JPH0286086A - Manufacturing method of exposed heating part ceramic heater - Google Patents

Manufacturing method of exposed heating part ceramic heater

Info

Publication number
JPH0286086A
JPH0286086A JP20247089A JP20247089A JPH0286086A JP H0286086 A JPH0286086 A JP H0286086A JP 20247089 A JP20247089 A JP 20247089A JP 20247089 A JP20247089 A JP 20247089A JP H0286086 A JPH0286086 A JP H0286086A
Authority
JP
Japan
Prior art keywords
heater
ceramic
ceramic heater
manufacturing
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20247089A
Other languages
Japanese (ja)
Other versions
JPH067510B2 (en
Inventor
Yasuo Matsushita
松下 安男
Ryutaro Jinbo
神保 龍太郎
Ken Takahashi
研 高橋
Seiichi Yamada
誠一 山田
Seijiro Takeda
武田 誠次郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1202470A priority Critical patent/JPH067510B2/en
Publication of JPH0286086A publication Critical patent/JPH0286086A/en
Publication of JPH067510B2 publication Critical patent/JPH067510B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はセラミックヒータの製造方法に係り、特に急速
加熱性に優れ、グロープラグ(予熱栓)等に使用するの
に好適なセラミックヒータの製造方法に関するゆ [従来の技術〕 ディーゼルエンジンでは、予備燃焼室内にグロープラグ
を備え、始動時にはまずグロープラグを1000’C前
後に予熱して燃料への着火を助ける方式が一般に行われ
ている。従来、グロープラグとして金属外管の中に金属
線ヒータを内蔵したものが使用されている。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing a ceramic heater, and in particular to a method for manufacturing a ceramic heater that has excellent rapid heating properties and is suitable for use in glow plugs (preheating plugs), etc. [Prior Art] In a diesel engine, a glow plug is generally provided in a pre-combustion chamber, and at the time of starting, the glow plug is first preheated to around 1000'C to help ignite the fuel. Conventionally, glow plugs in which a metal wire heater is built into a metal outer tube have been used.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、このようなグロープラグでは予熱を開始
してから金属外管の表面温度が1000℃前後にまで達
する時間が比較的長く、特に低温時においては予熱時間
がさらに長くなり始動までに10秒以上の待ち時間を要
するという欠点があった。乗用車ではこの待ち時間(予
熱時間)が問題であり、急速始動の実現が強く望まれて
いる。
However, with such glow plugs, it takes a relatively long time for the surface temperature of the metal outer tube to reach around 1000℃ after preheating starts, and especially at low temperatures, the preheating time becomes even longer, and it takes more than 10 seconds to start. The disadvantage is that it requires a long waiting time. This waiting time (preheating time) is a problem in passenger cars, and there is a strong desire to realize rapid starting.

また従来、セラミックスを用いた発熱体としては、窒化
ケイ素や酸化アルミニウムのセラミック体中にタングス
テン、モリブデンなどを用いた金属線状発熱抵抗体を埋
設したものがある。これらの発熱体では金属とセラミッ
クスという特性の異なるものを組み合わせているため、
焼成が難しくかつ発熱体として用いる場合にも急速加熱
による熱衝撃やくり返し通電によるヒートサイクルでの
特性変化が問題となり、使用温度がこれによって制限さ
れるという欠点があった。
Conventionally, heating elements using ceramics include those in which a metal wire heating resistor made of tungsten, molybdenum, or the like is embedded in a ceramic body of silicon nitride or aluminum oxide. These heating elements combine metals and ceramics, which have different characteristics, so
It is difficult to fire, and even when used as a heat generating element, there are problems with thermal shock due to rapid heating and property changes due to heat cycles due to repeated energization, which limits the temperature at which it can be used.

一方、点火装置として、U字型のセラミックス発熱体が
提案されている。(特公昭57−44892号公報)。
On the other hand, a U-shaped ceramic heating element has been proposed as an ignition device. (Special Publication No. 57-44892).

