JPH0310047B2 - - Google Patents

Info

Publication number
JPH0310047B2
JPH0310047B2 JP18634383A JP18634383A JPH0310047B2 JP H0310047 B2 JPH0310047 B2 JP H0310047B2 JP 18634383 A JP18634383 A JP 18634383A JP 18634383 A JP18634383 A JP 18634383A JP H0310047 B2 JPH0310047 B2 JP H0310047B2
Authority
JP
Japan
Prior art keywords
magnetostrictive
magnetostrictive wire
wire
potentiometer
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18634383A
Other languages
Japanese (ja)
Other versions
JPS6078318A (en
Inventor
Toshitsugu Ueda
Hiroyuki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP18634383A priority Critical patent/JPS6078318A/en
Publication of JPS6078318A publication Critical patent/JPS6078318A/en
Publication of JPH0310047B2 publication Critical patent/JPH0310047B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/02Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by magnetic means, e.g. reluctance
    • G01H11/04Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by magnetic means, e.g. reluctance using magnetostrictive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Description

【発明の詳細な説明】 〔発明の属する分野〕 本発明は超音波を利用した磁歪ポテンシヨメー
タに関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a magnetostrictive potentiometer that utilizes ultrasonic waves.

〔従来技術〕[Prior art]

超音波を利用した磁歪ポテンシヨメータは本願
出願人によつて開発され、その開発された技術は
特願昭53−22281号(特開昭54−115172号)、特願
昭53−22282号(特開昭54−115173号)等として
多数出願され、かつ横河新技術リポート′79P3
(1979)等によつて発表され、既に公知の状態に
あるものである。このような公知の磁歪ポテンシ
ヨメータを第1図に示す。
A magnetostrictive potentiometer using ultrasonic waves was developed by the applicant of this application, and the developed technology is disclosed in Japanese Patent Application No. 53-22281 (Japanese Unexamined Patent Publication No. 54-115172) and Japanese Patent Application No. 53-22282 ( Many applications have been filed such as Japanese Patent Application Laid-Open No. 115173/1989, and Yokogawa New Technology Report '79P3
(1979) and others, and is already well known. Such a known magnetostrictive potentiometer is shown in FIG.

第1図において、10は磁歪線、20は超音波
発生用のコイル21と永久磁石22とで構成され
た可動の駆動部、30,40は夫々は検出コイル
31,41及び永久磁石32,42で構成された
検出部である。検出部30と40は磁歪線10の
両端に固定されており、駆動部20より発生し磁
歪線10を伝播する超音波信号を受信する。駆動
部20の変位位置は超音波信号が検出部30と4
0に到達するまで時間の差を検出することにより
求められる。このような構成に係る第1図の装置
は非接触のポテンシヨメータとして、例えば記録
計の位置帰還要素等に適用して好敵なものであ
る。
In FIG. 1, 10 is a magnetostrictive wire, 20 is a movable drive unit composed of an ultrasonic generation coil 21 and a permanent magnet 22, and 30 and 40 are detection coils 31 and 41 and permanent magnets 32 and 42, respectively. This is a detection unit consisting of. The detection units 30 and 40 are fixed to both ends of the magnetostrictive wire 10 and receive ultrasonic signals generated by the drive unit 20 and propagated through the magnetostrictive wire 10. The displacement position of the drive unit 20 is such that the ultrasonic signal is detected by the detection units 30 and 4.
It is obtained by detecting the difference in time until it reaches 0. The device of FIG. 1 having such a configuration is suitable for use as a non-contact potentiometer, for example, as a position return element of a recorder.

このような構成に係る磁歪ポテンシヨメータに
用いられる磁歪線10を固定部材に取付ける場合
には、磁歪線10の両端以外を支持すると出力が
減衰して誤差を生じるようになる。その為、第1
図のポテンシヨメータにおいては磁歪線10の両
端に固定した検出部30と40とでこの磁歪線を
支持するようにしている。一方、磁歪線10とし
ては薄肉パイプ或いは薄いリボン等、薄肉の材料
の方が肉厚のものより渦電流損或いは伝播減衰等
の影響が小さくて適する。しかし、上記の両端支
持方法では薄肉で強度の極く弱い磁歪線を支持す
ることはできず、更に丸型等直線以外の形状の磁
歪線の支持ができない等の問題点がある。
When attaching the magnetostrictive wire 10 used in the magnetostrictive potentiometer having such a configuration to a fixed member, if the magnetostrictive wire 10 is supported at other than both ends, the output will attenuate and an error will occur. Therefore, the first
In the illustrated potentiometer, the magnetostrictive wire 10 is supported by detecting sections 30 and 40 fixed to both ends thereof. On the other hand, as the magnetostrictive wire 10, a thin material such as a thin pipe or a thin ribbon is more suitable than a thick material because the influence of eddy current loss or propagation attenuation is smaller. However, the above-mentioned method of supporting both ends cannot support magnetostrictive wires that are thin and have extremely low strength, and furthermore, there are problems such as the inability to support magnetostrictive wires having shapes other than round, equilinear shapes.

