JPH0310007A - Method and apparatus for manufacturing metal fine powder - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for producing fine metal powder and an apparatus therefor.

[Prior Art] Conventionally, as a method and apparatus for manufacturing fine metal powder using ultrasonic vibration, for example, Japanese Patent Application Laid-Open No. 58-110604
No. 61-295306 is disclosed. These conventional techniques will be explained with reference to the drawings. Figure 7(A).

In both cases (B), molten metal 62 is made to flow down from above into a conical resonator 61, and the molten metal 62 atomized by the ultrasonic vibration of the resonator 61 becomes minute particles 63, and the cooling gas supply pipe It is cooled by cooling gas 65 ejected from 64 to produce fine metal powder. In FIG. 8, a resonator 71 is immersed in a molten metal 72, and the ultrasonic vibrations generated from this generate minute metal particles 73 from the surface of the molten metal 72, which are then deposited into a chamber 74 maintained in an inert atmosphere. The metal powder is cooled by the cooling gas introduced from the cooling gas introduction lower 5, and a fine metal powder is produced.

[Problems to be Solved by the Invention] However, the above-mentioned conventional technology has the following problems.

■The temperature of the molten metal flowing down or immersed into the resonator is generally high, so when the molten metal comes into contact with the resonator, alloying elements or impurities contained in the resonator mix into the molten metal, resulting in high-purity fine metal powder. is not obtained.

■If a heat-resistant ceramic material is used to withstand the temperature of molten metal, the vibration characteristics will be poor and the desired vibration will not be obtained.

(2) Fluctuations in the thickness of the molten metal formed on the resonator result in variations in the directly produced fine metal powder, but it is difficult to control the thickness.

The present invention has been made in view of the above, and an object of the present invention is to provide a method and apparatus for producing fine metal powder that can stably and easily produce fine metal powder of high purity. do.

[Means for Solving the Problems] The manufacturing method of the present invention includes a step of melting a metal material to create a metal melt, and focusing an ultrasonic wave on the surface of the metal melt to turn the metal melt into a fine liquid. a step of atomizing the metal melt into droplets, a step of determining the ambient temperature near the surface of the metal melt, a step of controlling the energy and frequency of the ultrasonic waves based on the ambient temperature constant signal of 111 J, and the energy of the ultrasonic waves. and a step of atomizing the metal melt into the micro droplets by focusing the ultrasonic waves on the surface of the metal melt while controlling the frequency, and a step of cooling and solidifying the micro droplets. It is characterized by

The manufacturing method of the present invention also includes a step of melting a metal material to create a metal melt, and a step of focusing ultrasonic waves on the surface of the metal melt to atomize the metal melt into minute droplets. , a step of measuring the particle size and production amount of the micro droplets, a step of controlling the position of the focal point of the ultrasonic wave based on the particle size/production amount measurement signal, and a step of controlling the position of the focal point. The method is characterized by comprising a step of focusing the ultrasonic waves on the surface of the metal melt to subsequently atomize the metal melt into the micro droplets, and a step of cooling and solidifying the micro droplets. Here, there are a step of measuring the sound pressure of the ultrasonic wave, a step of controlling the energy of the ultrasonic wave based on a constant sound pressure signal of 111 J, and a step of focusing the ultrasonic wave on the surface of the metal melt while controlling the energy of the ultrasonic wave. It is preferable to include a step of atomizing the metal melt into fine droplets.

Further, the manufacturing method of the present invention includes a step of melting a metal material to create a metal melt, a step of causing the metal melt to flow down to create a metal melt flow, and an ultrasonic wave applied to the surface of the metal melt flow. atomizing the metal melt into minute droplets; measuring the ambient temperature near the surface of the metal melt flow; and adjusting the energy and frequency of the ultrasonic waves based on the ambient temperature measurement signal. controlling the energy and frequency of the ultrasonic waves while focusing the ultrasonic waves on the surface of the metal melt stream to subsequently atomize the metal melt into the micro droplets; Particularly, the manufacturing method of the present invention is characterized by comprising a step of cooling and solidifying minute droplets, and a step of melting a metal material to form a metal melt, and flowing down the metal melt to form a metal melt. A process of creating a melt flow, a process of focusing ultrasonic waves on the surface of the metal melt flow to atomize the metal melt into micro droplets, and measuring the particle size and production amount of the micro droplets. and focusing ultrasonic waves on the surface of the metal melt while setting the pressure of the atmosphere in contact with the surface of the metal melt flowing down to a predetermined value based on the particle size/generation i71p+ constant signal. The method is characterized in that the method further comprises the steps of atomizing the metal melt into the micro droplets, and cooling and solidifying the micro droplets.

Further, the manufacturing method of the present invention includes a step of melting a metal material to create a metal melt, a step of causing the metal melt to flow down to create a metal melt flow, and an ultrasonic wave applied to the surface of the metal melt flow. a step of atomizing the metal melt into micro droplets by focusing the metal melt, a step of measuring the particle size and production amount of the micro droplets, and a step of measuring the particle size and amount of the micro droplets.
controlling the position of the focal point of the ultrasonic wave based on the generation amount n1 constant signal, and focusing the ultrasonic wave on the surface of the metal melt flow while controlling the position of the focal point, and subsequently The method is characterized by comprising a step of atomizing the liquid into the minute droplets, and a step of cooling and solidifying the minute droplets. Here, a process of measuring the sound pressure of the ultrasonic wave, a process of controlling the energy of the ultrasonic wave based on the sound pressure measurement signal, and a process of focusing the ultrasonic wave on the surface of the metal melt flow while controlling the energy of the ultrasonic wave. It is preferable to include a step of atomizing the metal melt into fine droplets.

Further, the manufacturing method of the present invention includes a step of melting a metal material to create a metal melt, a step of setting the pressure of an atmosphere in contact with a surface of the metal melt to a predetermined value, and a step of causing the metal melt to flow down. a step of focusing ultrasonic waves on the surface of the metal melt flow under pressure to atomize the metal melt into micro droplets; and a step of atomizing the metal melt into micro droplets. a step of measuring the particle size and production amount; a step of controlling the focal point position of the ultrasonic wave based on the particle size/production amount measurement signal; a step of setting the pressure of the atmosphere in contact with the surface of the metal melt flow to a predetermined value; a step of measuring the atmosphere temperature near the surface of the metal melt flow; and a step of emitting ultrasonic waves based on the ambient temperature n1 constant signal. controlling energy and frequency; focusing ultrasound on the surface of the metal melt to subsequently atomize the metal melt into the micro droplets; cooling and solidifying the micro droplets; It is considered a sign of cormorant to have the following.

The manufacturing apparatus of the present invention includes a holder for holding a metal material, a heating means disposed adjacent to the holder to heat the metal material to produce a metal melt, and an ultrasonic wave generator that generates an ultrasonic wave. a focusing means for atomizing the metal melt into minute droplets by focusing on the surface of the metal melt; an atmosphere temperature measurement means for measuring the ambient temperature near the surface of the metal melt; The present invention is characterized by comprising an ultrasonic control means for controlling ultrasonic energy and frequency based on a signal, and a cooling means for cooling the micro droplets.

