JPH0288937A - Method and device for measuring distribution of refractive index of optical wave guide - Google Patents
Method and device for measuring distribution of refractive index of optical wave guideInfo
- Publication number
- JPH0288937A JPH0288937A JP24205188A JP24205188A JPH0288937A JP H0288937 A JPH0288937 A JP H0288937A JP 24205188 A JP24205188 A JP 24205188A JP 24205188 A JP24205188 A JP 24205188A JP H0288937 A JPH0288937 A JP H0288937A
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- refractive index
- optical waveguide
- prism
- measured
- index distribution
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Links
- 238000000034 method Methods 0.000 title claims abstract description 16
- 230000003287 optical effect Effects 0.000 title claims description 47
- 238000005259 measurement Methods 0.000 claims abstract description 9
- 238000004364 calculation method Methods 0.000 claims description 17
- 238000005315 distribution function Methods 0.000 claims description 15
- 238000010168 coupling process Methods 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 3
- 238000013480 data collection Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/37—Testing of optical devices, constituted by fibre optics or optical waveguides in which light is projected perpendicularly to the axis of the fibre or waveguide for monitoring a section thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/412—Index profiling of optical fibres
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はブレーナ形光導波路の深さ方向の屈折率分布を
測定する方法および装置に関する。本発明は、特に、光
集積回路製造プロセスの最適化に利用するに適する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and apparatus for measuring the refractive index distribution in the depth direction of a Brehner optical waveguide. The present invention is particularly suitable for use in optimizing optical integrated circuit manufacturing processes.
本発明は、ブレーナ形光導波路の深さ方向の屈折率分布
を測定する光導波路屈折率分布測定方法および装置にお
いて、
係数が未知数である屈折率分布関数を仮定し、実効屈折
率のデータから各係数を求めることにより、
少ないデータで正確な屈折率分布を演算するものである
。The present invention provides an optical waveguide refractive index distribution measuring method and apparatus for measuring the refractive index distribution in the depth direction of a Brehner-type optical waveguide. By determining the coefficients, an accurate refractive index distribution can be calculated using a small amount of data.
光集積回路の製造プロセスを評価するうえで、ブレーナ
形光導波路の深さ方向の屈折率分布を知ることが重要と
なることがある。この屈折率分布は、製造プロセスにふ
ける個々のパラメータ、例えばチタン拡散工程における
拡散温度および拡散時間等に対応させて測定しておくこ
とにより、光導波路を設計するための重要な情報となる
。これは、特に、新しい装置を用いてプロセスを立ち上
げる場合に重要である
また、屈折率分布を測定することにより、基板上に成長
させた薄膜の厚さを測定することができる。膜厚の測定
方法としては、光の干渉を利用したエリプソメトリが良
く知られている。しかし、高精度に測定するためには、
プリズム結合法が用いられる。In evaluating the manufacturing process of optical integrated circuits, it is sometimes important to know the refractive index distribution in the depth direction of a Brener optical waveguide. This refractive index distribution becomes important information for designing an optical waveguide by measuring it in accordance with individual parameters involved in the manufacturing process, such as diffusion temperature and diffusion time in the titanium diffusion step. This is particularly important when starting up a process using new equipment.Measuring the refractive index profile also allows the thickness of a thin film grown on a substrate to be measured. Ellipsometry, which uses light interference, is a well-known method for measuring film thickness. However, in order to measure with high precision,
A prismatic coupling method is used.
プリズム結合法では、高屈折率のプリズムを光導波路に
近接して配置し、このプリズムを介して光導波路に光ビ
ームを入射させる。プリズムがない場合には、光導波路
の側面から光ビームを入射させることはできない。しか
し、プリズムを用い、光導波路に対する光ビームの入射
角を適切に設定することにより、入射光ビームと導波モ
ードとの位相を整合させ、光ビームのパワーを光導波路
に結合させることができる。このとき、光ビームの入射
角、結合率、プリズムの形状およびその屈折率から、光
導波路の実効屈折率を演算により求めることができる。In the prism coupling method, a prism with a high refractive index is placed close to an optical waveguide, and a light beam is made to enter the optical waveguide through this prism. If there is no prism, a light beam cannot enter from the side of the optical waveguide. However, by using a prism and appropriately setting the incident angle of the light beam with respect to the optical waveguide, the phases of the incident light beam and the waveguide mode can be matched, and the power of the light beam can be coupled to the optical waveguide. At this time, the effective refractive index of the optical waveguide can be calculated from the incident angle of the light beam, the coupling ratio, the shape of the prism, and its refractive index.