〔本発明の目的〕[Object of the present invention]

本発明はこのような問題点を改善する為になさ
れたもので、薄肉で、しかも直線以外の形状の磁
歪線、例えば丸型の磁歪線でも信号に影響を与え
ることなくその磁歪線を支持することのできる全
体構成の簡単な磁歪ポテンシヨメータを得ること
を目的としたものである。以下本発明の実施例を
詳細に説明する。
The present invention has been made to improve these problems, and is capable of supporting magnetostrictive wires that are thin and have shapes other than straight lines, such as round magnetostrictive wires, without affecting the signal. The purpose of this invention is to obtain a magnetostrictive potentiometer with a simple overall configuration that can be used. Examples of the present invention will be described in detail below.

〔実施例〕〔Example〕

第2図は本発明に係る磁歪ポテンシヨメータの
一実施例の構成図である。第2図において、10
は磁歪線で、この磁歪線は丸型になつている。2
0は磁歪線10を支持する支持部で、この支持部
は磁歪線10の外周において一定の間隙を隔て
て、その外周に沿うように丸型に形成されてい
る。31乃至34は夫々磁歪線10と支持部20
とを繋ぐ繋部である。磁歪線10と支持部20及
び繋部31乃至34は、これら全体を例えばNi
のような磁歪特性の大きい金属の板をエツチング
により抜くことにより成形したものである。この
ように繋部31乃至34をエツチングにより成形
したので、本発明によればこれらの繋部を極く細
く(実施例では0.1mm…0.2mm)形成することがで
きる。支持部20は固定部材(図示せず)にその
周面が取付けられる。40は超音波発生用のコイ
ル41(及び第1図に示す永久磁石42)を有す
る駆動部である。この駆動部は磁歪線10の一端
11に固定的に取付けられている。50は回転
軸、60は取付け部材、70は検出部である。検
出部70は取付け部材60を介して回転軸50に
取付けられている。
FIG. 2 is a configuration diagram of an embodiment of the magnetostrictive potentiometer according to the present invention. In Figure 2, 10
is a magnetostrictive wire, and this magnetostrictive wire has a round shape. 2
0 is a support part that supports the magnetostrictive wire 10, and this support part is formed in a round shape along the outer periphery of the magnetostrictive wire 10 with a constant gap therebetween. 31 to 34 are the magnetostrictive wire 10 and the support part 20, respectively.
It is the connecting part that connects the two. The magnetostrictive wire 10, the supporting part 20, and the connecting parts 31 to 34 are made of Ni, for example.
It is formed by etching a metal plate with large magnetostrictive properties such as . Since the connecting portions 31 to 34 are formed by etching in this manner, according to the present invention, these connecting portions can be formed extremely thin (0.1 mm to 0.2 mm in the embodiment). The support portion 20 has its peripheral surface attached to a fixing member (not shown). Reference numeral 40 denotes a drive unit having a coil 41 (and a permanent magnet 42 shown in FIG. 1) for generating ultrasonic waves. This drive section is fixedly attached to one end 11 of the magnetostrictive wire 10. 50 is a rotating shaft, 60 is a mounting member, and 70 is a detection section. The detection unit 70 is attached to the rotating shaft 50 via an attachment member 60.

検出部70において、71,72は夫々コア、
73は永久磁石である。コア71には超音波を検
出する検出コイル74が捲装されている。コア7
1と72永久磁石73を挟んでコ字状に組立てら
れ、これにより検出ヘツドが構成されている。
In the detection unit 70, 71 and 72 are cores, respectively.
73 is a permanent magnet. A detection coil 74 for detecting ultrasonic waves is wound around the core 71 . core 7
1 and 72 are assembled in a U-shape with a permanent magnet 73 in between, thereby forming a detection head.

このような構成の検出部70は、一側が開放さ
れた検出ヘツド内に磁歪線10が挿入されるよう
に取付け部材60を介して回転軸50に取付けら
れている。然して回転軸50を回転させると、検
出部70はこの回転軸を軸として磁歪線10に沿
つて円弧状に回転する。
The detection unit 70 having such a configuration is attached to the rotating shaft 50 via the attachment member 60 so that the magnetostrictive wire 10 is inserted into the detection head with one side open. When the rotating shaft 50 is rotated, the detecting section 70 rotates in an arc shape along the magnetostrictive line 10 about this rotating shaft.

