JPH0288433A - Optical element and method for manufacturing optical element - Google Patents
Optical element and method for manufacturing optical elementInfo
- Publication number
- JPH0288433A JPH0288433A JP23821788A JP23821788A JPH0288433A JP H0288433 A JPH0288433 A JP H0288433A JP 23821788 A JP23821788 A JP 23821788A JP 23821788 A JP23821788 A JP 23821788A JP H0288433 A JPH0288433 A JP H0288433A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- optical element
- sol
- glass
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000499 gel Substances 0.000 claims abstract description 23
- 239000011521 glass Substances 0.000 claims abstract description 22
- 238000009826 distribution Methods 0.000 claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 150000004703 alkoxides Chemical class 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims abstract description 5
- 239000002994 raw material Substances 0.000 claims abstract description 5
- 238000003980 solgel method Methods 0.000 claims abstract description 4
- 238000005245 sintering Methods 0.000 claims abstract description 3
- 239000011240 wet gel Substances 0.000 claims abstract description 3
- 239000000203 mixture Substances 0.000 claims description 4
- 239000010419 fine particle Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 230000004075 alteration Effects 0.000 abstract description 15
- 238000001035 drying Methods 0.000 abstract 1
- 239000002019 doping agent Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 238000000465 moulding Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000003491 array Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001879 gelation Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- WXYNMTGBLWPTNQ-UHFFFAOYSA-N tetrabutoxygermane Chemical compound CCCCO[Ge](OCCCC)(OCCCC)OCCCC WXYNMTGBLWPTNQ-UHFFFAOYSA-N 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/12—Other methods of shaping glass by liquid-phase reaction processes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は微小レンズを備えたガラス製光学素子及び該光
学素子の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a glass optical element equipped with a microlens and a method for manufacturing the optical element.
１個あるいは２個以上の微小レンズを備えた光学素子と
しては球面レンズ、非球面レンズ、フレネルレンズ、ホ
ログラムレンズ、あるいは、それらを多数個ならべて構
成したレンズアレイ等、様々な種類の物があり、光通信
、光情報処理、光加工等の分野で用いられている。これ
らの光学素子の製造方法としては、形状によりレンズ効
果を持たせる場合にはモールド成形法、プレス成形法等
が、また、屈折率勾配によりレンズ効果を持たせる場合
にはイオン交換法、ＣＶＤ法、分子スタッフインク法等
がある。There are various types of optical elements equipped with one or more microlenses, such as spherical lenses, aspherical lenses, Fresnel lenses, hologram lenses, and lens arrays constructed by arranging many of these lenses. It is used in fields such as optical communications, optical information processing, and optical processing. Methods for manufacturing these optical elements include molding methods, press molding methods, etc. when creating a lens effect due to the shape, and ion exchange methods and CVD methods when creating a lens effect through a refractive index gradient. , molecular stuff ink method, etc.
しかし、一部のレンズを除けば、前述した従来のレンズ
では何れも球面収差、非点収差等の各種収差の発生をと
もない、実際の使用に際しては、収差の補正を必要とす
る。簡単な例として、球面収差が大きい場合には、第５
図に示すように各光線が一点に集まらない。また、成形
精度やレンズ媒質の屈折率の関係から、−枚のレンズで
超長焦点のレンズ体や超短焦点のレンズ体を実現するこ
とが非常に難しいと言う問題点を有していた。また、球
面収差等を補正することが可能であるレンズとして非球
面レンズが挙げられるが、微小レンズ面を非球面化する
ことはきわめて難しく、量産性に乏しいという問題があ
った。However, with the exception of some lenses, all of the above-mentioned conventional lenses suffer from various aberrations such as spherical aberration and astigmatism, and require correction of aberrations in actual use. As a simple example, if the spherical aberration is large, the fifth
As shown in the figure, each ray of light does not converge on one point. Furthermore, due to the molding accuracy and the refractive index of the lens medium, it is extremely difficult to realize a lens body with a very long focus or a lens body with a very short focus using only one lens. Further, an aspherical lens is an example of a lens that can correct spherical aberration, etc., but it is extremely difficult to make a microlens surface aspherical, and there is a problem that mass production is poor.