さらに、複数の導波モードに対する実効屈折率を求める
ことにより、光導波路の屈折率分布を求めることができ
る。Furthermore, by determining the effective refractive index for a plurality of waveguide modes, the refractive index distribution of the optical waveguide can be determined.
プリズム結合法の詳細については、例えば、（１）西原
浩、春名正光、栖原敏明 共著、オーム社刊、「光集積
回路」第８章、第２３７〜２４３頁、（２） ウルリッ
ヒ、トルゲ、「メジャメント・オブーシン拳フィルムΦ
パラメターズ舎ウィズ・ア・プリズム・カプラ」、アプ
ライド・オプティクス第１２巻第１２号、１９７３年１
２月、第２９０１頁（Ｒ。For details on the prism coupling method, see, for example, (1) Hiroshi Nishihara, Masamitsu Haruna, and Toshiaki Suhara, "Optical Integrated Circuits," Chapter 8, pp. 237-243, published by Ohmsha; (2) Ullrich and Torge, " Measurement Obsin Fist Film Φ
"Parameters with a Prism Coupler", Applied Optics Vol. 12, No. 12, 1973 1
February, page 2901 (R.
Ｕｌｒｉｃｈ ａｎｄ Ｒ，Ｔｏｒｇｅ、 ”Ｍｅａｓ
ｕｒｅｍｅｎｔ ｏｆ ＴｈｉｎＦｉｌｍ Ｐａ
ｒａｒｎｅｔｅｒｓ ｗｉｔｈ ａ Ｐｒ１５ｍ
Ｃｏｕｐｌｅｒ”。Ulrich and R. Torge, “Meas.
urement of ThinFilm Pa
raneters with a Pr15m
Coupler”.
＾ｐｐ１．Ｏｐｔ、、 Ｖｏｌ、１２． Ｎｏ、
１２． ロｅｃｅｍｂｅｒ １９７３）に詳しく
説明されている。^pp1. Opt., Vol. 12. No,
12. (1973).
しかし、プリズム結合法により求めた実効屈折率により
光導波路の屈折率分布を求めるには、多数の導波モード
を測定する必要があった。However, in order to determine the refractive index distribution of an optical waveguide using the effective refractive index determined by the prism coupling method, it was necessary to measure a large number of waveguide modes.
本発明は、以上の問題点を解決し、少ない実効屈折率の
データから正確な屈折率分布を求める光導波路屈折率分
布測定方法および装置を提供することを目的とする。An object of the present invention is to solve the above-mentioned problems and provide an optical waveguide refractive index distribution measuring method and apparatus for determining an accurate refractive index distribution from a small amount of effective refractive index data.
本発明の光導波路屈折率分布測定方法は、係数が未知数
である屈折率分布関数を仮定し、プリズム結合法により
求めた実効屈折率を用いて前記係数を算出する。この算
出には、非線形最小自乗法を用いる。The optical waveguide refractive index distribution measurement method of the present invention assumes a refractive index distribution function whose coefficients are unknown, and calculates the coefficients using the effective refractive index determined by the prism coupling method. This calculation uses the nonlinear least squares method.
本発明の光導波路屈折率分布測定装置は、プリズム結合
法により実効屈折率を求める手段と、係数が未知数であ
る屈折率分布関数を仮定ｔ１プリズム結合法により求め
た実効屈折率を用いて前記係数を算出する手段とを備え
たことを特徴とする。The optical waveguide refractive index distribution measurement device of the present invention includes a means for determining an effective refractive index by a prism coupling method, and a means for determining an effective refractive index by using the effective refractive index determined by the t1 prism coupling method, assuming a refractive index distribution function whose coefficients are unknown. The invention is characterized by comprising means for calculating.
ブレーナ形光導波路の屈折率分布は、一般に、その製造
プロセスによって定まる分布関数にしたがっている。た
だし、その分布関数の個々の係数は、製造プロセスにお
ける処理温度、時間その他の条件により変化する。The refractive index distribution of a Brehner optical waveguide generally follows a distribution function determined by its manufacturing process. However, the individual coefficients of the distribution function vary depending on processing temperature, time, and other conditions in the manufacturing process.