このような構成の磁歪ポテンシヨメータにおい
て駆動部40を構成する超音波発生用コイル41
にパルス電流を供給すると、コイル41の中の磁
歪線10に局所的な磁場の変化が起り、その変化
は磁歪効果により縦弾性波(超音波)に変換され
て磁歪線10内を検出部70に向つて伝播する。
一方、検出部70を構成する検出ヘツドにおて
は、永久磁石73で発生した磁束がコア71→磁
歪線10→コア72を通つて再び永久磁石73に
戻る磁路が形成されている。このような磁路に磁
歪信号が入つて来ると、逆磁歪効果により磁路の
パーミアンスが変化して磁束の変化を生じ、その
結果検出コイル74に検出部70の変位位置に応
じた時間後にパルス電圧が発生する。
In the magnetostrictive potentiometer having such a configuration, the ultrasonic generation coil 41 that constitutes the drive unit 40
When a pulse current is supplied to the magnetostrictive wire 10 in the coil 41, a local change in the magnetic field occurs in the magnetostrictive wire 10, and this change is converted into a longitudinal elastic wave (ultrasonic wave) by the magnetostrictive effect, and the inside of the magnetostrictive wire 10 is transmitted to the detection unit 70. propagate towards.
On the other hand, in the detection head constituting the detection section 70, a magnetic path is formed in which the magnetic flux generated by the permanent magnet 73 returns to the permanent magnet 73 through the core 71→magnetostrictive wire 10→core 72. When a magnetostrictive signal enters such a magnetic path, the permeance of the magnetic path changes due to the inverse magnetostrictive effect, causing a change in magnetic flux, and as a result, a pulse is generated in the detection coil 74 after a time corresponding to the displacement position of the detection unit 70. Voltage is generated.

ここで、駆動部40を構成する超音波発生用コ
イル41にパルス電流を印加してから検出部70
に検出パルス信号が発生するまでの時間は、コイ
ル41からの直接波と、磁歪線10の端面12で
反射して戻つてくる反射波とを検出部70が検出
するに要する時間t1、t2を測定することにより、
可動部である検出部70の変位位置を検出するこ
とができる。下式(1)はt1、t2の演算内容を示した
もので、このような演算をすることにより、音速
の温度変化等の影響が除去された変位位置信号を
得ることができる。
Here, after applying a pulse current to the ultrasonic generation coil 41 that constitutes the drive section 40, the detection section 70
The time until the detection pulse signal is generated is the time t1, t2 required for the detection unit 70 to detect the direct wave from the coil 41 and the reflected wave reflected from the end face 12 of the magnetostrictive wire 10 and returned. By measuring,
The displacement position of the detection section 70, which is a movable section, can be detected. Equation (1) below shows the calculation contents of t1 and t2, and by performing such calculations, it is possible to obtain a displacement position signal from which the influence of temperature changes and the like on the speed of sound has been removed.

(t2−t1)/(t2+t1) =d2/(d1+d2) ……(1) ここに、 t1=d1/c t2=d2/c d1=駆動部40と検出部70までの距離 d2=検出部70と磁歪線10の端面12までの
距離 C=音速 すなわち、遅延時間t1,t2の和と差の比が可動
部である検出部70の変位位置を表わす信号とな
る。
(t2-t1)/(t2+t1) =d2/(d1+d2)...(1) Here, t1=d1/c t2=d2/c d1=distance from the drive section 40 to the detection section 70 d2=detection section 70 and the distance C to the end face 12 of the magnetostrictive wire 10 = speed of sound. That is, the ratio of the sum and difference of the delay times t1 and t2 becomes a signal representing the displacement position of the detection section 70, which is a movable section.

