JPH029424U - - Google Patents
Info
- Publication number
- JPH029424U JPH029424U JP8657688U JP8657688U JPH029424U JP H029424 U JPH029424 U JP H029424U JP 8657688 U JP8657688 U JP 8657688U JP 8657688 U JP8657688 U JP 8657688U JP H029424 U JPH029424 U JP H029424U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rotation speed
- developing device
- resist
- resist developing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図は本考案の実施例を示すレジスト現像装
置の斜視図、第２図は同レジスト現像装置の側面
図、第３図は同レジスト現像装置の要部拡大側面
図、第４図は同レジスト現像装置の要部拡大正面
図、第５図は従来のレジスト現像装置の概略構成
図である。
１０……駆動軸、１１……テーブル、１２……
ノズル、１３……スピナー用モータ、１４……モ
ータの出力軸、１４ａ……吸着板、１５……基板
、１６……現像液。
FIG. 1 is a perspective view of a resist developing device showing an embodiment of the present invention, FIG. 2 is a side view of the resist developing device, FIG. 3 is an enlarged side view of the main parts of the resist developing device, and FIG. 4 is the same. FIG. 5 is an enlarged front view of main parts of a resist developing device, and is a schematic configuration diagram of a conventional resist developing device. 10... Drive shaft, 11... Table, 12...
Nozzle, 13... Spinner motor, 14... Output shaft of motor, 14a... Adsorption plate, 15... Substrate, 16... Developer.
Claims (1)
象となる基板を前記テーブルの面に対して垂直方
向に装着し、該基板を回転させるスピナー装置と
、 (c) 前記基板に対向するように配設されるノズ
ルとを設け、 (d) 前記スピナー装置の回転数よりも前記テー
ブルの回転数が高くなるようにしたことを特徴と
するレジスト現像装置。[Claims for Utility Model Registration] (a) A rotatable table; (b) A substrate mounted on the table and to be subjected to resist development is mounted in a direction perpendicular to the surface of the table, and the substrate is (c) a nozzle disposed to face the substrate; and (d) the rotation speed of the table is higher than the rotation speed of the spinner device. A resist developing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8657688U JPH029424U (en) | 1988-07-01 | 1988-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8657688U JPH029424U (en) | 1988-07-01 | 1988-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029424U true JPH029424U (en) | 1990-01-22 |
Family
ID=31311214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8657688U Pending JPH029424U (en) | 1988-07-01 | 1988-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029424U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61293135A (en) * | 1985-06-18 | 1986-12-23 | Ozen Corp | Cooler for miniature motor |
-
1988
- 1988-07-01 JP JP8657688U patent/JPH029424U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61293135A (en) * | 1985-06-18 | 1986-12-23 | Ozen Corp | Cooler for miniature motor |
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