しかしこのようなセラミック発熱体をディーゼルエンジ
ンのグロープラグ等に使用する場合、U字型の発熱体に
は内部空間部を有しているために機械的強度が弱くエン
ジンの振動等によって長期的な使用に問題が生じる欠点
があった。またセラミック発熱体をU字型に成形するこ
とは製作上手間を要する欠点があった。
However, when such a ceramic heating element is used in a diesel engine glow plug, etc., the U-shaped heating element has an internal space, so its mechanical strength is weak, and engine vibration etc. can cause long-term damage. There were drawbacks that caused problems in use. Furthermore, molding the ceramic heating element into a U-shape has the disadvantage of requiring a lot of manufacturing time.

本発明の目的は、上記した従来技術の欠点をなくし、1
000℃前後までの昇温時間が短かく。
The purpose of the present invention is to eliminate the above-mentioned drawbacks of the prior art, and to
The heating time to around 000℃ is short.

堅固で、高温耐久性に優れ、しかも長い使用寿命を有す
るセラミックヒータの製造方法を提供するものである。
The present invention provides a method for manufacturing a ceramic heater that is strong, has excellent high-temperature durability, and has a long service life.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するため1本発明に係るセラミックヒー
タの製造方法は、導電性セラミックス焼結体からなる導
電部と絶縁性セラミックス焼結体からなる絶縁部とが一
体焼結されたセラミックヒータの製造方法において前記
一体焼結された部材を切断し、個々のヒータ回路を形成
するようにしたものである。ここで、前記絶縁部を介し
て前記導電部を両側に積層し、且つ前記両側の導電部が
互いに導通するように前記導電性セラミックス焼結体を
設け、板厚方向に切断し、U字型回路を形成するのがよ
い。
In order to achieve the above object, 1 the method for manufacturing a ceramic heater according to the present invention is to manufacture a ceramic heater in which a conductive part made of a conductive ceramic sintered body and an insulating part made of an insulating ceramic sintered body are integrally sintered. In the method, the integrally sintered member is cut to form individual heater circuits. Here, the conductive parts are laminated on both sides through the insulating part, and the conductive ceramic sintered body is provided so that the conductive parts on both sides are electrically connected to each other, and cut in the thickness direction to form a U-shape. It is better to form a circuit.

〔実施例〕〔Example〕

以下、本発明の実施例を添付図面に基づいて詳細に説明
する。
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

第1図は本発明の一例を示し、図において1は導電路が
U字形を有するヒータ部材、2はU字形ヒータ部1の中
央溝部を埋めて一体に接合された絶縁部材である。3は
ヒータ部材の端部に接合された一対のリード端子である
。導電性セラミックからなるヒータ部材1はU字型とな
っているのでグロープラグのように限られたスペース内
でヒータ部材1の寸法を小さくでき、かつヒータ部材1
の露出を大きくし、燃料の着火を確実にできる。
FIG. 1 shows an example of the present invention, in which numeral 1 denotes a heater member having a U-shaped conductive path, and numeral 2 denotes an insulating member that fills the central groove of the U-shaped heater section 1 and is joined together. 3 is a pair of lead terminals joined to the ends of the heater member. Since the heater member 1 made of conductive ceramic is U-shaped, the size of the heater member 1 can be reduced in a limited space such as a glow plug, and the heater member 1 can be made small.
This increases the exposure of fuel and ensures ignition of the fuel.

またU字型のヒータ部材1の中央溝部は開口とすること
なく、絶縁部材2で埋設されているので機械的補強と導
電路間の電気絶縁性とグロープラグの気密構造とを容易
にすることができる。
In addition, the central groove of the U-shaped heater member 1 is not open, but is buried with the insulating member 2, which facilitates mechanical reinforcement, electrical insulation between conductive paths, and airtight structure of the glow plug. Can be done.

ヒータ部材1を構成する導電性セラミックとして1周期
律表の4a族、5a族または6a族元素の炭化物、ホウ
化物または窒化物等の非酸化物導電材の群から選ばれた
1種以上とSiCとSiCの焼結助剤であるAQ又はA
Q化合物とからなる焼結体であって、この焼結体中の非
酸化物導電材は20〜80重量%が望ましい。
The conductive ceramic constituting the heater member 1 includes at least one non-oxide conductive material selected from the group of non-oxide conductive materials such as carbides, borides, or nitrides of elements of group 4a, group 5a, or group 6a of the periodic table, and SiC. and AQ or A, which is a sintering aid for SiC.
Q compound, and the non-oxide conductive material in this sintered body is preferably 20 to 80% by weight.

