JPH0284345A - inkjet recording head - Google Patents

inkjet recording head

Info

Publication number
JPH0284345A
JPH0284345A JP26110588A JP26110588A JPH0284345A JP H0284345 A JPH0284345 A JP H0284345A JP 26110588 A JP26110588 A JP 26110588A JP 26110588 A JP26110588 A JP 26110588A JP H0284345 A JPH0284345 A JP H0284345A
Authority
JP
Japan
Prior art keywords
recording head
inkjet recording
ink
ink flow
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26110588A
Other languages
Japanese (ja)
Inventor
Hiroshi Sugitani
博志 杉谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP26110588A priority Critical patent/JPH0284345A/en
Publication of JPH0284345A publication Critical patent/JPH0284345A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は飛翔液滴を形成して記録を行なうインクジェッ
ト記録ヘッドの改良に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in an inkjet recording head that performs recording by forming flying droplets.

飛翔液滴を形成して記録を行なうインクジェット記録法
に使用されるインクジェット記録ヘッドは、吐出オリア
イス、インク流路−、インク流路の一部として形成され
、飛翔液滴を形成する為のエネルギーをインクに使用さ
せる個所である作用部及び複数のインク流路と該インク
流路に一対一で設けられた吐出オリフイ′スを有する所
謂マルチオリフィスタイプの記録ヘッドにおいては更に
共通インク供給室が設けられているものであり、これ等
は微細加工の下で精密且つ正確に加工製造されている。The inkjet recording head used in the inkjet recording method, which performs recording by forming flying droplets, is formed as part of the ejection orifice, ink channel, and ink channel, and uses energy to form flying droplets. In a so-called multi-orifice type recording head, which has an action part that is used for ink, a plurality of ink flow channels, and ejection orifices provided one-to-one in the ink flow channels, a common ink supply chamber is further provided. These are manufactured with precision and precision using micro-machining.

この記録ヘッド製造上におけるインク流路の形成の精度
・正確さの高低は作成された記録ヘッドの液滴発生効率
、消エネルギー率、液滴発生の安定性及び均一性、更に
ヘッド自体の耐久性に犬き（影響するもので、特Ｋ、高
密度マルチオリフィスタイプの記録ヘッドの場合には、
その製造法には精密且つ正確な超微細加工技術が要求さ
れ、更には、大量生産の点からはコストの低減の意味で
歩溜りの良さが要求されている。The precision and accuracy of ink flow path formation during the manufacturing of this recording head is determined by the droplet generation efficiency, energy consumption rate, stability and uniformity of droplet generation, and the durability of the head itself. In the case of a special high-density multi-orifice type recording head,
The manufacturing method requires precise and precise ultra-fine processing technology, and furthermore, from the point of view of mass production, a good yield is required in order to reduce costs.

丙午ら、従来法、例えば、ガラス板の研削加工によるイ
ンク流路の形成法、感光性ガラスをエツチングするとと
によるインク流路の形成法等は上記の諸点を必ずしも満
足し得るものではなく、製造された記録ヘッドの特性の
低下、或いは、歩溜りの悪さによるコスト上昇、−１３
の高密度をマルチオリフィス記録ヘッドの実現性の低下
を招来している。According to Heigo et al., conventional methods such as forming ink channels by grinding a glass plate, etching photosensitive glass, etc. do not necessarily satisfy the above points, and are difficult to manufacture. Decrease in recording head characteristics or increase in cost due to poor yield, -13
This high density reduces the feasibility of multi-orifice recording heads.