Further, the manufacturing apparatus of the present invention includes a holder for holding a metal material, a heating means installed adjacent to the holder to heat the metal material to produce a metal melt, and an ultrasonic wave generated from an ultrasonic wave generating means. a focusing means for atomizing the metal melt into micro droplets by focusing the metal melt on the surface of the flowing metal melt; a particle size measuring means for determining the particle size of the micro droplets; and a particle size measuring means for determining the particle size of the micro droplets. The method is characterized by comprising a focusing point control means for controlling the position of a focusing point of the ultrasonic waves focused by the particle size measuring means based on a signal from the particle size measuring means, and a cooling means for cooling the micro droplet. Here, a sound pressure measuring means for measuring the sound pressure of the ultrasonic waves focused on the surface of the metal melt, and an ultrasonic wave controlling the energy of the ultrasound waves based on the sound pressure a11 constant signal obtained by the sound pressure measuring means. Preferably, control means are provided.

Further, the manufacturing apparatus of the present invention includes a heating means for melting a metal material to produce a metal melt, and a flow means adjacent to the heating means for causing the metal melt to flow down, and a holder for holding the metal melt. a focusing means for atomizing the metal melt into minute droplets by focusing the ultrasonic waves generated from the ultrasonic wave generating means on the surface of the metal melt flow, and an ambient temperature near the surface of the metal melt flow. , an ultrasonic control means for controlling ultrasonic energy and frequency based on a signal obtained by measuring the atmospheric temperature, and a cooling means for cooling the microdroplet. shall be.

Further, the manufacturing apparatus of the present invention includes a heating means for melting a metal material to form a metal melt, and a flowing means disposed adjacent to the heating means for causing the metal melt to flow down, and holding the metal melt. a holding body, a focusing means for atomizing the metal melt into minute droplets by focusing the ultrasonic waves generated from the ultrasonic generation means on the surface of the flowing metal melt, and particles of the minute droplets. A particle size/production amount measuring means for measuring the diameter and production amount, and setting the pressure of the atmosphere in contact with the surface of the metal melt flowing down to a predetermined value based on the signal of the particle size/production amount measuring means. and a cooling means for cooling the micro droplets.

Further, the manufacturing apparatus of the present invention includes a heating means for melting a metal material to form a metal melt, and a flowing means disposed adjacent to the heating means for causing the metal melt to flow down, and holding the metal melt. a holding body, a focusing means for focusing the ultrasonic waves generated from the ultrasonic generating means on the surface of the metal melt to atomize the metal melt into minute droplets, and the particle size and production amount of the minute droplets. a particle size and production amount measuring means for measuring the ultrasonic waves; a focusing point control means for controlling the position of a focal point of the ultrasonic waves focused by the focusing means based on a signal from the particle size and production amount measuring means; It is characterized by comprising a cooling means for cooling the droplets. Here, a sound pressure measuring means for measuring the sound pressure of the ultrasound focused on the surface of the metal melt, and an ultrasonic control for controlling the energy of the ultrasound based on the sound pressure measurement signal obtained by the sound pressure measuring means. Preferably, means are provided.

Further, the manufacturing apparatus of the present invention includes: a heating means for melting a metal material to produce a metal melt; an atmosphere pressure setting means for setting the pressure of the atmosphere in contact with the surface of the metal melt to a predetermined value; A holder for holding the metal melt, and a flow means for keeping the flowing metal melt in a constant pressurized state. a pressure means; an ultrasonic generating means for generating a predetermined ultrasonic wave; and an ultrasonic wave generating means provided between the ultrasonic generating means and the holding body to focus the ultrasonic wave on the surface of the metal melt flowing down to generate the metal. a focusing means for atomizing the melt into micro droplets; a particle size/production amount measuring means for determining the particle size and production amount of the micro droplets; and a focusing point of the ultrasonic waves focused by the focusing means. a focusing point control means for controlling the position based on the signal from the particle size and production amount measuring means; and an atmosphere that comes into contact with the surface of the metal melt flowing down based on the signal from the particle size and production amount measuring means. atmospheric pressure control means for setting the pressure of the metal melt to a predetermined value; atmospheric temperature control means for determining the atmospheric temperature near the surface of the metal melt flow to a predetermined value; The present invention is characterized by comprising: ultrasonic control means for controlling the energy and frequency of sound waves; and cooling means for cooling the micro droplets.

Any heating means may be used as long as it can easily melt the metal material into a metal melt. Examples of such devices include heater radiant tubes, lasers, and the like.

Heat melting of metal materials can be done by placing the metal material in a container that is a holder and heating the container to melt the entire metal material, or by holding a metal plate, rod, wire, etc. with a holder and melting the metal material. This is done by heating only the tip of the. Therefore, the holding body includes a cold crucible 50 as shown in FIG. 6(A), a holding container 51 as shown in FIG. It is something. Alternatively, a metal melt flow may be created by attaching a holding body above the chamber and causing the metal melt to flow down. At this time, it is preferable that the metal melt flow has a cylindrical shape or a thin film shape. Further, the flow rate of the metal melt flow is preferably 0°4 to 2.4 m/sec. This is 0
．． If the speed is less than 4 m/sec, stable microdroplets cannot be obtained;
This is because if the speed exceeds 2.4 m/see, the ultrasonic waves cannot be reliably focused on the surface of the metal melt flow. The most preferred flow rate is 0.7 m/see.

The pressurizing means may be of any type as long as it can maintain a pressure state that improves the transmission efficiency of ultrasonic waves. For example, there is a method that directly adjusts the atmospheric gas pressure of the metal melt, and this may be installed directly within the device, or a badge-type chamber or the like may be installed separately from the device. May be connected.

The ultrasonic wave generating means may be any device that can generate ultrasonic waves having energy that can atomize the metal melt into minute droplets by focusing. An example of such a device is an ultrasonic generator that uses a normal high-frequency power source.

Further, as the ultrasonic focusing means, one is used that concentrates the ultrasonic waves on the surface of the metal melt and increases the energy of the ultrasonic waves. In this case, it is preferable to focus the ultrasonic waves on one point or a negative line. Furthermore, during the operation of pulverizing metal, a combination of point focusing type and line focusing type focusing means may be used.
A plurality of these may be attached. However, at this time, when the metal melt is flowing down, the metal melt is attached so as to converge on the metal melt flowing surface. This is because it is difficult to focus ultrasonic waves on particles that have been made into fine particles to further make them fine particles, and also because if the focusing point of the ultrasonic waves is not constant, the efficiency of making fine particles will deteriorate. It is.

Further, when focusing the ultrasonic waves, it is preferable that the traveling direction of the ultrasonic waves with respect to the metal melt flow is within a deflection angle of ±45@ around a straight line orthogonal to the metal melt flow. Therefore, it is particularly preferable that the ultrasonic waves travel in a direction perpendicular to the flow of the metal melt.

As means for measuring particle size and production amount, particle size distribution measurement equipment called particle sizer or optical means can be used to measure the production f.
An f1a meter or the like can be used.

Examples of the atmospheric temperature measuring means include a thermometer.

Furthermore, since the sound speed of ultrasonic waves depends on temperature, the sound speed may be measured using a sonic speed meter, and the measured signal may be converted into an ambient temperature signal. In order to accurately detect the ambient temperature on the surface of the metal melt, the location where this atmospheric temperature measuring means is installed is the focal point of the ultrasonic waves on the surface of the metal melt or, if the metal melt is flowing down, on the surface of the metal melt flow. It is preferable that it be in the vicinity of .

A laser, a microphone, etc. can be used as the sound pressure measuring means. In addition, in order to accurately detect the sound pressure on the surface of the metal melt, the location where this sound pressure measurement means is installed is determined by the location of the ultrasonic wave on the surface of the metal melt or, if the metal melt is flowing down, on the surface of the metal melt. Preferably, it is near the focal point.

