JPH0289433U - - Google Patents
Info
- Publication number
- JPH0289433U JPH0289433U JP16846088U JP16846088U JPH0289433U JP H0289433 U JPH0289433 U JP H0289433U JP 16846088 U JP16846088 U JP 16846088U JP 16846088 U JP16846088 U JP 16846088U JP H0289433 U JPH0289433 U JP H0289433U
- Authority
- JP
- Japan
- Prior art keywords
- transparent
- transparent substrate
- large number
- thin film
- tft panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Description
第１図および第２図は本考案の一実施例を示し
たもので、第１図はＴＦＴパネルの一部分の断面
図、第２図はＴＦＴパネルの製造工程図である。
１……透明基板、Ｔ……薄膜トランジスタ、Ｇ
……ゲート電極、２……ゲート絶縁膜、３……ｉ
―ａ―Ｓｉ半導体層、Ｓ……ソース電極、Ｄ……
ドレイン電極、６……ＳＯＧ膜、６ａ……透明画
素電極（金属拡散部分）。
FIGS. 1 and 2 show an embodiment of the present invention, in which FIG. 1 is a sectional view of a portion of a TFT panel, and FIG. 2 is a manufacturing process diagram of the TFT panel. 1...Transparent substrate, T...Thin film transistor, G
...gate electrode, 2...gate insulating film, 3...i
-a-Si semiconductor layer, S... source electrode, D...
Drain electrode, 6... SOG film, 6a... Transparent pixel electrode (metal diffusion part).
Claims (1)
電極を選択駆動する多数の薄膜トランジスタとを
配列形成したＴＦＴパネルにおいて、前記透明基
板面に、前記薄膜トランジスタのゲート電極とソ
ース、ドレイン電極のうち前記透明基板面に形成
された電極を除いて、基板面ほぼ全体にわたるＳ
ＯＧ（スピンオンガラス）膜を形成し、このＳＯ
Ｇ膜の所定部分を、導電性金属の拡散により導電
性をもたせた透明画素電極としたことを特徴とす
るＴＦＴパネル。 In a TFT panel in which a large number of transparent pixel electrodes and a large number of thin film transistors for selectively driving the pixel electrodes are arranged and formed on a transparent substrate, the transparent substrate is provided with a gate electrode, a source, and a drain electrode of the thin film transistor on the surface of the transparent substrate. S covers almost the entire substrate surface except for the electrodes formed on the substrate surface.
An OG (spin-on glass) film is formed, and this SO
A TFT panel characterized in that a predetermined portion of the G film is a transparent pixel electrode made conductive by diffusion of a conductive metal.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16846088U JPH071623Y2 (en) | 1988-12-28 | 1988-12-28 | TFT panel |
| CA000613680A CA1313563C (en) | 1988-10-26 | 1989-09-27 | Thin film transistor panel |
| US07/415,889 US5084905A (en) | 1988-10-26 | 1989-10-02 | Thin film transistor panel and manufacturing method thereof |
| DE68923054T DE68923054T2 (en) | 1988-10-26 | 1989-10-25 | Thin film transistor panel and manufacturing process. |
| EP89119842A EP0366116B1 (en) | 1988-10-26 | 1989-10-25 | Thin film transistor panel and manufacturing method thereof |
| KR1019890015469A KR940004764B1 (en) | 1988-10-26 | 1989-10-26 | Thin film transistor star panel and manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16846088U JPH071623Y2 (en) | 1988-12-28 | 1988-12-28 | TFT panel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0289433U true JPH0289433U (en) | 1990-07-16 |
| JPH071623Y2 JPH071623Y2 (en) | 1995-01-18 |
Family
ID=31457655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16846088U Expired - Lifetime JPH071623Y2 (en) | 1988-10-26 | 1988-12-28 | TFT panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071623Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05165058A (en) * | 1991-12-13 | 1993-06-29 | Casio Comput Co Ltd | Thin film transistor panel and its manufacture |
-
1988
- 1988-12-28 JP JP16846088U patent/JPH071623Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05165058A (en) * | 1991-12-13 | 1993-06-29 | Casio Comput Co Ltd | Thin film transistor panel and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH071623Y2 (en) | 1995-01-18 |
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