ヒータ部材に上記材料を選んだ理由は次の通りである。The reason for choosing the above material for the heater member is as follows.

まずAQまたはAQ化合物を燃結助剤とする緻密なSi
C焼結体は耐熱温度が高く、高強度で、しかも耐熱衝撃
性、耐酸化性に優れるため非酸化物導電材を結合するマ
トリックス材として好適である。AQ及びAn20.、
ARN、Al2Po4等のAQ化合物の添加は上記の効
果以外に。
First, dense Si using AQ or AQ compound as a combustion aid.
The C sintered body has a high heat resistance, high strength, and excellent thermal shock resistance and oxidation resistance, so it is suitable as a matrix material for bonding non-oxide conductive materials. AQ and An20. ,
Addition of AQ compounds such as ARN and Al2Po4 has effects other than those mentioned above.

元来高抵抗であるSiCの抵抗率を0.1〜10Ωcm
に低減する効果があり、非酸化物導電材の含有量が少な
い領域におけるヒータ部材の抵抗率調整が容易になる利
点がある。
The resistivity of SiC, which is originally high in resistance, is 0.1 to 10Ωcm.
This has the advantage of making it easier to adjust the resistivity of the heater member in areas where the content of the non-oxide conductive material is small.

前記非酸化物導電材の一群は、グロープラグの使用温度
範囲で実用上十分な耐熱、耐酸化を有し、長期間の使用
に対しても安定した抵抗特性を維持するのに有効である
。特に前記の非酸化物導電材は抵抗率が金属並に小さく
、かつ抵抗温度特性が正であり、その結果SiCとの複
合焼結体であるヒータ部材の抵抗率を101〜10−’
Qcmの範囲内で自由に調整でき、かつ非酸化物導電材
の種類あるいは組合せを適当に選ぶことにより所望の正
の抵抗温度係数が得られる。ヒータ部材に正の抵抗温度
特性を持たせることは高温時の電流急増による熱破壊が
防止できるのでヒータ部材には必須の特性である。さら
にヒータ部材中における非酸化物導電材の含有量が20
重量%よりも少ないとヒータ部材が負の抵抗温度特性を
有するようになり、80重量%よりも多いとヒータ部材
の強度が低下する。
The group of non-oxide conductive materials has practically sufficient heat resistance and oxidation resistance within the operating temperature range of glow plugs, and is effective in maintaining stable resistance characteristics even during long-term use. In particular, the non-oxide conductive material has a resistivity as low as that of metal and a positive resistance-temperature characteristic, and as a result, the resistivity of the heater member, which is a composite sintered body with SiC, is 101 to 10-'
It can be freely adjusted within the range of Qcm, and a desired positive temperature coefficient of resistance can be obtained by appropriately selecting the type or combination of non-oxide conductive materials. Providing the heater member with positive resistance-temperature characteristics is an essential characteristic for the heater member because it can prevent thermal damage caused by a sudden increase in current at high temperatures. Furthermore, the content of non-oxide conductive material in the heater member is 20%.
If it is less than 80% by weight, the heater member will have negative resistance-temperature characteristics, and if it is more than 80% by weight, the strength of the heater member will decrease.

一方、U字型のヒータ部材の中央溝部を埋める絶縁性セ
ラミックスは高強度、耐熱耐酸化性、並びに高温での電
気絶縁性に優れ、しかもヒータ部材と焼結温度がほぼ等
しいものを選定することが望ましい。このような点を考
慮すると絶縁性セラミ7 ’) スIcはSiC,Si
、N、、、AflN又はA1120゜を主成分とするこ
とが望ましい。
On the other hand, the insulating ceramic that fills the central groove of the U-shaped heater member should be selected to have high strength, heat resistance, oxidation resistance, and electrical insulation properties at high temperatures, and to have a sintering temperature that is approximately the same as that of the heater member. is desirable. Considering these points, insulating ceramic 7') is SiC, Si
, N, , AflN or A1120° as the main component.