The atmospheric pressure setting means sets the pressure of the atmosphere in contact with the surface of the flowing metal melt to a predetermined value.
Any method may be used as long as the flow rate, that is, the supply amount of the metal melt flowing down is constant, and the fine droplets are always atomized in an optimal state. For example, it is possible to directly change the pressure of the atmosphere in contact with the metal melt using a combination of a pressure control valve and a pressure detector in response to a signal from a particle size 7I-1 determining means.

The ultrasonic control means can be set so that when atomizing the metal melt flow into minute droplets, the ultrasonic waves always overlap in phase at the focal point and have the ultrasonic energy necessary for atomization. good. For example, the frequency may be finely adjusted according to the signal from the ambient temperature measuring means, the amount of atmospheric gas supplied to the device may be controlled, or the input to the ultrasonic generator may be changed depending on the signal from the sound pressure measuring means. Examples include those that change the atmospheric pressure within the device. Furthermore, if the desired sound pressure cannot be obtained, an alarm may be sounded or the operation may be stopped.

The focusing point control means controls the position of the focusing point of the ultrasonic waves to a predetermined position so that the atomized micro droplets always have the desired particle size and production amount, and controls the energy necessary for atomization. It is fine as long as it can be set optimally. For example, there is a method in which the position of the focusing means is moved or the energy or frequency is adjusted depending on the signal from the particle size/production amount measuring means.

Furthermore, the position of the focal point of the ultrasonic wave may be adjusted by changing the amount of metal melt flow.

The atmospheric pressure control means sets the pressure of the atmosphere in contact with the surface of the flowing metal melt to a predetermined value.
Any method may be used as long as the flow rate or supply amount of the metal melt flowing down is optimized to always atomize micro droplets having a desired particle size. For example, by changing the opening size of the flow port of the holder in accordance with the signal from the particle size measuring means, the flow rate and supply amount of the metal melt flowing down can be changed, and the pressure of the atmosphere in contact with the surface of the metal melt can be changed. It is possible to adopt a method in which the pressure is set to a predetermined value, or a method in which the pressure of the atmosphere in contact with the surface of the metal melt is directly changed by a combination of a pressure control valve and a pressure detector according to the signal from the particle size measuring means. can.

Metal melting is performed by measuring the ambient temperature, particle size, and production amount using an ambient temperature measuring means or particle size/formation amount measuring means, and controlling the ultrasonic frequency and sound pressure around the surface of the metal melt according to the signals. Atomization of the liquid may be stabilized.

Further, the amount of atomized metal fine powder produced may be measured in the same manner as the particle size to control the amount of produced metal fine powder.

Measuring means of particle size, production amount, ambient temperature, and sound pressure,
and ultrasound energy, ultrasound frequency, focal point position,
Of course, a combination of multiple types of sound pressure control means may be installed to stabilize the operation.

[Operation] According to the method and apparatus for producing fine metal powder according to the present invention, ultrasonic waves are generated, the phases of the ultrasonic waves are aligned, and the ultrasonic waves are focused on the surface of the metal melt. The metal melt is atomized into minute droplets by the energy of this ultrasonic wave.

Therefore, since the ultrasonic resonator is not in contact with the metal melt, it is possible to produce high-purity fine particles without introducing impurities into the atomized metal melt, and to extend the life of the resonator. .

By adding a fixed amount of metal as a raw material, fine metal powder can be produced stably and efficiently. Furthermore, fine metal powder can always be produced from a clean metal melt even in a flowing state. In addition, by atomizing the metal melt flow while maintaining the metal melt flow and the atmospheric gas of the metal melt at a predetermined pressure state, it is possible to increase the density of the medium gas and improve the flow condition of the metal melt flow. Set to the optimal state,
The transmission efficiency of ultrasonic waves can be made sufficiently high.

Measure the particle size and amount of atomized microdroplets, and
By controlling the position of the focal point of the ultrasonic waves in accordance with the production amount signal, the emitted ultrasonic waves can be focused at a predetermined surface of the metal melt with the energy and frequency optimal for atomization at all times.

In addition, by measuring the ambient temperature and controlling the ambient temperature inside the device according to this ambient temperature measurement signal, the radiated ultrasonic waves are always set at the optimal energy or frequency for atomization at a predetermined surface of the metal melt. It can be focused.

In addition, by measuring the particle size and production amount of the atomized minute droplets and setting the atmospheric pressure to a predetermined value according to the particle size and production amount signals, it is possible to create a metal melt flow with a constant flow rate. can. Therefore, the radiated ultrasonic waves can always be focused at the surface of the metal melt with optimal energy for atomization.

Furthermore, by measuring the sound pressure and controlling the ultrasonic energy in accordance with this sound pressure signal, the emitted ultrasonic waves can always be focused at the optimum energy for atomization on a predetermined surface of the metal melt.

As a result, by performing these actions alone or in combination of two or more, fine metal powder can be produced continuously, stably, and efficiently.

[Examples] Examples of the present invention will be described below with reference to the drawings. Note that the explanation of the manufacturing method of the present invention includes the explanation of the operation of the apparatus of the embodiment.

Example 1 FIG. 1 is an explanatory diagram showing the configuration of a manufacturing apparatus for fine metal powder according to an example of the present invention. In the figure, 10 is a holding container that holds molten metal. A heater 11 for melting the metal material is installed outside the holding container 10, and a metal melt 12 is held inside the holding container 10. This holding container 10 and heater 11 are provided above a chamber 13 maintained in an inert gas atmosphere. Further, a nozzle 14 for causing the metal melt 12 to flow down into the chamber 13 is provided at the bottom of the holding container 10. An ultrasonic generator 1 is provided on the side of the chamber 13. The ultrasonic generator 1 includes a high-frequency power source 15 and a high-frequency vibrator 16 provided outside a chamber 13, a resonator 18 provided inside the chamber 13, and an ultrasonic generator provided surrounding the resonator 18. It consists of one radial direction converter for focusing sound waves, and an amplitude expander 17 inserted between the chamber 13 and the radial direction converter 19 and connected between the vibrator 16 and the resonator 18.

Here, the material of the resonator 18 is preferably a titanium alloy or an aluminum alloy. Furthermore, since the radiation direction converter 19 has opposite phases on the vibrator side and the anti-vibrator side of the resonator 18, it is possible to superimpose these antiphase radiated sound waves in the same phase on the surface of the metal melt. is set up.

Further, the radiation direction converter 19 has a reflecting surface set in a parabolic shape in order to efficiently cause the sound waves to reach the surface of the metal melt.

Further, a chamber 71 is provided at the side end of the chamber 13.
A device 20 is provided which communicates with the interior of the device 3 and supplies cooling gas. This device 20 includes a pressure detector 21 and a pressure 3! based on the pressure detector 21. It has a J valve 22 and a compressor 23 that causes cooling gas to flow into the chamber 13. moreover,
A recovery device 24 for recovering the manufactured fine metal powder is connected to the other end of the chamber 13. Inside the chamber 13 is a particle size/amount measuring means 2 for measuring the particle size/amount of micro droplets generated by atomization, which will be described later.
6 is installed. The particle size/production amount measuring means 26 is constituted by a particle size/production amount distribution measuring device consisting of a particle sizer. Further, the particle size/production number measuring means 26 is electrically connected to a focusing point control means 27 which is provided in conjunction with the radial direction converter 19.

Next, the operation of the apparatus for manufacturing fine metal powder constructed as described above will be explained.

