JPH0282438U - - Google Patents
Info
- Publication number
- JPH0282438U JPH0282438U JP16013888U JP16013888U JPH0282438U JP H0282438 U JPH0282438 U JP H0282438U JP 16013888 U JP16013888 U JP 16013888U JP 16013888 U JP16013888 U JP 16013888U JP H0282438 U JPH0282438 U JP H0282438U
- Authority
- JP
- Japan
- Prior art keywords
- suction holes
- merging point
- merging
- valve
- vacuum chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図Ａは本考案実施例装置の断面図、第１図
Ｂ及び第１図Ｃは、夫々実施例装置の使用状態を
示す断面図、第２図は実施例装置の要部拡大断面
図、第３図は本考案の他の実施例装置の断面図、
第４図は従来例を示す断面図である。
FIG. 1A is a sectional view of the device according to the embodiment of the present invention, FIGS. 1B and 1C are sectional views showing the usage state of the device according to the embodiment, and FIG. 2 is an enlarged sectional view of the main parts of the device according to the embodiment. , FIG. 3 is a sectional view of another embodiment of the device of the present invention,
FIG. 4 is a sectional view showing a conventional example.
Claims (1)
２つの吸引孔を単位とし、その各吸引孔の、真空
ポンプに向う合流箇所を設けると共に、上記合流
箇所に合流する各吸引孔間の差圧により動作する
弁を上記合流箇所に設け、正圧側にある吸引孔を
上記弁で閉じるようにしたことを特徴とする真空
チヤツク。 In a vacuum chuck with multiple suction holes,
Two suction holes are used as a unit, and a merging point for each suction hole toward the vacuum pump is provided, and a valve that is operated by the differential pressure between the suction holes merging at the merging point is provided at the merging point, and a positive pressure side is provided. A vacuum chuck characterized in that a suction hole in the is closed by the valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16013888U JPH0282438U (en) | 1988-12-08 | 1988-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16013888U JPH0282438U (en) | 1988-12-08 | 1988-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282438U true JPH0282438U (en) | 1990-06-26 |
Family
ID=31441944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16013888U Pending JPH0282438U (en) | 1988-12-08 | 1988-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282438U (en) |
-
1988
- 1988-12-08 JP JP16013888U patent/JPH0282438U/ja active Pending