例えば、前者の従来法によって作成される記録へソドは
、インク流路内壁面が荒く、液滴吐出の為のエネルギー
を多く必要として消エネルギー率が悪い、研削の際ガラ
スの欠け１割れが発生し、製造歩留りの悪さ、液滴吐出
の安定性、均一性への影響が大である、後者の従来法に
よる場合には感光性ガラスの微細加工精度に限界がある
、材料コストが高い等の欠点が考えられる。更に、これ
等従来法に共通な欠点としては、インク流路溝を形成し
た溝基板と、インクに作用するエネルギーを発生する圧
電素子１発熱素子等の駆動素子が設けられた蓋板との貼
合せの際に位置合せが困難であって量産性に欠ける点が
挙げられる。For example, the recording head created by the former conventional method has a rough inner wall surface of the ink flow path, requires a lot of energy to eject droplets, and has a poor energy consumption rate, and glass chips and cracks occur during grinding. However, the manufacturing yield is poor, and the stability and uniformity of droplet ejection are significantly affected.If the latter conventional method is used, there is a limit to the precision of microfabrication of photosensitive glass, and the material cost is high. Possible drawbacks. Furthermore, a common drawback of these conventional methods is that the groove substrate on which the ink flow channel grooves are formed and the lid plate on which drive elements such as the piezoelectric element 1 heat generating element that generates energy acting on the ink are installed. One problem is that alignment is difficult during alignment, resulting in a lack of mass productivity.

従って、これ等の解決される構成を有するインクジェッ
ト記録ヘッドの開発が熱望されている。Therefore, the development of an inkjet recording head having a configuration that solves these problems is eagerly awaited.

本発明は、上記点に鑑み成されたもので、安価で小型で
あり、信頼性の高いインクジェット記録ヘッドを提供す
ることを目的とする。The present invention has been made in view of the above points, and an object of the present invention is to provide an inexpensive, small-sized, and highly reliable inkjet recording head.

又、インク流路を精度良（正確に且つ歩溜り良（微細加
工される構成を有するインクジェット記録ヘッドを提供
することでもある。Another object of the present invention is to provide an inkjet recording head having a structure in which the ink flow path is precisely machined and has a good yield.

本発明のインクジェット記録ヘッドは飛翔液滴を形成し
て記録を行なうインクジェット記録ヘッドのインク流路
を形成するインク流路溝が感光性組成物を使用して形成
された事を特徴とするものである。The inkjet recording head of the present invention is characterized in that the ink flow path grooves forming the ink flow path of the inkjet recording head that performs recording by forming flying droplets are formed using a photosensitive composition. be.

この様な構成とされるインクジェット記録ヘッドは、製
造に際する従来法の諸問題点を解決するものであり、更
に１液滴発生効率、消エネルギー率。The inkjet recording head with such a configuration solves various problems of conventional methods during manufacturing, and also improves single droplet generation efficiency and energy consumption rate.

液滴発生の安定性・均一性に優れた特性を有するもので
ある。It has excellent characteristics of stability and uniformity of droplet generation.

以下、本発明を図面に従って具体的に説明する。Hereinafter, the present invention will be specifically explained with reference to the drawings.

第１図（ａ）　、　（ｂ）　、　（Ｃ）は、本発明のイ
ンクジェット記録ヘッドの構造と組立を説明する為の模
式的説明図である。FIGS. 1(a), 1(b), and 1(C) are schematic explanatory diagrams for explaining the structure and assembly of the inkjet recording head of the present invention.

アルミナ等のセラミックス、金属、グラスチックス等を
形成して得られる基板１０１の所定位置には液体（イン
ク）Ｋ液滴発生の為のエネルギーを与えるエネルギー源
としての発熱素子、圧電素子等の駆動素子１０２が所定
個数固定的に設置される（図においては駆動素子は３つ
）。図示はされていないが駆動素子１０２への電気信号
入力の為の電極は、予め所定の手順と所定の方法に従っ
て設けて置いても良いし、駆動素子１０２の設置と同時
に行なっても良いし、後述する溝形成後設けても良いも
のである。At predetermined positions on the substrate 101 obtained by forming ceramics such as alumina, metals, glasstics, etc., there are drive elements such as heating elements and piezoelectric elements as energy sources that provide energy for generating liquid (ink) droplets. A predetermined number of driving elements 102 are fixedly installed (three driving elements in the figure). Although not shown, electrodes for inputting electrical signals to the drive element 102 may be provided in advance according to a predetermined procedure and method, or may be provided at the same time as the drive element 102 is installed. It may be provided after the grooves are formed, which will be described later.

