JPH0287066U - - Google Patents
Info
- Publication number
- JPH0287066U JPH0287066U JP16684188U JP16684188U JPH0287066U JP H0287066 U JPH0287066 U JP H0287066U JP 16684188 U JP16684188 U JP 16684188U JP 16684188 U JP16684188 U JP 16684188U JP H0287066 U JPH0287066 U JP H0287066U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering device
- ion sputtering
- sample chamber
- ions
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本案を採用した時のイオンスパツタ装
置の試料室内を真空排気している状態を示す図、
第２図は本案を採用して試料室を押し上げた状態
を示す図である。
１……蓋、２……ターゲツト、３……試料室、
６……ベース、７……バネ併用ベローズ、８……
バルブ、９……連結ベルト、１０……リークバル
ブ、１１……油回転ポンプ。
Figure 1 is a diagram showing the state in which the sample chamber of the ion sputtering device is evacuated when this proposal is adopted;
FIG. 2 is a diagram showing a state in which the sample chamber is pushed up using the present invention. 1...Lid, 2...Target, 3...Sample chamber,
6...Base, 7...Bellows with spring, 8...
Valve, 9...Connection belt, 10...Leak valve, 11...Oil rotary pump.
Claims (1)
る非導電性試料に対してイオンによりはじき出さ
れた金属を試料の表面に薄くコーテイングするイ
オンスパツタ装置において、真空排気を利用した
試料室の自動開閉機構を設けたことを特徴とする
イオンスパツタ装置。 In an ion sputtering device that thinly coats the surface of a non-conductive sample to be observed with a scanning electron microscope with metal ejected by ions, an automatic opening/closing mechanism for the sample chamber using vacuum evacuation was installed. An ion sputtering device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16684188U JPH0287066U (en) | 1988-12-26 | 1988-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16684188U JPH0287066U (en) | 1988-12-26 | 1988-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0287066U true JPH0287066U (en) | 1990-07-10 |
Family
ID=31454589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16684188U Pending JPH0287066U (en) | 1988-12-26 | 1988-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0287066U (en) |
-
1988
- 1988-12-26 JP JP16684188U patent/JPH0287066U/ja active Pending
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