そこで、プリズム結合法により求められた実効屈折率の
データと整合するように、非線形最小自乗法により、あ
らかじめ与えられた屈折率分布関数の個々の係数を演算
する。これにより、実効屈折率のデータ数が少なくても
正確な屈折率分布が得られる。また、求める係数の数よ
りデータ数が多ければ、従来の方法と比較して、測定時
の雑音の影響を削減できる。Therefore, the individual coefficients of the refractive index distribution function given in advance are calculated by the nonlinear least squares method so as to match the data of the effective refractive index determined by the prism combination method. As a result, an accurate refractive index distribution can be obtained even if the number of effective refractive index data is small. Furthermore, if the number of data is greater than the number of coefficients to be determined, the influence of noise during measurement can be reduced compared to conventional methods.
第１図は本発明実施例光導波路屈折率分布測定装置のブ
ロック構成図である。FIG. 1 is a block diagram of an optical waveguide refractive index profile measuring apparatus according to an embodiment of the present invention.
この実施例装置は、被測定光導波路１上に配置されたプ
リズム２と、このプリズム２に光ビームを入射するレー
ザ光源３と、このレーザ光源３からの光ビームの少なく
とも一部がプリズム２から光導波路に結合するときの光
ビームの入射角および結合率を測定する手段、すなわち
標本台制御部４および光検出器５と、この手段により測
定された入射角および結合率と、プリズム２の形状およ
び屈折率とから被測定光導波路１の実効屈折率を求める
演算手段、すなわちデータ収集制御部６とを備え、さら
に、係数が未知数である屈折率分布関数を仮定し、デー
タ収集制御部６により求めた実効屈折率を用いて前記係
数を算出する手段、すなわち非線形最小−乗法演算装置
７を備える。非線形最小−乗法演算装置７には、表示装
置８が接続される。This embodiment device includes a prism 2 disposed on an optical waveguide 1 to be measured, a laser light source 3 that makes a light beam incident on the prism 2, and at least a part of the light beam from the laser light source 3 from the prism 2. Means for measuring the incident angle and coupling rate of the light beam when coupled to the optical waveguide, that is, the specimen table controller 4 and the photodetector 5, the incident angle and coupling rate measured by this means, and the shape of the prism 2. and a refractive index, which calculates the effective refractive index of the optical waveguide 1 to be measured from A means for calculating the coefficient using the obtained effective refractive index, that is, a nonlinear least-multiplicative calculation device 7 is provided. A display device 8 is connected to the nonlinear least-multiplicative calculation device 7 .
標本台制御部４は、被測定光導波路１が載置された標本
台の角度を制御し、被測定光導波路１とレーザ光源３か
らのレーザ光との相対的角度を制御し、その値をデータ
収集制御部６に転送する。The specimen stage control unit 4 controls the angle of the specimen stage on which the optical waveguide 1 to be measured is placed, controls the relative angle between the optical waveguide 1 to be measured and the laser light from the laser light source 3, and calculates the value. The data is transferred to the data collection control unit 6.
光検出器５は、検出した光強度値をデータ収集制御部６
に転送する。The photodetector 5 sends the detected light intensity value to the data collection control unit 6.
Transfer to.
データ収集制御部６は、プリズム２の形状および屈折率
に関するデータをあらかじめ記憶し、これらのデータと
、標本台制御部４からのデータおよび光検出器５からの
データとにより、被測定光導波路１の実効屈折率を求め
る。The data collection control unit 6 stores data regarding the shape and refractive index of the prism 2 in advance, and uses these data, data from the specimen stage control unit 4, and data from the photodetector 5 to determine the optical waveguide 1 to be measured. Find the effective refractive index of
非線形最小−乗法演算装置７は、ガウス型、指数関数型
その他のあらかじめ与えられた屈折率分布関数の個々の
係数について、データ収集制御部６により求めた実効屈
折率を用いて算出する。さらに非線形最小−乗法演算装
置７は、表示装置８に、非線形最小−乗法演算装置７に
より算出された個々の係数値、これらの係数を用いた屈
折率分布関数、その他のデータを表示する。The nonlinear least-multiplicative calculation device 7 calculates each coefficient of a Gaussian type, exponential type, or other previously given refractive index distribution function using the effective refractive index determined by the data collection control unit 6. Furthermore, the nonlinear least-multiplicative calculation device 7 displays on the display device 8 the individual coefficient values calculated by the nonlinear least-multiplicative calculation device 7, the refractive index distribution function using these coefficients, and other data.