さらに導電性セラミックスがSiCを成分として含み、
絶縁性セラミックスがSiCを主成分とするものであれ
ば、両者の結合性が良く、両者の熱膨張係数の差異を小
さくすることができる。また熱膨張係数が約4 X 1
0−’/’CのSiCと熱膨張係数が7〜8X10″″
6/℃またはそれ以上であるT x + Z r t 
N bなどの炭化物、窒化物、ホウ化物等とを組合せて
複合させた導電性セラミックスの場合、熱膨張係数を6
X10−’/”C程度とすることかでき、絶縁性のAQ
Nの熱膨張係数にほぼ一致させることができる。
Furthermore, the conductive ceramic contains SiC as a component,
If the insulating ceramic has SiC as its main component, the bonding properties between the two will be good and the difference in coefficient of thermal expansion between the two can be reduced. Also, the coefficient of thermal expansion is approximately 4 x 1
0-'/'C SiC and thermal expansion coefficient of 7~8X10''''
T x + Z r t that is 6/°C or higher
In the case of conductive ceramics made by combining carbides such as Nb, nitrides, borides, etc., the coefficient of thermal expansion is 6.
The AQ of insulation can be approximately X10-'/''C.
The coefficient of thermal expansion can be made approximately equal to that of N.

本発明のセラミックヒータの製造例を図面に基づいて説
明する。まずヒータ部材組成物および絶縁物組成物をそ
れぞれ平板状に仮成形して所定形状の成形体に切り出し
後、第2図に示すように積層する。図中、11,12,
13.14はヒータ部材組成物成形体、15は絶縁部材
組成物成形体である。この積層体を所定圧力で本成形し
、セラミックスヒータの成形体を作製し、次いでホット
プレス焼結してヒータ素材を得る。このヒータ素材を第
3図に示す如く所定形状に切断(図中A。
A manufacturing example of the ceramic heater of the present invention will be explained based on the drawings. First, a heater member composition and an insulating material composition are each temporarily formed into a flat plate shape, cut into a molded body of a predetermined shape, and then laminated as shown in FIG. In the figure, 11, 12,
13 and 14 are heater member composition molded bodies, and 15 are insulating member composition molded bodies. This laminate is subjected to main molding at a predetermined pressure to produce a molded body of a ceramic heater, and then hot press sintered to obtain a heater material. This heater material is cut into a predetermined shape as shown in Fig. 3 (A in the figure).

Bは切断方向を示す)した後、ヒータ部端部にリード端
子を接合する。このようにして目的とするセラミックヒ
ータを量産できる。
B indicates the cutting direction), and then a lead terminal is joined to the end of the heater part. In this way, the desired ceramic heater can be mass-produced.

本発明において、ヒータの先端部に肉薄部を形成するこ
ともできる。肉薄部を形成することによって、ヒータの
先端が局所的に赤熱するため、燃料への着火が一層確実
に行なわれる。また肉薄部の内厚を調整することによっ
て先端部の電気抵抗を調整することも可能となる。また
ヒータ部材とプラグ栓体との絶縁性を図るためにヒータ
部材の側面に絶縁層を設けることができ、さらにヒータ
部材の全面に薄い絶縁層を設け、ヒータ部材を保護する
こともできる。このような絶AI 層として。
In the present invention, a thin portion may also be formed at the tip of the heater. By forming the thin part, the tip of the heater becomes red hot locally, so that the fuel can be ignited more reliably. Furthermore, by adjusting the inner thickness of the thin portion, it is also possible to adjust the electrical resistance of the tip. Further, an insulating layer can be provided on the side surface of the heater member to ensure insulation between the heater member and the plug body, and a thin insulating layer can also be provided over the entire surface of the heater member to protect the heater member. As such an absolute AI layer.

ヒータ部材の中央溝部に埋設される絶縁性セラミックス
と同一組成のもの、得られるセラミックヒータを大気中
で予め1200〜1500℃で加熱して形成したもの、
AQ203を主成分とする耐熱性の無機接着剤等によっ
て形成することができる。
A ceramic heater having the same composition as the insulating ceramic buried in the central groove of the heater member, a ceramic heater formed by heating the obtained ceramic heater in advance at 1200 to 1500°C in the atmosphere,
It can be formed using a heat-resistant inorganic adhesive containing AQ203 as a main component.

使用に先立って予め、¥!縁層を設けることによってヒ
ータ部材の耐熱性を低下させることなく、耐食性、耐環
境性の改善が期待できる。
Please pay ¥ before use! By providing the edge layer, improvement in corrosion resistance and environmental resistance can be expected without reducing the heat resistance of the heater member.