そこで本発明は以上のような問題点を解決するもので、
その目的とするところは、各種の収差をほとんど発生せ
ず、また、−枚のレンズ構成で超長焦点あるいは超短焦
点のレンズを可能にした微・小レンズを備えた光学素子
を提供し、且つ該光学素子を簡便に製造する方法を提供
することにある。Therefore, the present invention solves the above problems.
The purpose is to provide an optical element equipped with micro-lenses that hardly generates various aberrations, and which enables ultra-long focal length or ultra-short focal length lenses with a -lens configuration. Another object of the present invention is to provide a method for easily manufacturing the optical element.
（？５ＡＭを解決するための手段〕
上記課題を解決するために本発明の光学素子は、１個あ
るいは２個以上の微小レンズを備えた光学素子において
、該微小レンズ部分に屈折率分布を形成したことを特徴
とする。(Means for Solving ?5AM) In order to solve the above problems, the optical element of the present invention forms a refractive index distribution in the microlens portion in an optical element equipped with one or more microlenses. It is characterized by what it did.
また、本発明の光学素子の製造方法は、１種もしくは２
種以上の金属アルコキシドを主原料として目的ガラス成
分組成の液状ゾルを調製し、該液状ゾルをレンズ形状も
しくはレンズパターンを有する母型に接触させながらゲ
ル化させ、得られたウェットゲルを乾燥してドライゲル
とした後、焼結等の熱処理によりガラス体を得るゾル−
ゲル法によるガラス製光学素子の製造方法において、該
ドライゲルを熱処理する工程の途中に、前記ガラス体の
一部の屈折率を変える工程を付加したことを特徴とする
。Further, the method for manufacturing an optical element of the present invention may be one or two types.
A liquid sol having a desired glass component composition is prepared using a metal alkoxide of at least one species as a main raw material, and the liquid sol is gelled while being brought into contact with a matrix having a lens shape or a lens pattern, and the obtained wet gel is dried. A sol that obtains a glass body by heat treatment such as sintering after being made into a dry gel.
The method for manufacturing a glass optical element by a gel method is characterized in that a step of changing the refractive index of a part of the glass body is added during the step of heat-treating the dry gel.
さらに、目的ガラス成分組成の液状ゾルは、１種もしく
は２種以上の金属アルコキシド及び金属酸化物の微粒子
を主原料として調製したものであることを特徴とする。Furthermore, the liquid sol having the desired glass component composition is characterized in that it is prepared using one or more metal alkoxides and fine particles of metal oxides as main raw materials.
第４図をもとに本発明の微小レンズを備えた光学素子の
作用を説明する。レンズにより光を屈折させる場合には
、第４図（ａ）に示すようにレンズ媒質と空気との不連
続界面で屈折させる場合と、第４図（ｂ）に示すように
レンズ媒質中に形成された屈折率分布により屈折させる
場合とがある。The operation of the optical element equipped with the microlens of the present invention will be explained based on FIG. When light is refracted by a lens, there are cases where it is refracted at a discontinuous interface between the lens medium and air, as shown in Figure 4 (a), and cases where it is refracted at a discontinuous interface between the lens medium and air, as shown in Figure 4 (b). In some cases, the refraction is caused by the refractive index distribution.
従って、レンズ形状と屈折率分布を合わせ持つレンズを
つくり、なおかつ、２種類の屈折作用を各々異なる目的
に振り分け、つまり、不連続界面における屈折作用で光
路を曲げ、屈折率分布により収差を補正することにより
（勿論この逆でもよい）、収差のほとんど無いレンズを
一枚のレンズ体で実現することが可能となる。Therefore, we create a lens that has both a lens shape and a refractive index distribution, and also allocate two types of refractive action to different purposes.In other words, the refractive action at the discontinuous interface bends the optical path, and the refractive index distribution corrects aberrations. By doing this (of course, the reverse is also possible), it becomes possible to realize a lens with almost no aberrations using a single lens body.