駆動素子１０２が設けられた基板】０１の駆動素子１０
２の設けられている表面には、所定の厚みで感光性組成
物層１０４が、塗布法、ラミネート法等の適切な方法に
よって設けられる。Substrate provided with drive element 102] Drive element 10 of 01
A photosensitive composition layer 104 with a predetermined thickness is provided on the surface where the photosensitive composition 2 is provided by an appropriate method such as a coating method or a laminating method.

その後、通常行なわれているフォトリソグラフィーの手
段によりオリフィス部１０５１作用部１０６゜インク供
給路部１０７．インク吐出路部１０８等のインク流路を
形成するインク流路溝】０３を形成すも次いで、インク
流路溝１０３の設けられた基板１０】の駆動素子】０２
側に上蓋１０９を接合して本発明のインクジェット記録
ヘッドが製造される。従って先ず従来法における基板】
０１と上Ｍ１０９との正確な位置合せが不要であること
、形成されるインク流路の内壁面が平滑であって液体の
流れがスムースであり、液滴吐出に支障を来たさないこ
と、高密度微細加工が容易で簡単である為に、高特性を
有する高密度マルチオリノイス記録ヘッドを低コストで
歩溜り良（生産することが出来る等の利点を有し、製造
される記録ヘッドは液滴吐出効率。Thereafter, the orifice portion 1051, the acting portion 106, the ink supply passage portion 107. After forming the ink channel groove [03] which forms the ink channel such as the ink ejection channel section 108, the drive element [02] of the substrate 10 in which the ink channel groove 103 is provided is formed.
The inkjet recording head of the present invention is manufactured by joining the upper cover 109 to the side. Therefore, first of all, the substrate in the conventional method]
01 and the upper M109 are not required, the inner wall surface of the ink flow path to be formed is smooth, the liquid flows smoothly, and there is no problem with droplet ejection. Because high-density microfabrication is easy and simple, high-density multi-orinoid recording heads with high characteristics can be produced at low cost and with a high yield. Droplet ejection efficiency.

消エネルギー率、液滴の安定・均一吐出性に優れ、且つ
小型化が計れ安価であるという利点も具備するものであ
る。It has the advantage of being excellent in energy consumption rate, stable and uniform ejection of droplets, and being compact and inexpensive.

本発明において使用される感光性組成物としては、感光
性樹脂、フォトレジスト等の通常のリングラフイーの分
野において使用されている感光物の多くのものが挙げら
れる。これ等の感光物としては、例えば、ジアゾレジン
、Ｐ−ジアゾキノン、な」 更には例えばビニルモノマーと重合開始前を使用する元
重合壓フォトポリマー、ポリビニルシンナメート等と増
感剤を使用する三量化型フォトポリマー、オルツナ７ト
キノンジアジドとボラックタイプのフェノール樹脂との
混合物、ポリビニルアルコールとジアゾ樹脂の混合物、
４−グリシジルエチレンオキシドとベンツフェノンやグ
リシジルカルコンとを共重合させたポリエーテル型フォ
トポリマー、Ｎ　、Ｎ−ジメチルメタクリルアミドと例
えばアクリルアミドベンゾフェノンとの共重合体、不飽
和ポリエステル系感光性樹脂（例えばＡｌｌ、　（旭化
成）、テビスタ（帝人）、ゾンネ（関西ペイント）等〕
、不飽和ウレタンオリゴマー系感光性樹脂、三官能アク
リルモノマーに光重合開始剤とポリマーとを混合した感
光性組成物、重クロム酸系フォトレジスト、非クロム系
水溶性フォトレジスト、ポリケイ皮酸ビニル系フォトレ
ジスト、環化ゴム−アジド系フォトレジスト、等が挙げ
られる。The photosensitive composition used in the present invention includes many photosensitive materials such as photosensitive resins and photoresists that are commonly used in the field of phosphorography. These photosensitive materials include, for example, diazoresin, P-diazoquinone, etc. Furthermore, for example, pre-polymerized photopolymers that use a vinyl monomer before polymerization initiation, trimerized photopolymers that use polyvinyl cinnamate, etc. and a sensitizer, etc. Photopolymers, mixtures of ortuna 7-toquinone diazide and borac type phenolic resins, mixtures of polyvinyl alcohol and diazo resins,
Polyether type photopolymers made by copolymerizing 4-glycidylethylene oxide with benzphenone or glycidyl chalcone, copolymers of N,N-dimethylmethacrylamide and acrylamide benzophenone, unsaturated polyester photosensitive resins (e.g. All, (Asahi Kasei), Tevista (Teijin), Sonne (Kansai Paint), etc.]
, unsaturated urethane oligomer photosensitive resin, photosensitive composition containing a trifunctional acrylic monomer mixed with a photopolymerization initiator and polymer, dichromate photoresist, non-chromium water-soluble photoresist, polyvinyl cinnamate photoresist Examples include photoresist, cyclized rubber-azide photoresist, and the like.