First, the ultrasonic transducer 16 is vibrated by the high frequency power source 15, and the resonator 18 connected to the transducer 16 is vibrated. By appropriately selecting the frequency of this ultrasonic wave, the particle size and production amount of the fine metal powder can be changed. Ultrasonic waves are emitted by the vibration of the resonator 18 using the atmospheric gas as a medium. This radiated ultrasonic wave is focused on the surface of the metal melt 12 by a radiation direction converter 19 installed so that the ultrasonic waves are in phase and overlapped on the surface of the metal melt 12 . Then, minute droplets 25 are atomized from the surface of the metal melt 12. The particle size and production amount of the micro droplets 25 are determined by the particle size and production amount distribution measuring device of the a1 determination means 26 to be 411.
1 is fixed. The particle size and production amount measuring means 26 supplies this particle size and production amount measurement signal to the focusing point control means 27.

The focusing point control means 27 moves the radiation direction converter 19 up and down or back and forth to a predetermined position based on the particle size/production amount fllJ constant signal, and finely adjusts the frequency. That is, the radiated ultrasonic waves should always have the optimum energy for atomization and be focused on a predetermined surface of the flowing metal melt 12 (the position of the radial direction converter 19 should be set). During the process, the focused ultrasonic wave is always set at the optimal position to act on the surface of the metal melt 12 flowing down.This creates capillary waves on the surface of the metal melt 12, which The micro droplets 25 are made to fly up from the surface of the metal melt 12 with a desired particle size and production amount by overcoming the tension.

The flying micro droplets 25 are cooled and solidified by the cooling gas, and are carried to the collector 24 and collected by the flow of the cooling gas. In this way, metal fine particles having a desired particle size, production amount, and production amount can be obtained continuously and stably.

Next, an experimental example conducted to confirm the effects of the present invention will be described.

Experimental Example 1 Using the apparatus shown in Figure 1, an argon gas atmosphere was maintained at an absolute pressure of 1 kg/c-, and a resonator was vibrated at a frequency of 20 KHz, producing a vibration of approximately 12 microns with a single amplitude. When this was carried out, ultrasonic waves with a sound pressure level of 172 dB were obtained near the surface of the metal melt in a flowing state. A titanium alloy was used as the resonator, and an aluminum alloy was used as the molten metal. By applying ultrasonic waves with these characteristics to the surface of the flowing aluminum alloy liquid,
Small growth ridges were generated. Note that the flow rate of the aluminum alloy liquid was 0.7 m/sec. When the particle size of these micro droplets was measured, the average particle size was 70 μm.

In order to maintain this particle size, the position of the radiation direction converter was moved by a control means to change the focusing position of the ultrasonic waves.

The obtained aluminum alloy powder with microscopic ribs was spherical particles with a particle size of 40 to 100 microns and an average particle size of 70 microns. In addition, there was no oxidation on the particle surface or any contamination of impurity elements, and the metal powder was of extremely high purity. Note that the amount of particles produced was approximately 700 grams/hour.

Embodiment 2 FIG. 2 is an explanatory diagram showing the configuration of an apparatus for manufacturing fine metal powder according to an embodiment of the present invention. Note that explanations of parts that overlap with those of Example 1 will be omitted.

In the figure, 10 is a holding container that holds molten metal.

A heater 11 for melting the metal material is installed outside the holding container 10, and a metal melt 12 is held inside the holding container 10. This holding container 10 and heater 11 are provided below a chamber 13 maintained in an inert gas atmosphere. An ultrasonic generator 1 is provided above the chamber 13. The ultrasonic generator 1 includes a high-frequency power source 15 and a high-frequency vibrator 16 provided outside a chamber 13, a resonator 18 provided inside the chamber 13, and an ultrasonic generator provided surrounding the resonator 18. a radial direction converter 19 for focusing the sound waves;
It is composed of an amplitude expander 17 inserted between a chamber 13 and a radial direction converter 19 and connected between a vibrator 16 and a resonator 18.

Further, 1. Above the surface of the metal melt 12 in the holding container 10, a thermometer 28 is installed to measure the ambient temperature when the metal melt is atomized into minute droplets.

This thermometer 19 is connected to an atmosphere temperature control means 29 provided outside the chamber 13 in connection with a pressure regulating valve 22.
electrically connected to.

Next, the operation of the apparatus for manufacturing fine metal powder constructed as described above will be explained.

First, the ultrasonic transducer 16 is vibrated by the high frequency power source 15, and the resonator 18 connected to the transducer 16 is vibrated. Ultrasonic waves are emitted by the vibration of the resonator 18 using the atmospheric gas as a medium. This radiated ultrasonic wave is transmitted to the metal melt 12
The ultrasonic waves are focused on the surface of the metal melt 12 by a radiation direction converter 19 installed so that the ultrasonic waves are in phase and overlapped on the surface of the metal melt 12 . Then, the surface of the metal melt 12 is atomized into minute droplets 25 . At the time of atomization, the ambient temperature is set to n1 by a thermometer 28. Thermometer 28 supplies this ambient temperature measurement signal to ambient temperature control means 29. The ambient temperature control means 29 controls the opening and closing of the pressure regulating valve 22 based on the ambient temperature measurement signal. That is, the ambient temperature control means 29 monitors the temperature in the atmosphere, particularly near the focal point of the ultrasonic waves, maintains the ambient temperature at a predetermined level based on the information, and prevents the phase of the ultrasonic waves from shifting. The ambient temperature is set so that the radiated ultrasonic waves having the optimum energy for atomization are always focused on the surface of the metal melt 12. In this way, during operation, ultrasonic waves with optimum energy are always applied to the surface of the metal melt 12. As a result, capillary waves are created on the surface of the metal melt 12, which overcomes the surface tension and causes the micro droplets to form from the surface of the metal melt 12.
Make 5 fly up. The flying micro droplets 25 are cooled and solidified by the cooling gas, and are carried to the collector 24 and collected by the flow of the cooling gas. In this way, metal fine particles having a desired particle size and production amount can be obtained continuously, stably and efficiently.

Next, an experimental example conducted to confirm the effects of the present invention will be described.

Experimental Example 2 Using the apparatus shown in Figure 2, an argon gas atmosphere was maintained at an absolute pressure of 1 kg/cd, and a resonator with a frequency set to 20 KHz was vibrated to produce vibrations of approximately 12 microns with a single amplitude. 172d near the surface of the metal melt
Ultrasonic waves with a sound pressure level of B were obtained. In addition, the operation was carried out while controlling the atmospheric temperature near the surface of the metal melt using a thermometer.

Note that the atmospheric temperature during operation was maintained at 200°C±5°C. A titanium alloy was used as the resonator, and an aluminum alloy was used as the molten metal. This ultrasonic wave was applied to the surface of the aluminum alloy liquid to generate micro droplets.

In this way, aluminum alloy spherical particles with a particle size of 40 to 100 microns and an average particle size of 70 microns were obtained. There was no oxidation of the particle surface or contamination of impurity elements, and extremely high purity metal fine powder was obtained. Note that the amount of particles produced was 800 grams/hour.

Embodiment 3 FIG. 3 is an explanatory diagram showing the configuration of an apparatus for manufacturing fine metal powder according to an embodiment of the present invention. Note that explanations of parts that overlap with those of Example 1 will be omitted.

In the figure, 10 is a holding container that holds molten metal.

A heater 11 for melting the metal material is installed outside the holding container 10, and a metal melt 12 is held inside the holding container 10. This holding container 10 and heater 11 are provided in a chamber 13 maintained in an inert gas atmosphere. Further, a nozzle 14 for causing the metal melt 12 to flow down into the chamber 13 is provided at the bottom of the holding container 10. An ultrasonic generator 1 is provided on the side of the chamber 13. The ultrasonic generator 1 includes a high frequency power source 15 provided outside the chamber 13;
and a high-frequency vibrator 16, a resonator 18 provided in the chamber 13, a radial direction converter 19 provided surrounding the resonator 18 for focusing the ultrasonic waves, and a radial direction converter 19 that surrounds the resonator 18. The vibrator 1 is inserted through the container 19.
6 and an amplitude expander 17 connected between the resonator 18.