次に、非線形最小−乗法演算装置７による演算について
説明する。Next, the calculation by the nonlinear least-multiplicative calculation device 7 will be explained.
被測定光導波路１の深さ方向をＸ軸とし、屈折率分布関
数をｎ （ｘ、 ａ、 ｂ、 ・・・） とする。た
だし、ａｌｂｌ・・・は分布関数を特定する係数である
。このとき、実効屈折率ｎ ｔ １ （ａｓ ’Ｌ
・・・）を屈折率分布関数ｎ （Ｘ、 ａ、 ｂ、
・・・）の関数とみなすことができる。ここて、ｉはモ
ードの次数であり、ｉ＝０、■、・・・である。Let the depth direction of the optical waveguide 1 to be measured be the X axis, and let the refractive index distribution function be n (x, a, b, . . . ). However, albl... is a coefficient that specifies the distribution function. At this time, the effective refractive index n t 1 (as 'L
...) as the refractive index distribution function n (X, a, b,
) can be regarded as a function of Here, i is the order of the mode, and i=0, ■, .
そこで、データ収集制御部６により求められた実効屈折
率をｎｍｉとし、測定されたモードについて、
’ （ａ、 ｂ、 ”’） ”Σ（ｎｓＬ ｎ ｔｉ
（ａｎ ｂｌ ”’） ） ”五
・・・・・・・ ・（１）
が最小となるような係数ａ、ｂ、・・・を求めれば、屈
折率分布関数ｎ （ｘ、 ａ、 ｂ、 ・・・）を求め
ることができる。σ（ａ、 ｂ、 ・・・）を最小に
する正規方程式は、・・・・・・・（２）
で表される。Therefore, let the effective refractive index determined by the data collection control unit 6 be nmi, and for the measured mode, ' (a, b, "') "Σ(nsL n ti
(an bl "') ) "5...... (1) If we find the coefficients a, b,... that minimize the following, we can obtain the refractive index distribution function n (x, a, b, ) can be found. The normal equation that minimizes σ(a, b, ...) is expressed as (2).
ここで、係数ａ％ｂ１・・・の近似値をａｏＳｂｏ、・
・・とし、その補正値をａｌ 、ｂｌ 、・・・とする
。すなわち、
とする。このとき実効屈折率ｎ ｔ １ ’（ａｓ Ｉ
Ｌ ・・・）は、ｎ Ｌｌ （’Ｌ ’Ｌ ”’）
＝ｎ ｔｌ （ａｏ、 ｂＯｓ ””）＋・・・
で表される。ここで、高次の導関数については無視した
。（４）式を（２）式に代入すると、＋・・・
・・・・・・・・（５ａ）
＋・・・
が得られる。Here, the approximate value of the coefficient a%b1... is aoSbo,
..., and its correction values are al, bl, .... In other words, let. At this time, the effective refractive index n t 1 '(as I
L...) is n Ll ('L 'L ''')
= n tl (ao, bOs "") +... is expressed. Here, higher-order derivatives are ignored. By substituting equation (4) into equation (2), +... (5a) +... is obtained.
以上の式を補正値ａ、 、１）ｌ 、・・・について解
き、それぞれ近似値ａ。Ｓｂ０、・・・に加算すること
により、近似の精度を高めることができる。この演算を
近似値が収束するまで繰り返すことにより、係数ａ、ｂ
、・・・の値が得られる。Solve the above equation for the correction values a, , 1)l, ... and obtain approximate values a, respectively. By adding it to Sb0, . . . , it is possible to improve the accuracy of the approximation. By repeating this operation until the approximation converges, the coefficients a, b
,... values are obtained.
以上の演算において、” Ｌ ｌ （ａｏ、 ｂＯ＋
・・・）は固有方程式の解として与えられるので、その
値とそのａ、ｂ、・・・に関する偏微分は、数値計算に
より与えられる。In the above calculation, “L l (ao, bO+
) is given as a solution to the characteristic equation, so its value and its partial differential with respect to a, b, . . . are given by numerical calculation.