第4図はヒータの先端部゛に肉薄部を形成する例を示し
ている。U字型のヒータ部材22の中央溝部に絶縁部材
23を埋設し、ヒータ部材22の側面に絶縁層21を設
けた素材を第3図に示すように切断加工した後ヒータの
先端部を切削加工によって肉薄部25が形成される。次
いでヒータ部材22の端部にリード端子24を接続する
FIG. 4 shows an example in which a thin portion is formed at the tip of the heater. An insulating member 23 is buried in the central groove of a U-shaped heater member 22, and a material with an insulating layer 21 provided on the side surface of the heater member 22 is cut as shown in FIG. 3, and then the tip of the heater is cut. A thin portion 25 is formed by this. Next, a lead terminal 24 is connected to the end of the heater member 22.

第5図におけるヒータの先端部に肉薄部が形成されたヒ
ータの更に他の例は、第3図に示す切断加工(六方向、
B方向の切断加工)の前にヒータ素材の両端部をそれぞ
れ切削加工して薄肉部41を形成し、然る後第3図に示
す切断加工を施すことによって製造される。本実施例に
おいても、切断加工後のヒータ素材毎に切削加工を行う
必要がないので量産性が向上することになる。
Still another example of the heater in which a thin wall portion is formed at the tip of the heater in FIG.
Before cutting in direction B), both ends of the heater material are cut to form thin walled portions 41, and then the cutting process shown in FIG. 3 is performed. Also in this embodiment, there is no need to perform cutting for each heater material after cutting, so mass productivity is improved.

実施例1 黒色SiC粉末49重量%、An20.粉末1重量%及
びZrB、粉末50重量%の混合粉に成形バインダ(5
%PVA溶液)を10重量部加え、ライカイ機で30分
間混合した後16メツシユのフルイに通してヒータ部組
成物を!I!I整した。
Example 1 Black SiC powder 49% by weight, An20. A molded binder (5%
% PVA solution) was added, mixed for 30 minutes using a Raikai machine, and then passed through a 16-mesh sieve to form the heater part composition! I! I have adjusted it.

一方AQN粉末に成形バインダ(5% PVA溶液)を
20重量部加え、混合した後16メツシユのフルイで整
粒して絶縁部組成物を調整した。
On the other hand, 20 parts by weight of a molding binder (5% PVA solution) was added to the AQN powder, mixed, and then sized using a 16-mesh sieve to prepare an insulation composition.

次いでヒータ部組成物及び絶縁部組成物を平板状に仮成
形し、これから第2図に示す如く所定形状の成形体を切
り出した後積層した。このvLfFj体を所定圧力で本
成形してセラミックヒータの成形体を作製した。
Next, the heater part composition and the insulating part composition were temporarily molded into a flat plate shape, and a molded body of a predetermined shape was cut out from the plate as shown in FIG. 2, and then laminated. This vLfFj body was subjected to final molding at a predetermined pressure to produce a ceramic heater molded body.

続いて上記成形体を真空ホットプレス装置を用いて、圧
力300 kg/a1、温度1950’C1保持時間1
hの条件でホットプレス燃結してヒータ素材を得た。
Subsequently, the above molded body was heated using a vacuum hot press device at a pressure of 300 kg/a1 and a temperature of 1950'C1 for a holding time of 1.
A heater material was obtained by hot press sintering under the conditions of h.

このヒータ素材を第3図に示す如く所定形状に切断した
後、ヒータ部端部にNiリード端子を高温メタライズ法
で接合して第1図に示したと同様のセラミックヒータを
作成した。
After cutting this heater material into a predetermined shape as shown in FIG. 3, Ni lead terminals were bonded to the ends of the heater portion by high-temperature metallization to create a ceramic heater similar to that shown in FIG. 1.

得られたセラミックヒータは、室温時の抵抗値が約0.
1Ω(抵抗率は約1.5 X 10″″4ΩC+a)、
先端部を1000℃にした時の抵抗値が約0.3Ωであ
り、グロープラグ用ヒータとして好ましい抵抗温度特性
を有する。また同ヒータの絶縁部材であるAQN焼結体
は相対密度が98.5%の緻密質で、室温時に1011
Ωam以上の抵抗率を有し。
The obtained ceramic heater has a resistance value of about 0.0 at room temperature.
1Ω (resistivity is approximately 1.5 x 10″4ΩC+a),
The resistance value when the tip portion is heated to 1000° C. is approximately 0.3Ω, and has a resistance temperature characteristic suitable for a heater for a glow plug. In addition, the AQN sintered body that is the insulating member of the heater is dense with a relative density of 98.5%, and has a relative density of 1011% at room temperature.
It has a resistivity of Ωam or more.