Further, at the side end of the chamber 13, the chamber 1
A device 20 is provided which communicates with the inside of the cooling gas and supplies cooling gas. This device 20 includes a pressure detector 21 , a pressure regulating valve 22 based thereon, and a compressor 23 that causes cooling gas to flow into the chamber 13 . Furthermore, a recovery device 24 is connected to the other end of the chamber 13 for recovering the manufactured fine metal powder. chamber 1
A particle size/amount measuring means 30 for measuring the particle size/amount of micro droplets generated by atomization, which will be described later, is installed in the chamber 3. The particle size/production amount measuring means 30 is constituted by a particle size/production amount distribution measuring device consisting of a particle sizer. Further, the particle size/production number measuring means 30 is electrically connected to an atmospheric pressure control means 32 which is electrically connected to a pressure regulating means 31 .

Next, the operation of the apparatus for manufacturing fine metal powder constructed as described above will be explained.

First, the ultrasonic transducer 16 is vibrated by the high frequency power source 15, and the resonator 18 connected to the transducer 16 is vibrated. Ultrasonic waves are emitted by the vibration of the resonator 18 using the atmospheric gas as a medium. This radiated ultrasonic wave is transmitted to the metal melt 12
The ultrasonic waves are focused on the surface of the metal melt 12 by a radiation direction converter 19 installed so that the ultrasonic waves are in phase and overlapped on the surface of the metal melt 12 . Then, minute droplets 25 are atomized from the surface of the metal melt 12. The particle size and production amount of the micro droplets 25 are measured by a particle size/production amount distribution measuring device of the particle size/production amount measuring means 30 . The particle size/production amount measuring means 30 measures this particle size/production amount.
The production amount measurement signal is supplied to the atmospheric pressure control means 32.

The atmospheric pressure control means 32 controls the degree of opening and closing of the pressure adjustment means 31 based on the particle size/production amount measurement signal to set the pressure in the chamber 13 to a predetermined value. That is, the pressure in the chamber 13 is set so that the radiated ultrasonic waves always have the optimum energy for atomization and are focused on a predetermined surface of the flowing metal melt 12. In this manner, during operation, the focused ultrasonic waves are always set at an optimal value and the focused ultrasonic waves are applied to the surface of the metal melt 12 flowing down. As a result, capillary waves are created on the surface of the metal melt 12,
This overcomes the surface tension and from the surface of the metal melt 12,
Micro droplets 25 are made to fly up with a desired particle size and production amount.

The flying micro droplets 25 are cooled and solidified by the cooling gas, and are carried to the collector 24 and collected by the flow of the cooling gas. In this way, fine metal particles of desired particle size and production amount can be obtained continuously and stably.

Next, an experimental example conducted to confirm the effects of the present invention will be described.

Experimental Example 3 Using the apparatus shown in Figure 3, an argon gas atmosphere was maintained at an absolute pressure of 1 kg/c-, and a resonator was vibrated at a frequency of 20 KHz to produce a vibration of about 12 microns with a single amplitude. When this was carried out, ultrasonic waves with a sound pressure level of 172 dB were obtained near the surface of the metal melt in a flowing state. A titanium alloy was used as the resonator, and an aluminum alloy was used as the molten metal. By applying ultrasonic waves with these characteristics to the surface of the flowing aluminum alloy liquid,
It generated minute wave numbers. Note that the flow rate of the aluminum alloy liquid was 0.7 m/sec. When the particle size of these micro droplets was measured, the average particle size was 70 μm.

In order to adjust the particle size to a desired value, the atmospheric pressure in the chamber was controlled in accordance with the amount of metal melt by controlling the degree of opening and closing of the regulating valve using a control means for controlling the atmospheric pressure in the chamber.

The obtained aluminum alloy powder, which was a micro droplet, was a spherical particle with a particle size of 40 to 100 microns and an average particle size of 70 microns. In addition, there was no oxidation on the particle surface or any contamination of impurity elements, and the metal powder was of extremely high purity. Note that the amount of particles produced was approximately 700 grams/hour.

Embodiment 4 FIG. 4 is an explanatory diagram showing the configuration of an apparatus for manufacturing fine metal powder according to an embodiment of the present invention. Note that explanations of parts that overlap with those of Example 1 will be omitted.

In the figure, 10 is a holding container that holds molten metal.

A heater 11 for melting the metal material is installed outside the holding container 10, and a metal melt 12 is held inside the holding container 10. This holding container 10 and heater 11 are provided below a chamber 13 maintained in an inert gas atmosphere. Above the surface of the metal melt 12 in the holding container 10, a particle sizer 33 is installed as a particle size/amount measuring means for measuring the particle size/amount of micro droplets generated by atomization. . Further, the particle sizer 33 is electrically connected to a focusing point control means 34 provided outside the chamber 13 in connection with the holding container 10. In addition, metal melt 1
A microphone 35 is installed above the surface of the metal melt 12 as a sound pressure measuring means for measuring the sound pressure near the surface of the metal melt 12. Further, the microphone 35 is connected to the chamber 1.
It is electrically connected to an ambient temperature control means 36 provided outside of the pressure regulating valve 22 and connected to the pressure regulating valve 22 . An ultrasonic generator 1 is provided above the chamber 13. The ultrasonic generator 1 includes a high-frequency power source 15 and a high-frequency vibrator 16 provided outside the chamber 13, a resonator 18 provided inside the chamber 13, and the resonator 1.
a radial direction converter 19 for focusing ultrasonic waves provided surrounding the chamber 13 and the radial direction converter 19;
The amplitude expander 17 is connected between the vibrator 16 and the resonator 18 by penetrating the oscillator 16 and the resonator 18.

Next, the operation of the apparatus for manufacturing fine metal powder constructed as described above will be explained.

First, the ultrasonic transducer 16 is vibrated by the high frequency power source 15, and the resonator 18 connected to the transducer 16 is vibrated. Ultrasonic waves are emitted by the vibration of the resonator 18 using the atmospheric gas as a medium. This radiated ultrasonic wave is transmitted to the metal melt 12
The ultrasonic waves are focused on the surface of the metal melt 12 by a radiation direction converter 19 installed so that the ultrasonic waves are in phase and overlapped on the surface of the metal melt 12 . Then, minute droplets 25 are atomized from the surface of the metal melt 12. The particle size and production amount of the atomized micro droplets 25 are measured by a particle sizer 33. The particle sizer 33 supplies this particle size/production amount measurement signal to the focusing point control means 34. The focusing point control means 34 moves the holding container 10 up and down to a predetermined position based on the particle size/production amount measurement signal. That is, the position of the holding container 10 is set so that the radiated ultrasonic waves always have the optimum energy for atomization and are focused on a predetermined surface of the metal melt 12.

