JPH0283470U - - Google Patents
Info
- Publication number
- JPH0283470U JPH0283470U JP16190788U JP16190788U JPH0283470U JP H0283470 U JPH0283470 U JP H0283470U JP 16190788 U JP16190788 U JP 16190788U JP 16190788 U JP16190788 U JP 16190788U JP H0283470 U JPH0283470 U JP H0283470U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- generator
- plasma discharge
- monitoring
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
Description
第１図は、プラズマ放電構成基本回路。第２図
、プラズマ放電々圧波形。第３図、プラズマ放電
検出器、構成図。第４図、プラズマ放電検出器、
内部回路図。
、プラズマ放電々圧波形。第３図、プラズマ放電
検出器、構成図。第４図、プラズマ放電検出器、
内部回路図。
Claims (1)
- 電子放射を目的としたプラズマ発生装置におい
て、該発生装置のプラズマ放電回数を監視するこ
とにより、プラズマ発生装置の異常状態を発見す
るようにしたプラズマ放電検出器。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16190788U JPH0283470U (ja) | 1988-12-15 | 1988-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16190788U JPH0283470U (ja) | 1988-12-15 | 1988-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0283470U true JPH0283470U (ja) | 1990-06-28 |
Family
ID=31445256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16190788U Pending JPH0283470U (ja) | 1988-12-15 | 1988-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0283470U (ja) |
-
1988
- 1988-12-15 JP JP16190788U patent/JPH0283470U/ja active Pending