ヒータ先端部を約1200℃に赤熱しても絶縁性が失な
われることはなかった。
Even when the tip of the heater was heated to about 1200° C., the insulation properties were not lost.

本実施例になるセラミックヒータについて、昇温性能及
び昇温くり返し試験を行った結果を第6図及び第7図に
示した。昇温性能は第6図の曲線Aに示したように先端
赤熱部が1000℃に到達するまでの時間は12V印加
の時に約0.9秒であり、極めて急速な加熱が可能であ
る。また室温と1100℃の昇温くり返し試験は第7図
に示した如く、10万サイクル後の抵抗値変動は約3%
と小さく、通電耐久性に優れている。さらに本実施例の
セラミックヒータの先端部温度を1000±100℃に
制御して連続1000時間通電した後の抵抗値変動は約
3%であり、高温耐久性にも優れている。
Regarding the ceramic heater of this example, the temperature increase performance and the results of a temperature increase repetition test are shown in FIGS. 6 and 7. As for the temperature increase performance, as shown by curve A in FIG. 6, it takes about 0.9 seconds for the tip red-hot portion to reach 1000° C. when 12V is applied, and extremely rapid heating is possible. In addition, as shown in Figure 7, the resistance value fluctuation after 100,000 cycles was approximately 3% in the repeated heating test at room temperature and 1100°C.
It is small and has excellent durability when carrying electricity. Further, the temperature of the tip of the ceramic heater of this example was controlled at 1000±100° C., and the resistance value fluctuation after being continuously energized for 1000 hours was about 3%, and it also has excellent high-temperature durability.

さらに本実施例のセラミックヒータを用いて第8図に示
す如きグロープラグを作成し、これを6気筒のディーゼ
ルエンジンに装着して着火テストを行った結果、全気筒
共に約1秒以内で着火始動し、はぼ予熱なしでガソリン
エンジン並の急速始動が可能であった。この始動テスト
は約1万回くり返したが、ヒータの破損等のトラブルは
起らず。
Furthermore, a glow plug as shown in Fig. 8 was made using the ceramic heater of this example, and an ignition test was conducted by installing it in a 6-cylinder diesel engine. As a result, ignition started in all cylinders within about 1 second. However, it was possible to start as quickly as a gasoline engine without preheating. This startup test was repeated approximately 10,000 times, but no problems such as heater damage occurred.

またヒータ抵抗値の変動も3%以内であった。Further, the variation in heater resistance value was within 3%.

実施例2 黒色SiC粉末49重量%、焼結助剤のAQN粉末1重
量%及び導電材のTiC粉末50ffi量%を混合し、
実施例1と同様にしてヒータ部組成物を調整した。
Example 2 49% by weight of black SiC powder, 1% by weight of AQN powder as a sintering aid, and 50% by weight of TiC powder as a conductive material were mixed,
A heater part composition was prepared in the same manner as in Example 1.

一方縁色SiC粉末99重量%とBe11重量%とから
なる絶縁部組成物を実施例1と同様にして調整した。
On the other hand, an insulation composition consisting of 99% by weight of edge-colored SiC powder and 11% by weight of Be was prepared in the same manner as in Example 1.

上記の両組酸物から前記実施例1と同じ方法によりヒー
タ成形体を作成し1次いで真空ホットプレス装置を用い
て、圧力300 kg/cJ、温度2000℃、1hの
条件でホットプレス焼結してヒータ素材を得た。このヒ
ータ素材から第3図に示したと同様のヒータエレメント
を切りだし、Niリードを接合して第1図と同じ構造の
セラミックヒータを得た。
A heater molded body was prepared from both of the above acid groups by the same method as in Example 1, and then hot press sintered using a vacuum hot press machine at a pressure of 300 kg/cJ and a temperature of 2000°C for 1 hour. The heater material was obtained. A heater element similar to that shown in FIG. 3 was cut out from this heater material, and Ni leads were joined to obtain a ceramic heater having the same structure as shown in FIG. 1.