ゾル−ゲル法により作製された多孔質ゲル（ドライゲル
）中には、数百オングストロームの大きさを持つ空孔が
多数存在する。この空孔中に媒質の屈折率を変化させる
ドーパントを拡散させ、多孔質ゲルを熱処理してガラス
化すると、媒質中に屈折率分布が付いたガラス体が得ら
れる。この場合、屈折率分布は多孔質ゲル体中の細孔の
大きさ及びその分布状態、ドーパントの種類、その濃度
、溶媒の種類、拡散時間、拡散時の温度等、様々な因子
により制御が可能である。A porous gel (dry gel) produced by the sol-gel method contains many pores with a size of several hundred angstroms. When a dopant that changes the refractive index of the medium is diffused into the pores and the porous gel is heat-treated to vitrify it, a glass body with a refractive index distribution in the medium is obtained. In this case, the refractive index distribution can be controlled by various factors such as the size of the pores in the porous gel body and their distribution, the type of dopant, its concentration, the type of solvent, the diffusion time, and the temperature during diffusion. It is.
以下、実施例に基付き本発明の詳細な説明する。 Hereinafter, the present invention will be explained in detail based on examples.
但し、本発明は以下の実施例に限定されるものではない
。However, the present invention is not limited to the following examples.
［実施例１］
第１図に従って、本発明の光学素子の製造方法を説明゛
する。ここでは、マイクロレンズを作製する場合を示す
。[Example 1] A method for manufacturing an optical element of the present invention will be explained with reference to FIG. Here, a case is shown in which a microlens is manufactured.
エチルシリケートＳｉ （ＯＣ２Ｈｓ）ａ、４２．４ｇ
に０．０２規定の希塩酸溶液ＨＣＩ、 ３０． ０ｇ
を加えて加水分解した後、平均粒径が２００人の微粉末
シリカ１０．０ｇを添加し、均一溶液になるまで充分に
撹拌してゾル溶液を調製した。次に、０．２規定のアン
モニア溶液を用いてこのゾル溶液のｐＨ値を４．５に調
整し、球面レンズ形状が作り込まれている型１１（第１
図（ａ））中に流し込みゲル化させた。ゲル化後のゲル
体は縮重合反応の進行に伴い収縮を起こし、ガラス化時
にはゲル化時に比べて約２分の１の大きさに収縮してい
る。従って、型は予め収縮を見込んで作製しである。Ethyl silicate Si (OC2Hs)a, 42.4g
0.02N diluted hydrochloric acid solution HCI, 30. 0g
After hydrolysis, 10.0 g of finely powdered silica having an average particle size of 200 was added and sufficiently stirred until a homogeneous solution was obtained to prepare a sol solution. Next, the pH value of this sol solution was adjusted to 4.5 using a 0.2N ammonia solution, and mold 11 (first
It was poured into Figure (a) and allowed to gel. The gel body after gelation shrinks as the polycondensation reaction progresses, and during vitrification it shrinks to about half the size of the gel body. Therefore, the mold should be prepared in advance with shrinkage in mind.
ゲル化した後、ゲル体を型から取り出し、６０℃の恒温
乾燥機を用いて約１週間かけて乾燥させ多孔質ゲル体１
４（第１図（ｂ））を得た。このゲル体は空気雰囲気中
で一旦１０００°Ｃまで熱処理した後、ゲル体のレンズ
中央部分以外を除いて表面をマスキング（第２図（Ｃ）
） Ｌ、中央部の穴１６からドーパント溶液を拡散さ
せた。ドーパント溶液はテトラブトキシゲルマニウムＧ
ｅ（ｔ−ＱＣ４Ｈ９）４をエタノールにより体積比で５
倍に希釈したものを用いた（ゲルマニウムはシリカガラ
スに対して屈折率を高める働きをする）。その後、この
ゲル体を６０°Ｃの温度で約１日間乾燥し、続いてヘリ
ウム雰囲気中で約１２５０°Ｃまで加熱することにより
、第２図（ｄ）に示す様なマイクロレンズを備えたガラ
ス製光学素子１７（５ｍ＋＊Ｘ５ｍｍＸ１ ｍｍ ）を
得た。この光学素子に作り込まれているマイクロレンズ
の概要はレンズ径５００μｍ１ 焦点圧ｆｉ７８０μ
ｍであり、その性能を評価するためにフィゾー型干渉計
により波面収差を調べたところ、はぼ回折限界の値が得
られた。以上のように、ガラス中に屈折率分布を形成す
ることにより、収差を補正できたことがわかる。本実施
例では、球面形状の円形レンズをつくる場合を示したが
、勿論非球面レンズであってもよい。After gelation, the gel body is removed from the mold and dried in a constant temperature dryer at 60°C for about one week to form a porous gel body 1.