In this way, during operation, the focused ultrasonic wave is always set at the optimal position to act on the surface of the metal melt 12. On the other hand, a microphone 35 installed near the surface of the metal melt measures the sound pressure around the metal excitation liquid. The microphone 3 bow supplies this sound pressure 17111 constant signal to the ambient temperature control means 36. The ambient temperature control means 36 operates the pressure regulating valve 22 based on the sound pressure measurement signal to change the ambient temperature within the apparatus. That is, the temperature of the atmosphere in which the ultrasonic waves are propagated is set so that the radiated ultrasonic waves always have the optimum energy for atomization and are focused on a predetermined surface of the metal melt 12. In this way, during operation, the ultrasonic focusing point is always set at the optimum position, and the temperature of the atmosphere is such that the optimum ultrasonic energy can be propagated for atomization, and the ultrasonic waves are applied to the surface of the metal melt 12. Let it work. As a result, capillary waves are created on the surface of the metal melt 12,
This overcomes the surface tension and from the surface of the metal melt 12,
The minute droplets 25 are made to fly up. Flying micro droplet 25
is cooled and solidified by the cooling gas, and is carried to the recovery device 24 and recovered by the flow of the cooling gas. In this way, metal fine particles having a desired particle size and production amount can be obtained continuously, stably and efficiently.

Next, an experimental example conducted to confirm the effects of the present invention will be described.

Experimental Example 4 Using the apparatus shown in Figure 4, an argon gas atmosphere was maintained at an absolute pressure of 1 kg/cd, and a resonator with a frequency set to 20 KHz was vibrated to produce vibrations of approximately 12 microns with a single amplitude. 172d near the surface of the metal melt
Ultrasonic waves with a sound pressure level of B were obtained. This sound pressure was constantly measured with a microphone during operation, and the atmospheric pressure was adjusted to achieve the desired sound pressure. Using titanium alloy as a resonator,
An aluminum alloy was used as the molten metal. This ultrasonic wave was applied to the surface of this aluminum alloy liquid to generate micro droplets. When the particle size and production amount of these micro droplets were measured, the average particle size and production amount were 70 μm. In order to keep the particle size and production amount constant, the position of the holding container was moved to change the focal position of the ultrasonic waves. Note that the moving speed of the holding container was 1.2 cm/h.

In this way, the particle size and production amount are 40 to 100 microns,
Aluminum alloy spherical particles with an average particle diameter/formation ff of 170 microns were obtained. There was no oxidation of the particle surface and no contamination of impurity elements, and a metal fine powder of extremely high purity was obtained. Note that the amount of particles produced was 800 grams/hour.

Embodiment 5 FIG. 5 is an explanatory diagram showing the configuration of an embodiment of the present invention. Note that explanations of parts that overlap with those of Example 1 will be omitted.

In the figure, 10 is a holding container that holds the molten metal.

A heater 11 for melting the metal material is installed outside the holding container 10, and a metal melt 12 is held inside the holding container 10. This holding container 10 and heater 11 are installed in the first chamber 13. This first chamber 13 has an atmosphere pressure regulating valve that sets the pressure of the atmosphere in contact with the surface of the metal melt 12 to a predetermined value while adjusting the liquid level of the metal melt 12 by a liquid level meter 45. It has 44. First chamber 71
3 is provided above the second chamber 49 so as to communicate with it. A pressure regulating valve 41 is attached to the second chamber 49 to keep the metal melt 12 flowing down from the holding container 10 in a constant pressurized state.

Further, a second chamber 49 is inserted into the bottom of the holding container 10 to supply the metal melt 12 to the second chamber 4.
A nozzle 14 is provided to allow the flow to flow down into the interior of the container 9 . A cooling jacket 37 is provided in the second chamber 49 around the entire outer periphery of the apparatus in order to maintain the temperature of the apparatus at a predetermined value during operation.

Water as a refrigerant flows through the cooling jacket 37 from the inlet 37a to the outlet 37b. While flowing through the cooling jacket 37, this water absorbs heat generated by overheating during operation and releases it to the outside world.

An ultrasonic generator 1 and an ultrasonic generator 1 are disposed below the first chamber 13 in the second chamber 49 so as to be able to focus ultrasonic waves on the surface of the metal melt flow flowing down from the holding container 10. ' is provided. Ultrasonic generators 1 and 1'
is a high frequency power supply 1 installed outside the chamber 13.
5°15', high frequency vibrator 16.16', resonator 1
8.18' Radial direction converter 19 for focusing ultrasonic waves provided so as to surround this resonator 18.18'
．． 19', and an amplitude expander 17.17' connected between the vibrator 16.16' and the resonator 18.18' through the radial direction converter 19.19'.

Further, spare ultrasonic generators 1' are housed in the housing sections 38 on both sides of the second chamber 49, respectively.

Around the surface of the metal melt 12 flowing down from inside the holding container 10, there is a particle size/production amount/production amount measuring means 3 for measuring the particle size, production amount, and production amount of minute droplets generated by atomization.
9 has been installed. Particle size/production amount/production amount measurement means 3
Reference numeral 9 is composed of a particle size/production amount distribution measuring device 39a consisting of a particle sizer, and a production amount measuring device 39b consisting of a light receiving element and a light emitting element. In addition, particle size, production amount,
The production amount measuring means 39 is electrically connected to a focusing point control means 40 which is electrically connected to the ultrasonic generators 1 and 1'. Furthermore, particle size/production amount/production amount measuring means 3
- 9 is a pressure control means 42 provided in connection with a pressure regulating valve 41 that sets the pressure of the atmosphere in the second chamber 49 in contact with the surface of the metal melt 12 flowing down to a predetermined value; electrically connected.

Further, a thermometer 46 is installed around the surface of the metal melt 12 flowing down from inside the holding container 10 to determine the ambient temperature when the metal melt 12 is atomized into minute droplets 25. . This thermometer 46 is electrically connected to a water amount control means 43 that is connected to a water supply device (not shown) that controls the amount of water fed into the cooling jacket 37 . Incidentally, the metal fine powder may be recovered in a dry manner. In this case, it is preferable to cool the cooling gas that has passed through the recovery device once through a heat exchanger and then recirculate it for use.

Furthermore, alcohol 48 is stored at the bottom of the second chamber 49 in order to cool the atomized minute droplets 25 . A collector 24 is connected to the bottom of the second chamber 49 to collect the fine metal powder produced in the second chamber 49 . Note that when recovering metal fine powder in a dry manner, the cooling gas that has passed through the recovery device 24 is cooled by passing through a heat exchanger, and then the cooling gas is recirculated.

Next, the operation of the apparatus for manufacturing fine metal powder constructed as described above will be explained.

First, the metal melt 12 held in the holding container 10 in the first chamber 13 is maintained at a temperature equal to or higher than the melting point of the metal material by the heater 11.

Moreover, since the pressure inside the first chamber can be adjusted, the flow of the metal melt 12 flowing down from the holding container 10 is stabilized at a constant speed. Then, the metal melt flows down from the nozzle 14 into the second chamber 49 . The inside of the second chamber 49 is maintained in an inert atmosphere using an inert gas such as A gas, for example. This prevents oxidation or other chemical reactions of the metal melt 12 flowing down. The metal melt 12 is in a flowing state and always maintains a high degree of cleanliness.
9 is maintained at a predetermined pressurized state of at least atmospheric pressure or higher by adjusting the inert gas pressure with a pressure regulating valve 41.

Next, the ultrasonic transducers 16 and 16' are vibrated by the high frequency power sources 15 and 15', thereby vibrating the resonators 18 and 18' connected to the transducers 16 and 16'. By appropriately selecting the frequency of this ultrasonic wave, the particle size and production amount of the fine metal powder can be changed. Resonator 18.18
' Vibration causes ultrasonic waves to be emitted using the atmospheric gas as a medium.

In this case, since the atmospheric gas is in a pressurized state, it has a high density and transmits ultrasonic waves efficiently. The radiated ultrasonic waves are focused by the radial direction converter 19, 19' so that they overlap in phase on the surface of the metal melt 12 in a flowing state.

