JPH0299972U - - Google Patents
Info
- Publication number
- JPH0299972U JPH0299972U JP803989U JP803989U JPH0299972U JP H0299972 U JPH0299972 U JP H0299972U JP 803989 U JP803989 U JP 803989U JP 803989 U JP803989 U JP 803989U JP H0299972 U JPH0299972 U JP H0299972U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- flange
- vacuum port
- evaporation source
- beam evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP803989U JPH0512297Y2 ( ) | 1989-01-26 | 1989-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP803989U JPH0512297Y2 ( ) | 1989-01-26 | 1989-01-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0299972U true JPH0299972U ( ) | 1990-08-09 |
| JPH0512297Y2 JPH0512297Y2 ( ) | 1993-03-29 |
Family
ID=31213565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP803989U Expired - Lifetime JPH0512297Y2 ( ) | 1989-01-26 | 1989-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512297Y2 ( ) |
-
1989
- 1989-01-26 JP JP803989U patent/JPH0512297Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512297Y2 ( ) | 1993-03-29 |