4 (Fig. 1(b)) was obtained. This gel body was once heat-treated to 1000°C in an air atmosphere, and then the surface of the gel body was masked except for the central part of the lens (Figure 2 (C)).
) L, the dopant solution was diffused through the hole 16 in the center. The dopant solution is tetrabutoxygermanium G
e(t-QC4H9)4 with ethanol in a volume ratio of 5
A diluted version was used (germanium works to increase the refractive index of silica glass). Thereafter, this gel body is dried at a temperature of 60°C for about 1 day, and then heated to about 1250°C in a helium atmosphere to form a glass with microlenses as shown in FIG. 2(d). A manufactured optical element 17 (5m+*X5mmX1 mm) was obtained. The outline of the microlens built into this optical element is lens diameter 500μm1 focal pressure fi780μ
m, and in order to evaluate its performance, the wavefront aberration was investigated using a Fizeau interferometer, and a value at the Habo diffraction limit was obtained. As described above, it can be seen that aberrations can be corrected by forming a refractive index distribution in the glass. In this embodiment, a case where a circular lens with a spherical surface is made is shown, but of course an aspherical lens may be used.
［実施例２］
第２図は屈折率分布２２を、実施例１のようにレンズ部
分２１に付けたのではなく、レンズと対応する反対側の
面（裏面）に付けた場合の実施例である。製造方法は基
本的に実施例１と同じであるが、ゲルマニウムを拡散す
る際のマスク開口部の位置が、レンズの反対側に在ると
ころが異なる。本実施例ではレンズ径５００μｍ、焦点
距離６．０順の超長焦点レンズが作製できた。勿論、実
施例１の方法でも超長焦点レンズは作製可能である。[Example 2] Figure 2 shows an example in which the refractive index distribution 22 is not attached to the lens portion 21 as in Example 1, but is attached to the opposite surface (back surface) corresponding to the lens. be. The manufacturing method is basically the same as in Example 1, except that the mask opening for diffusing germanium is located on the opposite side of the lens. In this example, an ultra-long focal length lens with a lens diameter of 500 μm and a focal length of 6.0 was manufactured. Of course, an ultra-long focal length lens can also be manufactured using the method of Example 1.
［実施例３］
第３図は実施例１と同様な方法で、球面形状の円形レン
ズに屈折率分布を形成した場合の実施例である。但し、
この場合には第４図（ａ）に示すように、レンズの中央
部３２及び非レンズ部分３３にマスキングを施し、レン
ズ周辺部３４がら屈折率を下げるドーパントを拡散させ
、第３図（ｂ）に示すような光学素子３５を作製した。[Example 3] FIG. 3 shows an example in which a refractive index distribution is formed in a spherical circular lens using the same method as in Example 1. however,
In this case, as shown in FIG. 4(a), the central part 32 and non-lens part 33 of the lens are masked, and the dopant that lowers the refractive index is diffused from the peripheral part 34 of the lens, as shown in FIG. 3(b). An optical element 35 as shown in FIG.
この場合は、レンズ周辺部に屈折率分布を付け、レンズ
周辺部での球面収差を補正した。In this case, a refractive index distribution was applied to the lens periphery to correct spherical aberration at the lens periphery.