得られたセラミックヒータは、室温時の抵抗値が0.1
Ω、ヒータ先端部を1000℃に赤熱させた時の抵抗値
は約0.28Ωであった。またSiC絶縁部は相対密度
98.5%の緻密質で、室温時に1014ΩcI11以
上の抵抗率を有し、先端部を1200℃に加熱しても絶
縁性は失なわれていない。
The obtained ceramic heater has a resistance value of 0.1 at room temperature.
Ω, and the resistance value when the tip of the heater was heated to 1000° C. was approximately 0.28 Ω. Further, the SiC insulating part is dense with a relative density of 98.5%, has a resistivity of 1014 ΩcI11 or more at room temperature, and does not lose its insulating properties even when the tip is heated to 1200°C.

さらに本実施例のセラミックヒータを用いて作ったグロ
ープラグについても前記実施例1と同様な方法で昇温性
能、昇温くり返しテスト及び実エンジンによる着火性テ
ストを行ったが、いずれの特性も前記実施例1の場合と
同等の結果であった。
Furthermore, the glow plug made using the ceramic heater of this example was also subjected to heating performance, repeated heating tests, and ignitability tests using an actual engine in the same manner as in Example 1, but none of the characteristics were as described above. The results were similar to those in Example 1.

上記実施例において、グロープラグ用ヒータを例に説明
したが、本発明は家電品や産業機器等の各種ヒータある
いはガスレンジ、暖房器具、ボイラ等における気体およ
び液体燃料の点火装置等に適用することもできる。
In the above embodiments, glow plug heaters were explained as an example, but the present invention can also be applied to various heaters for home appliances and industrial equipment, as well as gas and liquid fuel ignition devices for gas ranges, heating appliances, boilers, etc. You can also do it.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、ヒータ部がU字型で露出した直熱型で
あるため1000℃前後までの昇温速度が非常に速く、
シかもU字型の中央溝部は絶縁部材で一体に接合されて
補強されているので機械的に堅固にすることができる。
According to the present invention, since the heater part is a U-shaped exposed direct heating type, the temperature rise rate up to around 1000°C is very fast.
Since the U-shaped central groove is integrally joined and reinforced with an insulating member, it can be made mechanically strong.

またヒータ部材および絶縁部材は耐熱dを高くできるの
で、高温安定性と通電耐久性に優れたセラミックヒータ
が得られる。
Further, since the heater member and the insulating member can have high heat resistance d, a ceramic heater with excellent high temperature stability and current durability can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(A)は本発明に係るセラミックヒータの構成の
一例を示す平面図、第1図(B)は第1図(A)の側面
図、第2図および第3図は本発明に係るセラミックヒー
タの製造工程を示す説明図、第4図(A)は本発明に係
るセラミックヒータの構成の他の例を示す平面図、第4
図(B)は第4図(A)の側面図、第5図は本発明に係
るセラミックヒータの構成の更に他の例を示す側面図、
第6図は本発明実施例になるセラミックヒータの昇温性
能を示す特性図、第7図は本発明実施例になるセラミッ
クヒータの昇温くり返し試験における抵抗値経時変化を
示す図、第8図は本発明のセラミックヒータを用いたグ
ロープラグを一部破断して示す図である。 1.22.31・・・ヒータ部材、2,23.32・・
絶縁部材、3.24・・・リード端子。
FIG. 1(A) is a plan view showing an example of the configuration of a ceramic heater according to the present invention, FIG. 1(B) is a side view of FIG. 1(A), and FIGS. FIG. 4A is an explanatory diagram showing the manufacturing process of the ceramic heater according to the present invention, and FIG.
Figure (B) is a side view of Figure 4 (A), Figure 5 is a side view showing still another example of the configuration of the ceramic heater according to the present invention,
FIG. 6 is a characteristic diagram showing the temperature increase performance of the ceramic heater according to the present invention, FIG. 7 is a diagram showing the change in resistance value over time in repeated heating tests of the ceramic heater according to the present invention, and FIG. FIG. 1 is a partially cutaway view showing a glow plug using the ceramic heater of the present invention. 1.22.31...Heater member, 2,23.32...
Insulating member, 3.24...Lead terminal.

