JPH0289828U - - Google Patents

Info

Publication number
JPH0289828U
JPH0289828U JP16999488U JP16999488U JPH0289828U JP H0289828 U JPH0289828 U JP H0289828U JP 16999488 U JP16999488 U JP 16999488U JP 16999488 U JP16999488 U JP 16999488U JP H0289828 U JPH0289828 U JP H0289828U
Authority
JP
Japan
Prior art keywords
quartz furnace
core tube
mixing chamber
furnace core
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16999488U
Other languages
English (en)
Other versions
JPH0745954Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988169994U priority Critical patent/JPH0745954Y2/ja
Publication of JPH0289828U publication Critical patent/JPH0289828U/ja
Application granted granted Critical
Publication of JPH0745954Y2 publication Critical patent/JPH0745954Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図ａは本考案の第１の実施例の縦断面図、
同図ｂは同図ａのＡ−Ａ断面図、第２図ａは本考
案の第２の実施例の縦断面図、同図ｂは同図ａの
Ａ−Ａ断面図、第３図は従来の炉芯管の側面図で
ある。 １，７……混合室、２，３……ノズル、４，８
……遮へい板、５……炉芯管本体、６……継手、
９……配管。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体装置製造の不純物拡散プロセスで使用さ
    れる拡散炉の石英炉芯管装置において、石英炉芯
    管本体の前部にこの石英炉芯管本体に導入される
    反応ガスの混合室を有し、かつこの混合室が前記
    石英炉芯管本体と取外し自由に接続されているこ
    とを特徴とする石英炉芯管装置。
JP1988169994U 1988-12-28 1988-12-28 石英炉芯管装置 Expired - Lifetime JPH0745954Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988169994U JPH0745954Y2 (ja) 1988-12-28 1988-12-28 石英炉芯管装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988169994U JPH0745954Y2 (ja) 1988-12-28 1988-12-28 石英炉芯管装置

Publications (2)

Publication Number Publication Date
JPH0289828U true JPH0289828U (ja) 1990-07-17
JPH0745954Y2 JPH0745954Y2 (ja) 1995-10-18

Family

ID=31460550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988169994U Expired - Lifetime JPH0745954Y2 (ja) 1988-12-28 1988-12-28 石英炉芯管装置

Country Status (1)

Country Link
JP (1) JPH0745954Y2 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104123A (ja) * 1982-12-07 1984-06-15 Toshiba Corp 不純物拡散装置
JPS6273535U (ja) * 1985-10-29 1987-05-11
JPS62278273A (ja) * 1986-05-26 1987-12-03 Nec Corp プラズマｃｖｄ装置
JPS63200537A (ja) * 1987-02-16 1988-08-18 Canon Inc 酸化シリコン膜形成装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104123A (ja) * 1982-12-07 1984-06-15 Toshiba Corp 不純物拡散装置
JPS6273535U (ja) * 1985-10-29 1987-05-11
JPS62278273A (ja) * 1986-05-26 1987-12-03 Nec Corp プラズマｃｖｄ装置
JPS63200537A (ja) * 1987-02-16 1988-08-18 Canon Inc 酸化シリコン膜形成装置

Also Published As

Publication number Publication date
JPH0745954Y2 (ja) 1995-10-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term