実施例１及び３で示したように、レンズ媒質に屈折率を
付与する方法としては、レンズの表面中央部から屈折率
を高める（あるいは低くする）ドーパントを拡散する方
法と、逆にレンズ周辺部からドーパントを拡散する方法
とがある。As shown in Examples 1 and 3, there are two methods for imparting a refractive index to a lens medium: one is to diffuse a dopant that increases (or lowers) the refractive index from the center of the surface of the lens, and the other is to diffuse a dopant from the center of the lens surface to increase (or decrease) the refractive index. There is a method of diffusing dopants from.
さらに、以上の実施例では１個のレンズ体を備えた光学
素子の場合を例として示したが、微小なレンズ体を多次
元的に多数配列してアレイ化した光学素子も、同様な方
法で作製可能であることは明かである。Furthermore, in the above embodiments, the case of an optical element with one lens body was shown as an example, but an optical element in which a large number of microscopic lens bodies are arranged multidimensionally into an array can also be produced using the same method. It is clear that it can be manufactured.
以上説明したように本発明によれば、微小レンズを備え
た光学素子の微小レンズ部分に屈折率分布を形成するこ
とにより、−枚のレンズ体で各種の収差を補正できると
共に、焦点距離が極めて長いレンズや、逆に短いレンズ
を容易に実現できる。As explained above, according to the present invention, by forming a refractive index distribution in the microlens portion of an optical element equipped with a microlens, various aberrations can be corrected with -1 lens body, and the focal length can be extremely shortened. Long lenses or, conversely, short lenses can be easily realized.
また、非球面レンズが達成できない、極めて微小なレン
ズ体の成形方法としても特に有効である。It is also particularly effective as a method for molding extremely small lens bodies, which cannot be achieved with aspherical lenses.
さらに、光学素子の製造方法としてゾル−ゲル法を用い
ているため、研削、研磨、微細加工等を一切行なうこと
なしに、高精度な光学素子を容易に製造することが可能
である。Furthermore, since the sol-gel method is used as a method for manufacturing optical elements, it is possible to easily manufacture highly accurate optical elements without performing any grinding, polishing, microfabrication, or the like.
本発明により作製できる光学素子としては、実施例で示
したマイクロレンズ、マイクロレンズアレイに限定され
るものではなく、マイクロフレネルレンズ、マイクロシ
リンドリカルレンズ、ホログラフィックレンズ及び、そ
れらを多次元的に集積化した各種レンズアレイなどが挙
げられる。勿論、本発明はレンズ以外の、例えばレンズ
効果を有しないプリズムなどの光学素子にも応用が可能
であることは明白である。Optical elements that can be produced according to the present invention are not limited to the microlenses and microlens arrays shown in the examples, but include micro Fresnel lenses, micro cylindrical lenses, holographic lenses, and multidimensional integration of these lenses. Examples include various lens arrays. Of course, it is obvious that the present invention can be applied to optical elements other than lenses, such as prisms that do not have a lens effect.
及び得られる光学素子の概略断面図。and a schematic cross-sectional view of the obtained optical element.
第４図は２種類の屈折作用を説明する図。FIG. 4 is a diagram explaining two types of refraction effects.
第５図は球面収差が大きいレンズ体を用いた場合の集光
状態を説明する図。FIG. 5 is a diagram illustrating a light condensing state when a lens body with large spherical aberration is used.
型 ゾル溶液注入口 ゾル 多孔質ゲル体 マスキング層 ドーパント溶液注入口 ガラス製光学素子 屈折率分布形成部分mold Sol solution inlet Sol porous gel body masking layer Dopant solution inlet glass optics Refractive index distribution forming part
第１図は本発明の光学素子の製造工程及び得られる光学
素子の概略断面図。
第２図は実施例２における光学素子の概略断面図。
第３図は実施例３における光学素子の製造工程２１・・
・球面レンズ部分
２２・・・屈折率分布形成部分
３１・・・多孔質ゲル体
３２・・・レンズ中央部のマスキング層３３・・・非レ
ンズ部分のマスキング層３４・・・ガラス製光学素子
３５・・・屈折率分布形成部分
４１・・・球面レンズ部分
４２・・・焦点
４３・・・屈折率分布形成部分
５１ ・
・球面レンズ部分
以 上
ｔｂ）
出願人 セイコーエプソン株式会社
代理人 弁理士 鈴木喜三部（他１名）（’Ｃ）
（ｄ）
第１図
（久）
Ｂ
第４図
（α）
（！０）
第３図FIG. 1 is a schematic sectional view of the manufacturing process of the optical element of the present invention and the obtained optical element. FIG. 2 is a schematic cross-sectional view of an optical element in Example 2. FIG. 3 shows the manufacturing process 21 of the optical element in Example 3.