Claims (1)

【特許請求の範囲】 1、導電性セラミックス焼結体からなる導電部と絶縁性
セラミックス焼結体からなる絶縁部とが一体焼結された
セラミックヒータの製造方法において、前記一体焼結さ
れた部材を切断し、個々のヒータ回路を形成するように
したことを特徴とするセラミックヒータの製造方法。 2、前記絶縁部を介して前記導電部を両側に積層し、且
つ前記両側の導電部が互いに導通するように前記導電性
セラミックス焼結体を設け、板厚方向に切断し、U字型
回路を形成する特許請求の範囲第1項記載のセラミック
ヒータの製造方法。
[Scope of Claims] 1. A method for manufacturing a ceramic heater in which a conductive part made of a conductive ceramic sintered body and an insulating part made of an insulating ceramic sintered body are integrally sintered, wherein the integrally sintered member A method for manufacturing a ceramic heater, characterized in that the ceramic heater is cut to form individual heater circuits. 2. The conductive parts are laminated on both sides through the insulating part, and the conductive ceramic sintered body is provided so that the conductive parts on both sides are electrically connected to each other, and cut in the thickness direction to form a U-shaped circuit. A method of manufacturing a ceramic heater according to claim 1, which comprises forming a ceramic heater.
JP1202470A 1989-08-04 1989-08-04 Method for manufacturing exposed-heat-generation ceramic heater Expired - Lifetime JPH067510B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1202470A JPH067510B2 (en) 1989-08-04 1989-08-04 Method for manufacturing exposed-heat-generation ceramic heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1202470A JPH067510B2 (en) 1989-08-04 1989-08-04 Method for manufacturing exposed-heat-generation ceramic heater

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP12265383A Division JPS6014784A (en) 1983-07-06 1983-07-06 Ceramic heater

Publications (2)

Publication Number Publication Date
JPH0286086A true JPH0286086A (en) 1990-03-27
JPH067510B2 JPH067510B2 (en) 1994-01-26

Family

ID=16458056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1202470A Expired - Lifetime JPH067510B2 (en) 1989-08-04 1989-08-04 Method for manufacturing exposed-heat-generation ceramic heater

Country Status (1)

Country Link
JP (1) JPH067510B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0674447A (en) * 1992-05-18 1994-03-15 Norton Co Ceramic igniter and manufacture thereof
JP2009121807A (en) * 2007-11-12 2009-06-04 Robert Bosch Gmbh Ceramic glow plug with reduced heater spacing
JP2009525570A (en) * 2006-01-30 2009-07-09 ライスター プロセス テクノロジーズ Heating element of hot air device
JP2011047641A (en) * 2009-08-27 2011-03-10 Robert Bosch Gmbh Glow plug
WO2011162074A1 (en) * 2010-06-22 2011-12-29 日本特殊陶業株式会社 Glowplug, production method thereof and heating device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113993U (en) * 1983-01-21 1984-08-01 ティーディーケイ株式会社 Electrode extraction structure of heating element
JPS59134585A (en) * 1983-01-21 1984-08-02 ティーディーケイ株式会社 Structure of heater

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113993U (en) * 1983-01-21 1984-08-01 ティーディーケイ株式会社 Electrode extraction structure of heating element
JPS59134585A (en) * 1983-01-21 1984-08-02 ティーディーケイ株式会社 Structure of heater

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0674447A (en) * 1992-05-18 1994-03-15 Norton Co Ceramic igniter and manufacture thereof
EP0570914A3 (en) * 1992-05-18 1995-09-13 Norton Co Ceramic igniters and process for making same
EP0818657A3 (en) * 1992-05-18 1998-08-26 Norton Company Process for making ceramic igniters
JP2009525570A (en) * 2006-01-30 2009-07-09 ライスター プロセス テクノロジーズ Heating element of hot air device
JP2009121807A (en) * 2007-11-12 2009-06-04 Robert Bosch Gmbh Ceramic glow plug with reduced heater spacing
JP2011047641A (en) * 2009-08-27 2011-03-10 Robert Bosch Gmbh Glow plug
WO2011162074A1 (en) * 2010-06-22 2011-12-29 日本特殊陶業株式会社 Glowplug, production method thereof and heating device
JP5255706B2 (en) * 2010-06-22 2013-08-07 日本特殊陶業株式会社 Glow plug, manufacturing method thereof, and heating device

Also Published As

Publication number Publication date
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