このような構成の本発明に係る磁歪ポテンシヨ
メータにおいては、磁歪線10と支持部20と共
に繋部31乃至34をエツチングによつて一体成
形することにより構成したので、繋部31乃至3
4を実施例の如く極めて細く構成することができ
る。その結果、本発明によれば伝播する縦弾性波
に殆んど影響を与えることなく薄肉で強度の弱い
磁歪線10を支持する支持部20を有する磁歪ポ
テンシヨメータを得ることができる。又、本発明
によれば丸形の磁歪線10でもこれを支持するこ
とができ、かつ磁歪線10と支持部20とを一体
成形により形成する為に構成が簡単で、しかも支
持部20を用いることにより装置への取付けも容
易で、かつ安価な構成の磁歪ポテンシヨメータを
得ることができる。
In the magnetostrictive potentiometer according to the present invention having such a configuration, the connecting portions 31 to 34 are integrally molded together with the magnetostrictive wire 10 and the support portion 20 by etching.
4 can be configured extremely thin as in the embodiment. As a result, according to the present invention, it is possible to obtain a magnetostrictive potentiometer having the support portion 20 that supports the thin and weak magnetostrictive wire 10 without substantially affecting the propagating longitudinal elastic waves. Further, according to the present invention, even a round magnetostrictive wire 10 can be supported, and since the magnetostrictive wire 10 and the support part 20 are formed by integral molding, the structure is simple, and moreover, the support part 20 is used. As a result, it is possible to obtain a magnetostrictive potentiometer that is easy to attach to a device and has an inexpensive structure.

〔他の実施例〕[Other Examples]

なお、第2図は磁歪線を丸型にした磁歪ポテン
シヨメータの実施例であるが、第3図はこれを直
線形にした直線形の磁歪ポテンシヨメータの実施
例の構成図である。第3図において、10は直線
状の磁歪線、20は支持部、31…34は繋部で
あり、又40は磁歪線10の一端11に取付けら
た駆動部、70は変位可能な検出部である。この
ような構成の第3図のポテンシヨメータにおいて
は、第2図と同様な作用効果を有する直線型の磁
歪ポテンシヨメータを得ることができる。
Although FIG. 2 shows an embodiment of a magnetostrictive potentiometer in which the magnetostrictive wire is made into a round shape, FIG. 3 is a configuration diagram of an embodiment of a linear magnetostrictive potentiometer in which the magnetostrictive wire is made into a straight shape. In FIG. 3, 10 is a straight magnetostrictive wire, 20 is a support part, 31...34 are connecting parts, 40 is a drive part attached to one end 11 of the magnetostrictive wire 10, and 70 is a displaceable detection part. It is. In the potentiometer of FIG. 3 having such a configuration, a linear magnetostrictive potentiometer having the same effect as that of FIG. 2 can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の磁歪ポテンシヨメータの構成
図、第2図及び第3図は夫々本発明に係る磁歪ポ
テンシヨメータの実施例を示す構成図である。 10……磁歪線、20……支持部、31−34
……繋部、40……駆動部、70……検出部。
FIG. 1 is a block diagram of a conventional magnetostrictive potentiometer, and FIGS. 2 and 3 are block diagrams showing embodiments of the magnetostrictive potentiometer according to the present invention. 10... Magnetostrictive wire, 20... Support part, 31-34
... Connecting section, 40 ... Drive section, 70 ... Detection section.

Claims (1)

【特許請求の範囲】[Claims] 1 固定部材に取付けられた支持部に複数個の繋
部を介して繋がれ前記支持部と共に磁歪材をエツ
チングによつて一体成形することにより形成され
た磁歪線、この磁歪線の一端に取付けられると共
にこの磁歪線に信号を発生させる駆動部、及び前
記磁歪線に沿つて移動しこの磁歪線を電播する前
記信号を検出する検出部よりなる磁歪ポテンシヨ
メータ。
1. A magnetostrictive wire that is connected to a support part attached to a fixed member via a plurality of connecting parts and formed by integrally molding a magnetostrictive material together with the support part by etching, and is attached to one end of this magnetostrictive wire. A magnetostrictive potentiometer comprising: a driving section that generates a signal on the magnetostrictive wire; and a detecting section that moves along the magnetostrictive wire and detects the signal that electrolytically spreads the magnetostrictive wire.
JP18634383A 1983-10-05 1983-10-05 Magnetostriction potentiometer Granted JPS6078318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18634383A JPS6078318A (en) 1983-10-05 1983-10-05 Magnetostriction potentiometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18634383A JPS6078318A (en) 1983-10-05 1983-10-05 Magnetostriction potentiometer

Publications (2)

Publication Number Publication Date
JPS6078318A JPS6078318A (en) 1985-05-04
JPH0310047B2 true JPH0310047B2 (en) 1991-02-12

Family

ID=16186692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18634383A Granted JPS6078318A (en) 1983-10-05 1983-10-05 Magnetostriction potentiometer

Country Status (1)

Country Link
JP (1) JPS6078318A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164216A (en) * 1984-02-07 1985-08-27 Yokogawa Hokushin Electric Corp Rotary type magnetostriction potentiometer

Also Published As

Publication number Publication date
JPS6078318A (en) 1985-05-04

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