In this way, when the focused ultrasonic waves act on the surface of the metal melt 12, capillary waves are created on the surface of the metal melt 12, which overcomes the surface tension and scatters minute droplets 25 from the surface of the metal melt S&12. let The particle size, production amount, and production amount of the micro droplets 25 are measured by the particle size/production amount distribution measuring device 39a and the production amount measuring device 39b of the particle size/production amount/production amount determining means 39. There is. The three particle size, production amount, and production amount measuring means supply the particle size, production amount, and production amount measurement signals to the focusing point control means 40 and the pressure control means 42. The focusing point control means 40 changes the positions of the ultrasonic generators 1 and 1' based on the particle size, production amount, and production amount measurement signal. That is, the positions of the ultrasonic generators 1 and 1' are set so that the emitted ultrasonic waves always have the optimum energy for atomization and are focused on a predetermined surface of the metal melt 12. Further, the pressure control means 42 controls the opening/closing degree of the pressure regulating valve 41 based on the particle size, production amount, and production amount measurement signal to set the pressure in the second chamber 49 to a predetermined value.

That is, the pressure in the second chamber 49 is set so that the radiated ultrasonic waves always have the optimum energy for atomization and are focused on a predetermined surface of the flowing metal melt 12.

Also, during atomization, the ambient temperature is measured by the thermometer 46.
11 has been established. The thermometer 46 supplies this atmospheric temperature measurement signal to the water amount control means 43 a.

The water amount control means 43 controls the amount of water supplied to the cooling jacket 37 that cools the device based on the ambient temperature AI constant signal. That is, the water amount control means 43 monitors the temperature in the atmosphere, particularly near the focal point of the ultrasonic waves, maintains it at a predetermined ambient temperature based on that information, prevents the phase of the ultrasonic waves from shifting, and constantly The ambient temperature is controlled so that the radiated ultrasonic waves having the optimum energy for atomization are focused on the surface of the metal melt 12. Furthermore, if temperature adjustment is delayed, the frequency is finely adjusted to focus.

The scattered minute droplets 25 fall into the alcohol 48, which is a reservoir at the bottom of the second chamber 49, are cooled and solidified, and are transported to the collector 24 and collected. In this way, metal fine particles having a desired particle size and production amount can be obtained continuously, stably and efficiently.

Next, an experimental example conducted to confirm the effects of the present invention will be described.

Experimental Example 5 Using the apparatus shown in Figure 5, the argon gas atmosphere in the second chamber was kept at an absolute pressure of 3 kg/cd, and the resonator was vibrated at a frequency of 20 KHz.
When vibration was performed with a single amplitude of about 12 microns, an ultrasonic wave with a sound pressure level of 182 dB was obtained near the surface of the flowing metal melt. A titanium alloy is used as the resonator,
An aluminum alloy was used as the molten metal. Ultrasonic waves with such characteristics were applied to the surface of the aluminum alloy liquid in a flowing state, and the aluminum alloy was pulverized. Note that the flow rate of the aluminum alloy liquid was 0.7 m/sec, and the pressure in the first chamber was adjusted so as to always satisfy this. Ta. Furthermore, in order to maintain a predetermined temperature inside the apparatus, the second chamber was equipped with a cooling jacket around its outer periphery. As a result, the temperature near the surface of the metal melt was maintained at 100±2°C.

The obtained aluminum alloy powder has a particle size and production amount of 40~
They were spherical particles with an average particle diameter of 70 microns and a production amount of 100 microns.・Also, there was no oxidation on the particle surface or contamination of impurity elements, and the metal powder was of extremely high purity. Note that the amount of particles produced was approximately 1100 grams/hour.

[Effects of the Invention] As explained above, according to the method and apparatus for producing fine metal powder according to the present invention, fine metal powder of high purity can be efficiently and easily continuously produced. .

[Brief explanation of drawings]

Figures 1 to 5 are explanatory diagrams showing the configuration of a metal fine powder production apparatus Q according to an embodiment of the present invention, Figure 6 (A) is an explanatory diagram of a cold crucible, and Figure 6 (B) is an explanatory diagram showing the configuration of a metal fine powder manufacturing apparatus Q according to an embodiment of the present invention. An explanatory diagram of a material holding container. Figures 7 (A) and (B) are explanatory diagrams showing a conventional metal fine powder production technique in which molten metal flows down into a resonator. Figure 8 is an explanatory diagram showing a resonator immersed in molten metal. FIG. 2 is an explanatory diagram showing a conventional metal fine powder manufacturing technique. 10... Holding container, 11... Heater 12...
Metal melt, 13... First chamber 14... Nozzle, 15.15'... High frequency power supply, 16.16'.
... Vibrator, 17.17'... Amplitude expander, 18.1
8'... Resonator, 19.19'... Radial direction converter, 20... Cooling gas supply device, 21... Pressure detector, 22... Pressure regulating valve, 23... Compression Machine, 24...
・Collector, 25... Micro droplet, 26, 30.39...
・Particle size/production amount measuring means, 27, 34.40... Focusing point control means, 28° 46... Thermometer, 29.36...
・Ambient temperature control means, 31...pressure adjustment means, 32
．． 42...Pressure control means, 33.39a...Particle sizer 35...Microphone, 37...
・Cooling jacket, 37a...Inlet, 37b...
Discharge port, 38... Storage section, 39b... Production amount measuring device, 41... Pressure regulating valve, 43... Water amount control means, 4
4...Atmosphere pressure adjustment valve, 45...Liquid level meter,
48... Alcohol, 49... Second chamber

Claims (17)

