JPH0288235U - - Google Patents
Info
- Publication number
- JPH0288235U JPH0288235U JP16679488U JP16679488U JPH0288235U JP H0288235 U JPH0288235 U JP H0288235U JP 16679488 U JP16679488 U JP 16679488U JP 16679488 U JP16679488 U JP 16679488U JP H0288235 U JPH0288235 U JP H0288235U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- gas
- nozzle
- vacuum chuck
- spraying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16679488U JPH0288235U (da) | 1988-12-26 | 1988-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16679488U JPH0288235U (da) | 1988-12-26 | 1988-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0288235U true JPH0288235U (da) | 1990-07-12 |
Family
ID=31454496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16679488U Pending JPH0288235U (da) | 1988-12-26 | 1988-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0288235U (da) |
-
1988
- 1988-12-26 JP JP16679488U patent/JPH0288235U/ja active Pending
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