この他、例えばデニポン社の１１０−マネントホトボリ
マーコーティング、ＲＩ８ＴＯＮ、ゾルダーｉスク７３
０８　、７４０８　、７３０ＦＲ、７４０ＦＲ、ＳＭＩ
　等０：）　商品名で市販されている感光性組成物も有
効に本発明において使用される。In addition, for example, Denipon's 110-manent photopolymer coating, RI8TON, Zolder i-sk 73
08, 7408, 730FR, 740FR, SMI
etc. 0:) Photosensitive compositions commercially available under trade names are also usefully used in the present invention.

感光性組成物の解像力が所望のオリフィス径。The orifice diameter that provides the desired resolution of the photosensitive composition.

インク流路（殊にノズル）密度を下回る場合には、その
部分のみ切削加工機（例えばシリコンウェア・−力ツテ
ング用の研削機）を使用して切削加工しても良い。If the density is lower than the density of the ink flow path (particularly the nozzle), only that portion may be cut using a cutting machine (for example, a grinding machine for silicone ware/tightening).

【図面の簡単な説明】[Brief explanation of the drawing]

第１図（ａ）　、　（ｂ）　、　（Ｃ）＃各々は、本発
明の記録ヘッドの好適な実施態様例の１つの組立を説明
する為の模式的組立工程図である。 １０１−−一基板　　　　　１０２−−−駆動素子１０
３・・・インク流路溝　】０４・・・感光性組成物層】
０５・・・オリフィス　　１０６−・・作用部１０７・
・・インク供給路部 １０８・・・インク吐出路部 】０９・・・上蓋 出願人　キャノン株式会社　　口、。 １・ 代理人　（６９８７）弁理士　丸　島　儀　−じ￥　１
［Ｉ８ （Ｃ） 昭和６３年１ １月１FIGS. 1(a), 1(b), and 1(C) are schematic assembly process diagrams for explaining the assembly of one preferred embodiment of the recording head of the present invention. 101--One substrate 102--Drive element 10
3... Ink channel groove] 04... Photosensitive composition layer]
05... Orifice 106-... Action part 107.
... Ink supply path section 108 ... Ink discharge path section] 09 ... Upper lid Applicant: Canon Co., Ltd. 1. Agent (6987) Patent attorney Gi Marushima - Ji ¥ 1
[I8 (C) January 1, 1988

Claims (1)

【特許請求の範囲】[Claims] 　飛翔液滴を形成して記録を行なうインクジェット記録
ヘッドのインク流路を形成するインク流路溝が感光性組
成物を使用して形成された事を特徴とするインクジェッ
ト記録ヘッド。1. An inkjet recording head characterized in that ink flow path grooves forming ink flow paths of the inkjet recording head that performs recording by forming flying droplets are formed using a photosensitive composition.
JP26110588A 1988-10-17 1988-10-17 inkjet recording head Pending JPH0284345A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26110588A JPH0284345A (en) 1988-10-17 1988-10-17 inkjet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26110588A JPH0284345A (en) 1988-10-17 1988-10-17 inkjet recording head

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP23322788A Division JPH01125241A (en) 1988-09-17 1988-09-17 Liquid discharge method

Publications (1)

Publication Number Publication Date
JPH0284345A true JPH0284345A (en) 1990-03-26

Family

ID=17357154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26110588A Pending JPH0284345A (en) 1988-10-17 1988-10-17 inkjet recording head

Country Status (1)

Country Link
JP (1) JPH0284345A (en)

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