- Spherical lens part 22...Refractive index distribution forming part 31...Porous gel body 32...Masking layer 33 in the center of the lens...Masking layer 34 in the non-lens part...Glass optical element 35 ...Refractive index distribution forming part 41 ... Spherical lens part 42 ... Focal point 43 ... Refractive index distribution forming part 51 ... Above the spherical lens part tb) Applicant Seiko Epson Co., Ltd. Agent Patent attorney Suzuki Kisanbe (1 other person) ('C) (d) Figure 1 (Ku) B Figure 4 (α) (!0) Figure 3
Claims (3)
素子において、該微小レンズ部分に屈折率分布を形成し
たことを特徴とする光学素子。(1) An optical element comprising one or more microlenses, characterized in that a refractive index distribution is formed in the microlens portions.
料として目的ガラス成分組成の液状ゾルを調製し、該液
状ゾルをレンズ形状もしくはレンズパターンを有する型
に接触させながらゲル化させ、得られたウェットゲルを
乾燥してドライゲルとした後、焼結等の熱処理によりガ
ラス体を得るゾル−ゲル法によるガラス製光学素子の製
造方法において、該ドライゲルを熱処理する工程の途中
に、前記ガラス体の一部の屈折率を変える工程を付加し
たことを特徴とする請求項１記載の光学素子の製造方法
。(2) A liquid sol having the desired glass component composition is prepared using one or more metal alkoxides as main raw materials, and the liquid sol is gelled while being brought into contact with a mold having a lens shape or a lens pattern. In a method for manufacturing a glass optical element using a sol-gel method in which a wet gel is dried to form a dry gel and then a glass body is obtained by heat treatment such as sintering, one of the glass bodies is heated during the step of heat treating the dry gel. 2. The method of manufacturing an optical element according to claim 1, further comprising a step of changing the refractive index of the portion.
１種もしくは２種以上の金属アルコキシド及び金属酸化
物の微粒子を主原料として調製したものであることを特
徴とする光学素子の製造方法。(3) The liquid sol having the target glass component composition described in item 2 is:
1. A method for producing an optical element, characterized in that the optical element is prepared using one or more metal alkoxides and fine particles of metal oxides as main raw materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23821788A JPH0288433A (en) | 1988-09-22 | 1988-09-22 | Optical element and method for manufacturing optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23821788A JPH0288433A (en) | 1988-09-22 | 1988-09-22 | Optical element and method for manufacturing optical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0288433A true JPH0288433A (en) | 1990-03-28 |
Family
ID=17026889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23821788A Pending JPH0288433A (en) | 1988-09-22 | 1988-09-22 | Optical element and method for manufacturing optical element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0288433A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005019858A (en) * | 2003-06-27 | 2005-01-20 | Toppan Printing Co Ltd | Two-dimensional image conversion element |
| JP2005222039A (en) * | 2003-12-26 | 2005-08-18 | Fuji Photo Film Co Ltd | Image exposure method and apparatus |
-
1988
- 1988-09-22 JP JP23821788A patent/JPH0288433A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005019858A (en) * | 2003-06-27 | 2005-01-20 | Toppan Printing Co Ltd | Two-dimensional image conversion element |
| JP2005222039A (en) * | 2003-12-26 | 2005-08-18 | Fuji Photo Film Co Ltd | Image exposure method and apparatus |
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