第２図は屈折率分布関数の測定例を示し、第３図は二次
イオン質量分析計により測定された被測定光導波路のチ
タン濃度を示す。この例は、屈折率分布を
ｎ（ｘ）＝ａ −ｅｘｐ（−ｂ ｘ”）＋ｎ０とした’
ｌ’ｉ：ＬｉＮｂＯ５光導波路について測定したもので
ある。第２図の屈折率分布は、チタン濃度分布によって
計算された屈折率分布とよく一致した。FIG. 2 shows an example of measurement of the refractive index distribution function, and FIG. 3 shows the titanium concentration of the optical waveguide to be measured measured by a secondary ion mass spectrometer. In this example, the refractive index distribution is n(x)=a −exp(−b x”)+n0'
l'i: Measured for a LiNbO5 optical waveguide. The refractive index distribution shown in FIG. 2 was in good agreement with the refractive index distribution calculated from the titanium concentration distribution.
以上の実施例では、データ収集制御部６が求めた実効屈
折率のデータを非線形最小自乗性演算装置７が自動的に
演算する構成としたが、実効屈折率のデータを手動で測
定し、その結果を非線形最小自乗性演算装置に手動で入
力する構成としても本発明を同様に実施できる。In the above embodiment, the nonlinear least squares calculation device 7 automatically calculates the effective refractive index data obtained by the data collection control unit 6, but the effective refractive index data is manually measured and calculated. The present invention can be similarly implemented with a configuration in which the results are manually input into the nonlinear least squares calculation device.
また、データ収集制御部６および非線形設°小自乗法演
算装置７として、同一の汎用コンビ二一夕を用いること
もできる。Further, the same general-purpose combination unit can be used as the data collection control section 6 and the nonlinear design small squares method calculation device 7.
以上説明したように、本発明の光導波路屈折率分布測定
方法および装置は、得られた実効屈折率のデータの数が
少なくても、正確な屈折率分布を求めることができる。As explained above, the optical waveguide refractive index distribution measuring method and apparatus of the present invention can obtain an accurate refractive index distribution even if the number of obtained effective refractive index data is small.
また、求める係数の数よりデータの数が多い場合には、
従来の方法に比較して雑音の影響を除去できる。Also, if the number of data is greater than the number of coefficients you want,
The influence of noise can be removed compared to conventional methods.
本発明は、光集積回路製造プロセスの評価に利用するこ
とができ、特に新しい製造装置を立ち上げる場合に特に
効果がある。The present invention can be used to evaluate optical integrated circuit manufacturing processes, and is particularly effective when starting up new manufacturing equipment.
また、膜厚を高精度に測定できる効果がある。Moreover, there is an effect that the film thickness can be measured with high precision.
第１図は本発明実施例光導波路屈折率分布測定装置のブ
ロック構成図。
第２図は屈折率分布関数の測定例を示す図。
第３図は被測定光導波路のチタン濃度を示す図。
１・・・被測定光導波路、２・・・プリズム、３・・・
レーザ光源、４・・・標本台制御部、５・・・光検出器
、６・・・データ収集制御部、７・・・非線形最小自乗
性演算装置、８・・・表示装置。
特許出願人 光計測技術開発株式会社
代理人 弁理士 井 出 直 孝
実施例
第
図
第
深さ（ＪＪＩＴ＋）
図屈折率分布の測定例
第
深さ（、ｕｍ）
図Ｔ１漕度FIG. 1 is a block diagram of an optical waveguide refractive index distribution measuring device according to an embodiment of the present invention. FIG. 2 is a diagram showing an example of measurement of a refractive index distribution function. FIG. 3 is a diagram showing the titanium concentration of the optical waveguide to be measured. 1... Optical waveguide to be measured, 2... Prism, 3...
