノイオコf)渉(方ンち イ列 を4丈
1L打面 図第2B図
FIG. 1 is an exploded perspective view showing an example of the configuration of a liquid jet recording head according to the present invention, FIG. 2A is a cross-sectional view taken along line A-A in FIG. 1, and FIG. 2B is a configuration of another embodiment of the present invention. FIGS. 3A and 3B are plan views schematically showing two examples of configurations of an electrothermal converter and its electrodes in a conventional liquid jet recording head. ...substrate, ...orifice plate, ...orifice, ...liquid path, ...heating resistor, ...individual electrode, ...-common electrode. 3 Orifice 2 angles, 1 line 1 line A-A wire surface drawing Figure 2A Figure 2B

Claims (1)

【特許請求の範囲】 1)選択的に記録液を吐出させて飛翔的液滴を発生させ
る複数のオリフィスと、該複数のオリフィスが形成され
、基板上の対向位置に設けられたオリフィスプレートと
、前記飛翔的液滴を形成するための熱エネルギーを発生
する電気熱変換体を前記複数のオリフィスのそれぞれに
対応して個別に設け、前記複数のオリフィスのそれぞれ
に連通し、基板上の仕切壁により分離された液路と、前
記個別の電気熱変換体に接続された一対の電極とを有す
る液体噴射記録ヘッドにおいて、 対向する前記仕切壁の少なくとも一部を前記電気熱変換
体で構成し、該電気熱変換体の個別電極および複数の電
気熱変換体に共通する電極を前記基板および前記オリフ
ィスプレートの前記基板と対向する面にそれぞれ配設し
たことを特徴とする液体噴射記録ヘッド。
[Scope of Claims] 1) A plurality of orifices that selectively eject recording liquid to generate flying droplets, and an orifice plate in which the plurality of orifices are formed and provided at opposing positions on a substrate; An electrothermal converter that generates thermal energy for forming the flying droplets is separately provided corresponding to each of the plurality of orifices, communicates with each of the plurality of orifices, and is connected to a partition wall on the substrate. In a liquid jet recording head having separate liquid paths and a pair of electrodes connected to the individual electrothermal transducers, at least a portion of the opposing partition wall is constituted by the electrothermal transducer; A liquid jet recording head characterized in that individual electrodes of the electrothermal transducers and electrodes common to the plurality of electrothermal transducers are respectively disposed on the substrate and the surface of the orifice plate facing the substrate.
JP15796088A 1988-06-28 1988-06-28 liquid jet recording head Pending JPH028058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15796088A JPH028058A (en) 1988-06-28 1988-06-28 liquid jet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15796088A JPH028058A (en) 1988-06-28 1988-06-28 liquid jet recording head

Publications (1)

Publication Number Publication Date
JPH028058A true JPH028058A (en) 1990-01-11

Family

ID=15661214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15796088A Pending JPH028058A (en) 1988-06-28 1988-06-28 liquid jet recording head

Country Status (1)

Country Link
JP (1) JPH028058A (en)

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