[Claims] (1) A step of melting a metal material to create a metal melt; a step of focusing ultrasonic waves on the surface of the metal melt to atomize the metal melt into minute droplets; and a step of atomizing the metal melt into minute droplets; a step of measuring the ambient temperature in the vicinity; a step of controlling the energy and frequency of the ultrasonic waves based on the ambient temperature measurement signal; A method for producing fine metal powder, comprising the steps of: focusing ultrasonic waves to atomize the metal melt into the minute droplets; and cooling and solidifying the minute droplets. (2) a step of melting a metal material to create a metal melt; a step of focusing ultrasonic waves on the surface of the metal melt to atomize the metal melt into micro droplets; and a step of atomizing the metal melt into micro droplets; a step of measuring the particle size and production amount; a step of controlling the position of the focal point of the ultrasonic waves based on the particle size and production amount measurement signal; and a step of controlling the surface of the metal melt while controlling the position of the focal point. A method for producing fine metal powder, comprising the steps of: focusing the ultrasonic waves to atomize the metal melt into the minute droplets; and cooling and solidifying the minute droplets. (3) A step of measuring the sound pressure of the ultrasonic wave, a step of controlling the energy of the ultrasonic wave based on the sound pressure measurement signal, and a step of focusing the ultrasonic wave on the surface of the metal melt while controlling the energy of the ultrasonic wave. 3. The method for producing fine metal powder according to claim 2, further comprising the step of atomizing the metal melt into fine droplets. (4) A step of melting a metal material to create a metal melt, a step of making the metal melt flow down to create a metal melt flow, and a step of focusing ultrasonic waves on the surface of the metal melt flow to a step of atomizing the melt into minute droplets, a step of measuring the ambient temperature near the surface of the metal melt flow, a step of controlling the energy and frequency of the ultrasonic wave based on the ambient temperature measurement signal; A step of focusing the ultrasonic waves on the surface of the metal melt flow while controlling the energy and frequency of the ultrasonic waves to subsequently atomize the metal melt into the micro droplets, and cooling and solidifying the micro droplets. A method for producing fine metal powder, comprising the step of: (5) A step of melting a metal material to create a metal melt, a step of causing the metal melt to flow down to create a metal melt flow, and a step of focusing ultrasonic waves on the surface of the metal melt flow to A step of atomizing the melt into micro droplets, a step of measuring the particle size and production amount of the micro droplets, and a step of atomizing the metal melt on the surface of the flowing metal melt based on the particle size and production amount measurement signal. A step of atomizing the metal melt into the micro droplets by focusing ultrasonic waves on the surface of the metal melt while setting the pressure of the contacting atmosphere to a predetermined value, and cooling and solidifying the micro droplets. A method for producing fine metal powder, comprising the step of: (6) A step of melting a metal material to create a metal melt, a step of causing the metal melt to flow down to create a metal melt flow, and a step of focusing ultrasonic waves on the surface of the metal melt flow to A step of atomizing the melt into micro droplets, a step of measuring the particle size and production amount of the micro droplets, and controlling the position of the focal point of the ultrasonic wave based on the particle size/production amount measurement signal. a step of focusing the ultrasonic waves on the surface of the metal melt flow while controlling the position of the focusing point and subsequently atomizing the metal melt into the micro droplets; A method for producing fine metal powder, comprising the step of cooling and solidifying it. (7) Measuring the sound pressure of the ultrasonic waves, controlling the energy of the ultrasonic waves based on the sound pressure measurement signal, and focusing the ultrasonic waves on the surface of the metal melt flow while controlling the energy of the ultrasonic waves. 7. The method for producing fine metal powder according to claim 6, further comprising the step of atomizing the metal melt into fine droplets. (8) Claim 4, wherein the metal melt flow has a cylindrical shape or a thin film shape.
8. The method for producing metal fine powder according to 7. (9) A step of melting a metal material to create a metal melt; a step of setting the pressure of the atmosphere in contact with the surface of the metal melt to a predetermined value; and a step of causing the metal melt to flow down. A step of focusing ultrasonic waves on the surface of the metal melt flow under pressure to atomize the metal melt into micro droplets, and measuring the particle size and production amount of the micro droplets. a step of controlling the focal point position of the ultrasonic wave based on the particle size/production amount measurement signal; and a step of controlling the surface of the metal melt flow flowing down based on the particle size/production amount measurement signal. a step of setting the pressure of the atmosphere in contact with the metal melt to a predetermined value; a step of measuring the ambient temperature near the surface of the metal melt flow; and a step of controlling the energy and frequency of the ultrasonic waves based on the ambient temperature measurement signal. It is characterized by comprising the following steps: a step of focusing ultrasonic waves on the surface of the metal melt to subsequently atomize the metal melt into the micro droplets; and a step of cooling and solidifying the micro droplets. A method for producing fine metal powder. (10) A holder for holding a metal material, a heating means disposed adjacent to the holder to heat the metal material to produce a metal melt, and an ultrasonic wave generator that generates an ultrasonic wave to generate a metal melt. a focusing means for atomizing the metal melt into minute droplets by focusing on a surface; an atmosphere temperature measurement means for measuring the ambient temperature near the surface of the metal melt; and a signal obtained by measuring the ambient temperature. 1. An apparatus for producing fine metal powder, comprising an ultrasonic control means for controlling ultrasonic energy and frequency, and a cooling means for cooling the micro droplets. (11) A holder for holding a metal material, a heating means installed adjacent to the holder to heat the metal material to produce a metal melt, and a metal on which ultrasonic waves generated from an ultrasonic wave generating means are flowing. a focusing means for atomizing the metal melt into minute droplets by focusing on the surface of the melt; a particle size measuring means for measuring the particle size of the minute droplets; and a particle size measuring means for measuring the particle size of the minute droplets; An apparatus for producing fine metal powder, comprising a focusing point control means for controlling the position of a focusing point based on a signal from the particle size measuring means, and a cooling means for cooling the minute droplets. (12) Sound pressure measuring means for measuring the sound pressure of the ultrasonic waves focused on the surface of the metal melt, and ultrasonic control for controlling the energy of the ultrasonic waves based on the sound pressure measurement signal obtained by the sound pressure measuring means. The apparatus for producing fine metal powder according to claim 11, further comprising means. (13) A holder for holding the metal melt, comprising a heating means for melting a metal material to produce a metal melt, a flowing means adjacent to the heating means for causing the metal melt to flow down, and an ultrasonic generator. a focusing means for atomizing the metal melt into minute droplets by focusing ultrasonic waves generated from the means on the surface of the metal melt flow; and an atmosphere temperature measurement for measuring the ambient temperature near the surface of the metal melt flow. ultrasonic control means for controlling ultrasonic energy and frequency based on a signal obtained by measuring the atmospheric temperature; and a cooling means for cooling the micro droplets. Manufacturing equipment. (14) A holder for holding the metal melt, comprising a heating means for melting a metal material to produce a metal melt, a flowing means disposed adjacent to the heating means for causing the metal melt to flow down, and an ultrasonic wave. A focusing means for atomizing the metal melt into minute droplets by focusing the ultrasonic waves generated from the generation means on the surface of the flowing metal melt, and measuring the particle size and production amount of the minute droplets. and atmospheric pressure control means for setting the pressure of the atmosphere in contact with the surface of the metal melt flowing down to a predetermined value based on the signal of the particle size and production amount measuring means. An apparatus for producing fine metal powder, comprising: cooling means for cooling the minute droplets. (15) A holder for holding the metal melt, comprising a heating means for melting a metal material to produce a metal melt, a flowing means disposed adjacent to the heating means for causing the metal melt to flow down, and an ultrasonic wave. A focusing means that focuses the ultrasonic waves generated from the generating means on the surface of the metal melt to atomize the metal melt into minute droplets; a generation amount measuring means; a focusing point control means for controlling the position of a focal point of the ultrasonic waves focused by the focusing means based on a signal from the particle size and generation amount measuring means; and a cooling device for cooling the micro droplets. 1. An apparatus for producing fine metal powder, comprising: means. (16) Sound pressure measuring means for measuring the sound pressure of the ultrasonic waves focused on the surface of the metal melt, and ultrasonic control for controlling the energy of the ultrasonic waves based on the sound pressure measurement signal obtained by the sound pressure measuring means. The apparatus for producing fine metal powder according to claim 15, further comprising means. (17) a heating means for melting a metal material to produce a metal melt; an atmospheric pressure setting means for setting the pressure of the atmosphere in contact with the surface of the metal melt to a predetermined value; and installed adjacent to the heating means, A holding body that holds the metal melt and includes a flowing means for causing the metal melt to flow down; a pressurizing means that maintains the flowing metal melt in a constant pressurized state; and generating a predetermined ultrasonic wave. an ultrasonic generating means provided between the ultrasonic generating means and the holding body to focus the ultrasonic waves on the surface of the flowing metal melt and atomize the metal melt into minute droplets; a focusing means; a particle size and production amount measuring means for measuring the particle size and production amount of the micro droplets; a focusing point control means that controls based on the signal; and an atmosphere pressure control that sets the pressure of the atmosphere in contact with the surface of the metal melt flowing down to a predetermined value based on the signal from the particle size/formation amount measuring device. an atmospheric temperature measuring means for measuring the atmospheric temperature near the surface of the metal melt flow; an ultrasonic control means for controlling the energy and frequency of the ultrasonic waves based on the signal obtained by the atmospheric temperature measurement; An apparatus for producing fine metal powder, comprising: a cooling means for cooling minute droplets;