Laser light source, 4... Specimen stage control unit, 5... Photodetector, 6... Data collection control unit, 7... Nonlinear least squares calculation device, 8... Display device. Patent Applicant Optical Measurement Technology Development Co., Ltd. Representative Patent Attorney Naotaka Ide Practical Example: Figure: Depth (JJIT+) Figure: Example of Measurement of Refractive Index Distribution: Depth (, um) Figure: T1: Depth (JJIT+)
Claims (1)
から光ビームを入射し、 この光ビームの少なくとも一部が上記プリズムから上記
被測定光導波路に結合するときの光ビームの入射角およ
び結合率を測定し、 この測定により得られた入射角および結合率と、上記プ
リズムの形状および屈折率とから、上記被測定光導波路
の実効屈折率を演算により求める光導波路屈折率分布測
定方法において、 係数が未知数である屈折率分布関数を仮定し、上記演算
により求めた実効屈折率を用いて前記係数を算出する ことを特徴とする光導波路屈折率分布測定方法。 ２、被測定光導波路に近接して配置されたプリズムと、 このプリズムに光ビームを入射する光源と、この光源か
らの光ビームの少なくとも一部が上記プリズムから上記
被測定光導波路に結合するときの光ビームの入射角およ
び結合率を測定する手段と、 この手段により測定された入射角および結合率と、上記
プリズムの形状および屈折率とから上記被測定光導波路
の実効屈折率を求める演算手段とを備えた光導波路屈折
率分布測定装置において、係数が未知数である屈折率分
布関数を仮定し、上記演算により求めた実効屈折率を用
いて前記係数を算出する手段を備えた ことを特徴とする光導波路屈折率分布測定装置。[Scope of Claims] 1. Light when a light beam is incident from the outside into a prism arranged close to the optical waveguide to be measured, and at least a part of this light beam is coupled from the prism to the optical waveguide to be measured. Optical waveguide refraction, in which the incident angle and coupling rate of the beam are measured, and the effective refractive index of the optical waveguide to be measured is calculated from the incident angle and coupling rate obtained by this measurement and the shape and refractive index of the prism. An optical waveguide refractive index distribution measuring method, characterized in that a refractive index distribution function whose coefficients are unknown is assumed, and the coefficients are calculated using the effective refractive index obtained by the above calculation. 2. A prism disposed close to the optical waveguide to be measured; a light source that makes a light beam incident on the prism; and at least a portion of the light beam from the light source coupled from the prism to the optical waveguide to be measured. means for measuring the incident angle and coupling ratio of the light beam; and calculation means for calculating the effective refractive index of the optical waveguide to be measured from the incident angle and coupling ratio measured by this means and the shape and refractive index of the prism. An optical waveguide refractive index distribution measuring device comprising means for assuming a refractive index distribution function whose coefficients are unknown and calculating the coefficients using the effective refractive index obtained by the above calculation. Optical waveguide refractive index distribution measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24205188A JPH0288937A (en) | 1988-09-26 | 1988-09-26 | Method and device for measuring distribution of refractive index of optical wave guide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24205188A JPH0288937A (en) | 1988-09-26 | 1988-09-26 | Method and device for measuring distribution of refractive index of optical wave guide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0288937A true JPH0288937A (en) | 1990-03-29 |
Family
ID=17083543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24205188A Pending JPH0288937A (en) | 1988-09-26 | 1988-09-26 | Method and device for measuring distribution of refractive index of optical wave guide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0288937A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5309214A (en) * | 1991-09-17 | 1994-05-03 | Olympus Optical Co., Ltd. | Method for measuring distributed dispersion of gradient-index optical elements and optical system to be used for carrying out the method |
| CN106461547A (en) * | 2014-05-21 | 2017-02-22 | 康宁股份有限公司 | Prism-coupling systems and methods for characterizing large depth-of-layer waveguides |
| JP2017161278A (en) * | 2016-03-08 | 2017-09-14 | 株式会社溝尻光学工業所 | Refractive index distribution measuring method and refractive index distribution measuring apparatus for cylindrical optical waveguide |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6170436A (en) * | 1984-09-14 | 1986-04-11 | Univ Kyoto | Method for measuring distribution of refractive index in cylinder |
-
1988
- 1988-09-26 JP JP24205188A patent/JPH0288937A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6170436A (en) * | 1984-09-14 | 1986-04-11 | Univ Kyoto | Method for measuring distribution of refractive index in cylinder |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5309214A (en) * | 1991-09-17 | 1994-05-03 | Olympus Optical Co., Ltd. | Method for measuring distributed dispersion of gradient-index optical elements and optical system to be used for carrying out the method |
| CN106461547A (en) * | 2014-05-21 | 2017-02-22 | 康宁股份有限公司 | Prism-coupling systems and methods for characterizing large depth-of-layer waveguides |
| CN106461547B (en) * | 2014-05-21 | 2019-12-03 | 康宁股份有限公司 | Prism coupling system and method for characterizing large depth-of-layer waveguides |
| JP2017161278A (en) * | 2016-03-08 | 2017-09-14 | 株式会社溝尻光学工業所 | Refractive index distribution measuring method and refractive index distribution measuring apparatus for cylindrical optical waveguide |
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